Vacuum Catalogue - Edwards

PRODUCT CATALOGUE2012

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ContentsSmall Wet/Dry PumpsTurbomolecular PumpsVapour PumpsMeasurement & ControlVacuum ValvesFittings and FlangesSemiconductor PumpsIndustrial Pumps and Pumping SystemsChemical Dry PumpsLiquid Ring PumpsShelf DryersProcess VacuumService12345678910111213

Small Wet/Dry Pumps1Page1Small Pumps and Pumping Systems 2Small Pumps: Application and Accessory Information 3Small Pumps and Accessories: Frequently Asked Questions 4nXDS Scroll Pumps 5nXDS-C Scroll Pumps 13XDS Scroll Pumps 14NGB Scroll Pumps 20E2M0.7 and 1.5 Oil Sealed Rotary Vane Pumps 21RV Rotary Vane Pumps 25EM18 and 28 Oil Sealed Rotary Vane Pumps 33Small ATEX Certified Pumps 37Electrical Data 41Diaphragm Pumps 46Shop online at www.edwardsvacuum.com

Small Pumps and Pumping Systems1Page2To meet the diverse needs of applications ranging from analyticalinstrumentation, wet chemistry, R & D to light industrial, Edwardsoffers a comprehensive range of different pumping technologies.Refer to the application and accessory guide to select pumps andaccessories for your application.Oil Free Scroll PumpsScroll pumps are an excellent alternative to rotary vane pumps whereoil free pumping is desirable. The innovative XDS pumps in particularuse a bearing shield to isolate the vacuum environment from all formsof lubricant not only making them totally dry, but also protecting thebearing from any process gases. Vapour handling is enabled by angas ballast; this allows the range of pumps to satisfy manyapplications that were previously off limits to scroll pumps.• 2 x 10 -2 mbar / 1.5 x 10 -2 Torr• 5 to 35 m 3 h -1 / 2.9 to 20.6 ft 3 min -1Oil Free Diaphragm Pumps• 2 mbar / 1.5 Torr• 0.6 to 2.0 m 3 h -1 / 0.35 to 1.2 ft 3 min -1The D-LAB diaphragm pumps are made of corrosion resistantmaterials, to withstand attack from chemicals. They are ideal forapplications such as gel drying and other wet chemistry processes.The XDD1 diaphragm pumps provide oil free backing for compoundturbomolecular pumps.Easy to ServiceAll Edwards pumps are designed for easy routine maintenance. Keycomponents are easily accessible and, with RV and XDS pumps, nospecial tools are required. Service kits of guaranteed parts areavailable for routine service by the user. Worldwide support from theEdwards service organization is also available.Quality ManufactureEdwards pumps are manufactured on state of the art machine toolsfor high consistency of components. For example, RV rotors aremanufactured in a robotic cell to remove errors and inconsistenciesfrom the manufacturing process.Oil Sealed Rotary Vane PumpsApplicationsEdwards high performance pumps are used in many industrial andlaboratory applications, including the following:• Electron microscopes, mass spectrometry, residual gas analysersand surface analysis• Epoxy degassing, powder materials processing• Solvent concentration• Sterilization, distillation and centrifuges• Gel dryers and glove boxes• Atomic emission spectrometers, nuclear physics, fusiontechnology and space research• Vacuum ovens• TV tube evacuation• Automotive system filling• Freeze drying• Vacuum metallurgy• 10 -3 mbar / 10 -3 Torr• 0.9 to 32.3 m 3 h -1 / 0.5 to 19.5 ft 3 min -1This wide range of rugged pumps offers an excellent ultimate withgood pumping speed. RV pumps have superior vapour handlingcapabilities, while operating quietly.Shop online at www.edwardsvacuum.com

Small Pumps: Application and Accessory InformationUse the information in the list below to select the best pump andaccessories for your application. The information is given as a guideonly; the optimum set-up may depend on your specific method ofoperation. Note that you need to buy the accessories separately,unless otherwise stated.ATEX and Flammable GasesThe following standard pump models have an internal ATEXclassification of II 3 G c IIB T4:• E2M0.7, E2M1.5• E1M18, E2M18 & E2M28• RV3, RV5, RV8, RV12• XDS5, XDS10, XDS35iThe following standard pump models operating on hydrocarbon oilcan be supplied with flameproof motors providing an externalclassification of II 2 G IIB T4 (or IIC):• RV3, RV5, RV8, RV12• E1M18, E2M18Gel DryersRecommended pump: nXDS/XDS or D-Lab.Suggested accessories for D-Lab: Separator.Optional accessories for D-Lab: Condenser, gas ballast valve.Rotary Evaporation and Vacuum OvensRecommended pump: nXDS/XDS or D-Lab.Suggested accessories for D-Lab: Separator.Optional accessories for D-Lab: Condenser, gas ballast valve.Centrifugal ConcentrationRecommended pump: nXDS/XDS.Vacuum FiltrationRecommended pump: nXDS/XDS or D-Lab.Suggested accessories for D-Lab: Separator.Optional accessories for D-Lab: Condenser, gas ballast valve.Distillation/Extraction ApparatusRecommended pump: nXDS/XDS or D-Lab.Suggested accessories for D-Lab: Separator.Optional accessories for D-LAB: Condenser, gas ballast valve.Freeze DryersRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories: Mist filters, oil return.MS Inlet Systems (like Electro-Spray)Recommended pump: XDS35i or E2M28.Suggested accessories for rotary pumps: Mist filter, oil return.Suggested accessories for nXDS/XDS: Silencer.Load Locks, Fume Hoods and Glove BoxesRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories for rotary pumps: Mist filter, oil return.Suggested accessories for nXDS/XDS: Silencer.Ultra High Speed CentrifugesRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories: Mist filterSuggested accessories for rotary pumps: Mist filters, oil return.Leak Detection, Electron Microscopes, MassSpectrometers and LasersRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories for rotary pumps: FL20K, Mist filter.Suggested accessories for nXDS/XDS: Silencer.Surface Science and Particle Size AnalysersRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories for rotary pumps: FL20K, Mist filter.Suggested accessories for nXDS/XDS: Silencer.High Energy PhysicsRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories for rotary pumps: FL20K, Mist filter.Suggested accessories for nXDS/XDS: Silencer.Helium or Rare Gas RecirculationRecommended pumps: nXDS/XDSBacking Turbomolecular PumpsRecommended pump: nXDS/XDS, XDD1 or Rotary pumps.Suggested accessories for rotary pumps: FL20K, Mist filter.Suggested accessories for nXDS/XDS: Silencer.Backing Diffusion PumpsRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories for rotary pumps: FL20K, Mist filter.Suggested accessories for nXDS/XDS: Silencer.Refrigeration, Air Conditioning SystemsRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories for rotary pumps: FL20K, Mist filter.Suggested accessories for nXDS/XDS: Silencer.Vacuum FurnaceRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories for rotary pumps: ITF20K, Mist filter.Suggested accessories for nXDS/XDS: Silencer.Azide Forming ApplicationsRecommended pump: nXDS/XDS or Rotary pumps.Suggested accessories for rotary pumps: Mist filter.Suggested accessories for nXDS/XDS: Silencer.Notes• FL20K is an inlet trap, to prevent oil back-streaming.• ITF20K is an inlet trap, to capture dust particles.• The gas ballast facility allows atmospheric air into the pump,minimising the formation of condensates (which contaminate theoil in rotary pumps).• An oil return kit is available for E2M0.7, E2M1.5, RV, EM18 andE2M28 pumps to allow oil to be returned from the mist filter to thepump. A gas ballast oil return is also available to allow oil to returnand have gas ballast flow.1Page3Shop online at www.edwardsvacuum.com

Small Pumps and Accessories: Frequently Asked Questions1Page4Oil MistQuestion: What accessory do I use to trap oil mist (which all oil sealedpumps emit during pump down or with gas ballast)?Answer: To meet regulations and preserve pump oil, fit arecommended Edwards oil mist filter (EMF) to the pump outlet, andconnect the exhaust to an exhaust line.Question: If I operate an RV pump continuously or with high inletpressure, what accessories do I need?Answer: Fit an Edwards mist filter (EMF) and a gas ballast oil return(GBOR) kit. Then the pump can be operated with the mode switchopen and gas ballast oil return. The oil condensed in the filter will becontinuously returned to the pump oil box.Vapour ProcessesQuestion: Which pump and accessories should I use if my processgenerates vapours which could condense in the pump?Answer: You can choose either an nXDS/XDS pump, or rotary pump.Gas ballast should be used with both pumps; to sweep the vapourthrough the pump. This prevents condensation and oil contamination.Operate the pump with gas ballast for at least an hour before andafter use. Choose the size of pump taking into account the vapourpumping rate.If you selected a rotary pump, then you should fit a gas ballast oilreturn kit and mist filter. Change the oil frequently and keep an oilchange reminder tag on the pump.D-Lab would also be a suitable alternative depending on requiredpumping speed.Dust and Particle ProcessesQuestion: Which pump and accessory should I use if my processgenerates dust or grit, which could clog or damage the pump?Answer: Use a rotary pump fitted with an inlet dust filter. We do notrecommend the use of scroll pumps or XDD1 pumps for theseapplications.Special Chemical Cleaning ProcessesQuestion: Which pump and accessory should I use if my processgenerates oxygen or ozone?Answer: Use a rotary pump adapted to run with Fomblin ® oil or nXDS/XDS. Contact Edwards for more information.Question: Are there any special considerations if my pump will beused in the vicinity of organic gases, like propane?Answer: Use a rotary pump fitted with a flameproof motor. ContactEdwards for more information.ContaminationQuestion: Which pump and accessories should I use if I must ensurethat my process and process chamber (operated below 0.1 mb) arenot contaminated with oil from the pump?Answer: Use an nXDS/XDS scroll pump.Alternatively, you can use a rotary pump with a FL20K foreline trapfitted to the system inlet. The trap contains activated alumina whichtraps the oil molecules. To maintain the alumina charge, bake thecharge basket or replace as required.Question: How can I reduce the noise level of my pump?Answer: If the noise is only obvious during pumping down then fittingthe exhaust with a silencer (nXDS/XDS pumps), or fitting an exhaustline will reduce the level.An alternative is to fit an acoustic enclosure. Contact Edwards formore information.Fomblin ® is a registered trademark of Solvay SolexisShop online at www.edwardsvacuum.com

nXDS6i Scroll PumpThe nXDS6i is the next generation in completely oil free, dry scroll pumps and replaces theXDS5. nXDS improves on legacy XDS pumps by offering increased pumping speeds,combined with lower ultimate pressures, lower power consumption and lower noise. Gasballast allows for pumping of condensable vapours including, water, solvents, dilute acidsand bases. nXDS pumps also feature the latest in tip seal technology giving significantlylonger life between tip seal changes. Integrated inverter drive with auto sensing voltageinput delivers optimized pumping performance globally. nXDS pumps are designed to becompletely field serviceable.1Page5Features & Benefits●●●●●Lubricant-free within the vacuum envelope and hermeticallysealed means totally clean and dry vacuum to prevent crosscontaminationNo atmosphere to vacuum shaft seals means bearings arecompletely isolated, which prevents process attack and meansthe bearings run cooler and last longerSimple single sided scroll arrangement combined with aninnovative motor and bearing design allows for easy field servicewith a minimum of special tooling for low cost of ownership andmaximum up-timeImproved motor and drive efficiencies for reduced power andcost of ownershipAdvanced interface provides a variety of traditional, analogueand digital control methods enabling remote control/monitoringvia USB, RS232 or RS485DimensionsApplications●●●●●General clean pumping applicationsScanning Electron Microscopes - SEMBeam lines and high energy physicsBacking turbo pumpsCentrifuges, ultra-high speedPerformance Curves1. Normal pumping speed 4. min standby power2. Normal full power 5. min standby speed3. Normal GB speedA. 9 wide slots (x 4) B. Rubber feet (x 4)Shop online at www.edwardsvacuum.com

1Page6Technical DataNominal rotational speed 1800 rpmDisplacement 6.8 m 3 h -1 / 4.0 ft 3 min -1Peak pumping speed 6.2 m 3 h -1 / 3.6 ft 3 min -1Ultimate vacuum (total pressure) 0.020 mbar / 0.015 TorrMinimum standby rotationalspeed1200 rpmSpeed control resolution(percentage of full rotation 1%speed)Pumping speed at minimumrotational speed4.1Maximum continuous inletpressure200 mbarMotor power 1-ph260 WPower connector 1-phIEC EN60320 C13Recommended fuse10A, 250Vac rmsWeight26.2 kg / 58 lbInlet flangeNW25Exhaust flangeNW25Noise level52 dB(A)Vibration at inlet flange < 4.5 mms -1 (rms)Leak tightness (static) < 1x10 -6 mbar ls -1Operating temperature range 10 to 40 °C / 41 to 104 °FOrdering InformationProduct DescriptionnXDS6i 100 - 127 V, 200 - 240 V, 1ph 50/60 HzAccessories & Spares2m electrical supply cable for 1-ph pumps, no plug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, UK, Three-pin plugExhaust silencerSilencer spares kitNW25 Inlet/Outlet exhaust filter 5 MicronOrder No.A73501983Order No.A50508000A50507000A50506000A50505000A50597000A50597800A505978051 Micron element A505978035 Micron element A50597802Gas Ballast adaptorGas Ballast adaptor blankExhaust Nozzle Kit 3/4'' To 15mmVibration isolatorsChemical resistance conversion kitnXDS Tip Seal Service KitnXDS Bearing Replacement KitA73501809A73501806A50509000A24801441A73501807A73501801A73501802Shop online at www.edwardsvacuum.com

nXDS10i Scroll PumpThe nXDS10i is the next generation in completely oil free, dry scroll pumps and replacesthe XDS10. nXDS improves on legacy XDS pumps by offering increased pumping speeds,combined with lower ultimate pressures, lower power consumption and lower noise. Gasballast allows for pumping of condensable vapours including, water, solvents, dilute acidsand bases. nXDS pumps also feature the latest in tip seal technology giving significantlylonger life between tip seal changes. Integrated inverter drive with auto sensing voltageinput delivers optimized pumping performance globally. nXDS pumps are designed to becompletely field serviceable.1Page7Features & Benefits●●●●●Lubricant-free within the vacuum envelope and hermeticallysealed means totally clean and dry vacuum to prevent crosscontaminationNo atmosphere to vacuum shaft seals means bearings arecompletely isolated, which prevents process attack and meansthe bearings run cooler and last longerSimple single sided scroll arrangement combined with aninnovative motor and bearing design allows for easy field servicewith a minimum of special tooling for low cost of ownership andmaximum up-timeImproved motor and drive efficiencies for reduced power andcost of ownershipAdvanced interface provides a variety of traditional, analogueand digital control methods enabling remote control/monitoringvia USB, RS232 or RS485DimensionsApplications●●●●●General clean pumping applicationsScanning Electron Microscopes - SEMBeam lines and high energy physicsBacking turbo pumpsCentrifuges, ultra-high speedPerformance Curves1. Normal pumping speed 4. min standby power2. Normal full power 5. min standby speed3. Normal GB speedA. 9 wide slots (x 4) B. Rubber feet (x 4)Shop online at www.edwardsvacuum.com


nXDS15i Scroll PumpThe nXDS15i is the next generation in completely oil free, dry scroll pumps and can beused to replace similar sized dry pumps and medium sized oil sealed pumps in a variety ofapplications. nXDS improves on legacy XDS pumps by offering increased pumping speeds,combined with lower ultimate pressures, lower power consumption and lower noise. Gasballast allows for pumping of condensable vapours including, water, solvents, dilute acidsand bases. nXDS pumps also feature the latest in tip seal technology giving significantlylonger life between tip seal changes. Integrated inverter drive with auto sensing voltageinput delivers optimized pumping performance globally. nXDS pumps are designed to becompletely field serviceable.1Page9Features & Benefits●●●●●Lubricant-free within the vacuum envelope and hermeticallysealed means totally clean and dry vacuum to prevent crosscontaminationNo atmosphere to vacuum shaft seals means bearings arecompletely isolated, which prevents process attack and meansthe bearings run cooler and last longerSimple single sided scroll arrangement combined with aninnovative motor and bearing design allows for easy field servicewith a minimum of special tooling for low cost of ownership andmaximum up-timeImproved motor and drive efficiencies for reduced power andcost of ownershipAdvanced interface provides a variety of traditional, analogueand digital control methods enabling remote control/monitoringvia USB, RS232 or RS485DimensionsApplications●●●●●General clean pumping applicationsScanning Electron Microscopes - SEMBeam lines and high energy physicsBacking turbo pumpsCentrifuges, ultra-high speedPerformance Curves1. Normal pumping speed 4. min standby power2. Normal full power 5. min standby speed3. Normal GB speedA. 9 wide slots (x 4) B. Rubber feet (x 4)Shop online at www.edwardsvacuum.com


nXDS20i Scroll PumpThe nXDS20i is the next generation in completely oil free, dry scroll pumps and can beused to replace similar sized dry pumps and medium sized oil sealed pumps in a variety ofapplications. nXDS improves on legacy XDS pumps by offering increased pumping speeds,combined with lower ultimate pressures, lower power consumption and lower noise. Gasballast allows for pumping of condensable vapours including, water, solvents, dilute acidsand bases. nXDS pumps also feature the latest in tip seal technology giving significantlylonger life between tip seal changes. Integrated inverter drive with auto sensing voltageinput delivers optimized pumping performance globally. nXDS pumps are designed to becompletely field serviceable.1Page11Features & Benefits●●●●●Lubricant-free within the vacuum envelope and hermeticallysealed means totally clean and dry vacuum to prevent crosscontaminationNo atmosphere to vacuum shaft seals means bearings arecompletely isolated, which prevents process attack and meansthe bearings run cooler and last longerSimple single sided scroll arrangement combined with aninnovative motor and bearing design allows for easy field servicewith a minimum of special tooling for low cost of ownership andmaximum up-timeImproved motor and drive efficiencies for reduced power andcost of ownershipAdvanced interface provides a variety of traditional, analogueand digital control methods enabling remote control/monitoringvia USB, RS232 or RS485DimensionsApplications●●●●●General clean pumping applicationsScanning Electron Microscopes - SEMBeam lines and high energy physicsBacking turbo pumpsCentrifuges, ultra-high speedPerformance Curves1. Normal pumping speed 4. min standby power2. Normal full power 5. min standby speed3. Normal GB speedA. 9 wide slots (x 4) B. Rubber feet (x 4)Shop online at www.edwardsvacuum.com

1Page12Technical DataNominal rotational speed 1800 rpmDisplacement 28.0 m 3 h -1 / 16.5 ft 3 min -1Peak pumping speed 22.0 m 3 h -1 / 13.0 ft 3 min -1Ultimate vacuum (total pressure) 0.030 mbar / 0.022 TorrMinimum standby rotationalspeed1200 rpmSpeed control resolution(percentage of full rotation 1%speed)Pumping speed at minimumrotational speed10Maximum continuous inletpressure50 mbarMotor power 1-ph260 WPower connector 1-phIEC EN60320 C13Recommended fuse10A, 250Vac rmsWeight25.6 kg / 56 lbInlet flangeNW25Exhaust flangeNW25Noise level52 dB(A)Vibration at inlet flange < 4.5 mms -1 (rms)Leak tightness (static) < 1x10 -6 mbar ls -1Operating temperature range 10 to 40 °C / 41 to 104 °FOrdering InformationProduct DescriptionnXDS20i 100 - 127 V, 200 - 240 V, 1ph 50/60 HzAccessories & Spares2m electrical supply cable for 1-ph pumps, no plug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, UK, Three-pin plugExhaust silencerSilencer spares kitNW25 Inlet/Outlet exhaust filter 5 MicronOrder No.A73801983Order No.A50508000A50507000A50506000A50505000A50597000A50597800A505978051 Micron element A505978035 Micron element A50597802Gas Ballast adaptorGas Ballast adaptor blankExhaust Nozzle Kit 3/4'' To 15mmVibration isolatorsChemical resistance conversion kitnXDS Tip Seal Service KitnXDS Bearing Replacement KitA73501809A73501806A50509000A24801441A73501808A73501801A73501802Shop online at www.edwardsvacuum.com

nXDS-CThe nXDS-C pump is a modified version of the nXDS that is suitable for use on vapourhandling processes, and may be used for some pumping applications involving corrosivesubstances. The nXDS-C variants have Chemraz® internal valves and stainless steelfittings for extra protection from the pumped media.1Page13Features & BenefitsTechnical Data●●●●●Lubricant-free within the vacuum envelope and hermeticallysealed means totally clean and dry vacuum to prevent crosscontaminationNo atmosphere to vacuum shaft seals means bearings arecompletely isolated, which prevents process attack and meansthe bearings run cooler and last longerNo oil changes required eliminating costs of contaminated oildisposalSimple single sided scroll design means routine maintenance isdone in minutes for low cost of ownership and maximum up-timeGas ballast feature to enable pumping of vapoursTechnical Data, Performance curves and Dimensions are as perthe standard nXDS pumps.Ordering InformationProduct DescriptionnXDS6iC 100 - 127 V, 200 - 240 V, 1ph 50 - 60 HznXDS10iC 100 - 127 V, 200 - 240 V, 1ph 50 - 60 HznXDS15iC 100 - 127 V, 200 - 240 V, 1ph 50 - 60 HznXDS20iC 100 - 127 V, 200 - 240 V, 1ph 50 - 60 HzAccessories & Spares2m electrical supply cable for 1-ph pumps, no plug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, UK, Three-pin plugnXDS Bearing Replacement KitnXDS Tip Seal Service KitOrder No.A73502983A73602983A73702983A73802983Order No.A50508000A50507000A50506000A50505000A73501802A73501801Shop online at www.edwardsvacuum.com

XDS35i Scroll Vacuum Pump1Page14The XDS35i pump has an innovative bearing shield design that isolates the vacuumenvironment from all forms of lubricant, not only making it totally dry but hermeticallysealed. The shield also protects the bearing from any process vapours.Gas ballast allows vapour to be handled and opens up the range of applications to manythat were previously unsuited to scroll pumps. The inverter drive controls the motorcharacteristics and ensures the pump always runs at optimum speed.Features & Benefits●●●●●Lubricant-free within the vacuum envelope and hermeticallysealed means totally clean and dry vacuum to prevent crosscontaminationNo atmosphere to vacuum shaft seals means bearings arecompletely isolated, this prevents process attack and meansbearings run cooler and last longerNo oil changes required eliminating costs of contaminated oildisposalSimple single sided scroll design means maintenance is done inminutes for low cost of ownership and maximum up-timeInverter drive for consistent pumping speed at 50/60HzDimensionsApplications●●●●●Clean pumping applicationsAutomotiveBeam lines and high energy physicsCentrifuges, ultra high speedCoatingPerformance Curves1. Speed 2. PowerA. 150 (5.91) B. 247.5 (9.74) 1. NW40 2. NW25Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationDisplacement 50 or 60Hz43 m 3 h -1 / 25 ft 3 min -1Peak pumping speed 50 or60Hz 35 m 3 h -1 / 21 ft 3 min -1Ultimate vacuum (Totalpressure)1 x 10 -2 mbar / 8 x 10 -3 TorrMax inlet pressure for watervapour35 mbar / 23 TorrMax water vapour pumping rate– GB I 70 gh -1Max water vapour pumping rate– GB II 240 gh -1Max allowed outlet pressure 0.2 bar gauge / 2.9 psig*Max allowed inlet and GBpressure0.5 bar gauge / 7 psigMotor power0.52kWPower connectorIEC EN60320 C19Nominal rotation speed 1750 rpmWeight48 kg / 105 lbInlet flangeNW40Exhaust flangeNW25Noise level57 dB (A)Product DescriptionXDS35i 100-120/200-230V, 1-ph, 50/60Hz with an IEC60320connector, factory set to 230VAccessories & Spares2m Electrical supply cable, no plug2m Electrical supply cable, North America/Japan plug2m Electrical supply cable, North European plug2m Electrical supply cable, UK, three-pin plugExhaust silencer XDS35iGas Ballast Adapter with 0.25mm holeSilencer spares kitTip seal kit XDS35iOrder No.A73001983Order No.A50508003A50507003A50506003A50505003A50597001A50626801A50597801A730018011Page15Vibration

XDS46i Scroll Vacuum Pump1Page16The XDS46i pump is a development on the XDS35i and thus shares many of the samefeatures and benefits but with a peak speed boosted to 40m 3 /hr. The XDS46i is optimisedfor maximum pumping speed at inlet pressures between 1 mbar and 10 mbar making itideally suited for LCMS and ICPMS applications requiring a higher pumping speed than thatoffered by the XDS35i. Recent improvements in tip seal technology have lead to reduced tipseal wear therefore giving a longer time between service interventions. The inverter drivecontrols the motor characteristics and ensures the pump always runs at optimum speed andallows the user to control the pump remotely.Features & Benefits●●●●●Lubricant-free within the vacuum envelope and hermeticallysealed means totally clean and dry vacuum to prevent crosscontaminationNo atmosphere to vacuum shaft seals means bearings arecompletely isolated, this prevents process attack and meansbearings run cooler and last longerNo oil changes required eliminating costs of contaminated oildisposalSimple single sided scroll design means maintenance is done inminutes for low cost of ownership and maximum up-timeInverter drive for consistent pumping speed at 50/60HzDimensionsApplications●●●LCMS inletICPMS inletCoatingPerformance Curves1. Speed 2. PowerA. 150 (5.91) B. 247.5 (9.74) 1. NW40 2. NW25Shop online at www.edwardsvacuum.com

XDS100B Scroll Booster Vacuum Pump1Page18Features & BenefitsThe XDS100B is a scroll booster, with a pumping mechanism designed specifically for highpumping speed. Like all booster pumps, it needs to be used in conjunction with a primarypump and is ideally matched with Edwards XDS35i or XDS46i scroll pumps. The XDS100Bis optimised for maximum pumping speed at inlet pressures between 1 mbar and 10 mbarmaking it ideally suited for ultra high throughput LCMS applications. The advanced pumpdesign has resulted in virtually no tip seal wear thus reducing service intervention andmaximising uptime.The inverter drive allows the pump to be connected to a single phase supply and controlsthe motor characteristics and ensures the pump always runs at optimum speed and allowsthe user to control the pump remotely.Applications●●●●●Lubricant-free within the vacuum envelope and hermeticallysealed means totally clean and dry vacuum to prevent crosscontaminationNo atmosphere to vacuum shaft seals means bearings arecompletely isolated, this prevents process attack and meansbearings run cooler and last longerNo oil changes required eliminating costs of contaminated oildisposalSimple single sided scroll design means maintenance is done inminutes for low cost of ownership and maximum up-timeInverter drive for consistent pumping speed at 50/60HzDimensions●High throughput – LCMSPerformance Curves1. Speed 2. PowerShop online at www.edwardsvacuum.com

Technical DataOrdering InformationPumping speed50 or 60Hz 95 m 3 h -1 / 56 ft 3 min -1Ultimate vacuum (Totalpressure)*

NGB Scroll Vacuum Pumps1Page20NGB pumps are standard nXDS/XDS pumps but with the gas ballast feature removed. Theyare for applications where it is advantageous to have the gas ballast control knob andmachining removed so that it cannot be accidentally opened. Example applications includerare gas recirculation and gas recovery.Note: Mains leads must be ordered separately, please see the catalogue entry for therelevant standard nXDS/XDS pump for the correct mains lead.Applications●●Rare gas recirculationGas recoveryFeatures & BenefitsTechnical DataTechnical Data and Dimensions are as per the standardnXDS/XDS pumps but ignoring the water vapour handlingcapability and gas ballast facility.Ordering Information●●●●●Lubricant-free within the vacuum envelope and hermeticallysealed means totally clean and dry vacuum to prevent crosscontaminationNo atmosphere to vacuum shaft seals means bearings arecompletely isolated, which prevents process attack and meansthe bearings run cooler and last longerNo oil changes required eliminating costs of contaminated oildisposalSimple single sided scroll design means routine maintenance isdone in minutes for low cost of ownership and maximum up-timeNo gas ballast to eliminate accidental opening and resultantingress of airDimensionsProduct DescriptionXDS35i-NGB 1-ph 100-120/200-230V set to 230VnXDS6iR 100 - 127 V, 200 - 240 V, 1ph 50 - 60 HznXDS10iR 100 - 127 V, 200 - 240 V, 1ph 50 - 60 HznXDS15iR 100 - 127 V, 200 - 240 V, 1ph 50 - 60 HznXDS20iR 100 - 127 V, 200 - 240 V, 1ph 50 - 60 HzAccessories & Spares2m electrical supply cable for 1-ph pumps, no plug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, UK, Three-pin plugExhaust silencerSilencer spares kitExhaust silencer XDS35iSilencer spares kitNW25 inlet/exhaust filter with 5µm elementNW40 inlet filter with 5µm elementNW40 low profile inlet filter with 5µm elementReplacement 1µm element for NW25 filterReplacement 1µm element for NW40 filterReplacement 1µm element for NW40 low profile filterReplacement 5µm element for NW25 filterReplacement 5µm element for NW40 filterReplacement 5µm element for NW40 low profile filterTip seal kit XDS35inXDS Tip Seal Service KitnXDS Bearing Replacement KitOrder No.A73005983A73503983A73603983A73703983A73803983Order No.A50508000A50507000A50506000A50505000A50597000A50597800A50597001A50597801A50597805NRD383000NRD386000A50597803NRD385000NRD388000A50597802NRD384000NRD387000A73001801A73501801A73501802nXDS FilterShop online at www.edwardsvacuum.com

E2M0.7 Two Stage Rotary Vane PumpThe E2M0.7 is a small two stage oil sealed rotary vane pump that features a very low soundlevel of only 43 dB(A), compact dimensions, low energy consumption and low operatingtemperature. It will appeal to scientific instrument manufacturers and laboratory users forbacking small turbomolecular or diffusion pumps as well as general laboratory applications.1Page21Fitted in a cabinet, the pump will be virtually inaudible and the low operating temperaturewill minimize the heat load on the equipment. Vertical vacuum inlet with horizontal option.Supplied with: Ultragrade 15 oil, NW O-ring and centering ring, 2 Allen keys and spareseals for oil drain and filler plugs.Features & BenefitsApplications●●●●●Very low sound level of only 43 dB(A).The pump is designed for reliable, long-term operation.Compact dimensions.Low energy consumption.Low operating temperature will minimize the heat load on theequipment.Dimensions●●●●Analytical instrumentsLeak detectors, HeliumResearch and developmentBacking Turbomolecular pumpsPerformance Curves1. 220-240 V motor 2. Handle (can be removed) 3. Alternative inlet positionShop online at www.edwardsvacuum.com

Technical DataOrdering Information1Page22Displacement (swept volume)50 Hz 0.9 m 3 h -1 / 0.5 ft 3 min -160 Hz 1.1 m 3 h -1 / 0.6 ft 3 min -1Speed (Pneurop 6602)50 Hz 0.75 m 3 h -1 / 0.4 ft 3 min -160 Hz 0.95 m 3 h -1 / 0.5 ft 3 min -1Ultimate vacuum (total pressure)without gas ballast3.0 x 10 -3 mbar / 2.3 x 10 -3 Torrwith full gas ballast2.0 x 10 -1 mbar / 1.5 x 10 -1 TorrInlet connectionNW10 flangeNozzle 11 mm external ØOutlet connectionremovable from 3/8 inch BSPtapped holeMaximum permitted pressure atoutlet0.5 bar gauge / 7 psigMaximum inlet pressure forwater vapour15 mbar / 11 TorrMaximum water vapourpumping rate 8 gh -1Motor power0.09 kWNominal rotational speed50/60Hz1400/1700 rpmPower connectorIEC EN60320 C13Operating temperature range 12 - 40 °CWeight, without oil10 kg / 22 lbsNoise43 dB(A) @ 50 HzOil capacity - maximum 0.28 litreOil capacity - minimum 0.2 litreRecommended oil (supplied) Ultragrade 15Product DescriptionE2M0.7 200-230V, 1-ph, 50/60Hz, IEC 60320 connectorsE2M0.7 100-120V, 1-ph, 50/60Hz, IEC 60320 connectorsAccessories & SparesModel EMF3 mist filter2m electrical supply cable for 1-ph pumps, UK, Three-pin plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, no plugSpares Kit C&O E2M0.7/1/1.5Spares Kit Blade E2M0.7/1.5NW10/10 Centring Nitrile S/S Pk1NW10 O Ring Viton Pk 5NW10 x 3/8'' BSP AdapterOrder No.A37141919A37141902Order No.A46220000A50505000A50506000A50507000A50508000A37101131A37101132C10511396H02124032A25908064Shop online at www.edwardsvacuum.com

E2M1.5 Two Stage Rotary Vane PumpThe E2M1.5 is a two stage oil sealed rotary vane pump suitable for many bench typeapplications. The pump features an alternative inlet connection position at the side of thepump so that overall installation height can be reduced to a minimum when required.The interstage version features an additional pumping port to provide a rough vacuum forauxiliary duties.1Page23Supplied with: Ultrgrade 15 oil, NW O-ring, centering ring, 2 Allen keys and spare seals foroil drain and filler plugs.Features & Benefits●●●●●The pump is designed for reliable, long-term operation.Compact dimensions.Low energy consumption.The interstage version features an additional pumping port toprovide a rough vacuum for auxiliary duties.The pump is a free-standing unit.DimensionsApplications●●●●●Analytical instrumentsLaboratory bench top vacuumLeak detectors, HeliumResearch and developmentBacking turbomolecular pumpsPerformance Curves1. Without gas ballast 2. With gas ballast1. 220-240 V motor 2. Handle (can be removed) 3. Alternative inlet positionShop online at www.edwardsvacuum.com

Technical DataOrdering Information1Page24Displacement (swept volume)50 Hz 1.8 m 3 h -1 / 1 ft 3 min -160 Hz 2.2 m 3 h -1 / 1.3 ft 3 min -1Speed (Pneurop 6602)50 Hz 1.6 m 3 h -1 / 0.8 ft 3 min -160 Hz 2.0 m 3 h -1 / 1.2 ft 3 min -1Ultimate vacuum (total pressure)without gas ballast3 x 10 -3 mbar / 2.3 x 10 -3 Torrwith gas ballast2.5 x 10 -2 mbar / 1.9 x 10 -2 TorrInlet connectionNW10 flangeNozzle 11 mm external diameterOutlet connectionremovable from hole tapped 3/8inch BSPMaximum permitted pressure atoutlet0.5 bar gauge / 7 psigMaximum inlet pressure forwater vapour15 mbar / 11 TorrMaximum water vapourpumping rate 16 gh -1Motor power 50/60 Hz (IP54) 0.16 kWNominal rotation speed 50/60Hz 2800/3400 rpmPower connectorIEC EN60320 C13Operating temperature range 12 - 40 °CWeight10 kg / 22 lbsNoise54 dB (A) @ 50 HzOil capacity - max0.28 litremin0.2 litreRecommended oil (supplied) Ultragrade 15Product DescriptionE2M1.5 200-230V, 1-ph, 50/60Hz, IEC 60320 connectorsE2M1.5 100-120V, 1-ph, 50/60Hz, IEC 60320 connectorsE2M1.5 interstage 200-230V, 1-ph, 50/60Hz, IEC 60320connectorsE2M1.5 interstage 100-120V, 1-ph, 50/60Hz, IEC 60320connectorsAccessories & SparesModel EMF3 mist filter2m electrical supply cable for 1-ph pumps, UK, Three-pin plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, no plugSpares Kit C&O E2M0.7/1/1.5Spares Kit Blade E2M0.7/1.5NW10/10 Centring Nitrile S/S Pk1NW10 O Ring Viton Pk 5NW10 x 3/8'' BSP AdapterOrder No.A37132919A37132902A37104919A37104902Order No.A46220000A50505000A50506000A50507000A50508000A37101131A37101132C10511396H02124032A25908064Shop online at www.edwardsvacuum.com

RV3 Two Stage Rotary Vane PumpEdwards RV pumps have become the industry standard for scientific primary pumpingapplications. RV pumps are uniquely capable of delivering high or low throughputs with highultimate vacuum. This, combined with ultra-low noise levels, makes them ideal for a widerange of applications including GCMS and other small bench top type applications.1Page25All pumps are approved to UL and CSA standards by an external test house. Edwards hasa global network, providing world-wide support for product applications and service.Supplied with: 1 litre of Ultragrade 19 oil, inlet filter and O-ring. Fomblin® must bepurchased separately for PFPE RV pumps.Features & BenefitsApplications●●●●●48 dB(A) and intrusive frequencies minimised.Dual mode. Suitable for high throughput and high vacuumapplications.Easy-to-use gas ballast.Fast acting inlet valve for system protection.High torque, dual voltage/dual frequency motor, electronic startrelay.Dimensions●●●●●Analytical instrumentsLaboratory bench top vacuumTurbomolecuar backing pumpsFreeze dryingResearch and developmentPerformance Curves1. High vacuum mode, gas ballast = 02. High throughput mode, gas ballast =0 and high vacuum mode, gas ballast =13. High vacuum and throughput modes, gas ballast =II1. 1-phase motor 2. 3-phase motor 3. Retractable handleShop online at www.edwardsvacuum.com

Technical DataOrdering Information1Page26Displacement50Hz 3.7 m 3 h -1 / 2.2 ft 3 min -160Hz 4.5 m 3 h -1 / 2.6 ft 3 min -1Speed (Pneurop 6602)50Hz 3.3 m 3 h -1 / 2 ft 3 min -160Hz 3.9 m 3 h -1 / 2.3 ft 3 min -1Ultimate pressure2.0 x 10 -3 mbar / 1.5 x 10 -3 TorrUltimate pressure GB I 3.0 x 10 -2 mbar / 2.3 x 10 -2 TorrUltimate pressure GB II 1.2 x 10 -1 mbar / 9.1 x 10 -2 TorrUltimate Pressure withFomblin®2 x 10 -2 mbar / 1.5 x 10 -2 TorrMax inlet pressure for watervapour80 mbar / 60 TorrMax water vapour pumping rate– GB I 60 gh -1Max water vapour pumping rate– GB II 220 gh -1Max allowed outlet pressure 1 bar gauge / 14 psigMax allowed inlet and gasballast pressure0.5 bar gauge / 7 psigMotor power 50/60Hz450 / 550WPower connector 1-phIEC EN60320 C13Nominal rotation speed 50/60Hz 1500 / 1800rpmWeight (without oil)25 kg / 55 lbOil capacity min/max0.42/0.7 litresRecommended oil Ultragrade 19Inlet flangeNW25Exhaust flangeNW25Noise level48 dB(A) @ 50 HzOperating temperature range 12 – 40 °CProduct DescriptionRV3 115/230V, 1-ph, 50/60Hz, Factory set to 230V for EuropeRV3 100/200V, 1-ph, 50/60Hz, Factory set to 200V for JapanRV3 200-220/380-415V, 3-ph, 50Hz and 200-230/460V, 3-ph,60Hz Factory set to 380/460VRV3 115/230V, 1-ph, 50/60Hz, Factory set to 115V for USAPFPE RV3 115/230V, 1-ph, 50/60 Hz, Factory set to 230V forEuropePFPE RV3 100/200V, 1-ph, 50/60Hz, Factory set to 200V forJapanPFPE RV3 200-220/380-415V, 3-ph, 50Hz and 200-230/460V,3-ph, 60Hz, Factory set to 380/460VPFPE RV3 115/230V, 1-ph, 50/60Hz, Factory set to 115V forUSAAccessories & Spares2m electrical supply cable for 1-ph pumps, UK, Three-pin plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, no plugRV gas-ballast adaptorExhaust Nozzle Kit 3/4'' To 15mmModel EMF10 mist filterClean and overhaul kitClean and overhaul kit (Nitrile)Blade Kit RV3Outer Shaft Seal Kit RVSpares Kit Inlet Valve RV3/5/8/12Spares Kit Cartridge RV3Order No.A65201903A65201904A65201905A65201906A65209903A65209904A65209905A65209906Order No.A50505000A50506000A50507000A50508000A50502000A50509000A46226000A65201131A65201137A65201130A65201134A65201036A65201032Shop online at www.edwardsvacuum.com

RV5 Two Stage Rotary Vane PumpEdwards RV pumps have become the industry standard for scientific primary pumpingapplications. RV pumps are uniquely capable of delivering high or low throughputs with highultimate vacuum. This, combined with ultra-low noise levels, makes them ideal for a widerange of applications including GCMS and other small bench top type applications.1Page27All pumps are approved to UL and CSA standards by an external test house. Edwards hasa global network, providing world-wide support for product applications and service.Supplied with: 1 litre of Ultragrade 19 oil, inlet filter and O-ring. Fomblin® must bepurchased separately for PFPE RV pumps.Features & BenefitsApplications●●●●●48 dB(A) and intrusive frequencies minimised.Dual mode. Suitable for high throughput and high vacuumapplications.Easy-to-use gas ballast.Fast acting inlet valve for system protection.High torque, dual voltage/dual frequency motor, electronic startrelay.Dimensions●●●●●Analytical instrumentsCentrifuges, ultra-high speedCoatingDegassing/curing - oil, epoxy resinDistillation/extraction/filtrationPerformance Curves1. High vacuum mode, gas ballast = 02. High throughput mode, gas ballast =0 and high vacuum mode, gas ballast =13. High vacuum and throughput modes, gas ballast =II1. 1-phase motor 2. 3-phase motor 3. Retractable handleShop online at www.edwardsvacuum.com

Technical DataOrdering Information1Page28Displacement50Hz 5.8 m 3 h -1 / 3.4 ft 3 min -160Hz 7.0 m 3 h -1 / 4.1 ft 3 min -1Speed (Pneurop 6602)50Hz 5.1 m 3 h -1 / 3.0 ft 3 min -160Hz 6.2 m 3 h -1 / 3.7 ft 3 min -1Ultimate pressure2.0 x 10 -3 mbar / 1.5 x 10 -3 TorrUltimate pressure GB I 3.0 x 10 -2 mbar / 2.3 x 10 -2 TorrUltimate pressure GB II 1.0 x 10 -1 mbar / 7.5 x 10 -2 TorrUltimate Pressure withFomblin®2.0 x 10 -2 mbar / 1.5 x 10 -2 TorrMax inlet pressure for watervapour50 mbar / 38 TorrMax water vapour pumping rate– GB I 60 gh -1Max water vapour pumping rate– GB II 220 gh -1Max allowed outlet pressure 1 bar gauge / 14 psigMax allowed inlet and gasballast pressure0.5 bar gauge / 7 psigMotor power 50/60Hz450 / 550WPower connector 1-phIEC EN60320 C13Nominal rotation speed 50/60Hz 1500 / 1800rpmWeight (without oil)25 kg / 55 lbOil capacity min/max0.42/0.7 litresRecommended oil Ultragrade 19Inlet flangeNW25Exhaust flangeNW25Noise level48 dB(A) @ 50 HzOperating temperature range 12 – 40 °CProduct DescriptionRV5 115/230V, 1-ph, 50/60Hz, Factory set to 230V for EuropeRV5 100/200V, 1-ph, 50/60Hz, Factory set to 200V for JapanRV5 200-220/380-415V, 3-ph, 50Hz and 200-230/460V, 3-ph,60Hz, Factory set to 380/460VRV5 115/230V, 1-ph, 50/60Hz, Factory set to 115V for USAPFPE RV5 115/230V, 1-ph, 50/60Hz, Factory set to 230V forEuropePFPE RV5 100/200V, 1-ph, 50/60Hz, Factory set to 200V forJapanPFPE RV5 200-220/380-415V, 3-ph, 50Hz and 200-230/460V,3-ph, 60Hz, Factory set to 380/460VPFPE RV5 115/230V, 1-ph, 50/60Hz, Factory set to 115V forUSAAccessories & Spares2m electrical supply cable for 1-ph pumps, UK, Three-pin plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, no plugRV gas-ballast adaptorExhaust Nozzle Kit 3/4'' To 15mmModel EMF10 mist filterClean and overhaul kitClean and overhaul kit (Nitrile)Spares Kit Blade RV5Outer Shaft Seal Kit RVSpares Kit Inlet Valve RV3/5/8/12Spares Kit Cartridge RV5Order No.A65301903A65301904A65301905A65301906A65309903A65309904A65309905A65309906Order No.A50505000A50506000A50507000A50508000A50502000A50509000A46226000A65201131A65201137A65301130A65201134A65201036A65301032Shop online at www.edwardsvacuum.com

RV8 Two Stage Rotary Vane PumpEdwards RV pumps have become the industry standard for scientific primary pumpingapplications. RV pumps are uniquely capable of delivering high or low throughputs with highultimate vacuum. This, combined with ultra-low noise levels, makes them ideal for a widerange of applications including GCMS and other small bench top type applications.1Page29All pumps are approved to UL and CSA standards by an external test house. Edwards hasa global network, providing world-wide support for product applications and service.Supplied with: 1 litre of Ultragrade 19 oil, inlet filter and O-ring. Fomblin® must bepurchased separately for PFPE RV pumps.Features & BenefitsApplications●●●●●48 dB(A) and intrusive frequencies minimised.Dual mode. Suitable for high throughput and high vacuumapplications.Easy-to-use gas ballast.Fast acting inlet valve for system protection.High torque, dual voltage/dual frequency motor, electronic startrelay.Dimensions●●●●●Analytical instrumentsCentrifuges, ultra-high speedCoatingDegassing/curing - oil, epoxy resinDistillation/extraction/filtrationPerformance Curves1. High vacuum mode, gas ballast = 02. High throughput mode, gas ballast =0 and high vacuum mode, gas ballast =13. High vacuum and throughput modes, gas ballast =II1. 1-phase motor 2. 3-phase motorShop online at www.edwardsvacuum.com

Technical DataOrdering Information1Page30Displacement50Hz 9.7 m 3 h -1 / 5.7 ft 3 min -160Hz 11.7 m 3 h -1 / 6.9ft 3 min -1Speed (Pneurop 6602)50Hz 8.5 m 3 h -1 / 5 ft 3 min -160Hz 10 m 3 h -1 / 5.9 ft 3 min -1Ultimate pressure2 x 10 -3 mbar / 1.5 x 10 -3 TorrUltimate pressure GB I 3 x 10 -2 mbar / 2.3 x 10 -2 TorrUltimate pressure GB II 6 x 10 -2 mbar / 4.6 x 10 -2 Torr-2 -2Ultimate pressure with Fomblin® 2 x 10 mbar / 1.5 x 10 TorrMax inlet pressure for watervapour38 mbar / 28.5 TorrMax water vapour pumping rate– GB I 60 gh -1Max water vapour pumping rate– GB II 220 gh -1Max allowed outlet pressure 1 bar gauge / 14 psigMax allowed inlet and gasballast pressure0.5 bar gauge / 7 psigMotor power 50/60Hz450 / 550WPower connector 1-phIEC EN60320 C13Nominal rotation speed 50/60Hz 1500 / 1800rpmWeight (without oil)28 kg / 61.6 lbOil capacity min/max0.45 / 0.75 litresRecommended oil Ultragrade 19Inlet flangeNW25Exhaust flangeNW25Noise level48 dB(A) @ 50 HzOperating temperature range 12 – 40 °CProduct DescriptionRV8 115/230V, 1-ph, 50/60Hz, Factory set to 230V for EuropeRV8 100/200V, 1-ph, 50/60Hz, Factory set to 200V for JapanRV8 200-220/380-415V, 3-ph, 50Hz and 200-230/460V, 3-ph,60Hz, Factory set to 380/460VRV8 115/230V, 1-ph, 50/60Hz, Factory set to 115V for USAPFPE RV8 115/230V, 1-ph, 50/60Hz, Factory set to 230V forEuropePFPE RV8 100/200V, 1-ph, 50/60Hz, Factory set to 200V forJapanPFPE RV8 200-220/380-415V, 3-ph, 50Hz, and 200-230/460V, 3-ph, 60Hz, Factory set to 380/460VPFPE RV8 115/230V, 1-ph, 50/60Hz, Factory set to 115V forEuropeAccessories & Spares2m electrical supply cable for 1-ph pumps, UK, Three-pin plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, no plugRV gas-ballast adaptorExhaust Nozzle Kit 3/4'' To 15mmModel EMF10 mist filterClean and overhaul kitClean and overhaul kit (Nitrile)Spares Kit Blade RV8Outer Shaft Seal Kit RVSpares Kit Inlet Valve RV3/5/8/12Spares Kit Cartridge RV8Order No.A65401903A65401904A65401905A65401906A65409903A65409904A65409905A65409906Order No.A50505000A50506000A50507000A50508000A50502000A50509000A46226000A65201131A65201137A65401130A65201134A65201036A65401032Shop online at www.edwardsvacuum.com

RV12 Two Stage Rotary Vane PumpEdwards RV pumps have become the industry standard for scientific primary pumpingapplications. RV pumps are uniquely capable of delivering high or low throughputs with highultimate vacuum. This, combined with ultra-low noise levels, makes them ideal for a widerange of applications including GCMS and other small bench top type applications.1Page31All pumps are approved to UL and CSA standards by an external test house. Edwards hasa global network, providing world-wide support for product applications and service.Supplied with: 1 litre of Ultragrade 19 oil, inlet filter and O-ring. Fomblin® must bepurchased separately for PFPE RV pumps.Features & BenefitsApplications●●●●●48 dB(A) and intrusive frequencies minimised.Dual mode. Suitable for high throughput and high vacuumapplications.Easy-to-use gas ballast.Fast acting inlet valve for system protection.High torque, dual voltage/dual frequency motor, electronic startrelay.Dimensions●●●●●Analytical instrumentsCentrifuges, ultra-high speedCoatingDegassing/curing - oil, epoxy resinDistillation/extraction/filtrationPerformance Curves1. High vacuum mode, gas ballast = 02. High throughput mode, gas ballast =0 and high vacuum mode, gas ballast =13. High vacuum and throughput modes, gas ballast =II1. 1-phase motor 2. 3-phase motorShop online at www.edwardsvacuum.com

Technical DataOrdering Information1Page32Displacement50Hz 14.2 m 3 h -1 / 8.4 ft 3 min -160Hz 17 m 3 h -1 / 10 ft 3 min -1Speed (Pneurop 6602)50Hz 12 m 3 h -1 / 7.1 ft 3 min -160Hz 14.2 m 3 h -1 / 8.4 ft 3 min -1Ultimate pressure2 x 10 -3 mbar / 1.5 x 10 -3 TorrUltimate pressure GB I 3 x 10 -2 mbar / 2.3 x 10 -2 TorrUltimate pressure GB II 6 x 10 -2 mbar / 4.6 x 10 -2 Torr-2 -2Ultimate pressure with Fomblin® 2 x 10 mbar / 1.5 x 10 TorrMax inlet pressure for watervapour32 mbar / 24 TorrMax water vapour pumping rate– GB I 60 gh -1Max water vapour pumping rate– GB II 220 gh -1Max allowed outlet pressure 1 bar gauge / 14 psigMax allowed inlet and gasballast pressure0.5 bar gauge / 7 psigMotor power 50/60Hz450 / 550WPower connector 1-phIEC EN60320 C13Nominal rotation speed 50/60Hz 1500 / 1800rpmWeight (without oil)29 kg / 63.8 lbOil capacity min/max0.65 / 1 litresRecommended oil Ultragrade 19Inlet flangeNW25Exhaust flangeNW25Noise level48 dB(A) @ 50 HzOperating temperature range 12 – 40 °CProduct DescriptionRV12 115/230V, 1-ph, 50/60Hz, Factory set to 230V forEuropeRV12 100/200V, 1-ph, 50/60Hz, Factory set to 200V for JapanRV12 200-220/380-415V, 3-ph, 50Hz and 200-230/460V, 3-ph,60Hz, Factory set to 380/460VRV12 115/230V, 1-ph, 50/60Hz, Factory set to 115V for USAPFPE RV12 115/230V, 1-ph, 50/60Hz, Factory set to 230V forEuropePFPE RV12 100/200V, 1-ph, 50/60Hz, Factory set to 200V forJapanPFPE RV12 200-220/380-415V, 3-ph, 50Hz and 200-230/460V, 3-ph, 60Hz, Factory set to 380/460VPFPE RV12 Two Stage Rotary Vane Pump 115/230V 1ph50/60Hz, Factory set to 115V for USAAccessories & Spares2m electrical supply cable for 1-ph pumps, UK, Three-pin plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, no plugRV gas-ballast adaptorExhaust Nozzle Kit 3/4'' To 15mmModel EMF20 mist filterClean and overhaul kitClean and overhaul kit (Nitrile)Spares Kit Blade RV12Outer Shaft Seal Kit RVSpares Kit Inlet Valve RV3/5/8/12Spares Kit Cartridge RV12Order No.A65501903A65501904A65501905A65501906A65509903A65509904A65509905A65509906Order No.A50505000A50506000A50507000A50508000A50502000A50509000A46229000A65201131A65201137A65501130A65201134A65201036A65501032Shop online at www.edwardsvacuum.com

E1M18 One Stage, E2M18 Two Stage Rotary Vane PumpsThe EM range of oil-sealed rotary pumps - renowned for their high ultimate vacuum, rapidpumping speed, quiet operation and ability to handle vapour - have become the industrystandard for laboratory and light industrial applications.The E1M18 and E2M18 pumps are direct drive, sliding vane pumps. The pump is oil sealedand designed for reliable, long-term operation. The pump is a freestanding unit with thedrive provided through a flexible coupling by either a single-phase or three-phase (fourpole)motor.1Page33Supplied with: Ultragrade 19 oil, NW25 O-ring and centering ring. Fomblin® must bepurchased separately for PFPE pumps.Features & BenefitsApplications●●●●●The pump is designed for reliable, long-term operation.Thermal overload device prevents overheating (single phaseonly).The drive is provided through a flexible coupling by a singlephaseor three-phase (four pole) motor.The motors are totally enclosed and are cooled by the motorcoolingfan.Pressure die cast oil box with integral oil seals prevents oil leaks.Dimensions●●●●Analytical instrumentsLeak detectors, HeliumResearch and developmentBacking Turbomolecular pumpsPerformance Curves1. Without gas ballast 2. With gas ballast1. Without gas ballast 2. With gas ballastOrder No. A B C D E F GA34310940 - 474 247 83 159 171.4 217A34315904 518 474 247 83 159 171.4 241A34317984 - 504 247 83 159 171.4 251A36310940 - 520 295 131 207 171.4 217A36315904 564 520 295 131 207 171.4 241A36317984 - 550 295 131 207 171.4 251Shop online at www.edwardsvacuum.com

1Page34Technical DataE1M18E2M18Displacement50Hz 20.5 m 3 h -1 / 20.5 m 3 h -1 /12.1 ft 3 min -1 12.1 ft 3 min -160Hz 25.0 m 3 h -1 / 25.0 m 3 h -1 /14.7 ft 3 min -1 14.7 ft 3 min -1Speed (Pneurop 6602)50Hz 17.0 m 3 h -1 / 17.0 m 3 h -1 /10 ft 3 min -1 10 ft 3 min -160Hz 20.4 m 3 h -1 / 20.4 m 3 h -1 /12.1 ft 3 min -1 12.1 ft 3 min -1Ultimate vacuum (totalpressure)without gas purge 3 x 10-2 mbar / 1 x 10-3 mbar /2.2 x 10-2 Torr 7.4 x 10-4 Torrwith gas purge 6.5 x 10-1 mbar / 1.5 x 10-1 mbar /4.8 x 10-1 Torr 1.1 x 10-2 Torrwith Fomblin® 3 x 10-1 mbar / 1 x 10-2 mbar /2.56 x 10-2 Torr 7.5 x 10-3 TorrInlet connection NW25 NW25Outlet connection*Nozzle 15 mmexternal Øremovable from3/4 in BSP tappedholeNozzle 15 mmexternal Øremovable from3/4 in BSP tappedholeMax permitted pressureat outlet0.5 bar gauge / 0.5 bar gauge /7 psig 7 psigMax inlet pressure 50 mbar / 20 mbar /for water vapour 38 Torr 15 TorrMax water vapourpumping rate 0.65 kg h -1 0.3 kg h -1Operating temp range 13-40°C 13 – 40 °CNominal Rotation speed50/60Hz1440/1720 rpm 1440 / 1720 rpmPower connector 1-ph** IEC EN60320 C19 IEC EN60320 C19Motor power 50 Hz 0.55 kW 0.55 kWMotor power 60 Hz 0.75 kW 0.75 kWWeight 37 kg / 82 lbs 39 kg / 86 lbsNoise @ 50Hz 57 dB(A) 57 dB(A)Oil capacity - max 1.4 litre 1.05 litreOil capacity - min 0.9 litre 0.75 litreRecommended oil(supplied)Ultragrade 19 Ultragrade 19* ThePFPE are supplied with NW25 outlet connection** Pumps listed with IEC connector onlyOrdering InformationProduct DescriptionE1M18 200-230/380-415V, 3-ph, 50Hz or 200-230/460V, 3-ph,60HzE1M18 100/200V, 1-ph, 50Hz or 100-105/200-210V, 1-ph,60HzE1M18 115/200-230V, 1-ph, 50/60Hz with IEC60320connector, factory set to 230VE1M18 PFPE 115/200-230V, 1-ph, 50/60Hz with IEC60320connectorE2M18 200-230/380-415V, 3-ph, 50Hz or 200-230/460V, 3-ph,60HzE2M18 100/200V, 1-ph, 50Hz or 100-105/200-210V, 1-ph,60HzE2M18 115/200-230V, 1-ph, 50/60Hz with IEC60320connectorE2M18 PFPE 200-230/380-415 V, 3-ph, 50 Hz or 200-230/460V, 3-ph, 60 HzE2M18 PFPE 100/200V, 1-ph, 50Hz or 100-105/200-210V, 1-ph, 60HzE2M18 PFPE 115/200-230 V, 1-ph, 50/60 Hz with IEC60320connector fittedAccessories & SparesModel EMF20 mist filter2m Electrical supply cable, UK, three-pin plug2m Electrical supply cable, North European plug2m Electrical supply cable, North America/Japan plug2m Electrical supply cable, no plugSpares Kit C&O E1M18/E2M18Spares Kit Blade E1M18Spares Kit Blade E2M18NW25 to 28mm bore tube adaptorOrder No.A34310940A34315904A34317984A34325984A36310940A36315904A36317984A36321940A36325904A36325984Order No.A46229000A50505003A50506003A50507003A50508003A36301131A34301041A36301020C105202013/4" BSP to NW25 outlet adaptor C10501414Shop online at www.edwardsvacuum.com

E2M28 Two Stage Rotary Vane PumpThe EM range of oil-sealed rotary pumps - renowned for its high ultimate vacuum, rapidpumping speed, quiet operation and ability to handle vapour - has become the industrystandard laboratory and light industrial applications.The E2M28 pump is a two-stage, direct drive, sliding vane pump. The pump is oil sealedand designed for reliable, long-term operation in both laboratory and industrialenvironments. The pump is a freestanding unit with the drive provided through a flexiblecoupling by either a single-phase or three-phase (four-pole) motor.1Page35Supplied with: Ultragrade 19 oil, NW25 O-ring and centering ring, lifting plate. Fomblin®must be purchased separately for PFPE pumps.Features & BenefitsApplications●●●●●The pump is designed for reliable, long-term operation.Thermal overload device prevents overheating (single phaseonly).The pump is a free-standing unit.The drive is provided through a flexible coupling by a singlephaseor three-phase (four pole) motor.The motors are totally enclosed and are cooled by the motorcoolingfan.Dimensions●●●●●Analytical instruments - LCMSAutomotiveBeam lines and high energy physicsCentrifuges, ultra-high speedCoatingPerformance Curves1. Without gas ballast 2. With gas ballastOrdering No. A B CA37310940 - 553 217A37315904 598 584 251A37317984 - 584 251Shop online at www.edwardsvacuum.com

1Page36Technical DataDisplacement (swept volume)50 Hz 32.2 m 3 h -1 / 19 ft 3 min -160 Hz 38.9 m 3 h -1 / 22.3 ft 3 min -1Speed (Pneurop 6602)50 Hz 27.5 m 3 h -1 / 16.2 ft 3 min -160Hz 33.0 m 3 h -1 / 19.5 ft 3 min -1Ultimate vacuum (total pressure)without gas ballast1 x 10-3 mbar / 7.5 x 10-4 Torrwith gas ballast1.5 x 10-2 mbar / 1.1 x 10-2 Torrwith Fomblin®1 x 10-2 mbar / 7.5 x 10-3 TorrInlet connectionNW25 flangeNozzle 15 mm external ØOutlet connection*removable from 3/4 in BSPtapped holeMax allowed pressure at outlet 0.5 bar gauge / 7 psigMax inlet pressure for watervapour30 mbar / 23 TorrMax water vapour pumping rate-1 0.7 kg hOperating temperature range 13 – 40 °CNominal rotation speed 1440 / 1720 rpmMotor power 50 Hz0.75 kWMotor power 60 Hz0.90 kWPower Connector 1-ph** IEC EN60320 C19Weight44 kg / 97 lbsNoise57 dB(A) @ 50 HzOil capacity - max1.5 litreOil capacity - min1.2 litreRecommended oil (supplied) Ultragrade 19* The PFPE are supplied with NW25 outlet connection** Pumps listed with IEC connector onlyOrdering InformationProduct DescriptionE2M28 200-220/380-415 V, 3-ph, 50 Hz or 200-230/460 V, 3-ph, 60 Hz IE2E2M28 100/200 V, 1-ph, 50 Hz or 100-105/200-210 V, 1-ph,60 HzE2M28 115/200-230 V, 1-ph, 50/60 Hz with IEC60320connector fittedE2M28 PFPE 200-220/380-415 V, 3-ph, 50 Hz or 200-230/460V, 3-ph, 60 Hz IE2E2M28 PFPE 115/200-230 V, 1-ph, 50/60 Hz with IEC60320connector fittedAccessories & SparesModel MF30 mist filterModel EMF20 mist filter2m Electrical supply cable, UK, three-pin plug2m Electrical supply cable, North European plug2m Electrical supply cable, North America/Japan plug2m Electrical supply cable, no plugClean and overhaul kit (hydrocarbon) E2M28Blade Kit E2M28/30NW25 to 28mm bore tube adaptorOrder No.A37330940A37315904A37317984A37341940A37325984Order No.A46233000A46229000A50505003A50506003A50507003A50508003A37301131A37301135C105202013/4" BSP to NW25 outlet adaptor C10501414Shop online at www.edwardsvacuum.com

RV ATEX Two Stage Rotary Vane PumpATEX RV pumps have an external ATEX classification of Ex II 2G IIC T4 or Ex II 2G IIB T4and are suitable for use in potentially explosive atmospheres. They share the same internalATEX classification as our standard RV pumps, namely Ex II 3G c IIB T4. ATEX pumps withflameproof motors require the user to provide 2 off hazardous area cable glands andcables. In addition, connection of the thermistors to an appropriate safety circuit must bemade to switch off the pump if overheating occurs. The pumps are supplied with the GasBallast port plugged. When pumping flammable gasses or vapours you must fit an inert gaspurge to this port to dilute such gases or vapours below the lower explosive limit.Supplied with 1 litre of Ultragrade 19 oil, inlet filter and O-ring.1Page37Features & Benefits●●●●●ATEX rated spot voltage motor.Dual mode. Suitable for high throughput and high vacuumapplications.Fast acting inlet valve for system protection.Efficient high pressure lubrication.Oil-tight with printed gaskets, effective shaft seals.DimensionsApplications●Hazardous area pumpingPerformance CurvesBlue = no gas purgeRed = With inert gas purgeBlue = no gas purgeRed = With inert gas purgePump A B CRV3 520 (20.47) 127 (5) 29 (1.06)RV5 520 (20.47) 127 (5) 29 (1.06)RV8 560 (22.05) 161 (6.34) 35 (1.38)RV12 580 (22.83) 181 (7.13) 35 (1.38)Shop online at www.edwardsvacuum.com

Technical DataOrdering Information1Page38DisplacementRV3 50Hz 3.7 m 3 h -1 / 2.2 ft 3 min -1RV3 60Hz 4.5 m 3 h -1 / 2.6 ft 3 min -1RV5 50Hz 5.8 m 3 h -1 / 3.4 ft 3 min -1RV5 60Hz 7 m 3 h -1 / 4.1 ft 3 min -1RV8 50Hz 9.7 m 3 h -1 / 5.7 ft 3 min -1RV8 60Hz 11.7 m 3 h -1 / 6.9 ft 3 min -1Product DescriptionATEX RV3 115V, 1-ph 50Hz Ex II 2G IIC T4ATEX RV3 115V, 1-ph, 60Hz Ex II 2G IIC T4ATEX RV3 115V, 1-ph, 60Hz Ex II 2G IIB T4ATEX RV3 230V, 1-ph, 60Hz Ex II 2G IIB T4ATEX RV3 230V, 1-ph, 50Hz Ex II 2G IIC T4ATEX RV3 230V, 1-ph, 60Hz Ex II 2G IIC T4ATEX RV3 230V, 1-ph, 50Hz Ex II 2G IIB T4Order No.A65218985A65218986A65218987A65218988A65218989A65218990A65218991RV12 50Hz 14.2 m 3 h -1 / 8.4 ft 3 min -1ATEX RV3 400V, 3-ph, 50Hz Ex II 2G IIC T4A65218992RV12 60Hz 17 m 3 h -1 / 10 ft 3 min -1Speed (Pneurop 6602)RV3 50Hz 3.3 m 3 h -1 / 2 ft 3 min -1RV3 60Hz 3.9 m 3 h -1 / 2.3 ft 3 min -1RV5 50Hz 5.1 m 3 h -1 / 3 ft 3 min -1RV5 60Hz 6.2 m 3 h -1 / 3.6 ft 3 min -1ATEX RV3 400V, 3-ph, 50Hz Ex II 2G IIB T4ATEX RV5 115V, 1-ph 50Hz Ex II 2G IIC T4ATEX RV5 115V, 1-ph, 60Hz Ex II 2G IIC T4ATEX RV5 115V, 1-ph, 60Hz Ex II 2G IIB T4ATEX RV5 230V, 1-ph, 60Hz Ex II 2G IIB T4ATEX RV5 230V, 1-ph, 50Hz Ex II 2G IIC T4ATEX RV5 230V, 1-ph, 60Hz Ex II 2G IIC T4A65218993A65318985A65318986A65318987A65318988A65318989A65318990RV8 50Hz 8.5 m 3 h -1 / 5 ft 3 min -1ATEX RV5 230V, 1-ph, 50Hz Ex II 2G IIB T4A65318991RV8 60Hz 10 m 3 h -1 / 5.9 ft 3 min -1RV12 50Hz 12 m 3 h -1 / 7.1 ft 3 min -1RV12 60Hz 14.2 m 3 h -1 / 8.4 ft 3 min -1Max allowed outlet pressure 1 bar gauge / 14 psigMax allowed inlet and gas purgepressure0.5 bar gauge / 7 psigNominal rotation speed 50/60Hz 1430 / 1710 rpmMotor power 50/60Hz550WWeight (without oil)RV328 kg / 61.6 lbRV528 kg / 61.6 lbATEX RV5 400V, 3-ph, 50Hz Ex II 2G IIC T4ATEX RV5 400V, 3-ph, 50Hz Ex II 2G IIB T4ATEX RV8 115V, 1-ph 50Hz Ex II 2G IIC T4ATEX RV8 115V, 1-ph, 60Hz Ex II 2G IIC T4ATEX RV8 115V, 1-ph, 60Hz Ex II 2G IIB T4ATEX RV8 230V, 1-ph, 60Hz Ex II 2G IIB T4ATEX RV8 230V, 1-ph, 50Hz Ex II 2G IIC T4ATEX RV8 230V, 1-ph, 60Hz Ex II 2G IIC T4ATEX RV8 230V, 1-ph, 50Hz Ex II 2G IIB T4ATEX RV8 400V, 3-ph, 50Hz Ex II 2G IIC T4ATEX RV8 400V, 3-ph, 50Hz Ex II 2G IIB T4ATEX RV12 115V, 1-ph, 60Hz Ex II 2G IIC T4A65318992A65318993A65418985A65418986A65418987A65418988A65418989A65418990A65418991A65418992A65418993A65518986RV831 kg / 68.2 lbATEX RV12 115V, 1-ph, 60Hz Ex II 2G IIB T4A65518987RV1232 kg / 70.4 lbATEX RV12 230V, 1-ph, 60Hz Ex II 2G IIB T4A65518988Inlet flangeNW25Exhaust flangeNW25Operating temperature range 12 – 40 °CATEX RV12 230V, 1-ph, 50Hz Ex II 2G IIC T4ATEX RV12 230V, 1-ph, 60Hz Ex II 2G IIC T4ATEX RV12 230V, 1-ph, 50Hz Ex II 2G IIB T4ATEX RV12 400V, 3-ph, 50Hz Ex II 2G IIC T4A65518989A65518990A65518991A65518992ATEX RV12 400V, 3-ph, 50Hz Ex II 2G IIB T4A65518993Shop online at www.edwardsvacuum.com

E1M18 One Stage, E2M18 Two Stage ATEX Rotary Vane PumpsATEX EM18 pumps have an external ATEX classification of Ex II 2G IIC T4 or Ex II 2G IIBT4 and are suitable for use in potentially explosive atmospheres. They share the sameinternal ATEX classification as our standard EM18 pumps, namely Ex II 3G c IIB T4. ATEXpumps with flameproof motors require the user to provide 2 off hazardous area cableglands and cables. In addition, connection of the thermistors to an appropriate safety circuitmust be made to switch off the pump if overheating occurs. The pumps are supplied withthe gas ballast port plugged. When pumping flammable gasses or vapours you must fit andinert gas purge to this port to dilute such gasses or vapours below the lower explosive limit.Supplied with ultragrade 19 oil, NW25 O-ring and centering ring.1Page39Features & Benefits●Approved to external ATEX standards Ex II 2G IIC T4 and Ex II2G IIB T4, which enables use in hazardous environments.DimensionsApplications●Hazardous area pumpingPerformance Curves1 Without gas purge 2 With gas purge1. Without gas purge 2. With gas purgeA B C D EE1M18 526 247 83 159 171.4E2M18 576 295 131 207 171.4Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationE1M18E2M18Product DescriptionOrder No.DisplacementE1M18 ATEX 230V, 1ph, 50Hz Ex II 2G IIB T4A343189911Page4050Hz 20.5 m 3 h -1 / 20.5 m 3 h -1 /12.1 ft 3 min -1 12.1 ft 3 min -160Hz 25.0 m 3 h -1 / 25.0 m 3 h -1 /14.7 ft 3 min -1 14.7 ft 3 min -1Speed (Pneurop 6602)E1M18 ATEX 230V, 1ph, 50Hz Ex II 2G IIC T4E1M18 ATEX 400V, 3ph, 50Hz Ex II 2G IIB T4E1M18 ATEX 400V, 3ph, 50Hz Ex II 2G IIC T4E1M18 ATEX 115V, 1ph, 60Hz Ex II 2G IIB T4E1M18 ATEX 115V, 1ph, 60Hz Ex II 2G IIC T4E1M18 ATEX 230V, 1ph, 60Hz Ex II 2G IIB T4A34318989A34318993A34318992A34318987A34318986A3431898850 Hz 17.0 m 3 h -1 / 17.0 m 3 h -1 /10 ft 3 min -1 10 ft 3 min -160Hz 20.4 m 3 h -1 / 20.4 m 3 h -1 /12.1 ft 3 min -1 12.1 ft 3 min -1Ultimate vacuum (totalpressure)without gas purge 3 x 10 -2 mbar / 1 x 10 -3 mbar /2.2 x 10 -2 Torr 7.4 x 10 -4 Torrwith gas purge 6.5 x 10 -1 mbar 1.5 x 10 -1 mbar/4.8 x 10 -1 Torr /1.1 x 10 -2 TorrInlet connection NW25 NW25Outlet connectionNozzle 15 mmexternal Øremovable from3/4 in BSP tappedholeNozzle 15 mmexternal Øremovable from3/4 in BSP tappedholeMax permitted pressureat outlet0.5 bar gauge / 0.5 bar gauge /7 psig 7 psigMax inlet pressure 50 mbar / 20 mbar /for water vapour 38 Torr 15 TorrMax water vapourpumping rate 0.65 kg h -1 0.3 kg h -1Operating temp range 13-40°C 13-40°CNominal Rotation speed50/60Hz1440/1720 rpm 1440/1720 rpmMotor power50 Hz 0.55 kW 0.55 kW60 Hz 0.75 kW 0.75 kWWeight 37 kg / 82 lbs 39 kg / 86 lbsNoise @ 50Hz 57 dB(A) 57 dB(A)Oil capacity - max 1.4 litre 1.05 litreOil capacity - min 0.9 litre 0.75 litreRecommended oil(supplied)Ultragrade 19 Ultragrade 19E1M18 ATEX 230V, 1ph, 60Hz Ex II 2G IIC T4A34318990E2M18 ATEX 230V, 1ph, 50Hz Ex II 2G IIB T4A36318991E2M18 ATEX 230V, 1ph, 50Hz Ex II 2G IIC T4A36318989E2M18 ATEX 400V, 1ph, 50Hz Ex II 2G IIB T4A36318993E2M18 ATEX 400V, 1ph, 50Hz Ex II 2G IIC T4A36318992E2M18 ATEX 115V, 1ph, 60Hz Ex II 2G IIB T4A36318987E2M18 ATEX 115V, 1ph, 60Hz Ex II 2G IIC T4A36318986E2M18 ATEX 230V, 1ph, 60Hz Ex II 2G IIB T4A36318988E2M18 ATEX 230V, 1ph, 60Hz Ex II 2G IIC T4A36318990Accessories & SparesOrder No.3/4" BSP to NW25 outlet adaptor C10501414NW25 O Ring Viton Pk 5H02124035NW25 to 28mm bore tube adaptorC10520201NW25/25 Centring Nitrile S/S Pk1C10514396Ultragrade 19 OilH11025013Spares Kit Blade E1M18A34301041Spares Kit C&O E1M18/E2M18A36301131Shop online at www.edwardsvacuum.com

Electrical DataSmall Pump AccessoriesElectrical dataThe table shows current data and suggests a suitable fuse rating.Starting current is drawn for less than one second and slow blowfuses should be used to prevent unnecessary rupture during starting.Pump outfits are rated for operation above 12°C. Pump starting attemperatures lower than 12°C will increase the current drawn due tothe higher start torque required. This may cause the motor thermaloverload to trip.Three-phase motors should be protected by a starter consisting of asuitably rated contactor and thermal overload. The trip currentregulator on the thermal overload should be set according to thestarter manufacturer's instructions.Full loadcurrent(A)Start current(A)Suggestedfuse rating(A)Electrical Supply 50 Hz 60 Hz 50 Hz 60 HzE2M0.7200-240 V 1-ph 50/60 Hz 1.0 1.0 2.8 2.3 6100-120 V 1-ph 50/60 Hz 1.8 1.9 5.7 5.3 10E2M1.5200-240 V 1-ph 50/60 Hz 1.4 1.3 5.5 5.2 6100-120 V 1-ph 50/60 Hz 3.1 2.6 12.0 11.2 10RV3 and RV5220-240 V 1-ph 50/60 Hz 2.7 2.1 17.0 17.0 5110-120 V 1-ph 50/60 Hz 4.4 4.4 30.8 30.8 10200 V 1-ph 50/60 Hz 2.9 2.4 17.6 17.2 5200-220 V 3-ph 50/60 Hz 1.7 1.7 10.2 10.2 2.5380-415/460 V 3-ph 50/60 Hz 1.0 1.0 5.7 7.0 2.5RV8 and RV12220-240 V 1-ph 50/60 Hz 3.4 3.4 17.0 18.0 5110-120 V 1-ph 50/60 Hz 7.8 6.9 34.0 30.8 13200 V 1-ph 50/60 Hz 4.0 4.0 17.6 17.2 5200-220 V 3-ph 50/60 Hz 2.5 2.9 14.0 12.0 4.0380-415/460 V 3-ph 50/60 Hz 1.5 1.5 9.0 8.7 2.5E1M18 and E2M18220-240 V 1-ph 50/60 Hz 4.6 5.0 33.0 33.0 15110-120 V 1-ph 50/60 Hz 11.0 10.0 42.0 32.0 30200 V 1-ph 50/60 Hz 6.0 5.5 44.0 44.0 15100 V 1-ph 50/60 Hz 12.0 11.0 88.0 88.0 30200-230 V 3-ph 50/60 Hz 3.3 2.3 16.1 15.9 10380-415/460 V 3-ph 50/60 Hz 1.9 1.6 10.2 10.6 6E2M28220-240 V 1-ph 50/60 Hz 6.0 6.5 27.0 32.0 15110-120 V 1-ph 50/60 Hz 12.0 12.0 36.0 50.0 30200 V 1-ph 50/60 Hz 6.5 5.5 40.0 40.0 20100 V 1-ph 50/60 Hz 12.0 12.0 80.0 80.0 30200-230 V 3-ph 50/60 Hz 3.8 3.9 22.8 22.0 16380-415/460 V 3-ph 50/60 Hz 2.3 2.3 14.3 14.6 10XDS35i200-230 V 1-ph 50/60 Hz 6.6 6.6 - - 16 (13 UK)100-120 V 1-ph 50/60 Hz 10.6 10.6 - - 20XDS46i and XDS100B200-230 V 1-ph 50/60 Hz 6.6 6.6 - - 16 (13 UK)100-120 V 1-ph 50/60 Hz 10.6 10.6 - - 20nXDS100-127 V 1-ph 50/60 Hz 10.0 10.0 - - 13200-240 V 1-ph 50/60 Hz 6.0 6.0 - - 10This diagram shows the accessories available for oil-sealed pumps.Refer to the following pages for details of each accessory. Note thatthe E-LAB2 pump is supplied with all required accessories.4 53131 Outlet mist filter12 Oil return kit23 Small volume inlet liquid catchpot4 ITO20K inlet liquid catchpot5 ITC20K inlet chemical trap6 ITF20K inlet dust filter7 FL20K foreline trap8121 EMF filter shown2 RV adjustable gas ballast oil return kit shown3 RV pump extension kit shown4?Not required for EM pumps276OIL11108 Vibration isolators9 Oil drain kit310 OB20 oil box purge adaptor11 Oil change reminder card12 RV gas ballast adaptor413 EBV20 solenoid operated gas ballastvalve191Page41Shop online at www.edwardsvacuum.com

1Page42Outlet Mist FiltersBenefits of the mist filter include:• Protection from oil mist emissions as required by COSHH andhealth and safety regulations• Use of optional oil return kits results in reduced oil levelmaintenance and savings in pump oil• If the oil element becomes blocked, an integral pressure relief valveopensEMF Filters The EMF3, EMF10 and EMF20 mist filters are suitablefor all small rotary vane pumps up to E2M18. (The EMF20 can beused with an E2M28 on low pressure/throughput applications;contact Edwards). They are very efficient at 99.999% DOP test andare also azide proof. The white bottom half of the body is semitransparent,allowing the oil level to be monitored. The EMF filtershave a unique odour element which neutralizes the smell of oil mist.MF30 FIlter The MF30 is suitable for E2M28 pumps. It is very efficientat 99.85% DOP test. You can monitor the oil level through the sightglassprovided.DimensionsEMF FiltersAFLOWAEMF3 128 mm /5.03 inchEMF10 171 mm /6.73 inchEMF20 191 mm /7.51 inchBSquare82 mm /3.22 inch97 mm /3.81 inch118.4 /4.66 inchInlet/OutletNW10NW25NW25BMF30 FiltersØ150 (5.91)31 (1.22)83 (3.27)NW25248 (9.76)296 (11.65)308 (12.13)1 Gas-ballast adaptor blank2 Gas-ballast adaptor3a Inlet / exhaust filter3b Inlet / exhaust filter4 Silencer5 Exhaust nozzle6 Vibration isolators7 Chemical resistance conversion kit8 Pump-to-controller cable (not shown)1 General view (O-ring seals not shown)Shop online at www.edwardsvacuum.com

Ordering InformationProduct DescriptionOrder No.Model EMF3 mist filter (0.315 kg) 1A46220000Model EMF10 mist filter (0.500 kg) 2A46226000Model EMF20 mist filter (0.700 kg) 2A46229000Model MF30 mist filter (1.30 kg) 3A462330001 Supplied with NW10 clamp, centring-ring and O-ring, NW10 to ⅜ inch BSP adaptor.2Supplied with NW25 clamp, centring-ring and O-ring, NW25 to ¾ inch BSP adaptor.3 Supplied with NW25 elbow, NW25 clamp, NW25 to ¾ inch BSP adapter and NW25 Co-Seal.SparesOrder No.Odour element (pack of 5)EMF3A22304081EMF10A22304079EMF20A22304077Oil elementEMF3A22304197EMF10A22304198EMF20A22304199MF30A22304057Body sealEMF3A27159538EMF10A27159535EMF20A27159534Oil Return KitsOil return kits These conserve the pump oil, by returning the oiltrapped in the mist filter to the pump. The gas ballast oil return kit, forexample, allows extended operation of the pump with gas ballast.Ordering InformationProduct DescriptionClean application oil return kit (RV, Speedivac 2 toE2M0.7, E2M1.5)Adjustable gas ballast oil return kit (RV)Clean application oil return kit (E1M18 to E2M28)Inlet Liquid CatchpotsThese catchpots minimize the entry of condensable vapours into thepump. Benefits of the catchpots include:• Capture condensable vapours, which would otherwise condense inthe pipelines or in the pump• Prevents froth or spray from the process from carrying over to thepump• Corrosion-resistant body• Visual indication of trapped liquid level• Hand-tightened drain plug, for easy drainageOrdering InformationProduct DescriptionITO20K inlet catchpot, 1.84 litres capacity, weight3.2 kgSmall volume inlet catchpot 0.1 litre capacity, weight0.3 kgBoth supplied with NW25 clamp, centring-ring andO-ring.Order No.A50419000A50523000A50420000Order No.A44110000A44105000ITD20K Inlet Desiccant TrapThe ITD desiccant trap is intended for use when pumping limitedquantities of water vapour at high pumping speeds to a low vapourpressure using phosphorous pentoxide (P 2 O 5 ) as the desiccant.P 2 O 5 (not supplied by Edwards) absorbs more than 20% (by weight)of water whilst still maintaining a low vapour pressure.The trap body is an aluminium casting which contains a tray assemblymade of stainless steel. The condition of the desiccant can beobserved through a glass cover fitted to the top of the trap.Ordering InformationProduct DescriptionITD20K Inlet Desiccant TrapITC20K Inlet Chemical TrapsThe ITC series of chemical traps provides the following benefits:• Protection against various aggressive vapours, which may attackthe pump or pump oil• Prevent high molecular weight vapours (such as might arise in aresin treatment plant), from reaching the pump. These vapourscould cause lacquering or clogging• The standard sorbent (activated charcoal), has relatively hightrapping properties (absorbs around 25% of its own weight), evenwhen large amounts of water vapour are being pumped• When filled with activated alumina on two-stage pumps,backstreaming of pump oil can be controlled• See also ITO catchpots for design advantages of the bodyOrdering informationITF20K Inlet Dust FilterThe ITF inlet dust filters prevent the entry of dust particles into thepump. The impedance of a clean filter reduces the pumping speed ofa 20 m 3 h -1 pump by about 20% at 1 mbar and 25% at 10 mbar.Depending on your application, you can normally clean the filterelement with a vacuum cleaner or a clean air blast, and then re-usethe element.The benefits of the ITF filters include:• Thick aluminium casting, to withstand abrasion• Tangential entry port, to promote centrifugal separation of dustparticles• Filter efficiency better than 96% (tested to BS2831, dust number 2).DimensionsITO20K, ITC20K and ITF20KOrder No.A44510000Product DescriptionOrder No.ITC20K inlet chemical trap charcoal charge 0.4 kg, A44410000weight 3.5 kgSorbent charge not supplied. Supplied with NW25 clamp, centring-ringand O-ring.SparesOrder No.0.5 kg activated charcoal H122050013 kg activated charcoal H122050020.45 kg activated alumina H026000500.2 kg activated alumina H02600056Ø171 (6.73)124 (4.88)1Page43205 (8.07)143 (5.63)NW25106 (4.17)68.5(2.70)NW1045˚Shop online at www.edwardsvacuum.com

1Page44Ordering InformationProduct DescriptionITF20K inlet dust filter (3.4) kgITF20K element and gasket kit (0.3 kg)EBV Gas Ballast Control ValvesFit the EBV 20 valve to allow remote operation of the pump’s gasballast control.Ordering InformationProduct DescriptionEBV20 110 V 1-ph 50/60 HzEBV20 (0.5 kg) 220 - 240 V 50/60 HzSuits the E2M0.7 to E2M28 including RVFor RV and XDS pumps an adaptor is requiredFor the E1M18/E2M28 an adapter is requiredAcoustic EnclosuresDesigned for use in a laboratory or an industrial environment,Edwards new acoustic enclosures are compatible with all EM, RV andnXDS/XDS pumps ranging up to the E2M28 series/XDS46i.The acoustic enclosure reduces the noise level by up to 9dBA andincorporates internal fans to ensure adequate air cooling is providedto the pump. They are also CSA/UL compliant.The design of the enclosure allows for it to be easily assembled ordisassembled without tooling. A removable front panel also allows forquick access to the oil sight glass and if required a side panel can beremoved allowing access to the oil filler cap (EM/RV only). Theenclosure is powered via a power cable fitting into an IEC 320 socket.• Simple slot together assembly means no tools are required• Designed to attenuate the noise of an E2M28 by 7dBA or anXDS35i/46i by 9dBA• Integrated cooling fans to maintain optimum pump runningtemperature• Castor wheels with brakes for easy manoeuvrability• Fully compatible with Edwards inlet traps, exhaust mist filters andnXDS/XDS silencer with extension spools (available separately)• Over temperature buzzer alarm with battery back-upDimensionsOrder No.A44215000A44201800Order No.A50006984A50006930A50502000A50006003Technical DataMass (RV-EM/XDS)Electrical supply for cooling fansVoltageFuse ratingConnectorApproximate noise reductionRVE2M28XDS35i/46iOrdering InformationFL20K Foreline TrapThe FL20K foreline trap has been developed for use in clean pumpingsystems, to prevent the back-migration of rotary pump oil mist into thesystem. The activated alumina sorbent has the following benefits:• Exceptional trapping properties for oil mist (99.7%)• A very long life before it is saturated• Can be rejuvenated by baking the basket containing the sorbent for2 hours at 250 °C – 300 °C.The FL20K is most useful with two-stage rotary pumps, operatingbelow 1 mbar. To maximize sorbent life, install the FL20K near thevacuum system. In common with other types of sorbent, activatedalumina absorbs water. This does not affect the oil vapour trappingproperties but may tend to prolong the roughing time on successivepump downs. To minimize vapour absorption, we recommend you fita valved by-pass line.The trap body is made of aluminium and is fitted with a removablebasket containing the sorbent.Dimensions23 kg/ 37 kg100-120 V/200-240 V5 A Type T 20 mmIEC320 socket7dBA7dBA9dBAProduct DescriptionRV/EM acoustic enclosure 110-120V (NRD317000)RV/EM acoustic enclosure 200-240V (NRD418000)nXDS/XDS acoustic enclosure 110-120VnXDS/XDS acoustic enclosure 200-240V(NRD797000)Accessories & Spares2m Electrical supply cable, UK 3 pin plug2m Electrical supply cable, N. Europe plug2m Electrical supply cable, USA/Japan plug2m Electrical supply cable, no plugNW25 Aluminium nipple 100mm longNW40 Aluminium nipple 130mm longOrder No.A50635906A50635903A50636906A50636903Order No.A50505000A50506000A50507000A50508000C10514409C10516409Ø82.5 (3.25)50 (1.97)6.5(0.26)Dimension RV/EM nXDS/XDSA 790 mm 778 mmB 285 mm 442 mmC 460 mm 580 mm130 (5.12)Ordering Information50 (1.97)NW25Product DescriptionOrder No.FL20K foreline trap weight 1kgA13305000(Supplied with 0.2 kg sorbent charge)SparesOrder No.0.45 kg activated alumina H026000500.2 kg activated alumina H02600056Shop online at www.edwardsvacuum.com

Vibration IsolatorsYou may need to fit vibration isolators to your pump if you mount it intoa frame or a system, if the mounting points are not level or if you needto minimize the transmission of vibration and noise in yourapplication. You must fit flexible bellows or other flexible pipes to thepump inlet and outlet.The height of these neoprene rubber isolators reduces by about 1 mmwhen the pump is fitted.DimensionsE2M0.7, E2M1.541 (1.61) 30 (1.18)5(0.20)Ø25(0.98)74 (2.91)60 (2.36)2 x Ø6 (0.24)Ordering InformationProduct DescriptionVibration isolatorsE2M0.7, E2M1.5 (0.3 kg)RV, E1M/E2M18 (0.45 kg)E2M28 (0.45 kg)XDS35i (0.45 kg)nXDS (0.45 kg)Oil Box Drain KitsTwo kits are available:• RV easy oil box drain kit. This kit includes an oil drain extensiontube for use when the oil is gravity drained. Fits E2M0.7, E2M1.5,RV, E1M18, E2M18, E2M28.• ODP20, for use with the E1M18, E2M18 and E2M28 pumps. Thisaccessory provides alternative methods for draining oil whereaccess to the pump drain plug is difficult, or where there is no roomfor a receptacle under the drain outlet. The pack includes an oildrain extension tube for use when oil is gravity drained, and apressure drain device with which the oil can be discharged at a highlevel.Ordering InformationProduct DescriptionRV easy oil box drain kitODP20 oil box drain kitExhaust SilencersFor use on XDS pumps that are not connected to a house exhaustsystem. These silencers also offer exhaust filtration.Ordering InformationRV Pumps, E1M18/E2M18,E2M28, nXDS and XDS35i18 (0.71)37 (1.46)3.5(0.14)Ø22(0.97)61 (2.40)50 (1.97)2 x Ø5 (0.20)Order No.A24801407A24801404A24801412A24801408A24801441Order No.A50503000A50002000OB20 Oil Box Purge AdaptorThis stainless steel adaptor enables a flow of dry inert gas to beintroduced into the oil box to provide large scale dilution of processgases which cannot be dealt with sufficiently by the standard gasballast facility. The adaptor replaces the oil filler plug, on the RV andE1M18/E2M18 pumps only.Ordering InformationProduct DescriptionOB20 oil box purge adaptorOil Change Reminder TagThe oil change reminder tag is a useful reminder for users to changethe oil when it starts to go brown. Brown oil indicates that the oil iscontaminated or degraded, and must be changed to preventmechanical wear or failure of the pump. Tie the tag onto the pumpexhaust so that it hangs over the oil box.Ordering InformationProduct DescriptionOil change reminder tag (pack of 10)Water Jet Pump 0.23 m 3 h -1Fits laboratory tap and ordinary water supply for simplest productionof rough vacuum for distillation, filtration, aeration etc. An integralnon-return valve prevents system flooding from fluctuating waterpressures.Technical DataOrdering InformationOrder No.A50034000Order No.A20003017Material of constructionCorrosion resistant plasticequivalent to stainless steelRecommended water pressure 1.4 bar / 20 lbs inch -1Operational water temperature 15°C / 59°CPumping speed (air) 0.23 m 3 h -1 – 3.9 l min -1Ultimate vacuum16 – 19 mbar / 12-14.25 TorrTime to evacuate volume of 5 litres 3 min approxdown to 60 mbarWater consumption 625 l h -1 / 2.75 gal (US) min -1ConnectionsWater12 mm tubingVacuumriffled to suit 7 mm boretubingDrain⅜ inch (9.5 mm) tubingWeight34 gSize 60 W x 110 L / 2.5 inch x 4.3inchProduct DescriptionWater jet pumpFluoroelastomer ball/pin assembly for non-returnvalveOrder No.C41001000C039010101Page45Product DescriptionExhaust silencernXDSXDS35iSparessilencer spares kitnXDSXDS35iOrder No.A50597000A50597001Order No.A50597800A50597801Shop online at www.edwardsvacuum.com

D-LAB Diaphragm Vacuum Pump1Page46The D-LAB membrane pumps with their chemically resistant Teflon® heads, diaphragmsand Kalrez® valves offer the chemical or pharmaceutical laboratory user a wide range ofchoice, either used as stand-alone pumps or as part of a sophisticated system.The one head, 100 mbar ultimate vacuum pumps are suitable for use with drying equipmentor for replacing water-jet pumps, whilst the two head, 8 mbar ultimate vacuum pumps aresuitable for rotary evaporation, gas transfer and a wide range of medium vacuumapplications.110V pumps are supplied with USA plug; 220-240V pumps are supplied with an IECconnector but mains cable with correct plug must be ordered separately.Features & Benefits●●●●●Teflon® heads and diaphragmsOne and two head versions3 SizesCompact, space-saving designLow noiseDimensionsApplications●●●●●Rotary evaporationGel dryingVacuum desiccationVacuum filtrationVacuum degassingTechnical DataPumping speed (air)D-Lab A B C D E F10-100 255 50 182 144 98 -20-100 268 60 204 157 110 -34-100 296 60 222 172 122 -10-8 288 53 184 - 98 14020-8 312 59 204 - 110 15334-8 341 62 222 - 122 16910-100, 10-8 0.6 m 3 h -1 , 10 lmin -120-100, 20-8 1.2 m 3 h -1 , 20 lmin -134-100, 34-8 2 m 3 h -1 , 34 lmin -1Ultimate vacuum10-100, 20-100, 34-100 100 mbar 50Hz, 75 mbar 60Hz10-8, 20-8, 34-8 8 mbar 50Hz, 6 mbar 60HzInlet and outlet connectionRiffled nozzle, suitable for 9 mmi.d. hoseMaximum inlet pressure 1 barMotor power and current10-100, 110V 60Hz 110 W 1.3 A10-100, 220-240V 50Hz 100 W 0.6 A20-100, 110V 60Hz 145 W 1.9 A20-100, 220-240V 50Hz 130 W 0.9 A34-100, 110V 60Hz 220 W 3.2 A34-100, 220-240V 50Hz 180 W 1.4 A10-8, 100V 60Hz 110 W 1.3 A10-8, 220-240V 50Hz 90 W 0.6 A20-8, 110V 60Hz 130 W 1.2 A20-8, 220-240V 50Hz 120 W 0.9 A34-8, 110V 60Hz 250 W 3.2 A34-8, 220-240V 50Hz 200 W 1.5 AEnclosure ratingIP44Operating temperature 5 - 40 ºCWeight10-100 5.8kg / 12.8lbs20-100 7.1kg / 15.6lbs34-100 10.3kg / 22.7lbs10-8 6.9kg / 15.2lbs20-8 9.3kg / 20.5lbs34-8 12.6kg / 27.7lbsShop online at www.edwardsvacuum.com

Performance Curves1. D-LAB 34-100 2. D-LAB 20-100 3. D-LAB 10-1001. D-LAB 34-100 2. D-LAB 20-100 3. D-LAB 10-100Ordering InformationProduct DescriptionD-LAB 10-100, 110V, 60Hz, 1-phD-LAB 10-100, 220 –240, 50Hz, 1-phD-LAB 10-8, 110 V 1-phase 60 HzD-LAB 10-8, 220 -240~ 50Hz, 1-phD-LAB 20-100, 110V 60Hz, 1-phD-LAB 20-100, 220- 240~ 50Hz, 1-phD-Lab 20-8, 110 V 1-phase 60 HzD-Lab 20-8, 220-240V 50Hz, 1-phD-LAB 34-100, diaphragm pump, 110~ 60Hz, 1-phD-LAB 34-100, 220- 240~ 50Hz, 1-phD-LAB 34-8, diaphragm pump, 110V 60Hz, 1-phD-LAB 34-8, diaphragm pump, 220-240 V 1-phase 50 HzAccessories & SparesD-Lab Base Plate 10+20-XBaseplate For D-Lab Pumps 34-100,34-8.D-Lab SeparatorCondenser For D-Lab Pumps2m electrical supply cable for 1-ph pumps, UK, Three-pin plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, no plugGas Ballast For D-Lab Pumps 10-100,10-8D-Lab Gas Ballast 20+34-8D-Lab Controller 230VD-Lab Controller 100/110VService kit for D-LAB 10-100Service Kit D-Lab 20-100Service Kit D-Lab 34-100Service Kit D-Lab 10-8Service Kit D-Lab 20-8Service Kit D-Lab 34-8Order No.A48015941A48015960A48016941A48016960A48017941A48017960A48018941A48018960A48021941A48021960A48022941A48022960Order No.A48015134A48021134A48015136A48015137A50505000A50506000A50508000A48015135A48017135A48015138A48015139A48015815A48017815A48021815A48016815A48018815A480228151Page471. D-LAB 34- 8 2. D-LAB 20- 8 3. D-LAB 10- 81. D-LAB 34- 8 2. D-LAB 20- 8 3. D-LAB 10- 8Shop online at www.edwardsvacuum.com

XDD1 Diaphragm Vacuum Pump1Page48The Edwards XDD1 diaphragm pumps are used for backing small compound turbomolecularpumps in clean, high vacuum applications. They comply with EN61010, EN1012,CSA/UL and are designed to be free standing bench top units.The a.c. voltage motor can be used on worldwide supplies ranging from 100 to 115 V, and200 to 230 V. The d.c. voltage motor runs on 24 V via a 15 pin DIN connector. By selectingthe appropriate mode the pump speed can be controlled by the user to provide variablepumping speed. This version is suited to the customer who is building their own a system.Pumps are not supplied with connection cables. A suitable cable should be ordered with thepump.Features & Benefits●●●●●Dry pumping, oil free turbomolecular backing pump with no oildisposal issuesCompact and lightweight with a small footprintWorldwide a.c. voltage or 24 V d.c.On/off switchEN 60320 connector on AC pumpsDimensionsApplications●●●●●RGAMass spectrometersCryostat and Dewar evacuationIon pump evacuationSurface sciencePerformance Curves1. 50Hz 2. 60Hz1. 2000rpm 2. 700rpm1. Inlet 2. OutletShop online at www.edwardsvacuum.com

Technical DataOrdering InformationPumping Speeda.c.50Hz 1.2 m 3 h -160Hz 1.5 m 3 h -1d.c.50Hz0.6 m 3 h -1 600 rpm60Hz1.6 m 3 h -1 2200 rpmUltimate vacuum (typical)

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Turbomolecular Pumps2Page51nEXT Turbomolecular Pumps 54EXT Turbomolecular Pumps 60TAG Turbo and active gauge controller 64TIC Turbo Controllers 66EXT and nEXT Accessories 70Turbocarts 72nEXT Turbopumping Stations 74STP Magnetically Levitated Turbomolecular Pumps 75STPs and the Environment 77STP Pump with Integrated Controller 78Ultra High Vacuum STP Pumps 86High Throughput STP Pumps 94Advanced High Throughput STP Pumps 98High Flow and High Throughput STP Pumps 106STP Controllers 112Shop online at www.edwardsvacuum.com

EXT and nEXT Turbomolecular Pumps and Controllers2Page52EXT turbomolecular pumpsOur range of EXT and nEXT compound turbo molecular pumps andTIC Controllers use state-of-the-art technology to provide reliable,high and ultra high vacuum.Key Performance FactorsA turbomolecular pump (TMP) is a multi-stage axial-flow turbine inwhich high speed rotating blades provide compression by increasingthe probability of gas molecules moving in the pumping direction. Theturbomolecular pump is optimised for molecular flow conditions andrequires a suitably sized two stage rotary vane pump or an oil freescroll pump to exhaust to atmosphere.A compound molecular pump (CMP) is based on the concept ofcombining bladed turbomolecular stages with molecular drag stageson the same rotor. This design allows:• High critical foreline pressures (typically up to 10 mbar)• Options to use smaller backing pumps or dry diaphragm backingpumpsPumping Speed (volume flow rate) is determined by the rotordiameter, inlet flange size and rotational speed. The pumping speedreduces at high inlet pressures to a value determined by the size ofthe backing pump.As the inlet pressure rises, the motor power dissipation and pumptemperature increase. Maximum continuous inlet pressure setsthe maximum throughput limit for steady state pumping and dependson the cooling method used. Above this pressure, the rotationalspeed of the pump reduces as temperature sensors limit the pumppower. With a water-cooled pump, the actual maximum throughputdepends on the size of the backing pump.Quiescent Electrical Power is the nominal power dissipated by apump operating normally at full rotational speed and with low gasthroughput (inlet pressure below the 10 –3 mbar range). During therun-up time, or when operating at high gas throughput or above thecritical backing pressure, the pump power dissipation will rise andapproach the maximum power output for the turbo Controller used.Critical backing pressure for compound turbomolecular pumps isapproximately 10 to 20 mbar.Compression Ratio is determined by the rotational speed, thenumber of pump stages and the molecular weight of the pumped gas.It is higher for heavier gases which explains why the suppression ofhydrocarbon backstreaming is so effective and why the ratio forhydrogen is important for ultra high vacuum applications.Ultimate Pressure measured according to Pneurop standards, is thelowest pressure achieved in the test system, 48 hours after bakeout.The system is backed only by a two-stage rotary vane pump.Fluoroelastomer inlet seals are used with ISO-flanged pumps andmetal seals are used with CF-flanged pump models.Bearing and Suspension TechnologiesWe use two basic technologies: magnetic bearings and mechanicalceramic ball bearings.Ceramic bearings, which are lubricated for life by either grease or oil,have replaced conventional steel bearings. The silicon nitrideceramic balls are lighter, harder and smoother than steel equivalents,leading to longer life and lower vibration characteristics. Reliability isincreased because the ball and race materials are different, whichprevents micro pitting.Magnetic bearings further increase reliability. Our EXT and nEXTturbomolecular pumps use a hybrid bearing arrangement with apermanent magnet upper bearing and an oil lubricated ceramic lowerbearing.Rotor TechnologiesWe use two basic technologies:• compound molecular and fluid dynamic (combiningturbomolecular, drag and fluid dynamic stages) available on nEXT'T' variant pumps• Compound molecular (combining turbomolecular and drag stages)on all EXT and nEXT 'D' variant pumps.Motor TechnologyEXT pumps use brushless d.c. motors and are available in 24(EXT75DX), 24 to 48 (nEXT) and 80 (EXT556H) volt variants. For the24 volt pumps the TIC line of controllers are available with the addedbenefit of integrated instrument controllers. For the 80 volt pumps youcan choose from our EXC line of controllers to optimize theperformance and cost options for your application.The Controllers incorporate a regenerative back-up supply whichprovides power in the event of electrical supply failure to keep thevent-valve closed for several minutes.Ceramic ball bearingsCorrosive ApplicationsFor maximum life and reliability in the exacting process conditionsencountered in semiconductor wafer processing applications, werecommend that you use turbomolecular pumps from our EdwardsSTP-C and STPH-C series. These Maglev pumps have magneticbearings and are ideal for these harsh duty applications.Purge PortThe EXT and nEXT pumps all have purge-ports which can be used topurge the motor and bearing cavity with an inert gas (such asnitrogen). We recommend that you purge the pump when you pumpcorrosive and abrasive gas mixtures or those with an oxygen contentover 20%. You can use our PRX10 purge-restrictor to set the purgegas flow rate. This typically adds up to 25 sccm to the total gas loadand the backing pump must be sized accordingly.Shop online at www.edwardsvacuum.com

VentingTo maintain the cleanliness of your vacuum system, we recommendthat you vent a turbomolecular pump at or above half rotationalspeed, when the rotor is still spinning fast enough to suppress anybackstreaming of hydrocarbons from the backing line.The vent port on the EXT and nEXT pump is part way up the rotorstack to ensure maximum cleanliness even with fluoroelastomersealed vent-valves. Each pump is supplied with a manual vent-valve.If you use this manual valve care must be taken not to open it tooquickly, especially if the system volume is small (typically less thanthe approximate volume of the turbomolecular pump), because if therate of pressure rise is too high, the pump bearing life may bereduced.In a small volume system, the rate of pressure rise will be greater thanin a large volume for a given vent flow rate, and it may be necessaryto restrict the vent gas flow. We offer the VRX range of vent restrictorswhich you can fit to your EXT or nEXT pump.Since the rate of pressure rise cannot be accurately controlled by themanual vent-valve, we recommend that, unless you fit a suitable VRXrestrictor to the vent port, you must wait until the turbomolecular pumphas slowed down to 50% speed, as indicated by the controller, beforeyou open the manual vent-valve.The maximum rate of pressure rise varies by pump model, and theInstruction Manual supplied with the pump gives further guidance onthis, and the size of vent restrictor needed to meet the fastestpressure rise allowed.Control of the rate of venting is particularly important with pumpsusing fully magnetic bearings, otherwise the safety bearings may bedamaged.The manual vent-valve can be replaced with a TAV solenoid valvedriven by the Controller to allow venting after a 2 second delay onshut-off, or delaying vent until the rotational speed has dropped to50%. The Controller can also control the TAV vent-valve in the eventof power or pump failure.You can choose from two solenoid vent-valve options; the TAV5which covers most auto-venting applications, and the TAV6 whichhas a higher conductance than the TAV5 and is designed either foruse on larger chambers (typically with a volume greater than 10litres), or when you want to use a two-stage venting procedure for thefastest possible vent times.For two-stage venting you need two TAV valves. By using theappropriately restricted flow for the first stage vent-valve you can startventing when the pump is still at full rotational speed. Once the pumphas slowed to half rotational speed you can then introduce higher flowrates from the second stage vent-valve.EXT75DX and nEXT also have the facility for pulsed venting to allowrapid yet controlled venting of a system.Inlet-ScreenAn inlet-screen is fitted as standard to all EXT pumps and suppliedwith nEXT pumps. The inlet-screen prevents debris from falling intothe pump-inlet. In addition, the inlet-screen prevents you from cominginto contact with the blades of the pump when it is disconnected fromyour vacuum system.CoolingFor most applications, we recommend that you use forced-air coolingwith the appropriate ACX air-cooler connected to your EXT or nEXTpump. NB: high gas load, high backing pressure and rapid cyclingrequire more cooling.However, if the ambient temperature is above 35 °C you mustwater-cool the pump.Water cooling reduces the running temperature of the pump motorand bearings and is particularly recommended when you operate thepump with a continuous high throughput (that is, inlet pressure above1 x 10 -3 mbar) or when you bake the pump to above 70 °C (measuredat the inlet flange).Water cooling accessories need to be purchased separately.Scope of SupplyFor end users desiring front panel controls and indications wesuggest the following:• TIC controller with EXT75DX and nEXT• EXC300 controller with EXT556H and EXT to EXC cableEach EXT or nEXT pump is supplied with an inlet screen, elastomeror copper gasket inlet seal (as appropriate) and manual vent valve.Where required a water cooling accessory is available.Turbo controllers require the appropriate mains cable to be selected.2Page53Shop online at www.edwardsvacuum.com

nEXT240D Turbomolecular Pump2Page54The nEXT240D is a hybrid bearing compound turbopump available with either an ISO100 ora CF100 inlet flange and has a N 2pumping speed of 240ls -1 . nEXT pumps combine ourproven bearing technology (oil lubricated ceramic lower bearing with dry permanentmagnetic upper bearing), an improved rotor design with a new molecular drag stage todeliver improved pumping speed and compression ratios, and true user serviceability. Theyfeature 24V to 48Vd.c. sensor less motors with a built in drive that is fully compatible withour range of TAG and TIC controllers. They are available pre-set for either 80W or 160Wmaximum power, the former enabling use with our 100W TIC controllers are alsorecommended for pumping Argon, but with a longer ramp time to full operating speed.Features & BenefitsPerformance Curves●●●●●State-of-the-art rotor design enhances performance to deliverexceptional pumping speeds and compression ratiosFully end user serviceable in minimum time without complextooling or major disassembly...you can do it!Compact design with high performance for efficientsystemisationCompatible with Edwards TIC turbo and instrument controllersmeaning you can add up to 3 vacuum gauges without the needof an additional gauge controllerRoHS compliant and CSA/UL approved1. N 2. Ar 3. He4. H 2DimensionsOrdering InformationProduct DescriptionnEXT240D Turbomolecular Pump ISO100 Inlet FlangenEXT240D Turbomolecular Pump ISO100 Inlet Flange, 80WnEXT240D Turbomolecular Pump CF100 Inlet FlangenEXT240D Turbomolecular Pump CF100 Inlet Flange, 80WAccessories & SparesDX/nEXT Pump Profibus Communications ModuleOrder No.B81200100B81200101B81200200B81200201Order No.D39755000Shop online at www.edwardsvacuum.com

Technical DataInlet flangeDN100ISO-K, DN100CFOutlet flangeDN25NWPumping speedN 2-1 240 lsHe 230 ls -1H 2-1 165 lsCompression ratioN 211 >1 × 10He 3 x 10 5H 24 1 x 102Page55Ultimate pressure with RVbacking pump ISO/CFRecommended backing pump*Vent portPurge port

nEXT300D Turbomolecular Pump2Page56The nEXT300D is a hybrid bearing compound turbo pump available with either an ISO100or a CF100 inlet flange and has a N 2pumping speed of 300ls -1 . nEXT pumps combine ourproven bearing technology (oil lubricated ceramic lower bearing with dry permanentmagnetic upper bearing), an improved rotor design with a new molecular drag stage todeliver improved pumping speed and compression ratios, and true user serviceability. Theyfeature 24V to 48Vd.c. sensor less motors with a built in drive that is fully compatible ourrange of TAG and TIC controllers. They are available pre-set for 80W or 160W maximumpower, the former enabling use with our 100W TIC controllers are also recommended forpumping Argon, but with a longer ramp time to full operating speed.Features & BenefitsPerformance Curves●●●●●State-of-the-art rotor design enhances performance to deliverexceptional pumping speeds and compression ratiosFully end user serviceable in minimum time without complextooling or major disassembly... You can do it!Compact design with high performance for efficientsystemisationCompatible with Edwards TIC turbo and instrument controllersmeaning you can add up to 3 vacuum gauges without the needof an additional gauge controllerRoHS compliant and CSA/UL approved1. N 2. Ar 3. He4. H 2DimensionsOrdering InformationProduct DescriptionnEXT300D Turbomolecular Pump ISO100 Inlet FlangenEXT300D Turbomolecular Pump ISO100 Inlet Flange, 80WnEXT300D Turbomolecular Pump CF100 Inlet FlangenEXT300D Turbomolecular Pump CF100 Inlet Flange, 80WAccessories & SparesDX/nEXT Pump Profibus Communications ModuleOrder No.B82200100B82200101B82200200B82200201Order No.D39755000Shop online at www.edwardsvacuum.com


nEXT400D Turbomolecular Pump2Page58The nEXT400D is a hybrid bearing compound turbo pump available with either an ISO160or a CF160 inlet flange and has a N 2pumping speed of 400ls -1 . nEXT pumps combine ourproven bearing technology (oil lubricated ceramic lower bearing with dry permanentmagnetic upper bearing), an improved rotor design with a new molecular drag stage todeliver improved pumping speed and compression ratios, and true user serviceability. Theyfeature 24V to 48Vd.c. sensor less motors with a built in drive that is fully compatible ourrange of TAG and TIC controllers. They are available pre-set for 80W or 160W maximumpower, the former enabling use with our 100W TIC controllers are also recommended forpumping Argon, but with a longer ramp time to full operating speed.Features & BenefitsPerformance Curves●●●●●State-of-the-art rotor design enhances performance to deliverexceptional pumping speeds and compression ratiosFully end user serviceable in minimum time without complextooling or major disassembly... you can do it!Compact design with high performance for efficientsystemisationCompatible with Edwards TIC turbo and instrument controllersmeaning you can add up to 3 vacuum gauges without the needof an additional gauge controllerRoHS compliant and CSA/UL approved1. N 2. Ar 3. He4. H 2DimensionsOrdering InformationProduct DescriptionnEXT400D Turbomolecular Pump ISO160 Inlet FlangenEXT400D Turbomolecular Pump ISO160 Inlet Flange, 80WnEXT400D Turbomolecular Pump CF160 Inlet FlangenEXT400D Turbomolecular Pump CF160 Inlet Flange, 80WAccessories & SparesDX/nEXT Pump Profibus Communications ModuleOrder No.B83200300B83200301B83200400B83200401Order No.D39755000Shop online at www.edwardsvacuum.com


EXT75DX Compound Turbomolecular Vacuum Pump2Page60The EXT75DX is a hybrid bearing compound turbo pump that combines the proventechnology of a ceramic mechanical lower bearing, a dry permanent magnetic upperbearing and Holweck drag stage with the added convenience of an on-board 24V controllerallowing parallel and serial communication compatible with our TAG and TIC controllers. Itis available with either aDN40NW, ISO63, DN63CF or an ISO100 inlet flange with an N 2pumping speed of up to 66ls -1 . A basic pump system would require an EXT75DX pump, aTAG or TIC controller, either an air or water cooling accessory and a suitable backingpump.DimensionsPerformance Curves1. N 2. He3. H 2A Manual vent valve in vent port E Purge port (blanked off)B Podule F Interstage port (EXT75iDX only)C Logic interface connector G Podule connector socketD Backing port H Earth connection1. N 2. HeShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeDN63ISO-K, DN63CF,DN40NW or DN100ISO-KOutlet flangeDN16NWVent/purge port1/8 inch BSPPumping Speed ISO63/63CF(DN40NW)(ISO100)N -1 -1 -1 2 61 ls (42 ls ) (66 ls )He 57 ls -1 (49 ls -1 ) (59 ls -1 )H 2-1 -1 -1 53 ls (48 ls ) (54 ls )Compression ratioProduct DescriptionEXT75DX DN63ISO-KEXT75DX DN63CFEXT75DX DN40NWEXT75DX DN100ISOKEXT75DX DN100ISO-K (DN25NW Backing)EXT75iDX Turbo Pump DN40NWEXT75iDX Turbo Pump DN63ISO-KEXT75iDX Turbo Pump DN63ISO-K (NW25 Interstage)Accessories & SparesDX/nEXT Pump Profibus Communications ModuleOrder No.B72241000B72242000B72243000B72245000B72246000B72235000B72237000B72238000Order No.D397550002Page61N 2 >1 × 1011He 1 x 10 6H 2 5 x 104Recommended backing pump*RV5/nXDS6iMax continuous inlet pressure (lightgas pumping) †water cooling (water at 15 °C,ambient temp at 40 °C)2 × 10 -2 mbarforced air cooled, 35 °C ambient 1 × 10 -2 mbarPump rotational speedNominal rotational speed90000 rpmVariable from 49500 toStandby rotational speed90000 rpm (63000 rpmdefault)Variable from 50-120W (80WProgrammable power limit settingsdefault)Rotational speed;PowerAnalogue outputsconsumption; Pump temp;Controller tempStart time to 90% speed 110 s ‡Ultimate Pressure (ISO/CF)RV backing pump

EXT556H Compound Turbomolecular Vacuum Pump2Page62The EXT556H incorporates our hybrid bearing and enhanced molecular drag pumpingtechnologies with turbopump stages on a single rotor. It is an 80V pump and therefore mustbe used with an EXC300 controller. The EXC300 is a fully featured controller with a userpanel, backing pump relay and bake-out band control. It is rack mountable and can poweran air cooler and control a vent valve as well as the turbopump.A basic pump system would require an EXT556H pump, an EXC300 controller, a pump tocontroller cable, either an air or water cooler accessory, and a suitable backing pump.DimensionsPerformance Curves1. N 2. He3. H 2A Inlet ISO100 E Purge portB Inlet ISO160 F Backing portC Vent port G Electrical connectorD Earth stud H Base mount holes (8)/Rubber feet (4)1. N 2. HeShop online at www.edwardsvacuum.com

Technical DataOrdering InformationMain Inlet flangeOutlet FlangeDN160ISO-K/DN160CFDN25NWProduct DescriptionEXT556H DN160ISO-KEXT556H DN160CFOrder No.B77751000B77752000Vent/purge port1/8 inch BSPInlet pumping speed* (compression ratio)N -1 10 2 540 ls (>10 )He 580 ls -1 (10 8 )H 2-1 6 500 ls (10 )Ar 510 ls -1 (>10 10 )EXT556H DN160ISO-K (Martensitic envelope)EXT556H DN160CF (Martensitic envelope)EXT556H DN160ISO-K (Fine inlet screen)Accessories & SparesEXT Pump To Controller Cable 1MEXT Pump To Controller Cable 3MEXT Pump To Controller Cable 5MB77757000B77758000B77761000Order No.D39618010D39618030D396180502Page63Ultimate Pressure (CF variant)Recommended backing pumpMax continuous inlet pressure (N 2 , He,H 2 )**

TAG Controller2Page64The TAG (Turbo & Active Gauge) controller is a small, compact, low cost pumping systemController, which is suitable for a wide range of vacuum applications. It is a 24V controllerthat is compatible with all Edwards DX and nEXT turbopumps. It contains no power sourceand thus you either need to supply your own power or buy the optional power supply. Inaddition to a turbopump it can control a backing pump, a vent valve, an air cooler and anEdwards active gauge.The TAG Controller is controlled by an easy to use interface. A large clear LED displayshows the pump speed or vacuum pressure. The compact size of the controller is ideal foruse on bench-tops or suitable mobile platforms.Features & BenefitsDimensions●●●●●Compatible with all Edwards 24V turbopumps enabling pumpcontrol and speed displayStart/stop control of a backing pump for full system control(external relay may be required)Turbomolecular pump start options: start with backing pump,start after time delay or start at pressure set pointVent valve control options: controlled vent from full speed, ventfrom half speed or no ventPressure display from a compatible active gauge in mbar, Torr orPaA Contrôleur TIC (Turbo and Instrument Controller), 200 WB Câble secteur / cordon de raccordementC WRG-S-NW25D Pompe à membrane 24 V c.c. XDD1E EXT75DX ISO63F Refroidisseur par air ACX75G Cordon rallonge XDD/DX/EXDCH Cordon rallonge XDD/DX/EXDC (en option)JCâble pour jauge activeK Alimentation électriqueShop online at www.edwardsvacuum.com

Technical DataMax input Power240WMains inputElectrical supply24V d.c.Power consumption (max) 5WAuxiliary terminalsAir cooling fan24V d.c. 3.6W maxTurbo pump24V d.c. 160W maxDimensions96 x 48 x 165mmMass0.3kgOperating temp 0°C to 40°CStorage temp -30°C to 70°CMax ambient operatinghumidity90% RH non-condensing at 40°CMax operating altitude 2000 mEnclosure ratingIP20. IP40 when panel mounted.Ordering InformationProduct DescriptionOrder No.TAG Turbo and active gauge controllerD39592000Accessories & SparesOrder No.Linecord 2M North Euro PlugD40013030Linecord 2M UK PlugD40013025Linecord 2m With US PlugD40013120XDD/DX/EXDC Extension Cable 1mD39700835XDD/DX/EXDC Extension Cable 2mD39700836XDD/DX/EXDC Extension Cable 5mD39700837200 W power supply D395928002Page65Shop online at www.edwardsvacuum.com

TIC Controller2Page66Features & BenefitsA compact turbo controller with a large clear graphical display, an intuitive user interfaceand serial communications providing full remote control and data logging functions via anew Windows based PC program. The controller automatically recognizes and supportsone 24 V turbomolecular pump from the EXT/nEXT range. Cooling and vent valve supportis provided directly from the controller. Mains backing pumps (up to nXDS20i/RV12) may becontrolled via an optional relay box. 2 different power variants are available, 100W or 200Wwhich determines the ramp speed of the turbo pump. In addition 200W models have theability to power a 24Vdc backing pump such as our XDD1 or nXDS through a 15-way D.Turbo and instrument models add the ability to control up to 3 of our range of Active gauges(excluding IGC & Barocels).Dimensions●●●●●TIC automatically recognizes and controls one 24 Vturbomolecular pump from either the nEXT, DX or EXDC ranges.nEXT and DX turbos have full serial communication with TIC andmay be both configured and report status via TIC.Both mains and 24 V backing pumps may be controlled by TIC.For larger vacuum systems the TIC may control mains backingpumps, up to and including nXDS10 and RV12, via the optionalrelay box.The optional external relay box enables mains backing pumps tobe controlled and also provides interfaces for a turbo heaterband, a backing line isolation valve and a logic bypass. Seerelay box section.In most instances, TIC systems may be simply and quicklyconfigured using the range of standard cables on offer, there istherefore no need for the customer to prepare loom assembliesor relay boxes and special interfaces.TIC is packaged in a compact case and may be panel or rack (¼19inch rack 3U) or bench mounted. With the addition of thebezel it becomes an attractive bench-top instrument. The large128 x 64 pixel backlit graphics LCD and mobile phone stylemenu system simplifies programming and with a choice ofsummary screens excellent visibility of displayed parameters isassured.1. Gauge inputs (FCC68 (RJ45) (turbo & instrument only)2. Logic interface (25-way 'D' socket)3. Backing pump 24V (15-way 'D' socket) (TIC200 only)4. Turbo Pump 24V (15-way 'D' socket)5. RS232/485 (9-way 'D' socket)6. Earth stud (M4)7. Mains input (CEE/IEC 320 plug)8. Mains on/off switch9. Auxiliary vent valve and fan terminals (24V supply) 4-way screw term.A TIC turbo and instrument controller, 200WB Mains cable/line cordC WRG-S-NW25D XDD1 24Vdc diaphragm pumpE EXT75DX ISO63F ACX75 air-coolerG XDD/DX/EXDC extension cableH XDD/DX/EXDC extension cable (optional)J Active gauge cableShop online at www.edwardsvacuum.com

Technical DataPump / TIC powerEXT75DXnEXT 80WnEXT 160WMains inputElectrical supplyPower consumption (max)Peak inrush currentEarth studAuxiliary terminalsAir cooling fanVent valveDimensions100W / 200WFast / FastSlow / SlowSlow / Fast90 to 264 V a.c. 47 to 63 Hz215 VA10.3 A @ 110 V a.c. / 23.0 A @ 230V a.c.M424 V d.c. 3 W max, ACX70, ACX75& ACX250H24 V d.c. 2 W max, TAV5 & TAV6Electronics housing110 mm high x 105 mm wide x 245mm deepFront panel106 mm wide x 128 mm highWeight3.5 kgOperating temp +0 ° to +40 °CStorage temp -30 ° to +70 °CMax ambient operatinghumidity90% RH non-condensing at 40 °CMax operating altitude 3000 mElectronic Design EN 61010-1ElectromagneticCompatibilityEnclosure ratingEN 61326 Industrial Location, ClassB EmissionsIP20Ordering InformationProduct DescriptionOrder No.TIC Turbo & Instrument Controller 100 W RS232D39721000TIC Turbo & Instrument Controller 200 W RS232D39722000TIC Turbo Controller 100 W RS232D39711000TIC Turbo Controller 200 W RS232D39712000Accessories & SparesOrder No.TIC Profibus Communications ModuleD39754000XDD/DX/EXDC Extension Cable 1mD39700835XDD/DX/EXDC Extension Cable 2mD39700836XDD/DX/EXDC Extension Cable 5mD39700837Linecord 2M UK PlugD40013025Linecord 2M North Euro PlugD40013030Linecord 2m With US PlugD400131200.5M Active Gauge Cable D400010051M Active Gauge CableD400010103M Active Gauge CableD400010305M Active Gauge CableD4000105010M Active Gauge CableD400011002Page67Shop online at www.edwardsvacuum.com

TIC Relay Boxes2Page68Features & BenefitsTwo relay boxes are available for use with our TIC controllers:- A small backing pump relay box is compatible with TIC turbo only and turbo andinstrument controllers- A small backing pump and instruments relay box is compatible with TIC turbo andinstrument controllersThe small backing pump relay boxes are able to control mains backing pumps up toRV12/XDS10. The relay box also controls a mains heater band and backing line isolationvalve. In addition the small backing pump and instrument relay box includes three 250 Va.c. 3 A changeover relays, which are activated by the gauge open collector set pointoutputs.Dimensions●●●●Enables TIC to control mains backing pumps, up to andincluding XDS10 and RV12.Provides interfaces for a turbo heater band, a backing lineisolation valve and a logic bypass. All relay boxes include a logicbypass facility for further system integration.TIC relay is packaged in a compact case and may be panel orrack (¼ 19inch rack 3U) or bench mounted.TIC relay will operate from mains supplies with voltages up to240 V ac.A.TIC200 turbo and instrumentK.TAV5 vent valveB.Mains cable / line cordL.ACX air coolerC.Relay boxM.TIC logic interface cableD.APG100 Pirani gaugeN.IEC320 M/F cableE.AIGX Ion gaugeP.TIC logic interface cableF.AIM Penning gaugeQ.XDD/DX/EXDC extension cableG.XDS scroll pumpR.TIC RS232 interface cableH.EXT/nEXT turbopumpS.Active gauge cableJ.BX heater bandT.PC with RS232 interfaceShop online at www.edwardsvacuum.com

Technical DataOrdering InformationMains inputConnector typeCEE/IEC320 inletMax rating240V a.c.Earth studM4Heater band outletConnector typeCEE/IEC320 inletMax rating240V a.c. 1AFuse 20mm x 5mm, 250V,1A type FBacking pump outletProduct DescriptionTIC Relay Box Sml BkgTIC Relay Box Inst & Sml BkgAccessories & SparesLinecord 2M North Euro PlugLinecord 2M UK PlugLinecord 2m With US PlugTIC Logic Interface Cable 2mTIC RS232 Interface Cable 2mXDD/DX/EXDC Extension Cable 1mXDD/DX/EXDC Extension Cable 2mOrder No.D39711805D39721806Order No.D40013030D40013025D40013120D39700833D39700834D39700835D397008362Page69Connector typeCEE/IEC320 inletXDD/DX/EXDC Extension Cable 5mD39700837Max rating240V a.c. 10AFuse 20mm x 5mm, 250V,10A type TSetpoint connectorConnector type12-way positronic PLC plugMax rating250V a.c. or 30V d.c., 3A(resistive)Mating half (supplied)12-way positronic PLC socketwith hoodBacking line isolation valveconnectorConnector type3-way DIN socketMax rating 24V d.c. 0.5ALead type 3 core 0,5mm 2Weight695gOperating temperature+0°C to +40°CStorage temperature-30°C to +70°CMax ambient operating humidity90% RH non-condensing at40°CMax operating altitude3000mElectronic designEN61010-1Enclosure ratingIP20Shop online at www.edwardsvacuum.com

EXT and nEXT Accessories2Page70Pump-to-Controller ExtensionCablesEXT75DX and nEXT pumps come as standard with a 1m cable fitted.Where you wish to mount the pump further away from the controller,an extension cable is required. They are available in 1, 3 and 5 mlengths, to suit your installation.Ordering InformationProduct DescriptionOrder No.1 m cable D397008353 m cable D397008365 m cable D39700837Air-CoolerAn air-cooler is used to cool a turbo pump when a suitable coolingwatersupply is not available or for a pump in a mobile pumpingsystem. The air-cooler is an enclosed electrical fan and fixing bracketassembly which is easily fitted to bolt holes in the base of the pump.The air-cooler has a 24 V d.c. motor which can be powered andcontrolled from a rear panel socket on the EXC/TIC Controller ornEXT/DX pump. It is supplied with 3 m of electrical cable.nEXT air coolers are also available with a phoenix connector to plugdirectly into the pump via short cable.Ordering InformationProduct Description To Fit Pumps Order No.ACX75 EXT75DX B58053075ACX555H EXT556H B58053561nEXT Axial air cooler nEXT240/300/400 B58053185nEXT Radial air cooler nEXT240/300/400 B58053175nEXT Axial air cooler with nEXT240/300/400 B58053180connectornEXT Radial air coolerwith connectornEXT240/300/400 B58053170BX Bakeout BandUse a BX bakeout band to increase the rate of degassing of the pumpbody to achieve faster pump down and lower ultimate pressure.Bakeout bands are only fitted to CF flanged pumps and/or intendedfor use in ultra high vacuum systems.Bakeout bands are available for use with 110-120 or 220-240 V a.c.electrical supplies and can be powered from a rear panel socket onthe EXC/TIC Controller. It is supplied with 3 m cable and mating CE22connector.Ordering InformationProduct Description To Fit Pumps Order No.Contact Edwards for ordering informationPRX10 Purge-RestrictorThe PRX10 purge-restrictor is used to set the flow-rate of purge gasinto the (n)EXT pump. All of the (n)EXT pumps have a purge-port toallow you to purge the motor and bearing cavity with dry nitrogen oranother inert gas. Fit a vent-port adaptor to the purge-port of thepump to convert it from ⅛ inch BSP to DN10NW, before you use thePRX10.Ordering InformationProduct DescriptionPRX10 purge-restrictorTAV Vent-ValveThe TAV vent-valves are 24 V d.c. solenoid operated valves whichyou can use to vent your vacuum system with atmospheric air or drynitrogen when you switch off the (n)EXT pump. The valves aresupplied with a sintered bronze inlet-filter, a riffled hose connector, 3m of electrical cable and a DN10NW adaptor. The vent-valves can bepowered and controlled from a rear panel socket on the EXC/TICController or directly on DX/nEXT. You can either use your TAV ventvalveto replace the manual vent-valve supplied with the (n)EXTpump, or adapt it to fit any other suitable port on the vacuum systemupstream of the turbomolecular pump.Dimensions46Ordering InformationProduct DescriptionTAV5 vent-valveTAV6 vent-valveVent-Port AdaptorThis ⅛ inch BSP male to DN10NW adaptor can be used to replacethe TAV5 vent-valve or the manual vent-valve fitted to the EXTpumps. It allows the threaded vent-port or purge port on the pump tobe converted to a DN10NW flange.The vent-port adaptor is supplied with a removable flow-restrictor andan O-ring to seal the adaptor to the pump.Ordering Information44Order No.B58065001Order No.B58066010B58066020Product DescriptionVent-port adaptorOrder No.B58066011Shop online at www.edwardsvacuum.com

Vibration IsolatorA vibration isolator can be fitted to the inlet-flange of the (n)EXT pumpto reduce the transmission of the small amount of vibration generatedby the pump to your vacuum system. The vibration isolator has twoflanges separated by a flexible stainless steel bellows and an outerrubber anti-vibration collar.The vibration isolator is designed for use with vertically mountedpumps only.Ordering InformationTo Fit Pump Inlet-FlangeDN63CFDN63ISO-KDN100ISO-KDN160ISO-KDN100CFDN160CFVRX Vent-RestrictorFit a VRX vent-restrictor to your (n)EXT pump if you will vent thepump when the pump speed is above 50% of full rotational speed.The vent-restrictor restricts the flow-rate of the vent gas into the(n)EXT pump. You can also use the VRX to replace the standardrestrictor supplied with the PRX10 purge restrictor to obtain a differentpurge rate.You can fit the vent-restrictor to the TAV vent-valve, to the vent-portadaptor or directly to the vent or purge port of the pump.Ordering InformationWater-CoolerA water cooler is used to cool a turbo pump where ambienttemperatures are above 35°C, where high gas flows are required orwhere backing pressure is high.For EXT75DX and EXT556H pumps the water cooler is fitted with6mm OD nozzle connectors. For nEXT pumps the water cooler issupplied with push fit connectors to suit a 10mm OD pipe.Ordering InformationOrder No.B58101000B58115000B58120000B58125000B58105000B58110000VRX Vent-Restrictor Orifice Diameter (mm) Order No.VRX10 0.1 B58066021VRX20 0.2 B58066022VRX30 0.3 B58066023VRX50 0.5 B58066024VRX70 0.7 B58066025Product description Pump Order No.nEXT water cooler nEXT240/300/400 B80000815WCX water-coolerWCX250 EXT75DX B73600121WCX555H EXT556H B58067003(n)EXT SparesEach (n)EXT pump is supplied with an inlet seal and inlet screen.These items may also be ordered as spares.Ordering InformationProductDescriptionPump TypeEXPT coined outfitsnEXT bearing service parts andtoolsOn nEXT it is possible for end-users to change the oil cartridge andbearing in the field, using basic workshop tools and an Edwards toolkit. Service parts and tools are listed below.Ordering InformationTo Fit InletFlange SizeOrder No.Inlet flange seals with integrated inet screen100 coarse nEXT240/300 DN100ISO B81000808100 fine nEXT240/300 DN100ISO B81000809160 coarse nEXT400 DN160ISO B80000825160 fine nEXT400 DN160ISO B80000826ISX inlet-screen100 coarse nEXT240/300 DN100CF B80000821100 fine nEXT240/300 DN100CF B80000822160 coarse nEXT400 DN160CF B80000823160 fine nEXT400 DN160CF B8000082463 EXT75DX DN63ISO-K, B72240860DN63CF160 coarse EXT556H DN160ISO-K, B58051007DN160CF160 fine EXT556H DN160ISO-K, B58051008DN160CFInlet flange sealsDN40NW Co-Seal, fluoroelastomerB27158453ISO63 Trapped O-ring, fluoroelastomerB2715817063CF copper compression gasket (pack of 10) C10007490100CF copper compression gasket (pack of 10) C10009290160CF copper compression gasket (pack of 5) C10011290Product descriptionOil cartridge tool kitBearing tool kitOil cartridgeBearing and oil cartridgeOrder No.B80000812B80000805B80000811B800008102Page71Shop online at www.edwardsvacuum.com

T-Station 752Page72The T-Station 75 is Edwards’s new entry level Turbopumping system. It combines ourproven EXT75DX with a choice of either an oil sealed E2M1.5 backing pump or an XDD1diaphragm pump where a totally dry solution is desired.The T-Station comes with our new TAG (Turbo and Active Gauge) controller fitted asstandard which enables single button start/stop of the system, the ability to control one ofour Active Gauges*, vent valve control*, and delayed start to either time or pressure if agauge is fitted making the T-Station ideal for general laboratory needs.* Gauges and TAV5 vent valve must be purchased separately.Features & Benefits●●●●●Fully assembled and ready to useControl of turbopump, backing pump and optional gauge fromintegrated controllerNW40, ISO63 or CF63 inlet flangesChoice of backing pumps, E2M1.5 oil sealed pump T-Station75W or XDD1 diaphragm pump T-Station 75DDelayed turbo start option for pumping larger volumesDimensionsT-Station 75DApplications●●●●●General laboratory applicationsSpectroscopySurface analysisSmall coating systemsVacuum tube manufacturingOrdering InformationProduct DescriptionT-Station 75D NW40 200-230V 50/60HzT-Station 75D NW40 100-120V 50/60HzT-Station 75D ISO63 200-230V 50/60HzT-Station 75D ISO63 100-120V 50/60HzT-Station 75D CF63 200-230V 50/60HzT-Station 75D CF63 100-120V 50/60HzT-Station 75W NW40 200-230V 50/60HzT-Station 75W NW40 100-120V 50/60HzT-Station 75W ISO63 200-230V 50/60HzT-Station 75W ISO63 100-120V 50/60HzT-Station 75W CF63 100-120V 50/60HzOrder No.TS75D1001TS75D1002TS75D2001TS75D2002TS75D3001TS75D3002TS75W1001TS75W1002TS75W2001TS75W2002TS75W3002T-Station 75W CF63 200-230V 50/60HzTS75W3001Accessories & SparesOrder No.0.5M Active Gauge Cable D400010051M Active Gauge Cable2m electrical supply cable for 1-ph pumps, no plug2m electrical supply cable for 1-ph pumps, NorthAmerica/Japan plug2m electrical supply cable for 1-ph pumps, North Europeanplug2m electrical supply cable for 1-ph pumps, UK, Three-pin plug3M Active Gauge Cable5M Active Gauge CableAIM-X Active Inverted Magnetron GaugeAPG100 Active Pirani Vacuum GaugeAPGX-H Active Linear Convection GaugeModel EMF3 mist filterTAV5 Vent Valve 24V DC 1/8 BspWRG-S Active Wide Range GaugeD40001010A50508000A50507000A50506000A50505000D40001030D40001050D14642000D02603000D02391000A46220000B58066010D14701000T-Station 75DShop online at www.edwardsvacuum.com

Technical DataPumping Speed for N 2NW40 42 ls -1ISO63/CF63 61 ls -1Compression ratio for N 211 >1 x 10Backing pump speed @ 50HzE2M1.5 1.6 m 3 h -1XDD1 1.2 m 3 h -1Ultimate pressure

nEXT Turbopumping Stations2Page74Our new range of nEXT turbopumping stations build on our previousgeneration, but with a simplified ordering matrix and expanded rangeto include turbopumps with speeds from 42 l s -1 to 400 l s -1 .For pumping speeds from 42 l s -1 to 66l/s we offer our trustedEXT75DX pump with a choice of various wet and dry backing pumpsand a Turbo and Instrument TIC100.For pumping speeds of 240 l s -1 to 400 l s -1 the new turbopumpingstations are based on our nEXT pumps offering the additionalflexibility of end-user serviceability plus a choice of backing pumpsand a Turbo and Instrument TIC200.Turbopumping stations fitted with E2M1.5 or RV pumps come with anEMF mist filter fitted, and those fitted with our class leading XDS scrollpumps have an isolation valve fitted between the turbopump andbacking pump as standard.All turbopumping stations include 4 locking castor wheels, a benchtopmounting kit, built in air cooling and come configured to suit a widevariety of applications such as:• UHV systems• Beam lines• Load locks• Surface science• High energy physicsFeatures & Benefits• Fully assembled and ready to use• Where nEXT is fitted the turbopump is fully end user-serviceable• Control of the turbopump, backing pump and gauges from theintegrated TIC• Serial communication control available with RS232 and RS485(Windows software included)• Dry pumping options with XDD1, XDS5 and XDS10Ordering InformationTurbopump *M EXT75DXB nEXT240DC nEXT300DD nEXT400DInlet Flange *1 DN40NW (EXT75DX)2 DN63ISO-K (EXT75DX)3 DN63CF (EXT75DX)4 DN100ISO-K (nEXT240/300)5 DN100CF (nEXT240/300)6 DN160ISO-K (nEXT400)7 DN160CF (nEXT400)Backing Pump1 E2M1.5 ‡2 RV53 RV12A XDD1B XDS5C XDS10T S – – 0 0Vent OptionManual vent 0TAV5 vent valve W 1Electrical Supply220-240 V 50/60 Hz (Europe) 1110-120 V 50/60 Hz (USA) 2200 V 50/60 Hz (Japan) 3220-240 V 50/60 Hz (UK) 4* Turbopump and inlet flange must match as shown‡For Japan low volts on E2M1.5 please order the USA voltage variant, for all otherpumps please order Japan version and specify low volts on your orderShop online at www.edwardsvacuum.com

STP Magnetically Levitated Turbomolecular PumpsIn April 2002, Edwards Acquired theTurbomolecular Pump Business of SeikoInstruments, Inc.• Distributed and supported globally by Edwards for nearly twentyyears• Designed by continuous improvement on existing proven reliabletechnology• Advanced materials and designs provide:- Class leading performance- Low vibration- Guaranteed reliability- Low cost of ownership• The broad product range covers all potential turbo pumpapplications.• Qualified by all major semiconductor OEM’s• Used in all major semiconductor fabrication plants• Installed base of over 80000 units, 85% in the semiconductorindustryKey Features• Multi-axis magnetic bearing system• High Throughput versions for high flow processes• Low vibration characteristics• Advanced controller technology• Full interfacing capabilityFeatures & Benefits• Improved pumping performance- Optimised for semiconductor process pressures- Maximised gas throughput for each flange size- Applications specific models• New generation universal controllers• Compact (1/2 rack) controller- Auto tune enabling "mix and match" pumps- Integrated TMS control- Improved diagnostics• High power d.c. motor drive- Fast ramp-up time- Self regeneration upon power failure, eliminating the need forbatteriesEdwards is a leader in clean and dry vacuum technology. The firstSTP pumps were sold in 1983 and there are now over 80000installations worldwide. 85% are operating on semiconductor processtools where they demonstrate exceptional levels of reliability. STPpumps are the first choice for applications demanding high up-time,hydrocarbon-free pumping, minimal maintenance and low vibration.• Proven reliability.• Clean oil-free high vacuum.• Complete range from 300 to 4500 l s -1 .• Application specific models.• Very low noise and vibration.• Low cost of ownership.• Virtually maintenance free.• Installation in any orientation.• Full remote control interface.• Supported globally by EdwardsProven Magnetic Bearing TechnologyThe rotor is entirely suspended by magnetic bearings so all contactbetween the rotor and the remainder of the pump is eliminated. Aswell as giving very low vibration, the elimination of contact means nobearing wear and no requirement for consequent pump maintenance.STP RangeUHV Series The Ultra High Vacuum series of magneticallylevitated turbo molecular pumps are the products of choicefor the semiconductor, surface science or high energyphysics industries. They offer unrivalled reliability,performance, cleanliness and class leading low vibrationlevels. The pumps are all d.c. powered, eliminating theneed for batteries, they use a half rack controller whichfeatures auto-tuning and advanced diagnostic features.The range contains pumps with speeds from 300 l s -1 to1000 l s -1 all of which are available in ISO or CF flangevariants.High Throughput Series The high throughput series ofmagnetically levitated turbo pumps generate the high gasflows required by the current generation of semiconductoretch, ion implant and LCD systems. All the pumps featurea five active axis magnetic bearing system and a d.c. drivefor increased robustness and stability. They use a Holweckstage to provide advanced throughput performance. Theyoperate via a half rack controller with auto-tuning,advanced diagnostics and an integrated temperaturemanagement system. The range operates with throughputspeeds from 300 l s -1 to 1300 l s -1 .2Page75Shop online at www.edwardsvacuum.com

2Page76STP FeaturesAdvantage Series The new Advantage series ofmagnetically levitated turbo pumps have been designed toprovide the highest levels of throughput required by thenext generation of semiconductor etch and CVDprocesses. They have been developed, using continuousimprovement techniques, from the ultra reliable, highperformance H series of products. Their advanced rotordesign combined with selection of the best materials hasallowed the creation of the next generation of highthroughput turbo pump inside the same footprint as manyof the existing models. The range contains pumps withthroughput speeds from 800 l s -1 to 4500 l s -1 .Oil Free All STP turbomolecular pumps are oil free. The use ofmagnetic bearings eliminates all hydrocarbon lubricants ensuring nocontamination of the vacuum process from the turbomolecular pump.This feature is vital in the semiconductor industry (where devicedensities are constantly increasing) and in surface science or highenergy physics applications (where even minute degrees ofcontamination disrupt measurements).Maintenance Free Unlike conventional mechanical bearings,magnetic levitation means there is no frictional contact, eliminatingsources of wear and vibration. This feature enables STPturbomolecular pumps to run for years with virtually no maintenance,reducing annual operating costs to a minimum and ensuringmaximum up-time is achieved. This maintenance free feature can beparticularly beneficial on processes producing chemical orradioactive contamination.Vibration Free Magnetic levitation of the rotor results in an extremelylow level of noise and vibration. Peak-to-peak vibration level is lessthan 0.02 µm. This amplitude remains constant throughout the life ofthe pump and is free from troublesome sub-harmonics.µm21828 441 50 100-35x10-1210 amp/divResidual gas analysis0 200 400 600 800 1000HzVibration analysis STP300 displacement/frequencyAutomatic Balancing System (ABS) ABS is a unique patenteddevelopment of 5-axis technology. If any rotor imbalance isintroduced (by deposition of process by-products, for example),sensors in the pump detect changes in the rotor motion andcompensate the magnetic bearing fields to allow the rotor to spin onits natural inertial axis. This minimizes the vibration transmitted to theinlet flange. ABS works at all pump rotational speeds.Safety Backup Bearings STP pumps have dry lubricated axial andradial mechanical bearings as safety backup bearings. These supportthe rotor and protect the pump in the event of a total disruption ofmagnetic suspension or a massive air inrush which overcomes themagnetic bearing stiffness. These high precision ball bearings are drylubricated and are not in contact with the rotor during normaloperation.Optimised Rotors The multistage pure bladed rotors in theUHV pumps provide the high vacuums required for clearbeamlines on CD SEM machines, mass spectrometersand ion implanters. They provide optimum pumpingperformance with excellent light gas compression ratios.Compound Rotors The high throughput pumpsincorporate a Holweck drag stage that increases thepumps throughput at low pressure.N 2OCTMSAdvanced Series Compound Rotors The advanced seriespumps have a redesigned compound rotor, the materialsof manufacture have been improved to reduce theclearances within the pump, the rotors have an advanced3D design and the Holweck stage has been redesigned toincrease the throughput.Corrosion Resistant To ensure a high level of resistance tocorrosion, the corrosion resistant (C) and high throughput(H-C) pumps have nickel coated rotors/stators and pumpinternals suitable for ion implantation and plasma etching.Further enhanced levels of protection are available onrequest.Nitrogen Purging The corrosion resistant (C) pumps andthe high throughput (H-C) pumps have a nitrogen purgefacility, a constant flow of nitrogen through the pumpdilutes corrosive gases minimising their damage to thepumps motor and sensor coils.TMS System The Edwards Temperature ManagementSystem is available on a wide range of turbo pumps. It isdesigned to optimize the temperature within the pump,dramatically reducing the particle condensation within.This will not only considerably enhance the performance ofthe pump under harsh process conditions, but alsoincrease its operational life.ApplicationsSemiconductor Fabrication STP turbomolecular pumps are thenumber one choice for the world's leading semiconductor etch andimplant manufacturers. The pumps are installed on the harshestapplications (for example, metal etch) and demonstrate exceptionallevels of reliability.• Plasma etch (chlorine, fluorine and bromine chemistries) for metal(aluminium), tungsten and dielectric (oxide) and polysilicon• Electron cyclotron resonance (ECR) etch• Film deposition CVD, PECVD, ECRCVD, MOCVD• Sputtering• Ion implantation source, beam line pumping end station• MBE• Diffusion• Photo resist stripping• Crystal/epitaxial growth• Wafer inspection• Load lock chambersScientific Applications STP pumps are used extensively in the world’sforemost research and development institutes. The pumps satisfystringent performance criteria and reliability expectations. They arealso used in the following applications:• Scientific instruments: surface analysis, mass spectrometry,electron microscopy• High energy physics: beam lines, accelerators• Radioactive applications: fusion systems, cyclotronsShop online at www.edwardsvacuum.com

STPs and the EnvironmentReducing Energy UsageReducing global energy consumption is key in the fight against globalwarming. In addition to minimising the energy our production facilitiesand offices consume, our latest generation of Maglev turbo pumpsenable our customers to meet their energy reduction targets. Futureproofing against carbon taxes and potentially qualifying for ‘GreenGrants’.Example:In the production of coated products, existing vacuum pump energycould account for >50% of the total energy consumed by the processtool.With an installed base of 95,000 maglev turbo pumps globally in awide range of applications, Edwards STP Maglevs typically reducethe power consumption of Diffusion by < 90%.Switching from Diffusion pumps to the latest Maglev turbos fromEdwards on an 80 pump glass coating line will dramatically reduceyour carbon footprint by over 3,000 tonnes of CO 2 e / year.Economising by switching to the new generation ofSTP Maglev turbo pumpsBenefits of STP Maglev turbo pumps• Lower utility cost (Power and Water)• No yearly services or oil changes• Increased pumping performance• Very low ambient noise and low vibration• Reduced space requirementsEdwards HT10 Diffusion Pump vs Maglev TurboPumpPowerconsumptionWaterconsumptionEdwards HT16 Diffusion Pump vs Maglev TurboPumpPowerconsumptionWaterconsumptionHT10DiffusionPumpSTPiXA2205% reduction* at 300 sccm gas load power = 0.3 kW** Energy source units vs kW/hKg CO 2 = kWh 0.537Source: Department for Environment, Food, Rural Affairs, UKEnabling Environmental TechnologyCO 2reductionper year(tonnes)5.1 kW 0.3 kW* 94% 22.6 pa**400 l h -1 120 l h -1 70%HT16DiffusionPumpSTP XA3203 % reductionCO 2reductionper year(tonnes)9 kW 0.3 kW* 97% 40.9 pa**700 l h -1 120 l h -1 83%Solar Cells A photovoltaic solar cell (PV cell) is asemiconductor device which, in the presence of light,generates electricity. Solar cells provide clean renewableenergy, producing zero air pollution, hazardous waste ornoise.Biofuel Production The term biofuel applies to any solid,liquid or gaseous fuel produced from organic (once-living)matter. The word biofuel covers a wide range of products,some of which are commercially available today and someof which are still in research and development.Glass Coating Vacuum coated glass is primarily used tocontrol the solar generated thermal energy load onbuildings. Multiple layers comprising exotic metal oxidescreate infrared reflecting properties. Reducing the heatload on buildings reduces the need for electrical power torun air conditioning in hot countries. Conversely in coldcountries these same reflective properties are used toretain heat and reduce fuel used for heating. We expectthe trend to accelerate as sustainable building principlesbecome part of International building design standards.Switching from just one 10 inch Diffusion pump to a Maglevturbo reduces the energy consumption by up to 95%, witha CO 2 reduction of 22.6 tonnes per year.Steel Degassing Vacuum degassing (VD) and vacuumoxygen decarburisation (VOD) are used in the productionof speciality steel alloys to reduce the levels of hydrogen,carbon and other impurities during the secondary steelmaking process.Edwards dry mechanical vacuum pumps offerconsiderable energy savings compared to the traditionalmulti-stage steam ejector systems, backed with liquid ringpumps.Solid State Lighting Solid-state lighting sources, such aslight emitting diodes (LEDs), offer energy savings andenvironmental benefits compared to traditionalincandescent or fluorescent lamps. In some cases theycan offer a 95% energy saving over conventional lightingsystems.STP Turbo Pump RangeIntegrated Controller• 300 to 3300 l s -1• Compact design including a fully integrated controller• Innovative, self-sensing magnetic bearing system• Digital 5-axis control• Can be configured to run corrosive processes• Automatic Balancing System (ABS) standard• Automatic Vibration Reduction (AVR) standard• Reduces cabling requirement (no separate controller)• Profibus ® available• IP54 ratedUltra High Vacuum (UHV) Series• 300 to 1000 l s -1 ,

STP-iX455 Turbomolecular vacuum pump2Page78The STP-iX455 turbo-molecular pump features an innovative, magnetic bearing and motordrive system, providing a 50% reduction in vibration compared to previous generation turbopumps. An integrated controller eliminates the need for a conventional, rack-mountedcontroller and interconnecting cables, and does not require water cooling.The pump features 450 ls -1 pumping speed for nitrogen. The STP-iX455 is an excellent fitfor electron microscope, metrology, lithography and other vibration sensitive applications.Features & Benefits●●●●●Compact Design including a fully integrated controllerInovative, Self-Sensing magnetic bearing systemDigital 5-axis controlVibration levels reduced by 50% compared to the existing turbopumpsCan be configured to run corrosive processesDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. He 2. H 2Compression Ration CR vs Backing PressureInlet Flange A B1. N 2 (450ls -1 ) 2. H 2 (460ls -1 ) 3. N 2 (300ls -1 ) 4. H 2 (300ls -1 )ISO100 130 (5.12) 12 (0.47)DN100CF 152 (5.98) 21 (0.83)(ISO160, VG150) (ISO160, VG150) (ISO100, VG100) (ISO100, VG100)VG100 182 (7.17) 12 (0.47)ISO160 180 (7.09) 12 (0.47)DN160CF 203 (7.99) 22 (0.87)VG150 235 (9.25) 12 (0.47)Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeISO100KPumping SpeedN -12 300 lsH 2 300 ls-1Product DescriptionSTP-iX455 Turbomolecular pump ISO100KSTP-iX455 Turbomolecular pump ISO160KSTP-iX455 Turbomolecular pump DN100CFSTP-iX455 Turbomolecular pump DN160CFOrder No.PT640Z010PT640Z020PT640Z050PT640Z060Compression ratioN 82 >10H 2 >1 x 104Ultimate pressure6.5 x 10 -6 order PaMax working pressure1.3 x 10 -1 PaAllowable backing pressure 67 PaRated speed55000 rpmStarting time

STP-iXR1606 Turbomolecular vacuum pump2Page80STP-iXR1606 series magnetically levitated turbo-molecular pump provides industry-leadingperformance and incorporates latest technology small power supply into the onboardcontrol which is the same concept with STP-iXA2206/iXA3306 series. The pumpingperformance is improved by the newest developed revolutionary rotor design. This fullyintegrated product offers easy installation and small footprint as an all-in-one solution for allapplication tools.Features & Benefits●●●●●Eliminates connection cable between pump and control unit.Eliminates installation space and cost required by conventionalrack type control unit.Compact design results in easy installation and small foot print.Highest pumping speed in the 8” TMP class, along with the STP-A1603.32% reduced power consumption in the high gas flow area.DimensionsApplications●●●Glass CoatingSolar PVDIndustrial SputteringPerformance CurvesInletportflangeVG150VG200VG250ISO160F ISO200F ISO250FICF203ICF253ICF305ØA 235 300 350 225 285 335 203 253 305ØB 237 237 237 237 237 237 237 237 237C 15 16 16 15 16 16 22 25 28D 420 380 380 420 380 380 420 418 380ØE 210 270 320 200 260 310 181 231.8 284F 22.5 22.5 15 22.5 15 15 9 7.5 5.625G 8-Ø12 8-Ø158-Ø12 12-Ø11 12-Ø1112-Ø1520-Ø8.424-Ø8.432-Ø8.4H 313 273 273 313 273 273 313 311 273I 263 223 223 263 223 223 263 261 223Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationIntel Flange Size VG150 VG200/VG250ISO160FICF203Backing port size KF40 KF40Pump SpeedN -12 900 lsH 2 600 ls-1Compression ratioN 82 >10ISO200F/ISO250FICF253/ICF3051600 ls -11200 ls -1Product DescriptionSTP-iXR1606 ISO200FSTP-iXR1606 VG200STP-iXR1606 ISO250FSTP-iXR1606 ISO160FSTP-iXR1606 VG150STP-iXR1606 ISO200F with ProfibusSTP-iXR1606 ISO250F with ProfibusAccessories & SparesiDT-001 Display TerminalPower cable 5mOrder No.YT790Z010YT790Z020YT790Z040YT790Z070YT790Z080YT790Z100YT790Z110Order No.YT79U1Z00YT79Y0A002Page81H 2 1 x 103Power cable 10mYT79Y0A03Ultimate pressureAllowable backing pressureMax Gas size N2 (water cooledonly)10 -7 Pa (10 -9 Torr)266 Pa (2 Torr)4700 sccmPower connector onlyPTZ003114Max Gas size Ar (water cooledonly)(7.94 Pam 3 s -1 )1800 sccmRated speedStarting timeMounting positionInput voltageMaximum input power-Weight(3.04 Pam 3 s -1 )36,500 rpm8 minAny orientation200 to 240 (± 10) V a.c.750 VA48 kgShop online at www.edwardsvacuum.com

STP-iXA2206C Turbomolecular vacuum pump2Page82The STP-iXA2206 series magnetically levitated turbomolecular pump provides industryleadingperformance and incorporates a small power supply into the onboard control unit –the latest technology of the well-established STP-iXA2205 series. The height of the pump isequal to the STP-A2203C and is also equal to the height of the STP-iXA2205 series withoutit’s power supply (iPS-1200). This fully integrated product offers easy installation and asmall footprint as an all-in-one solution for all application tools.Features & Benefits●●●●●Compact design including a fully integrated controllerInnovative, self-sensing magnetic bearing systemDigital 5-axis controlVibration levels reduced by 50% compared to the existing turbopumpsCan be configured to run corrosive processesDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemestries) formetal (aluminium), tungsten and dialectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping and stationPerformance CurvesInlet portflange VG250 ISO250F ICF305ØA 350 335 305ØB 296 296 296C 18 16 28D 235 245 275E 395 405 435F 312 322 352G 281 291 321H 283 293 323I 322 332 322Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flange sizeBacking port sizePump speed N 2 /ArISO250F/VG250/ICF305KF402200/1900 ls -1Compression ratio N 2 /H 2 >108 / 1 x 104Product DescriptionSTP-iXA2206C ISO250FSTP-iXA2206C VG250STP-iXA2206C DN250CFSTP-iXA2206C ISO250F with ProfibusOrder No.YT810Z010YT810Z020YT810Z030YT810Z040Ultimate pressureAllowable backing pressureMax gas flow N 2 * (water cooledonly)Max gas flow Ar * (water cooledonly)10 -7 Pa (10 -9 Torr)266 Pa (2 Torr)3000 sccm(5.07 Pam 3 s -1 )1400 sccmAccessories & SparesiDT-001 Display unitPower Cable 10MPower Cable 15mPower Cable 5mOrder No.YT63U1Z30PT35Y0A00B75030430B750300202Page83(2.36 Pam 3 s -1 )Rated speed27000 rpmRun-up time to 90% rated speed

STP-iXA3306C Turbomolecular vacuum pump2Page84The STP-iXA3306 series magnetically levitated turbomolecular pump provides industryleadingperformance and incorporates a small power supply into the onboard control unit –the latest technology of the well-established STPiXA3305 series.The height of the pump is equal to the STP-XA2703/XA3203 and is also equal to the heightof the STP-iXA3305 series without its power supply (iPS-1200). This fully integrated productoffers easy installation and a small footprint as an all-in-one solution for all application tools.Features & Benefits●●●●●Compact design including a fully integrated controllerInnovative, self-sensing magnetic bearing systemDigital 5-axis controlVibration levels reduced by 50% compared to the existing turbopumpsCan be configured to run corrosive processesDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemestries) formetal (aluminium), tungsten and dialectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping and stationPerformance CurvesInletportflangeVG250 ISO250F VG300 ISO320F ICF305 ICF356ØA 350 335 400 425 305 356-Ø B 358 358 358 358 358 358C 15 15 18 20 28 28.5D 281 281 242 242 286 281E 435 435 396 396 440 435F 363 363 325 325 368 364G 320 320 282 282 325 321H 319 319 281 281 324 320I 251 251 212 212 256 251Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flange sizeBacking port sizeISO250F / VG250 / ICF305KF40Pumping speed N 2 2650 ls-1Pumping speed Ar 2300 ls -1Compression ratio N 2 /H 2 >108 / 2 x 103Ultimate pressureAllowable backing pressureMax gas flow N 2 *(water cooledonly)Max gas flow Ar * (water cooledonly)10 -7 Pa (10 -9 Torr)266 Pa (2 Torr)4000 sccm(6.76 Pam 3 s -1 )2100 sccmProduct DescriptionSTP-iXA3306C ISO250FSTP-iXA3306C VG250STP-iXA3306C ISO320FSTP-iXA3306C VG300STP-iXA3306C ISO250F with ProfibusSTP-iXA3306C ISO320F with ProfibusAccessories & SparesiDT-001 Display unitPower Cable 5mPower Cable 10MPower Cable 15mOrder No.YT820Z020YT820Z030YT820Z040YT820Z050YT820Z060YT820Z070Order No.YT63U1Z30B75030020PT35Y0A00B750304302Page85Rated speedStarting timeMounting positionInput voltageMax input power without TMSMax input power with TMSWeight(3.55 Pam 3 s -1 )27700 rpm

STP301 Turbomolecular Vacuum Pump2Page86Edwards STP301 is for use in electron microscopes and semiconductor applications.Edwards rotor technology gives class-leading performance for maximum process flexibility.The STP301 has been approved for use by major equipment manufacturers in the scientificinstrument, semiconductor and magnetic media industries.This STP pump is supplied with an inlet screen.For a complete installation order an STP pump, a controller, a connection cable and powercable.Features & Benefits●●●●●Advanced rotor technologyMaximized process flexibilityOil freeLow vibrationHigh reliabilityDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. N 2. He3. H 2A. Electrical connector B. Outlet port C. Purge portShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portISO100, CF100KF25Pumping SpeedN -12 300 lsH 2 300 ls-1Compression ratioN 82 >10H 2 >2 x 104Ultimate pressure with bake outheating (VG/ISO flange)6.5 x 10 -6 Pa (5 x 10 -8 Torr)Product DescriptionSTP301 ISO100 Inlet KF25 OutletSTP301 DN100CF InletSTP301C ISO100 InletSTP301C ISO100 inlet KF40 outletSTP301C DN100CF InletSTP301C ISO100 inlet KF25 outletAccessories & SparesSCU-21 Control unitSTP301/451 Water Cooling CoilSTP301/451/603/1003 Air Cooler 100-120 VACSTP301/451/603/1003 Air Cooler 200-240 VACOrder No.B74830020B74831010B74871010B74872000B74881010B74871000Order No.PT21Z0Z04YT21CA001YT011A003YT011A0052Page87Ultimate pressure with bake outheating (ICF flange)Maximum allowable inletpressure (ambient cooled)Max continuous outlet pressure(ambient cooled)Rated speedStarting time10 -8 Pa (10 -10 Torr)0.066 Pa (5 x 10 -4 Torr)13 Pa (0.1 Torr)48000 rpm3 minSTP straight connection cable, 3mSTP straight connection cable, 5mConnection cable, 12mType B P/Cab 3M UK PlugType B P/Cab 3M Europe PlugType B P/Cab 3M Ring TerminalsType B P/Cab 5M Ring TerminalsB70700010B70700000PT21Y0B08A50505010A50506010B70700090B70700040Maximum inlet flangetemperature120 °CInput voltage100 to 120 (± 10%) V a.c. or200 to 240 (± 10%) V a.c.Power consumption at start up0.55 kVAPump weight11 kgController weight7 kgShop online at www.edwardsvacuum.com

STP-L301 Turbomolecular Vacuum PumpEdwards corrosion resistant STP-L301(C) is for use in electron microscopes andsemiconductor applications. Edwards rotor technology gives class-leading performance formaximum process flexibility.2Page88The STP-L301(C) has been approved for use by major equipment manufacturers in thescientific instrument, semiconductor and magnetic media industries.Features & Benefits●●●●●Advanced rotor technologyMaximized process flexibilityOil freeLow vibrationHigh reliabilityDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. N 22. He3. H 2A. Connector B. Outlet portShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portPurge portISO100, CF100KF25KF10Pumping SpeedN -12 260 lsH 2 290 ls-1Compression ratioN 82 >10He 5 x 10 5Product DescriptionSTP-L301C ISO100 InletSTP-L301 ISO100 InletSTP-L301 DN100CF InletSTP-L301C DN100CF InletAccessories & SparesSCU-21 Control unitSTP301/451 Water Cooling CoilSTP301/451/603/1003 Air Cooler 100-120 VACSTP301/451/603/1003 Air Cooler 200-240 VACSTP straight connection cable, 3mOrder No.B75800010B75800090PT470Z000PT47AZ030Order No.PT21Z0Z04YT21CA001YT011A003YT011A005B707000102Page89H 2 2 x 104STP straight connection cable, 5mB70700000Ultimate pressure with bake outheating (VG/ISO flange)Ultimate Pressure with bake outheating (ICF flange)6.5 x 10 -6 Pa(5 x 10 -8 Torr)10 -8 PaConnection cable, 12mType B P/Cab 3M Europe PlugType B P/Cab 3M Ring TerminalsType B P/Cab 3M UK PlugType B P/Cab 5M Ring TerminalsPT21Y0B08A50506010B70700090A50505010B70700040Max allowable inlet pressureambient cooledMax continuous outlet pressureambient cooledRated speedStarting timeMaximum inlet flangetemperatureInput voltagePower consumption at start upPump weightController weight(10 -10 Torr)6.7 x 10 -2 Pa(5 x 10 -4 Torr)13 Pa(0.1 Torr)48000 rpm3 min120 °C100 to 120 (± 10) V a.c. or200 to 240 (± 10) V a.c.0.55 kVA13 kg7 kgShop online at www.edwardsvacuum.com

STP603 Turbomolecular Vacuum Pump2Edwards STP603 is a new turbomolecular pump for use in the most advancedsemiconductor applications. Edwards rotor technology gives class-leading performance formaximum process flexibility. This pump has been approved for use by major equipmentmanufacturers in the semiconductor and magnetic media industries.Page90Features & Benefits●●●●●Advanced rotor technologyMaximized process flexibilityOil freeLow vibrationHigh reliabilityDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. N 22. He3. H 2A. Electrical connector B. Outlet port C. Purge portShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portISO160FKF40Pumping SpeedN -12 650 lsH 2 550 ls-1Compression ratioN 82 >10H 2 >105Ultimate pressure with bake outheating (VG/ISO flange)6.5 x 10 -6 PaProduct DescriptionSTP603 ISO160F InletSTP603C ISO160F InletSTP603 DN160CF InletSTP603C DN160CF InletAccessories & SparesSCU-800 Control unitWater cooling coilSTP301/451/603/1003 Air Cooler 100-120 VACSTP301/451/603/1003 Air Cooler 200-240 VACVibration Isolator ISO200-KPower Cable 5mOrder No.YT39B0030YT39B0110YT390Z005YT39AZ002Order No.YT49Z2Z00YT170A001YT011A003YT011A005B58061000PT49Y0A002Page91Ultimate Pressure with bake outheating (ICF flange)(5 x 10 -8 Torr)10 -7 PaPower Cable 10mConnection Cable 3mSTP straight connection Cable, 5mPT49Y0A01B75130050B75130020(10 -9 Torr)Max continuous outlet pressure 13 Pa (0.1 Torr)Rated speed35000 rpmStarting time6 minMax inlet flange temp 120 °CInput voltage100 to 120 (± 10) V a.c. or200 to 240 (± 10) V a.c.Power consumption at start up 0.8 kVAPump weight31 kgController weight9 kgSTP straight connection cable ,10mB75130060Shop online at www.edwardsvacuum.com

STP1003 Turbomolecular Vacuum Pump2Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the mostadvanced of semiconductor applications. Edwards’s rotor technology gives class-leadingperformance for maximum process flexibility. This pump has been approved for use bymajor equipment manufacturers in the semiconductor and magnetic media industries.Page92Features & Benefits●●●●●Advanced rotor technologyMaximized process flexibilityOil freeLow vibrationHigh reliabilityDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. N 22. He3. H 2A. Electrical connector B. Outlet port C. Purge portShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portPurge portISO200FKF40KF10Pumping SpeedN -12 1000 lsH 2 800 ls-1Compression ratioN 82 >10H 2 >105Product DescriptionSTP1003C ISO200F InletSTP1003 ISO200F InletSTP1003C DN200CF InletSTP1003 DN200CF InletAccessories & SparesSCU-800 Control unitWater cooling coilSTP301/451/603/1003 Air Cooler 100-120 VACSTP301/451/603/1003 Air Cooler 200-240 VACVibration Isolator ISO200-KOrder No.YT39B0130YT390Z001PT39AZ003YT39B0010Order No.YT49Z2Z00YT170A001YT011A003YT011A005B580610002Page93Ultimate pressure with bake outheating (VG/ISO flange)10 -7 PaPower Cable 5mPower Cable 10mPT49Y0A00PT49Y0A01Ultimate pressure with bake outheating (ICF flange)(10 -9 Torr)10 -8 PaConnection Cable 3mSTP straight connection Cable, 5mSTP straight connection cable ,10mB75130050B75130020B75130060(10 -10 Torr)Max continuous outlet pressure 13 Pa(0.1 Torr)Rated speed35000 rpmStarting time6 minMax inlet flange temp 120 °CInput voltage100 to 120 (± 10) V a.c. orto 240 (± 10) V a.c.Power consumption at Start up 0.8 kVAPump weight31 kgController weight9 kgShop online at www.edwardsvacuum.com

STPH301C Turbomolecular Vacuum Pump2Edwards high performance STPH301C turbomolecular pump has been designed for use inthe harshest of semiconductor applications. The pumps field proven reliability and classleadingperformance give maximum process flexibility. The STPH301C has been approvedfor use by major equipment manufacturers in the semiconductor and magnetic mediaindustries.Page94Features & Benefits●●●●●Advanced rotor technologyHigher gas throughputMaximized process flexibilityOil freeLow vibrationDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. 300 ls -1 N 22. 280 ls -1 He3. 200 ls -1 H 2A Electrical connector B Outlet port C Purge portD Cooling water out E Cooling water inShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portPurge portWater cooling fittingISO100KKF40KF10PT1/4Pumping SpeedN -12 300 lsH 2 200 ls-1Product DescriptionSTPH301C ISO100K InletSTPH301C DN100CF InletSTPH301CV TMS ISO100F InletSTPH301CV TMS DN100CF InletAccessories & SparesSCU-800 Control unitPower Cable 5mOrder No.B71901010YT340Z004YT3416001YT3416005Order No.YT49Z2Z00PT49Y0A002Compression ratioN 82 >10Power Cable 10mConnection Cable 3mSTP straight connection Cable, 5mPT49Y0A01B75130050B75130020Page95H 2 103STP straight connection cable ,10mB75130060Ultimate pressure with bake outheating10 -7 PaTMS Connection Cable KitTMS Connection Cable KitPT330V000PT330V001(10 -9 Torr)Max continuous outlet pressure 660 Pa(5 Torr)Max Nitrogen throughput 2500 sccmRated speed48000 rpmStarting time4 minMax inlet flange temperature 120 °CInput voltage100 to 120 (± 10) V a.c. or200 to 240 (± 10) V a.c.Power consumption0.6 kVAPump weight15 kgController weight9 kgTMS Connection Cable KitPT330V002Shop online at www.edwardsvacuum.com

STPH451C Turbomolecular Vacuum Pump2Edwards high performance STPH451C turbomolecular pump has been designed for use inthe harshest of semiconductor applications. The pumps field proven reliability and classleadingperformance give maximum process flexibility. The STPH451C has been approvedfor use by major equipment manufacturers in the semiconductor and magnetic mediaindustries.Page96Features & Benefits●●●●●Advanced rotor technologyHigher gas throughputMaximized process flexibilityOil freeLow vibrationDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. 450 ls -1 N 22. 340 ls -1 He3. 300 ls -1 H 2A Electrical connector B Outlet port C Purge portD Cooling water out E Cooling water inShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portPurge portWater cooling fittingISO160KKF40KF10PT1/4Pumping SpeedN -12 450 lsH 2 300 ls-1Product DescriptionSTPH451C ISO160K InletSTPH451C DN160CF InletSTPH451CV TMS ISO160F InletSTPH451CV TMS DN160CF InletAccessories & SparesSCU-800 Control unitPower Cable 5mOrder No.B71901001PT340Z005YT3416007YT3416006Order No.YT49Z2Z00PT49Y0A002Compression ratioN 82 >10Power Cable 10mConnection Cable 3mSTP straight connection Cable, 5mPT49Y0A01B75130050B75130020Page97H 2 103STP straight connection cable ,10mB75130060Ultimate pressure with bake outheating10 -7 PaTMS Connection Cable KitTMS Connection Cable KitPT330V000PT330V001(10 -9 Torr)Max continuous outlet pressure 660 Pa(5 Torr)Max Nitrogen throughput 2500 sccmRated speed48000 rpmStarting time4 minMax inlet flange temperature 120 °CInput voltage100 to 120 (± 10) V a.c. or200 to 240 (± 10) V a.c.Power consumption0.6 kVAPump weight15 kgController weight9 kgTMS Connection Cable KitPT330V002Shop online at www.edwardsvacuum.com

STPA803C Turbomolecular Vacuum Pump2Edwards STPA803C turbomolecular pump is designed for use in semiconductorapplications. Edwards advanced rotor technology gives class-leading performance formaximum process flexibility. The STPA803C has been approved for use by majorequipment manufacturers in the semiconductor and magnetic media industries.Page98Features & Benefits●●●●●Advanced rotor technologyMaximized process flexibilityOil freeLow vibrationHigh reliabilityDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. 800 ls -1 N 2 2. 520 ls -1 H2A. Electrical connector B. Outlet port C. Purge portShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portPurge portWater cooling fittingISO160FKF40KF10PT1/4Pumping SpeedN -12 800 lsH 2 520 ls-1Product DescriptionSTPA803C ISO160F InletSTPA803C DN160CF InletSTPA803CV (TMS) ISO160F InletSTPA803CV (TMS) DN160CF InletAccessories & SparesSCU-800 Control unitPower Cable 5mOrder No.YT36B0040YT36B0010YT3626000YT3626003Order No.YT49Z2Z00PT49Y0A002Compression ratioN 82 >10Power Cable 10mSTP straight connection Cable, 5mSTP straight connection cable ,10mPT49Y0A01B75130020B75130060Page99H 2 103TMS Connection Cable KitPT330V000Ultimate pressure with bake outheating10 -7 Pa (10 -9 Torr)TMS Connection Cable KitTMS Connection Cable KitPT330V001PT330V002Max continuous outlet pressure270 Pa (2 Torr)Max Nitrogen throughput1500 sccmRated speed32500 rpmStarting time7 minMax inlet flange temperature 120 °CInput voltage200 to 240 (± 10) V a.c.Power consumption0.85 kVAPump weight39 kgController weight9 kgShop online at www.edwardsvacuum.com

STPA1303C Turbomolecular Vacuum Pump2Edwards STPA1303C is a turbomolecular pump designed for use in semiconductorapplications. Edwards advanced rotor technology gives class-leading performance formaximum process flexibility. The STPA1303C has been approved for use by majorequipment manufacturers in the semiconductor and magnetic media industries.Page100Features & Benefits●●●●●Advanced rotor technologyHigher gas throughputMaximized process flexibilityOil freeLow vibrationDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. 1300 ls -1 N 2 2. 800 ls -1 H2A. Electrical connector B. Outlet port C. Purge portShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portPurge portWater cooling fittingISO200FKF40KF10PT1/4Pumping SpeedN -12 1300 lsH 2 800 ls-1Product DescriptionSTPA1303C ISO200F InletSTPA1303C DN200CF InletSTPA1303C TMS ISO200F InletSTPA1303C TMS DN200CF InletAccessories & SparesSCU-800 Control unitPower Cable 5mOrder No.B71802020YT36B0030YT3626005YT3626004Order No.YT49Z2Z00PT49Y0A002Compression ratioN 82 >10Power Cable 10mConnection Cable 3mSTP straight connection Cable, 5mPT49Y0A01B75130050B75130020Page101H 2 103STP straight connection cable ,10mB75130060Ultimate pressure with bake outheating10 -7 PaTMS Connection Cable KitTMS Connection Cable KitPT330V000PT330V001Maximum continuous outletpressure *(10 -9 Torr)270 PaTMS Connection Cable KitPT330V002(2 Torr)Maximum Nitrogen throughput *1500 sccmRated speed32500 rpmStarting time7 minMaximum inlet flangetemperature120 °CInput voltage200 to 240 (± 10) V a.c.Power consumption0.85 kVAPump weight39 kgController weight9 kg* Water cooledShop online at www.edwardsvacuum.com

STPA1603C Turbomolecular Vacuum Pump2Page102The small and powerful Edwards STPA1603C turbo-molecular pump has been designedusing Edwards advanced rotor technology. This provides high throughput, maximumreliability and class leading performance which is demanded by the latest generation ofsemiconductor processes. Its half rack controller and compact design provide considerablespace saving, whilst its advanced deposition reduction system gives improved reliability andperformance. The STPA1603C has been qualified on the latest 200 mm etch tools as wellas on new generation 300 mm oxide etch processes.Features & Benefits●●●●●Advanced rotor designIncreased performanceHigher gas throughputHigh reliabilityMaintenance freeDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. 1600 ls -1 Ar2. 1600 ls -1 N 2 3. 1200 ls -1 H 2A Electrical connector B Outlet port C Purge portD Cooling water out E Cooling water inShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portPurge portWater cooling fittingISO200FKF40KF16PT1/4Pumping SpeedN -12 1600 lsH 2 1200 ls-1Product DescriptionSTPA1603C ISO200F InletSTPA1603C DN200CF InletSTPA1603CV TMS ISO200F InletSTPA1603CV TMS DN200CF InletAccessories & SparesSCU-800 Control unitPower Cable 5mOrder No.B75100010B75100100YT4616004YT4616005Order No.YT49Z2Z00PT49Y0A002Compression ratioN 82 >10Power Cable 10mSTP straight connection Cable, 5mSTP straight connection cable ,10mPT49Y0A01B75130020B75130060Page103H 2 >7 x 103Ultimate pressure with bake outheating10 -7 PaMax allowable backing pressure266 Pa(2 Torr)Max Nitrogen throughput2500 sccmRated speed36500 rpmStarting time7 minMounting positionAnyWater cooling flow 2 lmin -1Temperature 5-25 °CPressure0.3 MPaRecommended purge gas flow20 sccmInput voltage200 to 240 (± 10) V a.c.Power consumption0.85 kVAPump weight35 kgController weight9 kgShop online at www.edwardsvacuum.com

STPA2203C Turbomolecular Vacuum Pump2Page104Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductorapplications. It has advanced rotor technology that gives class-leading performance formaximum process flexibility. A new half rack controller gives additional space savings andincorporates d.c. drive technology for battery-free operation. The STPA2203C has beenapproved for use by major etch, ion implant and deposition equipment manufacturers in thesemiconductor and magnetic media industries.Features & Benefits●●●●●Advanced rotor designHigher gas throughputMaximized process flexibility5 Axis Magnetic Suspension SystemZero contaminationDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. N 2 2. H2AElectricalconnectorB Outlet port C Purge portD Cooling water out E Cooling water in FTemperature sensorconnectorShop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeOutlet portPurge portWater cooling fittingISO250FKF40KF10PT1/4Pumping SpeedN -12 2200 lsH 2 1700 ls-1Product DescriptionSTPA2203C ISO250F InletSTPA2203C DN250CF InletSTPA2203CV TMS ISO250F InletSTPA2203CV TMS DN250CF InletAccessories & SparesSCU-1600 Control unitPower Cable 5mOrder No.YT4V0Z002YT4V0Z003YT4V66001YT4V66002Order No.YT76Z0Z00B750300202Compression ratioN 82 >10Power Cable 10MSTP straight connection cable, 5mSTP straight connection cable, 10mPT35Y0A00B75030010B75030040Page105H 2 >2.5 x 1045m TMS connection cable kitPT351V000Ultimate pressureMaximum allowable backingpressure10 -6 Pa(10 -8 Torr)400 Pa10m TMS connection cable kit15m TMS connection cable kitPT351V001PT351V002(3 Torr)Maximum Nitrogen throughput1500 sccmRated speed27000 rpmStarting time7 minMounting positionAnyWater cooling tlow 2 lmin -1Water cooling temperature 5-25 °CPressure0.3 MPaRecommended purge gas flow20 sccmInput voltage200 to 240 (± 10) V a.c.Power consumption1.5 kVAPump weight61 kgController weight12 kgShop online at www.edwardsvacuum.com

STP-XA2703C Turbomolecular PumpThe STP-XA2703C turbo pump offers high performance in the process range of highvacuum to 2300 sccm process flow with enhanced throughput for all gases.2Page106This pump is based on a new platform design offering features to improve thermalmanagement, which enhances performance on harsh processes, increases the maximumprocess flow capability and reduces the effects of corrosion and deposition.The outstanding performance is suited to both light and harsh applications, such assemiconductor etch, implant, lithography and LCD processes.Features & Benefits●●●●●Advanced rotor designIncreased H 2 , N 2 and Ar performanceImproved performance in the process pressure range of highvacuum to 2300 sccmMaintenance free5-axis magnetic suspension systemDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. 2650 ls -1 N 22. 2300 ls -1 Ar3. 2050 ls -1 H 2VG250 ISO250F ICF305 (DN250CF)A 350 (13.8) 335 (13.2) 305 (12.0)*B 15 (0.6) 15 (0.6) 28 (1.1)*C 454 (17.9) 454 (17.9) 459 (18.1)*D 409 (16.1) 409 (16.1) 414 (16.3)*E 377.5 (14.9) 377.5 (14.9) 383 (15.1)*F 319 (12.6) 319 (12.6) 325 (12.8)*G 262 (10.3) 262 (10.3) 267 (10.5)*H 379.5 (14.9) 379.5 (14.9) 385 (15.2)*J 387 (15.2) 387 (15.2) 393 (15.5)mm (inch)A Temperature management system (TMS) sensorB TMS Heater (TMS spec only)C TMS heater cover (TMS spec only)D Outlet port KF40E Cooling water port Rc 1/4 ISOF Purge port KF10Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeVG250Pumping SpeedN -12 2650 lsH 2 2050 ls-1Compression ratioN 82 >10H 2 >6 x 103Ultimate pressure10 -7 PaMax allowable backing pressure 266 PaMax allowable gas flowN 2 (water cooled)2300 sccmProduct DescriptionSTP-XA2703C VG250STP-XA2703C ISO250STP-XA2703C DN250CFAccessories & SparesSCU-1600 Control unitPower Cable 5mPower Cable 10MSTP straight connection cable, 5mSTP straight connection cable, 10mOrder No.YT660Z110PT660Z140YT6610010Order No.YT76Z0Z00B75030020PT35Y0A00B75030010B750300402Page107Ar (water cooled)(3.8 Pam 3 s -1 )1900 sccm(3.2 Pam 3 s -1 )Rated speed27500 rpmStarting time8 minMounting positionAny orientationWater cooling Flow 3 lmin -1Water cooling TemperaturePressure5-25 °C (41-77 °F)0.3 MPaRecommended purge gas flow-2 3 -1 50 sccm (8.4 x 10 Pam s )Input voltage 200 to 240 V a.c. (± 10)Power consumptionPump weightController weight1.5 kVA75 kg (165 lb)12 kg (26.4 lb)Shop online at www.edwardsvacuum.com

STP-XA3203C Turbomolecular PumpThe STP-XA3203C turbo pump offers high performance in the process range of highvacuum to 2300 sccm process flow with enhanced throughput for all gases.2Page108This pump is based on a new platform design offering features to improve thermalmanagement, which enhances performance on harsh processes, increases the maximumprocess flow capability and reduces the effects of corrosion and deposition.The outstanding performance is suited to both light and harsh applications, such assemiconductor etch, implant, lithography and LCD processes.Features & Benefits●●●●●Advanced rotor designIncreased H 2 , N 2 and Ar performanceImproved performance in the process pressure range of highvacuum to 2300 sccmMaintenance free5-axis magnetic suspension systemDimensionsApplications●●●●●Plasma etch (chlorine, fluorine and bromine chemistries) formetal (aluminum), tungsten and dielectric (oxide) and polysiliconElectron cyclotron resonance (ECR) etchFilm deposition CVD, PECVD, ECRCVD, MOCVDSputteringIon implantation source, beam line pumping end stationPerformance Curves1. 3200 ls -1 N 22. 2800 ls -1 Ar3. 2300 ls -1 H 2VG300 ISO320F ICF356 (DN320CF)A 400 (15.8) 425 (16.7) 356 (14.0)*B 18 (0.7) 20 (0.8) 28.5 (1.1)*C 415.5 (16.4) 415.5 (16.4) 454.5 (17.9)*D 370.5 (14.6) 370.5 (14.6) 409.5 (16.1)*E 339 (13.3) 339 (13.3) 378.5 (14.9)*F 280.5 (11.0) 280.5 (11.0) 320.5 (12.6)*G 223.5 (8.8) 223.5 (8.8) 262.5 (10.3)*H 341 (13.4) 341 (13.4) 380.5 (15.0)*J 348.5 (13.7) 348.5 (13.7) 388 (15.3)mm (inch)A Temperature management system (TMS) sensorB TMS Heater (TMS spec only)C TMS heater cover (TMS spec only)D Outlet port KF40E Cooling water port Rc 1/4 ISOF Purge port KF10Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationInlet flangeISO320FPumping SpeedN 2-1 3200 lsH 2-1 2300 lsCompression ratioN 28 >10H 23 >6 x 10Ultimate pressure10 -7 PaMax allowable backing pressure 266 PaMax allowable gas flowN 2 (water cooled)2300 sccmProduct DescriptionSTP-XA3203C ISO320FSTP-XA3203C DN320CFSTP-XA3203C VG300Accessories & SparesSCU-1600 Control unitPower Cable 5mPower Cable 10MSTP straight connection cable, 5mSTP straight connection cable, 10mOrder No.YT660Z050PT660Z080YT660Z150Order No.YT76Z0Z00B75030020PT35Y0A00B75030010B750300402Page109Ar (water cooled)(3.8 Pam 3 s -1 )1900 sccm(3.2 Pam 3 s -1 )Rated speed27500 rpmStarting time8 minMounting positionAny orientationWater coolingFlow 3 lmin -1TemperaturePressureRecommended purge gas flow5-25 °C (41-77 °F)0.3 MPa50 sccmInput voltagePower consumptionPump weightController weight(8.4 x 10 -2 Pam 3 s -1 )200 to 240 (± 10) V a.c.1.5 kVA80 kg (176 lb)12 kg (26.4 lb)Shop online at www.edwardsvacuum.com

STP-XA4503C Turbomolecular PumpThe STP-XA4503C magnetic bearing turbomolecular pump has a wide process window,from high vacuum, to high flow requirements with enhanced throughput for all gases.2Page110This pump is based on a new design, offering features to improve thermal management,which enhances performance on harsh processes, increases the maximum process flowcapability and reduces the effects of corrosion and deposition.It has been designed to handle light and harsh duty applications, such as etch, implant,lithography and FPD processes.Features & BenefitsOrdering Information●●●●●Advanced Rotor DesignIncreased Argon performanceHighest pumping speed in its classWide process windowHigher throughput at lower pressureProduct DescriptionSTP-XA4503C ISO320F InletAccessories & SparesPower Cable 10MPower Cable 5mSCU-1600 Control unitOrder No.YT670Z040Order No.PT35Y0A00B75030020YT76Z0Z00STP straight connection cable, 10mB75030040STP straight connection cable, 5mB75030010DimensionsPerformance CurvesA. TMS Sensor E. Cooling water port 2-RC ¼ (ISO)B. Tms Heater (built in) F. Purge port KF10C. Heater cover G. Inlet port VG350D. Outlet port KF40 H. TMS – Temperature management systemShop online at www.edwardsvacuum.com

Technical DataInlet flange sizeVF300, ISO320F, VG350Backing port sizeKF40Pumping speedN 2-13800 to 4300 ls(dependant on model)H -12 2500 lsCompression ratioN 82 >10H 32 6 x 102Page111Ultimate pressureMax allowable backing pressureMax allowable gas flowN 2 (Water cooled only)10 -7 Pa / 10 -9 mbar266 Pa / 2.66 mbar2800 sccm4.73 Pam 3 s -1Maximum allowable gas flowAr(Water cooled only)2150 sccm3.63 Pam 3 s -1Rated speed24000 rpmRun up time to 90% rated speed 12 minutesMounting positionAny orientationWater coolingFlow 3 lmin -1Temperature 5 – 25 °C / 41 – 77 °FPressure0.3 MPaRecommended purge gas flowN 2 50 sccm / 8.4 x 10 -2 Pam 3 s -1Input voltageMaximum input power (withoutTMS)200 – 240 ±10 % V a.c.1.5 KVAShop online at www.edwardsvacuum.com

SCU-350 Control Unit2Page112The Edwards new SCU-350 control unit is a EU-RoHS compliant controller for small sizedturbo pumps. It is fully compatible with the current control unit models, but has an improvedvibration property at low frequency range. It also has lower input voltage, which contributesto a reduction in electric capacity and tool power consumption.The SCU-350 has improved noise immunity and is equipped with universal voltage functionfor operation with supply voltage from 100-240 VAC without switching.Features & BenefitsApplications●●●●●Better vibration propertyNo peak vibration movement across all frequenciesCompact designSmallest size control unit in its classEnergy savingDimensions●●STP301/451 seriesSTPL301/L451 seriesPump to controller cableShop online at www.edwardsvacuum.com

Technical DataOrdering InformationMagnetic bearing control system Digital controlInput voltage 100-120200-240V a.c.Power consumption (Start up) Max 350 VAPower consumption(continuous)Max 150 VAInput frequency50/60 ±2 HzLeak current3.5 mAMain breaker rated current 5 AMotor drive system3-phase DCAllowable ambient temperature 0 to 40 °C(32 to 104 °F)Weight8 kgPanel displayLCDProduct DescriptionSCU-350 Control UnitSCU-350 Turbo Pump Control Unit with RS232SCU-350A Turbo Pump Control Unit with ABSAccessories & SparesType B P/Cab 3M Ring TerminalsType B P/Cab 5M Ring TerminalsType B P/Cab 10M Ring TerminalsType B P/Cab 15M Ring TerminalsSTP straight connection cable, 3mSTP straight connection cable, 5mSTP straight connection cable, 10mSTP straight connection cable, 15mSTP straight connection cable, 20mOrder No.YT21Z3ZC0YT21ZEZC0YT21ZCZC0Order No.B70700090B70700040PT21Y0A00PT21Y0A01B70700010B70700000B70700130B70700070B707001502Page113Shop online at www.edwardsvacuum.com

SCU-800 Control unit2Page114The Edwards SCU800 turbo pump control unit is a fully digital controller, and has perfectcompatibility for middle sized pumps. New AVR (Auto vibration reduction) technologyachieves a further reduction in vibration levels, and the advanced pre-maintenance callfunction provides advanced notice of precise maintenance time.The reliability focused design, enhanced communication function, and perfect compatibilitybring significant back up units savings and contributes to a reduction in total C 0O.Features & Benefits●●●●●Universal ControllerSingle controller is used for middle sized pumps. No requirementfor different controllers for each pump typeService back up stocks will be reducedAdvanced Pre-maintenance FunctionAVR (Auto Vibration Reduction) minimizes the rotate systemvibration during acceleration.DimensionsApplications●●●●●STP603/1003 seriesSTPH301/H451 seriesSTPH803/H1303 seriesSTPA803C/A1303 seriesSTPA1603 seriesTechnical DataMagnetic bearing control system Digital controlPump to controller cableInput voltagePower consumption(without TemperatureManagement System, TMS)Power consumption (with TMS)Input frequencyLeak currentMain breaker rated currentMotor drive systemAllowable ambient temperatureWeightTMS control unitSerial communication function(RS232/RS485)Panel display100 – 120 ±10 V a.c.200 – 240 ±10 V a.c.Max 850 VAMax 1200 VA50/60 ±2 Hz3.5 mA10 A3-phase d.c.0 to 40 °C (32 to 104 °F)8.5 kgBuilt-inStandardLCDShop online at www.edwardsvacuum.com

Ordering InformationProduct DescriptionSCU-800 Turbo Pump Control UnitAccessories & SparesPower Cable 5mPower Cable 10mPower Cable 15mPower Cable 20mSTP straight connection Cable, 5mSTP straight connection cable ,10mSTP straight connection cable, 15MSTP straight connection cable, 20MOrder No.YT49Z2Z00Order No.PT49Y0A00PT49Y0A01PT49Y0A02PT49Y0A03B75130020B75130060B75130070B751301902Page115Shop online at www.edwardsvacuum.com

SCU-1600 Control unit2The fully digital SCU-1600 turbo pump control unit is compatible with STP turbo pumpsranging from 2000 ls -1 to 4500 ls -1 . It provides reliability, enhanced communication and pumpcompatibility with reduced back-up unit requirements and minimized overall cost ofownership.Page116Features & Benefits●●●●●Advanced pre-maintenance functionPrecise maintenance timingTwo stage warning messagesRotor imbalance monitoringBack-up bearing damage monitoringDimensionsApplications●●●●STP-A2203/2503/2803/3003/3503STP-F2203STP-XA2703/3203/4503STP-XH2603/3203Technical DataMagnetic bearing control system Digital controlInput voltagePower consumption (withoutTemperature ManagementSystem, TMS)Power consumption (with TMS)Input frequencyLeak currentMain breaker rated currentMotor drive systemAllowable ambient temperatureWeightTMS control unitSerial communication function(RS232/RS485)Operation switchPanel display200 – 240 ±10 V a.c.Max 1600 VAMax 2100 VA50/60 ±2 Hz3.5 mA15 A3-phase d.c.0 to 40 °C (32 to 104 °F)12 kgBuilt-inStandardStart, Stop, Reset, Select, Up,Down, Enter, Manual/RemoteLCDPump to controller cableOrdering InformationProduct DescriptionSCU-1600 Turbo Pump Control UnitAccessories & SparesPower cable, 15mPower cable, 20mSTP straight connection cable, 5mSTP straight connection cable, 10mSTP straight connection cable, 15mSTP straight connection cable, 20mOrder No.YT76Z0Z00Order No.YT76Y0A03YT76Y0A04B75030010B75030040B75030220B75030230Shop online at www.edwardsvacuum.com

Vapour Pumps3Page117High Throughput Diffusion Pumps 120Vapour Booster Pumps 126Vapour Pumps for Scientific Instruments and R&D Applications 130Diffstak Installation 132Vapour Pump Spares 134Shop online at www.edwardsvacuum.com

Vapour Pumps3Page118HT10 high throughput vapour pumpEdwards’ vapour pumps suit the widest range of applications, as weoffer the most comprehensive range of pumps and accessoriesavailable from any supplier.Our industrial, high throughput diffusion pumps and vapour boosterpumps fulfil the requirements of applications like vacuum metallurgy,distillation and coating.Our compact scientific pumps are designed for instrument andgeneral R&D applications.By matching the pump of your choice with appropriate accessories,we offer a complete high vacuum pumping solution for allapplications.Pumping Speed and ThroughputThe pumping speed (volume flowrate) of a vapour pump is thevolume of gas and vapour passing through the inlet of the pump inone second. The unit of measurement is l s -1 . The throughput (massflowrate) is the mass of gas passing through the pump in one secondand is measured in mbar l s -1 . The throughput of the pump is thesame at the pump inlet and pump outlet.At a given pressure, pumping speed (S) and throughput (Q) arerelated by the simple equation: Q = P × S, where P is the pressure.You can use this equation to convert between pumping speed andthroughput measurements.Below about 1 × 10 -3 mbar, pumping speed is the most convenientmeasure of the pump's performance. At these pressures, thepumping speed is proportional to the diameter of the pump inlet: alarge pump is required to obtain higher pumping speeds. Above about1 × 10 -3 mbar, the pump's throughput is most often used tocharacterise its performance. At these pressures, the performance ofthe pump is affected by its internal construction as well as its overallsize.To choose the best type of vapour pump for your application, youmust define the operation pressure and the pumping speed (orthroughput) requirement of your application and match these to theperformance characteristics of our range of vapour pumps.Remember that, when you calculate the required pumping speed, youmust include provision for the process gas throughput, the outgassingof the vacuum system and the leakage into the system. You may alsohave to consider how quickly you want to achieve the operationpressure.Measurement MethodsThe methods used to measure pressure and flow have become moreaccurate in recent years allowing much tighter controls over systemconditions. The speeds and throughputs quoted in the catalogue forthe HT diffusion pumps are based on actual pump data derived frommeasurements made with the latest technology total pressuregauges and mass flow transducers in accordance with ISOstandards.Some confusion could arise with previously published speed andthroughput figures for older designed pumps where, historically,pressure measurements were made with partial pressure gauges likethe McLeod gauge. This older gauge can indicate speeds up to 30%higher than that expected using state of the art total pressure gauges.Further confusion could arise from the measurement standardschosen to determine pumping performance. In the case of AVS(American Vacuum Society), this can indicate speeds and throughputup to 15% higher than ISO figures.Historical industry practice meant that in considering the above, andpotential gauge accuracy of ± 15%, it was possible to have speedsquoted 60% higher than might be expected using modern totalpressure measurement equipment. This should be carefullyconsidered when comparing specifications for older derived datapublished for similarly sized competitor pumps and the Edwards HTdiffusion pumps.Ultimate VacuumThe ultimate vacuum of a vapour pump is the lowest pressureachieved in tests on the pump, measured above the inlet of the pump(or above the high vacuum valve for the Diffstaks). The ultimatevacuum depends on: the type of fluid used in the pump; thetemperature of the inlet baffle; the amount of outgassing from thevacuum system; and the amount of leakage into the system.Critical Backing PressureThe critical backing pressure is the highest pressure that a pump cantolerate in the backing line. If the pressure is higher than the criticalbacking pressure, the pump may stall. The critical backing pressuredepends on: the pump design; the power of the heaters; and the fluidused in the vapour pump.BackstreamingBackstreaming is the direct movement of molecules of pump fluidvapour from the pump toward the vacuum system. All Edwardspumps are specially designed to minimise backstreaming; the pumpshave a guard ring (sometimes called a cool-cap) fitted above the topjet. The guard ring condenses vapour molecules moving from the topjet toward the vacuum system.In some sensitive applications, backstreaming may be veryundesirable; you can minimise backstreaming if you fit a baffle or atrap to the top of the pump.Shop online at www.edwardsvacuum.com

Vapour Pumps for Industrial ApplicationsEdwards has long been a pioneer of vapour pumps and diffusionpump technology with innovations such as the diffusion pump coldcap and the combined diffusion pump, the Diffstak.Edwards's range of high throughput diffusion pumps have manyadvantages in industrial applications. High throughput gives highpumping speeds at high pressures, earlier cross over from backingpump set to the diffusion pump, thus reducing pump down time toprocess pressure. A high tolerance to gas surges and high criticalbacking pressures are additional benefits of this range of pumps. Thepumps, in back to back testing, are comparable to the best leadingcompetition but also incorporating the above benefits.To offer even higher pumping speeds, of up to 45000 m 3 h -1 atpressures intermediate between mechanical boosters and diffusionpumps Edwards can supply our industrially proven vapour boosterpumps. Vapour boosters from Edwards have been proven in the fieldfor over 30 years. A constant program of updates and improvements,with input from OEM's and end users, ensures that the vapourboosters always meet the requirements of the industry. Thiscombined with inherent reliability, ease of use, ease of maintenanceand tolerance to a wide range of inlet and exhaust pressures meansthey have been used extensively in metallurgy and coating industriesas well as many other specialist applications.• Vacuum metallurgy• Distillation, drying and degassing• Thin film coating and metallising• Large scale researchIndustrial applications require a robustly designed and constructedvapour pump often with very high throughputs. Edwards provides acomplete range of vapour diffusion pumps and vapour boosters tomeet these needs. All industrial diffusion pumps are water-cooled.HT Series PumpsThese pumps are designed to give high throughput (pressuremultiplied by pumping speed) at 4 x 10 -3 mbar making them ideal forindustrial processes that evolve large quantities of gases. Their highcritical backing pressure means that they are more tolerant to suddenincreases in load. They are particularly suitable for large coatingsystems and furnaces.All Edwards vapour diffusion pumps are fully fractionating. Thismeans that volatile components are fed to the lower stages of thevapour pump and the vapour fed to the inlet stage is stripped of thesefractions and this improves the ultimate vacuum performance of thepump. Conduction cooled baffles above the pump help to preventpump fluid migration into the vacuum system, which would preventthe pump achieving its ultimate vacuum. Baffles also ensue thatbackstreaming is minimised.The outgassing from the system, its leak tightness, the vapourpressure of the pump fluid and the number of joints and elastomersused for seals all contribute to the pump down time and ultimatevacuum achievable. Ultimate vacuum is a function of the vapourpressure of the pump fluid selected, at a particular temperature, andin most industrial applications the pump's throughput at a particularpressure is more important than obtaining a very high ultimatevacuum. For these reasons we have elected not to quote an ultimatevacuum for our industrial vapour diffusion pumps, since it would notprovide a useful measure of their performance.By combining Edwards vapour diffusion pumps with either our GVseries dry pump combinations or our oil-sealed rotary pumpcombinations fast pump-down and process times are achievable. Ourapplications specialists are able to recommend suitable pumpcombinations to meet specific process requirements.Vapour Booster PumpsVapour booster pumps operate in a similar way to vapour diffusionpumps but generate boiler pressures approximately ten times higherthan is typical for a vapour diffusion pump. The high boiler pressurefeed supplies powerful ejector nozzles, that are specifically designedto increase further the throughput of the pump. The ultimate pressureof these pumps is typically in the range 10 -4 to 10 -5 mbar, abovewhich the pumps exhibit considerable pumping speed for permanentgases. Additionally, they are tolerant to high backing pressures.Vapour boosters are typically used in the 10 -1 to 10 -4 mbar rangewhere primary pump combinations are often at their limit and ordinarydiffusion pumps exhibit instability.Edwards booster pumps are particularly tolerant to pumpingcontaminated systems and processes with high gas loads ofhydrogen, hence their suitability for use in metallurgical and chemicalprocess applications.By combining Edwards vapour booster pumps with either our GVseries dry pump combinations or our oil-sealed rotary pumpcombinations fast pump-down and process times are achievable. Ourapplications specialists are able to recommend suitable pumpcombinations to meet specific process requirements.3Page119Shop online at www.edwardsvacuum.com

HT10 Diffusion pumpThe HT high throughput series is the pinnacle of our diffusion pump knowledge withtechnology aimed specifically at industrial users.3Page120Features & BenefitsEdwards HT10 (ANSI10/ISO320 inlet) diffusion pump is designed for all light and heavyduty industrial applications. The robust construction gives high pumping speed at highpressure. The cast and machined aluminium interior provides consistent performance, whilethe stainless steel body prevents corrosion and ensures process cleanliness. These pumpsare designed to give a high throughput (pressure multiplied by pumping speed) at 4 × 10 -3mbar making them ideal for industrial processes that involve large quantities of gases.Applications●●●●●Highest throughput of comparative sized pumpsEarliest crossover pressure of similar sized pumpsExcellent maximum backing line pressure and tolerance to gassurgesComparative pumping speed to similar sized pumpsIntegral cold cap for best performance and low backstreamingDimensions●●●●Vacuum metallurgyDistillation, drying and degassingThin film coating and metallizingLarge-scale researchPerformance Curves1. Comparative pumping speeds from back to back testing2. ISO pumping speed obtained using total pressure gauges3. ISO throughput obtained using total pressure gaugesShop online at www.edwardsvacuum.com

Technical DataOrdering InformationComparative pumping speed4650 ls -1ISO pumping speed†Nitrogen 3000 ls -1Helium 4650 ls -1AVS pumpingNitrogen 3330 ls -1Helium 5165 ls -1Maximum throughput (nitrogen) 10 mbar ls -1Critical backing pressure(DC704EU)Minimum backing pumpdisplacement for maximumthroughput7.5 Torr ls -11.1 mbar0.8 Torr60 m 3 h -135 ft 3 min -1Recommended backing pump‡ GV80, E2M80Recommended fluidDC704EUFluid charge (dry)1250 ml1.3 qtANSI10/ANSI12 or EO12Inlet/backing connection inch/EO130 mm orISO320/ISO63Water connection3/8 inch NPT femaleHeater power5.1 kW6.8 hpWarm up time30 minMinimum cooling water flow at25°C 400 l h -1Pressure drop across coolingwater supplyWeight1.8 US gal min -11 bar14.5 psi80 kg176 lbsProduct DescriptionHT10 ANSI10/ANSI2, 200VHT10 ANSI10/ANSI2, 220VHT10 ANSI10/ANSI2, 380VHT10 ANSI10/ANSI2, 400VHT10 ANSI10/ANSI2, 415VHT10 ANSI10/ANSI2, 460VHT10 ANSI10/ANSI2, 480VHT10 EO12/EHVI130, 200VHT10 EO12/EHVI130, 220VHT10 EO12/EHVI130, 380VHT10 EO12/EHVI130, 400VHT10 EO12/EHVI130, 415VHT10 ISO320/ISO63, 200VHT10 ISO320/ISO63, 220VHT10 ISO320/ISO63, 380VHT10 ISO320/ISO63, 400VHT10 ISO320/ISO63, 415VHT10 ISO320/ISO63, 480VOrder No.B31101200B31101220B31101380B31101400B31101415B31101460B31101480B31102200B31102220B31102380B31102400B31102415B31103200B31103220B31103380B31103400B31103415B311034803Page121† ISO speed and throughout data obtained with total pressuremeasurement. Partial pressure readings typically increase data by~30%. ISO speed measurements are typically 10% less than AVSmeasurements for the same pump.‡ These are given for guidance, please contact Edwards for arecommendation of pump combinations best suited to yourapplication.Shop online at www.edwardsvacuum.com

HT16B Diffusion pumpThe HT high throughput series is the pinnacle of our diffusion pump knowledge withtechnology aimed specifically at industrial users.3Page122Features & BenefitsEdwards HT16B (ANSI16/ISO5000 inlet) diffusion pump is designed for all light and heavyduty industrial applications. The robust construction gives high pumping speed at highpressure. The cast and machined aluminium interior provides consistent performance, whilethe stainless steel body prevents corrosion and ensures process cleanliness. These pumpsare designed to give a high throughput (pressure multiplied by pumping speed) at 4 × 10 -3mbar making them ideal for industrial processes that involve large quantities of gases.Applications●●●●●Highest throughput of comparative sized pumpsEarliest crossover pressure of similar sized pumpsExcellent maximum backing line pressure and tolerance to gassurgesComparative pumping speed to similar sized pumpsIntegral cold cap for best performance and low backstreamingDimensions●●●●Vacuum metallurgyDistillation, drying and degassingThin film coating and metallizingLarge-scale researchPerformance Curves1. Comparative pumping speeds from back to back testing2. ISO pumping speed obtained using total pressure gauges3. ISO throughput obtained using total pressure gaugesShop online at www.edwardsvacuum.com

Technical DataOrdering InformationComparative pumping speed11580 ls -1ISO pumping speed†Nitrogen 6500 ls -1Helium 7200 ls -1AVS pumpingNitrogen 7220 ls -1Helium 8000 ls -1Maximum throughput (nitrogen) 18 mbar ls -113.5 Torr ls -1Critical backing pressure(DC704EU)1.4 mbar1 TorrMin backing pump displacementfor max throughput 94 m 3 h -155 ft 3 min -1Recommended backing pump‡ GV80, GXS250, E2M175Recommended fluidDC704EUFluid charge (dry)2400 ml / 2.5 qtInlet/backing connection ANSI16/ANSI3 orISO500/ISO100Water connection3/4 inch NPT femaleHeater power9 kW / 12 hpWarm up time60 minMinimum cooling water flow at25°C 700 l h -1 / 3.1 US gal min -1Pressure drop across coolingwater supply1 bar / 14.5 psiWeight185 kg / 408 lbsProduct DescriptionHT16B ANSI16/ANSI3, 200VHT16B ANSI16/ANSI3, 220VHT16B ANSI16/ANSI3, 380VHT16B ANSI16/ANSI3, 400VHT16B ANSI16/ANSI3, 415VHT16B ANSI16/ANSI3, 440VHT16B ANSI16/ANSI3, 460VHT16B ANSI16/ANSI3, 480VHT16B ISO500/ISO100, 200VHT16B ISO500/ISO100, 220VHT16B ISO500/ISO100, 380VHT16B ISO500/ISO100, 400VHT16B ISO500/ISO100, 415VHT16B ISO500/ISO100, 440VHT16B ISO500/ISO100, 460VHT16B ISO500/ISO100, 480VOrder No.B31220200B31220220B31220380B31220400B31220415B31220440B31220460B31220480B31222200B31222220B31222380B31222400B31222415B31222440B31222460B312224803Page123† ISO speed and throughout data obtained with total pressuremeasurement. Partial pressure readings typically increase data by~30%. ISO speed measurements are typically 10% less than AVSmeasurements for the same pump.‡ These are given for guidance, please contact Edwards for arecommendation of pump combinations best suited to yourapplication.Shop online at www.edwardsvacuum.com

HT20B Diffusion pumpThe HT high throughput series is the pinnacle of our diffusion pump knowledge withtechnology aimed specifically at industrial users.3Page124Features & BenefitsEdwards HT20B (ANSI20/ISO630 inlet) diffusion pump is designed for all light and heavyduty industrial applications. The robust construction gives high pumping speed at highpressure. The cast and machined aluminium interior provides consistent performance, whilethe stainless steel body prevents corrosion and ensures process cleanliness. These pumpsare designed to give a high throughput (pressure multiplied by pumping speed) at 4 × 10 -3mbar making them ideal for industrial processes that involve large quantities of gases.Applications●●●●●Highest throughput of comparative sized pumpsEarliest crossover pressure of similar sized pumpsExcellent maximum backing line pressure and tolerance to gassurgesComparative pumping speed to similar sized pumpsIntegral cold cap for best performance and low backstreamingDimensions●●●●Vacuum metallurgyDistillation, drying and degassingThin film coating and metallizingLarge-scale researchPerformance CurvesA. Electrical supply connectorB. Water inlet connectorC. Water outlet connector1. Comparative pumping speeds from back to back testing2. ISO pumping speed obtained using total pressure gauges3. ISO throughput obtained using total pressure gaugesShop online at www.edwardsvacuum.com

Technical DataOrdering InformationComparative pumping speed18000 ls -1ISO pumping speed†Nitrogen 8000 ls -1Helium 16000 ls -1Max throughput (nitrogen) 24 mbar ls -118 Torr ls -1Critical backing pressure(DC704EU)1.3 mbar /1 TorrMin backing pump displacementfor max throughput 135 m 3 h -180 ft 3 min -1Recommended backing pump‡ GXS250, E2M175Recommended fluidDC704EUFluid charge (dry)3600 ml / 3.8 qtInlet/backing connection ANSI20/ANSI4 orISO630/ISO160Water connection3/4 inch NPT femaleHeater power12.6 kW / 16.9 hpWarm up time60 minMinimum cooling water flow at25°C 960 l h -1 / 4.2 US gal min -1Pressure drop across coolingwater supply1.2 bar / 17.4 psiWeight275 kg / 605 lbsProduct DescriptionHT20B ANSI20/ANSI4, 200VHT20B ANSI20/ANSI4, 220VHT20B ANSI20/ANSI4, 380VHT20B ANSI20/ANSI4, 400VHT20B ANSI20/ANSI4, 415VHT20B ANSI20/ANSI4, 440VHT20B ANSI20/ANSI4, 460VHT20B ANSI20/ANSI4, 480VHT20B ISO630/ISO160, 200VHT20B ISO630/ISO160, 220VHT20B ISO630/ISO160, 380VHT20B ISO630/ISO160, 400VHT20B ISO630/ISO160, 415VHT20B ISO630/ISO160, 440VHT20B ISO630/ISO160, 460VHT20B ISO630/ISO160, 480VOrder No.B31420200B31420220B31420380B31420400B31420415B31420440B31420460B31420480B31422200B31422220B31422380B31422400B31422415B31422440B31422460B314224803Page125† ISO speed and throughout data obtained with total pressuremeasurement. Partial pressure readings typically increase data by~30%. ISO speed measurements are typically 10% less than AVSmeasurements for the same pump.‡ These are given for guidance, please contact Edwards for arecommendation of pump combinations best suited to yourapplication.Shop online at www.edwardsvacuum.com

18B4B Vapour Booster Pump3Page126Features & BenefitsThe Edwards 18B4B vapour booster pumps offer higher pumping speeds, of up to 6000 l s -1at pressures intermediate between mechanical boosters and diffusion pumps. Vapourboosters from Edwards have been proven in the field for over 30 years. With a constantprogram of updates and modernisation, with input from OEM’s and end users, combinedwith inherent reliability, ease of use and tolerance to various inlet and exhaust pressuresthey have been used extensively in metallurgy and coating industries as well as otherspecialist applications.Applications●●●●●Very large pumping speed at high operating pressuresVery high throughput at operating pressuresQuick crossover for excellent pump down timesIndustry proven for over 40 yearsExcellent reliabilityDimensions●●●●Vacuum metallurgyDistillation, drying and degassingThin film coating and metallizingLarge-scale researchPerformance CurvesB. Position of base securing holes 3 x 7/16 inch (12.7mm) diameter on 21 5/8 inch (549mm) p.c.d.Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationPumping speedair 4000 ls -1hydrogen 6000 ls -1Maximum throughput 100 mbar ls -1 /75 Torr ls -1Critical backing pressure 2-2.6 mbar /(with AP201 fluid)1.5-2 TorrRecommended backing pumpdisplacement 190 m 3 h -1 /112 ft 3 min -1Recommended backing pump GXS450, E2M275Recommended fluidApiezon® AP201Fluid charge10 litre / 9.5 qtInlet connection8x11mm holes on 387.4 PCD(Edwards) /ANSI 12 inch / ISO320Backing connection 2 inch union (Edwards) /ANSI 4 inch / ISO160Water connection -Heater power6.0 kW / 8 hpWarming up time for fullperformance atmaximum heater input60 minMinimum water flow inletWater block threaded holeWeight375 l h -1 @ 20 o C / 1.8 US galmin -1 @ 20 o C½ inch BSP165 kg / 365 lbs3Page127Shop online at www.edwardsvacuum.com

30B5M Vapour Booster Pump3Page128Features & BenefitsThe Edwards 30B5M vapour booster pumps offer higher pumping speeds, of up to15000 ls -1 at pressures intermediate between mechanical boosters and diffusion pumps.Vapour boosters from Edwards have been proven in the field for over 30 years. With aconstant program of updates and modernisation, with input from OEM's and end users,combined with inherent reliability, ease of use and tolerance to various inlet and exhaustpressures they have been used extensively in metallurgy and coating industries as well asother specialist applications.Applications●●●●●Very large pumping speed at high operating pressuresVery high throughput at operating pressuresQuick crossover for excellent pumpdown timesIndustry proven for over 40 years and continuously updated tosuit OEM and end-user requirementsExcellent reliabilityDimensions●●●●Vacuum metallurgyDistillation, drying and degassingThin film coating and metallizingLarge-scale researchPerformance CurvesHeaters may be withdrawn either end; allow 1524 mm for this purpose.A = Dia. 100 mm boiler cleaning point.Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationPumping speedair 12500 ls -1hydrogen 15000 ls -1Maximum throughput 300 mbar ls -1225 Torr ls -1Critical backing pressure 5.3-6 mbar(with AP201 fluid)4-4.5 TorrRecommended backing pumpdisplacement 290 m 3 h -1Recommended backing pump†Recommended fluidFluid chargeInlet connectionBacking connectionWater connectionHeater powerWarming up time for fullperformance atmaximum heater input171 ft 3 min -1GXS450, E2M275Apiezon® AP20155 litre / 52 qt12 x 20.60 holes on 686.0 PCD4 x 16.70 holes on 235.0 PCD1 inch BSP22.5 kW / 30 hp60 minProduct Description30B5M, 380V, 3Ø, 50/60 Hz with Terminal Box30B5M, 400V, 3Ø, 50/60 Hz with Terminal Box30B5M, 415V, 3Ø, 50/60 Hz with Terminal Box30B5M, 440V, 3Ø, 50/60 Hz with Terminal Box30B5M, 460V, 3Ø, 50/60 Hz with Terminal Box30B5M, 480V, 3Ø, 50/60 Hz with Terminal BoxOrder No.B06407380B06407400B06407415B06407440B06407460B064074803Page129Minimum water flow inlet2250 l h -1 @ 20 o CWeight9.9 US gal min -1 @ 20 o C620 kg / 1367 lbs† These are given for guidance, please contact Edwards for arecommendation of pump combinations best suited for yourapplication.Shop online at www.edwardsvacuum.com

Vapour Pumps for Scientific Instruments and R&D ApplicationsData summary vapour pumps3Page130Pump 63/150M 63/150C63/150PPumping speed (M&P/C)Nitrogen l s -1 135 150Hydrogen l s -1 200 225Minimum backing m 3 h -1 5 5pump displacement *Inlet connection ISO63 ISO63Backing connection NW10 NW10Scientific and R&D applications require special vapour pumps andaccessories. It is important to minimize any backstreaming of thevapour pump fluid, and the number of elastomer seals used in systemdesign needs to be kept to a minimum, to give clean pumping withOil charge capacityHeater PowerWeight (M&P/C)60 ml450 W9 kg / 5 kg60 ml450 W9 kg / 5 kgminimal outgassing. For bench-top or transportable instruments,Pump 100/300M 100/300Ccompact air-cooled pumps are essential.100/300P 100/300FEdwards offers a range of vapour pumps and accessories which aredesigned to meet these needs.Diffstak Vapour Diffusion PumpsThe compact water-cooled Diffstak pumps with an integral cooledbaffle offer exceptionally clean pumping with very low backstreaming,reduced outgassing, and a reduction in the number of elastomerseals required for installation.The Diffstak design has been proven over many years with thousandsof pumps installed. They are supplied in two types: standard, andunvalved. (C – collar model pumps).Pumping speed (M&P/C)NitrogenHydrogenMinimum backingpump displacement *Inlet connectionBacking connectionOil charge capacityHeater Powerl s -1l s -1m 3 h -1 2805005ISO100NW25125 ml650 W3005355ISO100 / 6inchNW25125 ml650 WThe Edwards Diffstak 63 (ISO 63 inlet), 100 (ISO100 inlet), 160Weight (M/P/C/F) 12 kg / 13 kg / 12 kg / 13 kg /(ISO160 inlet), 250 (ISO250 inlet), design has been proven over9 kg / 10 kg 9 kg / 10 kgmany years with thousands of pumps installed.The standard Diffstak pumps have integral high vacuum valves and Pump 160/700M 160/700Cwater-cooled baffles, which are supplied as either manually operated160/700P 160/700F(M-model pumps) or pneumatically operated (P-model pumps).Pumping speed (M&P/C)When comparing pumping speeds, note that the speeds quoted forNitrogen l s -1 700 760valved Diffstaks are the speeds above the high vacuum valve, takingHydrogenfull account of the valve's impedance.l s -1 1300 1410The unvalved Diffstaks are for systems requiring the highest possibleMinimum backing m 3 h -1 12 12pump displacementultimate vacuum or for those which do not need a high vacuum valve.All sizes are available with ISO flanges while two sizes are alsoInlet connection ISO160 ISO160 / 8available with CF flanges. (F – ConFlat ® model pump).inchThe complete range is shown in the table below. Refer to thefollowing pages for full technical data for each of the pumps and alsofor full details of installations, spares and accessoriesBacking connectionOil charge capacityHeater PowerNW25250 ml1350 WNW25250 ml1350 WStandardUnvalved DiffstakWeight (M/P/C/F) 26 kg / 27 kg / 26 kg / 27 kg /18 kg / 20 kg 18 kg / 20 kgDiffstak ISO Flange CF Flange63/150M or P 63/150C –Pump 250/2000M 250/2000C100/300M or P 100/300C 100/300F250/2000P160/700M or P 160/700C 160/700FPumping speed (M&P/C)250/2000M or P 250/2000C –Nitrogen l s -1 2000 2130Hydrogen l s -1 3000 3200The following table shows the critical backing and ultimate pressuresMinimum backing mfor the diffusion pump range:h -1 40 40pump displacement *Critical Backing Ultimate Pressure Inlet connection ISO250 ISO250PressureBacking connection NW40 NW40Fluid (mbar) (mbar)Oil charge capacity 500 ml 500 mlSantovac ® 5 0.6 5 × 10 -9Heater Power 2250 W 2250 WSilicone 702 1.2 7 × 10 -6Weight (M/P/C) 59 kg / 60 kg / 59 kg / 60 kg /Silicone 704 0.8 7 × 10 -846 kg 46 kgConFlat ® is a registered trademark of Varian, IncSantovac ® is a registered trademark of Santovac Fluids, Inc, USAShop online at www.edwardsvacuum.com*. For maximum throughput. (63/150M and 63/150P – For applications where maximumthroughput is not required, use an RV3.)

Ordering informationProduct descriptionOrder No.Standard Diffstak 63/150M110-125 V 1-ph 50/60 Hz B34431976210-225 V 1-ph 50/60 Hz B34431977230-250 V 1-ph 50/60 Hz B34431978Standard Diffstak 63/150P110-125 V 1-ph 50/60 Hz B34432976210-225 V 1-ph 50/60 Hz B34432977230-250 V 1-ph 50/60 Hz B34432978Unvalved Diffstak 63/150C110-125 V 1-ph 50/60 Hz B34433976210-225 V 1-ph 50/60 Hz B34433977230-250 V 1-ph 50/60 Hz B34433978Supplied with: NW10 elbow, NW10 centring-ring,NW10 clamp, water pipe couplings and ferrules, inletISO 63 Co-Seal.Standard Diffstak 100/300M110-125 V 1-ph 50/60 Hz B34631976210-225 V 1-ph 50/60 Hz B34631977230-250 V 1-ph 50/60 Hz B34631978Standard Diffstak 100/300P110-125 V 1-ph 50/60 Hz B34632976210-225 V 1-ph 50/60 Hz B34632977230-250 V 1-ph 50/60 Hz B34632978Unvalved Diffstak 100/300C110-125 V 1-ph 50/60 Hz B34633976210-225 V 1-ph 50/60 Hz B34633977230-250 V 1-ph 50/60 Hz B34633978Unvalved Diffstak 100/300F110-125 V 1-ph 50/60 Hz B34640976210-225 V 1-ph 50/60 Hz B34640977230-250 V 1-ph 50/60 Hz B34640978Unvalved Diffstak 100/300D120V 1-ph 50/60HzB34642968Supplied with: NW25 elbow, NW25 centring-ring,NW25 clamp, water pipe couplings and ferrules inletISO Co-Seal (C version only).Product descriptionOrder No.Standard Diffstak 160/700M110-125 V 1-ph 50/60 Hz B34831976210-225 V 1-ph 50/60 Hz B34831977230-250 V 1-ph 50/60 Hz B34831978Standard Diffstak 160/700P110-125 V 1-ph 50/60 Hz B34832976210-225 V 1-ph 50/60 Hz B34832977230-250 V 1-ph 50/60 Hz B34832978Unvalved Diffstak 160/700C110-125 V 1-ph 50/60 Hz B34833976210-225 V 1-ph 50/60 Hz B34833977230-250 V 1-ph 50/60 Hz B34833978Unvalved Diffstak 160/700F110-125 V 1-ph 50/60 Hz B34840976210-225 V 1-ph 50/60 Hz B34840977230-250 V 1-ph 50/60 Hz B34840978Supplied with: NW25 elbow, NW25 centring-ring,NW25 clamp, water pipe couplings and ferrules, inletISO 160 Co-Seal (C version only).Standard Diffstak 250/2000M110-125 V 1-ph 50/60 Hz B35031976210-225 V 1-ph 50/60 Hz B35031977230-250 V 1-ph 50/60 Hz B35031978Standard Diffstak 250/2000P110-125 V 1-ph 50/60 Hz B35032976210-225 V 1-ph 50/60 Hz B35032977230-250 V 1-ph 50/60 Hz B35032978Unvalved Diffstak 250/2000C110-125 V 1-ph 50/60 Hz B35033976210-225 V 1-ph 50/60 Hz B35033977230-250 V 1-ph 50/60 Hz B35033978Supplied with: NW40 elbow, NW40 centring-ring,NW40 clamp, water pipe couplings and ferrules, inletISO 250 trapped O-ring.3Page131Shop online at www.edwardsvacuum.com

Diffstak Installation3Page132• M-model pumps have a manually operated high vacuum valve.P-model pumps have a pneumatically operated high vacuumvalve. Both M-model and P-model pumps have inlet flanges whichare compatible with ISO flanges: the internal diameter of the inletflange is narrower and the flange is deeper than a standard ISOflange, to accommodate the high vacuum valve.• C-model pumps do not have a high vacuum valve and have an ISOflange on the inlet.• F-model pumps do not have a high vacuum valve and have a CFflange on the inlet.63/150, 100/300, 160/700 InstallationRefer to the diagrams and the tables on these pages to identify thepipeline components and valves required to complete the typicalDiffstak installation shown. Items supplied with the pump are shownas a dotted line. Read the footnotes below the diagrams and thetables for more information and for details of the installationrequirements for the different models of Diffstaks.3 ** 12910 *** 5P5P7654*4P4P*8Diagram Component 63/150 Component 100/300 Component 160/700 ComponentKey Description Size Quantity Size Quantity Size Quantity1 2 ISO tube/collar assembly ISO63 1 ISO100 1 ISO160 12 2 3 Rotable flange pack ISO63 1 ISO100 1 ISO160 13 4 Bolts (size × minimum length, mm)M- and P-model M8 × 75 4 M8 × 75 8 M10 × 90 8F-model – – M8 × 55 16 M8 × 60 204 5 Inlet seal ISO63 1 ISO100 1 ISO160 15 BRV valve, manual BRV10M 1 BRV25M 1 BRV25M 1BRV valve, pneumatic BRV10P 1 BRV25P 1 BRV25P 16 Clamp NW10 1 NW25 1 NW25 17 O-ring assembly NW10 1 NW25 1 NW25 18 6 4-port light-weight electropneumatic – 2 – 2 – 2control valve9 6 5-port electropneumatic control valve – 1 – 1 – 110 *** 5-port electropneumatic control valve – 1 – 1 – 11 These items are supplied with the pumps, except that the inlet seal for the F-model pumps is not supplied.2 Not required for F-model pumps; use CF fittings.3 Not required for C-model pumps; use claw clamps to bolt the pump ISO inlet flange directly to the ISO tube/collar assembly.4 Bolts are not available from Edwards. Bolts are not required for C-model pumps; use claw clamps to bolt the pump ISO inlet flange directly to the ISO tube/collar assembly; use 4 clawclamps for ISO63, ISO100 and ISO160 flanges.5 These inlet seals are suitable for standard, C-model pumps only; use CF fittings for F-model pumps.6 Required only for pneumatic operation BRV valves; use either 1 5-port control valve or 2 4-port control valves. If you use 2 4-port control valves, you can use the isolation position of theBRV valve.7 Required only for P-model pumps, to control the operation of the high vacuum valve.Shop online at www.edwardsvacuum.com

250/2000 Installation3711163P10**5P25769*7 63P87610 ** 4 *3Page1335Diagram Component ComponentKey Description Size Quantity1 ISO tube/collar assembly ISO250 12 2 Rotatable flange pack ISO250 13 3 Bolts (size, minimum M10 × 110 12length, mm) M- & P-model4 Inlet seal, trapped O-ring ISO250 15 PV40 valve, manual PV40MK 2PV40 valve, pneumatic PV40PK 26 Clamp NW40 57 O-ring assembly NW40 58 T-piece NW40 1 1 These items are supplied with the pump.9 Elbow NW40 110 4 3-port electropneumaticcontrol valve 211 5 5-port electropneumatic –control valve12 Not required for C-model pumps; use 6 claw clamps to bolt the pump ISO inlet flangedirectly to the ISO tube/collar assembly.3 Bolts are not available from Edwards. Bolts are not required for Model-C pumps; use6 claw clamps to clamp the pump ISO inlet flange directly to the ISO tube/collarassembly.4 Required only for pneumatic operation PVPK valves; use 1 3-port control valve foreach of the two PVPK valves.5 Required only for P-model pumps, to control the high vacuum valve.Shop online at www.edwardsvacuum.com

Vapour Pump Spares3Page134Product descriptionOrder No.Diffstak 63 Heater (0.45 kW)110-125 V H01700182210-225 V H01700186230-250 V H01700191Diffstak 100 Heater (0.4 kW)120 V H01700226Diffstak 100 Heater (0.65kW)110-125 V H01700199210-225 V H01700097230-250 V H01700190Diffstak 160 Heaters (one of each power required)110-125 V 0.35 kW H01700102210-225 V 1 kW H01700059230-250 V 0.35 kW H01700107210-225 V 1 kW H01700063230-250 V 0.35 kW H01700113230-250 V 1 kW H01700054Diffstak 250 Heaters (one of each power required)110-125 V 0.85 kW H01700140110-125 V 1.4 kW H01700161210-225 V 0.85 kW H01700134210-225 V 1.4 kW H01700155230-250 V 0.85 kW H01700137230-250 V 1.4 kW H01700158HT10 Heater 1700 W, 50/60 Hz, 3-ph(three required)200 V H01706010220 V H01706011380 V H01706012400 V H01706013415 V H01706014460 V H01706015480 V H01706016HT16B Heater, 1500 W, 50/60 Hz, 3-phase(six required)200 V H01706020220 V H01706021380 V H01706022400 V H01706023415 V H01706024440 V H01706028460 V H01706025480 V H01706026HT20B Heater, 1400 W, 50/60 Hz, 3-phase(nine required)200 V H01706113220 V H01706114380 V H01706115400 V H01706116415 V H01706117440 V H01706118460 V H01706119480 V H01706120Shop online at www.edwardsvacuum.com

Notes3Page135Shop online at www.edwardsvacuum.com


Measurement & Control4TIC Instrument Controllers 140Profibus Communications Module 142Page137ADC Active Digital Controllers 144APG100 Active Pirani Vacuum Gauge 146APGX-H Active Linear Convection Gauges 148ATC Active Thermocouple Gauge 150ASG Active Strain Gauge 152AIM Active Inverted Magnetron Gauge 156WRG Active Wide Range Gauge 158AIGX Active Ion Gauge 160Model 1575 Pressure Display 162CG16K Capsule Dial Gauge 163IS16K Vacuum Interlock Switch 164VS16K Adjustable Vacuum Switch 165Gascheck Leak Detectors 166Shop online at www.edwardsvacuum.com

Vacuum Measurement and Control Systems4Page138The Edwards range of instruments offers:• Measurement over the range 2000 to 10 -11 mbar• Advanced microprocessor based controllers• Calibration of instruments to UK national standardsSelecting Your Vacuum GaugeEdwards offers a wide choice of vacuum measurement and controlproducts – from dial gauges to microprocessor based gaugecontrollers. Within each product range, there is a family of modelsdesigned to meet the widest user specification.The first step in selecting the right gauge to meet your application isto decide the range of pressures that you want to measure at each ofyour measuring points. The chart below indicates the broad pressureranges covered by the spectrum of Edwards instruments: use thischart as a primary guide to the choice of gauge head.The second step is to establish your requirement for the output of thepressure measurement. If you simply want an indication that a certainlevel of vacuum has been reached (for example, to open a valve orstart a process), then a vacuum switch or Active gauge head alonemay be appropriate. If you want to display the pressure locally, thena dial gauge may be suitable. If you need the pressure display to beremote from the measurement point (for example, in a control panel)then select the TIC Instrument Controller or Active Digital Controller,depending on the features you require. (You will also need to selectappropriate gauge head(s) to accompany these displays andcontrollers.) If your control system (such as a PLC, PC or dedicatedmicroprocessor controller) needs to know the pressure to makesequence decisions but you do not need a separate vacuum display,then you can use an Active gauge head as a stand-alone transducerconnected to an appropriate power supply and control system analoginput.Thirdly, you need to select a gauge suitable for the process gasesand constructed to withstand exposure to the external environment ofyour vacuum system. Consider both whether the gauge will survive inthe process and also whether the process gases will effect thegauge's measurement. For example, the measurement made bymechanical gauges (vacuum switches, dial gauges, strain gaugesand capacitance manometers) is not affected by gas composition,whereas that made by other types of gauges is gas dependent.Calibration for Different GasesAll of our gauge heads are calibrated for dry nitrogen; the calibrationfor dry air is the same. If you use thermal conductivity or ionizationgauges with gases other than nitrogen or air, you may need to applya gas correction factor for an accurate indication of your systempressure. Please contact us if you need more information.Gauge Head InstallationHow you install the gauge head into your vacuum system will affectthe accuracy and reliability of your pressure measurement. For bestperformance we recommend that you:• Connect the gauge head to your vacuum system with a straight,short branch pipe. This pipe should have an internal diameter noless than that of the gauge tube itself. Long, narrow or angledconnections can cause a significant measurement error. Note thatthe indicated pressure may be higher or lower than the actualpressure.• Connect the gauge head as close as possible to the point whereyou want to measure the system pressure.• Orientate the gauge head so that it is vertical, with the connectionto the vacuum system at its base. This prevents debris falling intothe gauge.10 -11 10 -10 10 -9 10 -8 10 -7 10 -6 10 -5 10 -4 10 -3 10 -2 10 -1 1 0 10 2 10 3 mbarUltra High Vacuum High Vacuum Medium Vacuum Low VacuumACTIVE STRAIN GAUGECG16KACTIVE THERMOCOUPLE GAUGEACTIVE PIRANICAPACITANCE MANOMETERACTIVE INVERTED MAGNETRONWIDE RANGE GAUGEACTIVE ION GAUGEACTIVE ION GAUGE CONTROLLERShop online at www.edwardsvacuum.com

The Active Gauge Concept• Operate from standard power supplies for simple installation• Gauge type identification signal and common 0-10 V d.c. output• Cable lengths of up to 100 m for remote operation• Range of microprocessor based controllers• The Active gauge range with TIC Instrument Controller givecontinuous measurement from 2000 mbar to 10 -11 mbar• Low cost analog and digital displays and controllers availableEdwards Active vacuum gauges and controllers give unrivalledperformance, flexibility and ease of use. Traditionally, vacuumgauges consisted of a sensing element and a separate display/controller. With Edwards' Active gauges, the functions that arespecific to the gauge type (such as signal conditioning andspecialized power supplies) have been moved from the dedicatedcontroller and incorporated in the head itself. Now the gauge headcan be used as a stand-alone transducer: it requires only a simplepower supply and it provides a 2 to 10 V output.Alternatively, you can connect the gauges to a Edwards display oruniversal controller: these will accept all gauge types in anycombination for the most flexible solution.The Active Gauge RangeActive Pirani Gauge A range of Pirani gauges including linearmeasuring from above atmospheric pressure to 10 -4 mbar, withintegral set-point for OEM use.Active Ion Gauge A new range of small self-contained Active iongauges with a measuring range from 5 x 10 -2 to 5 x 10 -10 Torr. Thegauges incorporate degas, automatic emission current switching,automatic filament protection, a push button adjustable set point andstatus indicating LED.Active Inverted Magnetron Operating through the range 10 -2 mbar to10 -9 mbar, with integral set-point for OEM use. A low externalmagnetic active field version is available.Active Wide Range Gauge A range of gauges measuring fromatmosphere to 10 -9 mbar with a linear output and integral set-point forOEM use. A low external magnetic field version is available.Active Thermocouple Gauge A range of gauges measuring fromatmosphere to 10 -3 mbar, with integral set-point for OEM use andLED indication of vacuum status.Active Strain Gauge A range of strain gauges measuring from 2000mbar to 1 mbar. This type of gauge is extremely rugged and offersaccurate, gas independent measurement.Barocel Capacitance ManometersThe Barocel manometers provide high accuracy, high stability, gasindependent pressure measurement making them ideal for a widerange of industrial process, research and calibration applications.Their Iconel/Monel construction means that they can also be usedwith corrosive and radioactive gases.• Accuracy 0.15% of reading• True total pressure measurement, independent of gas species• Very high corrosion resistance• Fast response• Wide range, 4 decade range with single head• Temperature controlled manometers from 45 °C• Excellent stability• Full scale ranges from 1 mbar to 1000 mbar (0.05 Torr to1000 Torr)Active Controllers and DisplaysThe Edwards Active range of gauges can operate as stand-alonepressure transducers requiring only a simple power supply andproviding a 2 to 10 V analog output. If you need a complete vacuummeasuring and display system, we also offer a range of controllersand displays.Our displays and controllers are designed for maximum flexibility andease of use. The range is suitable for bench-top or panel mountingand options include RS232 interfacing.TIC Instrument Controller A compact instrument controller with alarge clear graphical display, an intuitive user interface and serialcommunications providing full remote control and data loggingfunctions for one or more TIC systems via a new Windows TM basedPC program.The controller supports, automatically recognises and controls up tosix gauges from the Edwards range (including IGC and up to threeBarocels), with coverage from 2000 to 6.6 x 10 -10 mbar. Low pressuregauges may be controlled and protected by high pressure gaugesand there are open collector set point outputs. An optional relay boxuses these outputs to control mains changeover relays.The TIC instrument controller may be either rack or bench mountedand provides a useful hub for the flexible operation of a wide range ofvacuum system configurations.Active Digital Controller The Edwards Active Digital Controller (ADC)is a compact single gauge controller and display. It features a brightLED display and simple push-button controls. The ADC automaticallyrecognises compatible Edwards gauges, loads the appropriate lookuptable and displays the pressure in commonly used vacuum units.The ADC is available in standard and enhanced versions. Thestandard controller displays the pressure measured by a single activegauge. The enhanced controller supports two similar gauges – it hastwo variable hysteresis set-points which are linked to 48 V d.c. 1 Achangeover relays and two 0-10 V d.c. analog outputs. To aid systemintegration, the enhanced controller is provided with an RS232interface.When combined with a suitable gauge, such as the Edwards APGX-HConvection Pirani or Wide Range Gauge (WRG), the ADC representsa cost effective means of monitoring and controlling process vacuumin a broad range of applications.Other InstrumentsIn addition to the range of Active gauges, Edwards offers a variety ofmore traditional vacuum measurement and control products.Our simple dial gauges provide rugged, local indication of pressuresfrom atmosphere to 1 mbar and are ideal for vacuum chambers in anindustrial environment. Vacuum switches, with high current ratings,give a simple method of directly controlling loads without the need foradditional relays or power supplies.Gauge Calibration ServiceAll Edwards gauges may either be supplied with a calibrationcertificate or re-calibrated by request.• Provides certificate of calibration traceable to National Standardswhich meets ISO9000 requirements worldwide• Service available for both new and returned instruments• Transducers calibrated separately or with display/controllerAs a leading manufacturer of vacuum instruments, Edwards offers anexpert calibration and repair service with 25 years of experience.Other manufacturers' vacuum instruments including Helium leaks arealso covered. The instruments are calibrated with dry nitrogen; forcalibration with other gases or at specific pressures, please consultEdwards. The option of calibration figures before and afteradjustments and repairs is also available.The range of instruments include:• Active gauges, displays and controllers. Note that Active gaugescan be calibrated on their own, with a display or with a controller.• Capacitance manometers. Note that some types of manometerscan be calibrated as stand-alone instruments, with a controller orwith a pressure monitor, for example the TIC Instrument Controller.• Helium quartz leaks for mass spectrometer leak detectors.Contact Edwards for details.4Page139Shop online at www.edwardsvacuum.com

TIC Instrument ControllerThe TIC Instrument Controller provides compact control with a large, clear graphicaldisplay, an intuitive user interface and serial communications. The supplied WindowsbasedPC program provides full remote setup, control and data logging functions via theRS232 interface.Three TIC Instrument Controllers are available; the three head and six head versions canaccommodate 3 or 6 active gauges. The six head capman version can accept up to threeEdwards Barocel® Capacitance Manometers.4Features & BenefitsDimensionsPage140●●●●●TIC automatically recognizes and controls active gaugesincluding APG100 Pirani, convection, thermocouple, strain,inverted magnetron, wide range and active ion gauges. Toenable complete integration into PC and PLC controlledprocesses, all TIC variants include RS232 and RS485 interface.TIC has six pressure related set points, which operate opencollector outputs rated at 24 V d.c. 50 mA. Using the optionalrelay boxes, these may be linked to 250 V a.c. changeoverrelays to provide a useful accessory control capability. All relayboxes include a logic bypass facility for further systemintegration.In most instances, TIC systems may be simply and quicklyconfigured using the range of standard cables on offer, there istherefore no need for the customer to prepare loom assembliesor relay boxes and special interfaces.TIC includes lookup tables for a range of commonly encounteredprocess gasses (N 2 , He, Ar, CO 2 , Kr & Ne). Selecting theappropriate gas enables direct readout of the correct pressurewithout the need to apply conversion factors.TIC is packaged in a compact case and may be panel or rack (¼19 inch rack 3U) mounted. With the addition of the bezel itbecomes an attractive bench-top instrument. The large 128 x 64pixel backlit graphics LCD and mobile phone style menu systemsimplifies programming and with a choice of summary screensexcellent visibility of displayed parameters is assured.1. Gauge inputs 5. Mains input2. Logic interface 6. Mains on/off3. Serial comms port 7. Analogue outputs4. Earth stud1. Set point relay connection 5. User logic interface4. Tic logic interface connection 7. Earth studThis is the 6 set point version; the 3 set point version is similar.Shop online at www.edwardsvacuum.com

Technical DataElectrical DataConnector type CEE/IEC 320Electrical supply90 to 264 V AC, 47 to 63 Hz3 head TIC 55 VA. 6 Head TICPower consumption160 VAThe unit is self-protecting andhas no user replaceable fuse.FuseThe unit will recover once anyoverload is removed.Earth studM4Operating And Storage DataAmbient operating temperaturerange0 o C to 40 o C (measuredunderneath TIC)Maximum ambient operatinghumidityMax 90% RH non-condensing at40 o CMaximum operating altitude 3000 m maxIP rating 20IEC rated pollution degree 2Mechanical DataWeight1.7 KgInterfacesAnalogue output0-10 V DC – one for each gaugeSerial InterfaceSet-pointsThe TIC has two built-incommunications protocols,RS232 and RS485. These maybe used either to interface to aPLC or, using the WindowsTMPC software package supplied,connected to a PC for fullmonitoring and control of a TICsystem.6 set-point (open collector) ratedat 24V DC 50 mA can beassigned to any gauge. Usedirectly or in conjunction withTIC relay boxes.Ordering InformationProduct DescriptionOrder No.TIC Instrument Controller 3 Head RS232/RS485D39700000TIC Instrument Controller 3 Head RS232/RS485, Certificated D3970000CTIC Instrument Controller 6 Head RS232/RS485D39701000TIC Instrument Controller 6 Head CapmanD39702000TIC Instrument Controller 6 Head RS232/RS485, Certificated D3970100CTIC Instrument Controller 6 Head Capman, CertificatedD3970200CAccessories & SparesOrder No.0.5M Active Gauge Cable D40001005100M Active Gauge Cable AssemblyD4000199910M Active Gauge CableD4000110015M Active Gauge CableD400011501M Active Gauge CableD4000101025M Active Gauge CableD400012503M Active Gauge CableD4000103050M Active Gauge CableD400015005M Active Gauge CableD40001050Linecord 2M North Euro PlugD40013030Linecord 2M UK PlugD40013025Linecord 2m With US PlugD40013120TIC front bezel kitD39700803TIC Logic Interface Cable 2mD39700833TIC Relay Box Instruments (3 x 3A, 250V)D39700804TIC Relay box instruments (6 x 5 A, 250 V)D39701804TIC RS232 Interface Cable 2mD397008344Page141Capacitance manometer compatibility – 6 head capman versionsonly3 x 600 series Barocel®2 x 655 series Barocel®For more information, contact Edwards.Shop online at www.edwardsvacuum.com

Profibus Communications ModuleManufacturers, laboratories and research establishments are converting to fieldbus to takeadvantage of the reduced cabling and network equipment costs.Edwards offers a compact, Din rail mountable module to allow Profibus protocolcommunications with the TIC Turbo and Instrument Controllers, or directly with EdwardsDX/nEXT turbo pumps.4Features & BenefitsThe TIC is a versatile, advanced system controller capable of controlling a series of vacuumpumps and up to three Edwards Active vacuum gauges. The addition of the Profibusmodule allows full advantage to be taken of digital multi-drop communications.DimensionsPage142●●●●●Full Profibus International AccreditationDin Rail Or Rack MountingWide Operating Voltage Range 9 - 52 VSimple Set-upField Software Upgrades AvailableShop online at www.edwardsvacuum.com

Technical DataOrdering InformationElectrical DataElectrical supplyTIC Profibus module9 - 52 V DC 5W (switch onsurge 500 mA)Product DescriptionTIC Profibus Communications ModuleDX/nEXT Pump Profibus Communications ModuleOrder No.D39754000D39755000Ambient operating temperature 0 to 40 °CAmbient storage temperature -30 to 70 °CMax ambient operating humidity90% RH non-condensingMax operating altitude2000 mIP ratingIP30 - indoor use onlyMass0.28 kgConnectorsDC power connector (supplied)Profibus connector2-way receptacle. Mating part iscable mount terminal block(supplied). Suitable partsinclude: Phoenix MSTBV 2.5/2-G-5.08:Weidmuller BLZ 5.08/2:Amp796634-2: IMO 21.950/24Page143Connector type9-way sub-miniature ”D” typesocketProfibus data signalsElectrically compliant withRS485 specification isolatedfrom chassisProfibus power supply10 mA supply (protected forexternal terminator resistors ifrequired)ChassisFor Profibus cable screenconventionRepeater control signalDigital signal, nominally 0-5 Vbut with series 340 ohm resistor.High = module transmitting. Low= receiving or idleRS232 connector TIC version9-way sub-miniature ”D” typeplugRS232 protocol9600 baud, 1 stop bit, 8 databits, no parityRS232 protocol9600 baud, 1 stop bit, 8 databits, no parityCablesProfibus cableShould be screened and complywith EN50170RS232 cable TIC version15 m max. Screening notrequired.DX pump connectionConnection must be eitherdirectly to the DX pump flyinglead or an Edwards DX pumpextension cable.Shop online at www.edwardsvacuum.com

ADC Active Digital ControllerThe Edwards Active Digital Controller (ADC) is a compact single gauge controller anddisplay. It features a bright LED display and simple push-button controls. The ADCautomatically recognizes compatible Edwards gauges, loads the appropriate look-up tableand displays the pressure in commonly used vacuum units.Two versions are available; the standard ADC simply displays the pressure in choice ofunits, and the enhanced ADC includes a second gauge connection, two set-point relays,two analogue outputs and an RS232 interface.The ADC mk2 enhanced controller can now support 2 different gauges e.g. APG100 andAIM.4Features & BenefitsDimensionsPage144●●●●●Plug and measure operation means you simply plug in the mainssupply, connect the gauge and ADC displays the measuredpressureThe ADC supports Edwards gauges with a total measuringrange of 2000 to 1 x 10 -9 mbar (1500 to 7.5 x 10 -10 Torr)Bright LED display gives clear, long distance readabilityThe ADC displays units in mbar, Torr, Pascal or VoltsSmall 1/8 DIN enclosure, may be panel or bench mountedShop online at www.edwardsvacuum.com

Technical DataActive gauge compatibilityAPG100, APG-L, APG-MP,StandardAPG-M, APGX-H, APGX-L,WRGUp to two gauges from theEnhancedstandard version plus AIM-X,AIM-S & ASGHigh brightness green LEDDisplaydisplay (0.47 inch high)Units - mbar/Torr/Pa/VoltsElectrical supply100 to 240V AC 47 to 63 HzDimensional Data92 + 0.8 x 45 + 0.6 mmPanel cut-out(3.62inch x 1.77 inch) toDIN43700Panel thickness1.5mm (0.06 inch) MinWeight0.33KgOperating and storage dataOperating temperature +0 to +40°CStorage temperature-30 to +70°C90% RH non condensing atMax ambient operating humidity40°CStandardsElectrical safety BS EN 61010-1BS EN 61326 (IndustrialElectrical noise immunitylocation, class B emissions)Flame retardant case materials UL94 V1Enclosure ratingIP40Enhanced featuresTwo analogue output0-10V d.c.Two set-point relays, volt free1A at 48V d.c. / 2A at 24V d.c.single pole change-overSerial outputRS232Ordering InformationProduct DescriptionOrder No.ADC StandardD39590000ADC mkII EnhancedD39591500ADC Standard, CertificatedD3959000CADC mkII Enhanced, CertificatedD3959150CAccessories & SparesOrder No.0.5M Active Gauge Cable D40001005100M Active Gauge Cable AssemblyD4000199910M Active Gauge CableD4000110015M Active Gauge CableD400011501M Active Gauge CableD4000101025M Active Gauge CableD400012503M Active Gauge CableD4000103050M Active Gauge CableD400015005M Active Gauge CableD40001050Linecord 2M North Euro PlugD40013030Linecord 2M UK PlugD40013025Linecord 2m With US PlugD40013120TIC RS232 Interface Cable 2mD397008344Page145Shop online at www.edwardsvacuum.com

APG100 Active Pirani Vacuum GaugeFeatures include compact size for easy installation, a linear output, and a replaceablesensor tube. The new gauges are compatible with all Edwards TIC instrument controllersand other active gauge controllers and displays. They are also CSA, C/US approved as wellas fully RoHS compliant due to their lead-free construction.4Features & BenefitsPerformance CurvesPage146●●●●●Cable connections and gauge adjustment conveniently located,thereby minimizing the space envelope required for accessSensor tube can be baked to 150 o CAdjustable set-point for simple process control and interlockingRemote calibration possibleCSA, C/US approvedDimensionsOrdering InformationProduct DescriptionOrder No.APG100-XM, NW16D02601000APG100-XM, NW25D02602000APG100-XLC, corrosion resistant, NW16D02603000APG100-XLC, corrosion resistant, NW25D02604000APG100-XM, NW16, CertificatedD0260100CAPG100-XM, NW25, CertificatedD0260200CAPG100-XLC, NW16, CertificatedD0260300CAPG100-XLC, NW25, CertificatedD0260400CAPG100-XM, DN16CFNRD710000APG100-XLC, DN16CFNRD712000Accessories & SparesOrder No.Spare APG100-XLC electronics moduleD02603800FlangeNW16X30 mm (1.18 inch)Spare APG100-XM electronics moduleSpare mesh filter for APG100 pack of 5D02601800D02601805NW2540 mm (1.57 inch)Spare sensor for APG100-XLC NW16 flangeD02603801Spare sensor for APG100-XLC NW25 flangeD02604801Spare sensor for APG100-XM NW16 flangeD02601801Spare sensor for APG100-XM NW25 flangeD02602801Spare sensor for APG100-XM DN16CF flangeNRD711000Spare sensor for APG100-XLC DN16CF flangeNRD713000Shop online at www.edwardsvacuum.com

Technical DataMass85 gInternal volume 5 cm 3Enclosure ratingMeasurement range(APG100-XM)Measurement range(APG100-XLC)Accuracy (APG100-XM)Accuracy (APG100-XLC)Maximum over-pressureOperating temp rangeStorage temp rangeBake-out with no electronicsHumidityMaximum altitudeFilament temperatureElectrical supply voltagePower consumptionOutput signalSet-point – open collectortransistorRatingRange of set-pointFixed hysteresisLevel setting resolutionIP40Atmosphere to 10 -3 mbarAtmosphere to 10 -4 mbarTypically +/- 15% at

APGX-H Active Linear Convection GaugeEdwards Linear Convection Vacuum Gauge has a wide measuring range from 1333 to 3 x10 -4 mbar (1000 to 2.3 x 10 -4 Torr). The use of convection technology ensures accuracy andsensitivity are maintained to the top of the range.The gauge is compact and may be mounted in any orientation, simplifying installation wherespace is limited. The gauge incorporates a setpoint and two LEDs, which indicate setpointand gauge status.4Features & BenefitsDimensionsPage148●●●●●Wide Measuring Range 1333 to 3 x 10 -4 mbar (1000 to 2.3 x 10 -4Torr)Use of convection technology ensures consistent measuringaccuracy (typically ±15%) and repeatability (±5%) to top of rangeReduced Cost of OwnershipReplaceable tubes are availableCSA, C/US ApprovedANW16 Al75mm / 2.95inchNW16 St St75mm / 2.95inchNW25 St St75mm / 2.95inchPerformance CurvesTechnical Data1/8 inch NPT St St 87mm / 3.42inchPressure rangePower supplyPower consumptionAccuracyRepeatabilityResolutionResponse timeMaximum overpressureAdjustmentsSetpoints† (open collectortransistor)1333 to 3 x 10 -4 mbar(1000 to2.3 x 10 -4 Torr)14.5 to 30 V DC1.5 W maximum±15% of reading ±3 x 10 -4 mbar±5% of reading6mV increments< 100 ms10 bar absolute (145 psia)Set vacuum and setatmosphere. To allow forvariations in barometricpressure, atmosphere may beset in the range 700 to 1100mbar (525 to 825 Torr).Range of setpoint 1.8 to 9.3 VRating 30 V DC 100 mAFixed hysteresis (1/2 decade)500 mV† The setpoint output will be turned off if an error is detected. Forfurther information, please contact Edwards.Shop online at www.edwardsvacuum.com

Ordering InformationProduct DescriptionOrder No.APGX-H-NW16, aluminiumD02391000APGX-H-NW25 ST/STD02392000APGX-H-NW16 ST/STD02395000APGX-H 1/8” NPT ST/STD02396000APGX-H-NW16 Aluminium, CertificatedD0239100CAPGX-H-NW16 ST/ST, CertificatedD0239500CAPGX-H-NW25 ST/ST, CertificatedD0239200CAPGX-H 1/8” NPT ST/ST, CertificatedD0239600CAccessories & SparesOrder No.0.5M Active Gauge Cable D40001005100M Active Gauge Cable AssemblyD4000199910M Active Gauge CableD4000110015M Active Gauge CableD400011501M Active Gauge CableD4000101025M Active Gauge CableD400012503M Active Gauge CableD4000103050M Active Gauge CableD400015005M Active Gauge CableD40001050AGC EPROM Upgrade KitD38660800APGX-H Electronics ModuleD02391800APGX-H Filter Pack 5 (not NPT version)D02391805NW16 AL TUBE APGX-H SPARED02391801NW16 STST TUBE APGX-HD02395801NW25 STS TUBE APGX-H SPARED02392801Spare Tube 1/8" NPT ST/STD023968014Page149Shop online at www.edwardsvacuum.com

ATC Active Thermocouple GaugeThe Edwards Active Thermocouple (ATC-E) gauges mount directly on either the ATC-D orATC-M thermocouple tubes to form a compact, stand-alone transducer.The ATC-E electronics module drives both medium and low pressure gauge tubes. Thesegauges offer a cost effective measuring solution for higher pressures.4Page150Features & Benefits●●●●●Drive electronics mount directly on the gauge tube whichsimplifies the system design and saves valuable rack spaceWide range, regulated, internal power supply runs from standardd.c. power supplies from +13.5 to +36 V and is tolerant tovoltage fluctuationsStandard analogue outputs of 0 to +10 V d.c. and gaugeidentifier allows for easy interface with a computer or PLC andprovides fault output indicationAdjustable set-point with vacuum status LED can be used forprocess control and interlocking and includes a digital vacuumstatus signal with set-point level ready visuallyLow output impedance and integral Faraday shield provides ahigh level of noise immunity and permits long cable runs of up to100 metersDimensionsApplications●Active thermocouple gauges are ideally suited to applicationswhere a simple rugged gauge is required to measure higherpressures.Performance CurvesA. Allowance for cable and connectorShop online at www.edwardsvacuum.com

Technical DataATC-E Electronics ModulePower supply+13.5 to +36 V d.c. (max 1 Vripple)Power consumption0.54W maximumOutput signalOperating2 to 10 V d.c.Fault output0 to 2 V d.c., 10 to 13.5 V d.c.Output impedance0.1 ohmsMinimum load10 k ohmsTube Type SelectionAdjustmentsAdjust set point visually viapotentiometerSet pointOpen collector transistorRange of set point2 to 85 full scale voltageFixed hysteresis12 full scale voltageLevel setting±2 full scale voltageRating40 V d.c., 100 mA maximumTemperature rangeOperating+5 to +60 o CStorage0 to +70 o CWeight110 gExternal interface connector 8 way FCC68 / RJ45 socketATC-D, ATC-M gauge tubesPressure rangeATC-D50 to 5 x 10 -2 Torr65 to 6.5 x 10 -2 mbarATC-M1 to 1 x 10 -3 Torr1.3 to 1.3 x 10 -3 mbarMaximum overpressureATC-D10 bar absoluteATC-M3.4 bar absoluteWeight55 gInternal volumeATC-D 1 cm 3ATC-M 8 cm 3Ordering InformationProduct DescriptionOrder No.ATC-E Electronics moduleD35108000ATC-D 1/8 inch NPT gauge tubeD35512000ATC-M 1/8 inch NPT gauge tubesD35513000Accessories & SparesOrder No.0.5M Active Gauge Cable D40001005100M Active Gauge Cable AssemblyD4000199910M Active Gauge CableD4000110015M Active Gauge CableD400011501M Active Gauge CableD4000101025M Active Gauge CableD400012503M Active Gauge CableD4000103050M Active Gauge CableD400015005M Active Gauge CableD40001050NW10 Adapter Pipe 1/8NPT Female S/SC10501072Surge Protector BoxD400060004Page151For more information, contact Edwards.Shop online at www.edwardsvacuum.com

ASG Active Strain GaugeThe Edwards Active Strain Gauge (ASG) is a rugged, corrosion resistant diaphragm gaugewhich provides accurate, gas independent measurement from 2000 mbar to 1 mbar. It canbe used as a stand-alone transducer allowing OEMs and system builders to develop lowcost, flexible solutions to their vacuum instrumentation needs. Alternatively, it can beconnected to the TIC Instrument Controller where it can be combined with many othersensor types to provide a complete vacuum instrument solution.Note: ASG adaptor cable supplied separately. This cable must be used with TIC, AGC,ADC & ADD.4Page152Features & Benefits●●●●●Drive electronics combined in the gauge head which simplifiessystem design and saves valuable rack spaceWide range, regulated internal power supply which runs fromstandard d.c. power supplies of +13.5 to +36 V and is tolerant tovoltage fluctuationsStandard analogue output of 0 to 10 V d.c. which is easy tointerface with a computer or PLCHigh accuracy and stability. Accuracy of ±0.2 full scale andstability 0.2 full scaleCorrosion resistant, rugged design where the only materialexposed to vacuum is stainless steel 316DimensionsApplications●●Active strain gauges are an excellent choice where accurate,gas independent, measurement of pressures aroundatmosphere are required, making them ideal for applicationssuch as load locks.It can be used as a stand-alone transducer allowing OEMs andsystem builders to develop low cost, flexible solutions to theirvacuum instrumentation needs. Alternatively, it can beconnected to the TIC Instrument Controller where it can becombined with many other sensor types to provide a completevacuum instrument solution.Performance CurvesShop online at www.edwardsvacuum.com

Technical DataFull scale pressure rangeAccuracyStabilityTemperature coefficientPower supplyPower consumption1000 mbar±0.2 full scale±0.2 full scale±0.05 full scale per o C+13.5 to +36 V d.c.0.4 WOutput signalOperating0 to 10 V d.c. linearOutput impedance>200 ohmsMinimum load50 k ohmsResponse speed5 m/sAdjustmentsSet full scale and set zeroTemperature rangeCompensated+10 to +50 o COperating-20 to +90 o CMaterials exposed to vacuum Stainless steel 316Internal volume 1.25 cm 3Weight120gElectrical connectorMiniature 4 pin DinVacuum fitting1/8 Inch NPTStandardsOverall design EN 61010-1Electromagnetic compatibility EN 61326 (Class B Emissions)Enclosure ratingIP65Ordering InformationProduct DescriptionOrder No.ASG 1/8 Inch NPT, 1000 mbarD35725000ASG NW16, 1000 mbarD35726000ASG NW16, 2000 mbarD35728000ASG 1/8 Inch NPT, 2000 mbarD35727000ASG 1/8 Inch NPT, 1000 mbar, CertificatedD3572500CASG NW16, 1000 mbar, CertificatedD3572600CASG 1/8 Inch NPT, 2000 mbar, CertificatedD3572700CASG NW16, 2000 mbar, CertificatedD3572800CAccessories & SparesOrder No.0.5M Active Gauge Cable D40001005100M Active Gauge Cable AssemblyD4000199910M Active Gauge CableD4000110015M Active Gauge CableD400011501M Active Gauge CableD4000101025M Active Gauge CableD400012503M Active Gauge CableD4000103050M Active Gauge CableD400015005M Active Gauge CableD40001050Adapter Cable AGC-ASGD40003160Surge Protector BoxD400060004Page153Shop online at www.edwardsvacuum.com

ASG2 Active Strain GaugeThe Edwards Active Strain Gauge (ASG2) is a rugged, corrosion resistant diaphragmgauge which provides accurate, gas independent measurement from 2000 mbar to 1 mbarand 1000 mbar to 1 mbar. It can be used as a stand-alone transducer allowing OEMs andsystem builders to develop low cost, flexible solutions to their vacuum instrumentationneeds. Alternatively, it can be connected to the TIC Instrument Controller where it can becombined with many other sensor types to provide a complete vacuum instrument solution.Note: ASG adaptor cable supplied separately. This cable must be used with TIC, AGC,ADC & ADD.4Page154Features & Benefits●●●●●Drive electronics combined in the gauge head which simplifiessystem design and saves valuable rack spaceWide range, regulated internal power supply which runs fromstandard d.c. power supplies of +12 to +32 V and is tolerant tovoltage fluctuationsStandard analogue output of 0 to 10 V d.c. which is easy tointerface with a computer or PLCHigh accuracy and stability. Accuracy of ±0.2 full scale andstability 0.1% full scaleCorrosion resistant, rugged design where the material exposedto vacuum is stainless steel 316 L & Hastelloy C276DimensionsApplications●●Active strain gauges are an excellent choice where accurate,gas independent, measurement of pressures aroundatmosphere are required, making them ideal for applicationssuch as load locks.It can be used as a stand-alone transducer allowing OEMs andsystem builders to develop low cost, flexible solutions to theirvacuum instrumentation needs. Alternatively, it can beconnected to the TIC Instrument Controller where it can becombined with many other sensor types to provide a completevacuum instrument solution.Performance CurvesShop online at www.edwardsvacuum.com

Technical DataFull scale pressure range 1000 mbar, 2000 mbarAccuracy±0.2% full scaleStability±0.2% full scaleTemperature coefficient ±0.03% full scale per o CPower supply12 to 32 V d.c.Power consumption0.1 WOutput signalOperating0 to 10 V d.c. linearOutput impedance51 ohmsMinimum load>10 k ohmsAdjustmentsSet full scale and set zeroTemperature rangeCompensated-10 to +50 o COperating-40 to +80 o CMaterials exposed to vacuumStainless steel 316L, HastelloyC276Internal volume 2.78 cm 3Weight150gElectrical connector4 pin Din 43650 Form AVacuum fitting1/8 Inch NPT, NW16StandardsElectromagnetic compatibility EN 61326 -2-J for TransducersEnclosure ratingIP65Ordering InformationProduct DescriptionOrder No.ASG2 1/8 Inch NPT, 1000 mbarD35735000ASG2 NW16, 1000 mbarD35736000ASG2 NW16, 2000 mbarD35738000ASG2 1/8 Inch NPT, 2000 mbarD35737000ASG2 1/8 Inch NPT, 1000 mbar, CertificatedD3573500CASG2 NW16, 1000 mbar, CertificatedD3573600CASG2 1/8 Inch NPT, 2000 mbar, CertificatedD3573700CASG2 NW16, 2000 mbar, CertificatedD3573800CAccessories & SparesOrder No.0.5M Active Gauge Cable D40001005100M Active Gauge Cable AssemblyD4000199910M Active Gauge CableD4000110015M Active Gauge CableD400011501M Active Gauge CableD4000101025M Active Gauge CableD400012503M Active Gauge CableD4000103050M Active Gauge CableD400015005M Active Gauge CableD40001050Adapter Cable AGC-ASGD40003160Surge Protector BoxD400060004Page155Shop online at www.edwardsvacuum.com

AIM-X Active Inverted Magnetron GaugeThe Edwards Active Inverted Magnetron Gauges (AIM) combine the gauge-head andcontroller in one compact Active unit. These gauges have proved to be rugged and reliablein a wide range of applications ranging from scientific instruments to industrial processes.This gauge features a linear output for easy integration with a computer or PLC.4Page156Features & Benefits●●●●●Drive electronics combined in the gauge head which reduces thesystem cost and saves valuable rack spaceLow output impedance and integral Faraday shield provides highlevel of noise immunity and permits long cable runs (up to 100m)Low magnetic field version - XL - for sensitive applications e.g.mass spectrometry and electron microscopy.Interchangeable body tube allows for rapid tube replacementwithout pre-calibrationCSA, C/US approvedDimensionsApplications●All vacuum applications requiring rugged and reliable pressureindication in the range 1 x 10 -2 to 1 x 10 -9 mbar. Typicalprocesses range from general vacuum through industrial coatersand furnaces to scientific instruments and semicon.Performance CurvesShop online at www.edwardsvacuum.com

Technical DataPressure RangeAIM-X10 -2 to 10 -9 mbarAccuracy* Typically ±30%Maximum overpressure 10 bar absolute (145 psi)Power supply+13.5 to +36 V DC (max 1 Vripple)Power consumption2 W MaximumOutput signal2 to 10 V DCSet pointOpen collector transistorMaximum voltage40V DCCurrent100 mA maxTemperature rangeOperating+5 to +60°CStorage0 to +70°CMaterials exposed to vacuumNW25 versionsStainless steel 304 & 306 & 347,fluoroelastomer, glassInternal volume 26 cm 3Weight0.81 kgExternal interface connector 8-way FCC68/RJ45 socketVacuum fittingNW25StandardsElectromagnetic compatibility EN 61326(Class B Emissions)Enclosure ratingIP40*Accuracy is reduced at the limits of the measuring rangeOrdering InformationProduct DescriptionOrder No.AIM-X-NW25D14642000AIM-X-DN40CFD14662000AIM-X-NW25, CertificatedD1464200CAIM-X-DN40CF, CertificatedD1466200CAIM-XL-NW25D14645000AIM-XL-DN40CFD14665000AIM-XL-NW25, CertificatedD1464500CAIM-XL-DN40CF, CertificatedD1466500CAccessories & SparesOrder No.0.5M Active Gauge Cable D40001005100M Active Gauge Cable AssemblyD4000199910M Active Gauge CableD4000110015M Active Gauge CableD400011501M Active Gauge CableD4000101025M Active Gauge CableD400012503M Active Gauge CableD4000103050M Active Gauge CableD400015005M Active Gauge CableD40001050Aim Body Tube Assy - NW25D14545801Aim Body Tube Assy DN40CFD14661801AIM-X Elect & Mag HousingD14642800NW25 Centering Ring 3D Baffle VitonD02110000Spares Kit Aim Body TubeD14545802Spares Kit Aim Body Tube DN40CFD14661802Surge Protector BoxD400060004Page157Shop online at www.edwardsvacuum.com

WRG Active Wide Range GaugeThe Wide Range Gauge (WRG) family offers the capability of single port pressuremeasurement in the range atmosphere to 10 -9 mbar with a linear output. Its a compactsolution, halving the space and connectivity hardware requirement, which can be allimportant in many applications. The WRG has many novel features, including a newpatented striker, pushbutton calibration and set point controls and comprehensivediagnostics. The WRG is a cost-effective vacuum management solution when used eitherwith a Edwards controller or directly integrated into the system controls.4Page158Features & Benefits●●●●●Microprocessor signal processing gives seamless transitionbetween Pirani and magnetron outputs as well as linear output(log pressure scale)D-type version including cable strain relief and enhanced ingressprotection - IP44Low magnetic field version (SL) available for sensitiveapplications e.g. mass spectrometry and electron microscopyEasily programmed set point covering entire measuring rangeMagnetron uses an advanced patented technique for highlyreliable striking, even at high vacuum or in relativelycontaminated conditionsDimensionsApplications●●●Any vacuum system where there is a need to measure pressureover a wide range. The WRG with an AGD represents a verysimple and cost effective means of achieving this.The linear output and equation make WRG’s an attractive optionfor industrial OEM’s where the gauge may be directly integratedinto the process controller.The WRG is suitable for a wide range of HV and UHVapplications, however if your process will spend a significantamount of time between 5x10 -4 and 5x10 -3 mbar then Edwardsrecommend using independent APG100 Pirani and AIM Penninggauges, as this will improve gauge reliability for your application.Performance CurvesShop online at www.edwardsvacuum.com

Technical DataPressure rangeAccuracy *Maximum over pressurePower supplyPower consumptionOutput signalAdjustmentsSet pointMaximum voltageCurrentTemperature rangeOperatingStorageMaterials exposed to vacuum(Both NW and CF versions)Atmosphere to 10 -9 mbar/TorrTypically ±15%

AIGX Active Ion GaugeA compact Active ion gauge with dual yttria coated iridium filaments, a wide measuringrange from 6.6 x 10 -2 to 6.6 x 10 -10 mbar (5 x 10 -2 to 5 x 10 -10 Torr) and a 1 Volt/decade linearoutput.The new AIGX gauge from Edwards incorporates all the benefits of the industry standardActive gauging concept, with integral electronics and replaceable tube. The gauge has adegas facility and includes features to protect and extend the life of the filaments.The AIGX benefits from extremely low emissions of charged particles, which makes it anexcellent choice for processes where background noise is undesirable.4Features & BenefitsPerformance CurvesPage160●●●●●Full 8-decade measurement capability, to 6.6 x 10 -10 mbar (5 x10 -10 Torr).Two versions available, each with three vacuum couplingvariants:‘D’ versions have a 9-pin ‘D’ connector and standard interface;Up to a thirty-fold reduction in charged particle processcontamination compared to leading competitors.Automatic filament protection against switching on atatmosphere and running or degassing at high pressure.DimensionsTechnical DataPressure range6.6 x 10 -2 to 6.6 x 10 -10 mbar(5 x 10 -2 to 5 x 10 -10 Torr)Power supply+14.5 to +30.0 V d.c.Power consumptionNormal operation: 7W (Max),Degas: 14W (Max)Output signalLinear, 1 Volt / decadeResponse time1.33 x 10 -8 mbar(>10 -8 Torr) ˜100 ms1.33 x 10 -8 mbar(

Ordering InformationProduct DescriptionOrder No.AIGX-D-NW25D04860000AIGX-D-DN16CFD04861000AIGX-D-DN40CFD04862000AIGX-D-NW25, CertificatedD0486000CAIGX-D-DN16CF, CertificatedD0486100CAIGX-D-DN40CF, CertificatedD0486200CAIGX-S-NW25, CertificatedD0485000CAIGX-S-DN16CF, CertificatedD0485100CAIGX-S-DN16CFD04851000AIGX-S-DN40CFD04852000AIGX-S-DN40CF, CertificatedD0485200CAIGX-S-NW25D04850000Accessories & SparesOrder No.0.5M Active Gauge Cable D400010051M Active Gauge CableD400010103M Active Gauge CableD400010305M Active Gauge CableD4000105010M Active Gauge CableD40001100AIGX Fuses Spare Pk5D04850805AIGX Tube DN40CFD04852801AIGX Tube Spare DN16CFD04851801AIGX Tube Spare NW25D04850801AIGX-D Electronics Module SPD04860800AIGX-S Electronics Module SPD04850800DN16CF/1.33 Annealed Copper Gasket Pk 5C10001270DN16CF/1.33 Nut & Bolt & Washer M4 Pk 25C10001630DN40CF/2.75 Annealed Copper Gasket Pk 5C10005270DN40CF/2.75 Nut & Bolt & Washer M6 Pk 25C10005630NW25 Trapped O Ring VitonC105144904Page161Shop online at www.edwardsvacuum.com

Model 1575 Pressure DisplayThe Model 1575 Pressure Display is a low cost, microprocessor based, dig-ital display andset-point controller for the Barocel 600, 622 and 655 capac-itance manometers. The Model1575 incorporates power supply, digital display, four user-selectable set-points, along withanalog outputs in a compact 1/8 DIN package.4Features & BenefitsOrdering InformationPage162●●●●●Push button or remote zero adjustmentPush button full scale calibrationThere are four user programmable solid-state, open collectorset-points; two high and two low. The hysteresis bandassociated with each set-point can also be adjusted to meetsystem requirements.Easy to read LED displayOptional RS232 outputProduct DescriptionModel 1575, Analog Output, 115VModel 1575, Analog Output, 230VModel 1575, RS232 Output, 230VModel 1575, RS232 Output, 115VAccessories & SparesCable 1800 To 600 Length 15'Cable 1800 To 655 Length 15'Cable 622 Barocel 1501C/1575Order No.W60810000W60820000W60820004W60810004Order No.W18997005W18992005W18999005Linecord 2M North Euro PlugD40013030Linecord 2M UK PlugD40013025Linecord 2m With US PlugD40013120Technical DataSignal input± 10 V d.c.d.c. outputTransducer input signalA/D resolution± 25000 countsAccuracy1± 0.005% of reading ± 2 countsFull scale temperaturecoefficient20 ppm/ °CZero temperature coefficient 0.001 ppm/ °CZero suppression± 100% of full scaleTransducer supply±15 V d.c. at 250 mA(maximum)Electrical supply(50 - 60 Hz)Standard 230 V ac ± 10%Optional 115 V ac ± 10%Set-points (4 open collectortransistors)Voltage (maximum)50 VCurrent (maximum)100 mAHysteresis (both set-points) 0 - 99 countsControl statusLEDs indicate controls actuatedOperating temp range +0 to +55 °CStorage temp range -40 to +85 °CWarm-up time (at 25 °C) 30 minutesElectronic safety EN 61010-1Electromagnetic compatibilityEN 61326 Industrial Location,Class A EmissionsList of compatible transducers Barocel® 600, 655Shop online at www.edwardsvacuum.com

CG16K dial gaugeEdwards CG16K capsule dial gauges are barometrically compensated with NW flangefittings. Designed to cover the range of 0 to 1040 mbar, these robust gauges provideaccurate, repeatable performance even at low pressures making them equally suited fornon-corrosive process plant or for laboratory applications. Fitting is simple: the gauges canbe mounted direct or panel mounted using the kit supplied.Features & Benefits●●●●●Reading independent of gas typeAccurate to ±2% of full scaleBarometrically independentPipeline or panel mountingEasy to read linear scaleDimensionsApplications●●●●●BackfillingPortable equipmentDegassingRefrigerationFlammable vapoursOrdering Information4Page163Product DescriptionCG16K, 0-1040 mbarCG16K, 0-125 mbarCG16K, 0-50 mbarCG16K, 0-25 mbarCG16K, 0-760 TorrCG16K, 0-100 TorrCG16K, 0-40 TorrCG16K, 0-20 TorrCG16K, 0-1040 mbar, CertificatedCG16K, 0-125 mbar, CertificatedCG16K, 0-50 mbar, CertificatedCG16K, 0-25 mbar, CertificatedCG16K, 0-760 Torr, CertificatedCG16K, 0-100 Torr, CertificatedCG16K, 0-40 Torr, CertificatedCG16K, 0-20 Torr, CertificatedOrder No.D35610000D35611000D35612000D35613000D35630000D35631000D35632000D35633000D3561000CD3561100CD3561200CD3561300CD3563000CD3563100CD3563200CD3563300CTechnical DataRange0-1040 mbar, 0-760 Torr0-125 mbar, 0.100 Torr0-50 mbar, 0-40 Torr0-25 mbar, 0-20 TorrAccuracy±2% of full scale deflectionMaximum applied pressure25 mbar version 1 bar absolute, 0 bar gaugeOther versions2 bar absolute, 1 bar gaugeWeight1 kgVacuum connectionNW16 FlangeAccessories suppliedClamp and studs for panelmountingShop online at www.edwardsvacuum.com

IS16K Vacuum Interlock SwitchThe IS16K vacuum interlock switch is designed to safeguard the operator by ensuring thatelectrical circuits in the vacuum chamber do not remain energized when the system is let upto atmosphere.Typical applications include interlocking of the HT cleaning or process circuits on thin filmdeposition and vacuum systems.4Features & BenefitsThe IS16K is high vacuum compatible and corrosion resistant, with all wetted parts madefrom stainless steel. A high current rating allows direct switching of loads without additionalrelays or external power supplies.ApplicationsPage164●●●●●Single non-adjustable set-point, cannot be tampered withPositive break switchRapid contact separation, prevents arcingBreaks circuit directly, no relays requiredCorrosion resistant materials exposed to vacuumDimensions●●●●●FurnacesLaboratoriesTank unitsPackagingGeneral purpose pumping unitsOrdering InformationProduct DescriptionIS16K Vacuum Interlock SwitchOrder No.D05914000AMating half shown fittedTechnical DataFixed set-point640 ±120 mbar*Maximum switching differential 100 mbarMaximum working pressure 1 bar gauge (2 bar absolute)Electrical rating10 A resistive, 5 A inductive at250 V a.c.Electrical connection plug Type 283 mPmInternal volume 7 cm 3Materials in vacuumStainless steelLeak rate

VS16K Adjustable Vacuum SwitchThe VS16K is a general purpose vacuum switch with a user adjustable set-point and smallswitching differential. This diaphragm operated vacuum switch is high vacuum compatibleand corrosion resistant with all wetted parts made from stainless steel. A high current ratingallows direct switching of loads without additional relays or external power supplies.This switch should not be used for safety critical applications. For many interlockapplications the Edwards IS16K may be more suitable.Features & Benefits●●●●●Set-point range 30-1000 mbarUser adjustableReproducibleChangeover contacts for normally open or normally closedoperationSwitch point independent of gas compositionDimensionsApplications●●●●●FurnacesLaboratoriesTank unitsPackagingGeneral purpose pumping unitsOrdering Information4Page165Product DescriptionVS16K Adjustable Vacuum SwitchOrder No.D05915000AMating half shown fittedTechnical DataRange of adjustment30 to 1000 mbarMaximum switching differential 30 mbarMaximum working pressure 1 bar gauge (2 bar absolute)Electrical rating10 A resistive, 5 A inductive at250 V a.c.Electrical connection plug Type 283 mPmInternal volume 7 cm 3Materials in vacuumStainless steelLeak rate

GasCheck G3Introduced as an enhanced replacement for the popular GasCheck 3000, the Gascheck G3incorporates a new backlit dot matrix LCD for improving viewing in poor lighting and leakrate indication by both flashing LED and sounder, for easier use in all environments. Inaddition the GasCheck G3 has a new tactile keyboard with fewer keys and improvedtemperature stability for better performance in uncontrolled areas.4Features & BenefitsApplicationsPage166●●●●●Detect leaks with automatic and direct display of gas leak rateNew, simple to interpret graphical icon display menuChoice of readings in cc/sec, mg/m 3 or ppmRapidly detects almost any known gas mixture – particularlysensitive to ammonia, argon, butane, heliumData logging facility – 10 data points with date and time stampTechnical Data●●●●●Quality assurance testing on manufactured component sealsLaboratory applications, such as the detection of leaks from gaschromatographs, from mass spectrometers, from gas cylindersand fittingsIndustrial applications, such as the detection of leaks from gasinstallations, in cylinder receiving rooms, from pipelineassemblies, the detection of leaks from stored gases and thedetection of vapours released from stored chemicalsMedical applications, such as the detection of leaks from gasbottles and pipelines and leak testing of membrane materials,glove boxes and so forthPneumatic applications, such as leak testing of pipeline joints,gaskets and so forthOrdering InformationDetectorMin detectable limits of somecommon gases:R134AHeliumArgonCarbon DioxideSulphur HexafluorideResponse/Recovery timeShort probeLong probeMicro thermal conductivitysensor5.8x10 -5 cc/sec1.0x10 -5 cc/sec3.5x10 -5 cc/sec4.0x10 -5 cc/sec2.2x10 -5 cc/sec1s9sData logging10 data points with date andtime stampBatteries4 off AA Alkaline or NiMHOperating temp range 0 to 50 °CStorage temp range -25 to 70 °CLength with 110 mm, shortprobe390 mmLength with 300 mm, long probe 580 mmStorage Case420 x 320 x 97 mmUnpacked weight0.5 kgPacked weight1.6 kgElectrical noise immunity EN61326, class B emissionsProduct DescriptionGasCheck G3Accessories & SparesB Series Long ProbeGas Check Battery HolderGas Check NozzleShort Probe For B Series For Gas CheckOrder No.D14132000Order No.D14128802D14130802D14130800D14128801Shop online at www.edwardsvacuum.com

Vacuum ValvesSpeedivalves 169Ball Valves 171PVMK Manual Operation Isolation Valves 1735Page167PVPK Pneumatic Operation Isolation Valves 175PVEK Solenoid Operation Isolation Valves 179Backing/Roughing Valves 187Soft-Start Valves 189BGV Stainless Steel Gate Valves 191GV Manual and Pneumatic Gate Valves 195Butterfly Valves 197Air Admit and Needle Valves 199Electro-Pneumatic Control Valves 202Shop online at www.edwardsvacuum.com

Valves for Vacuum Systems5Page168Complete RangeWhatever the application, Edwards has the right solution to meet yourprocess requirements. Well known for its innovation in pump design,Edwards applies the same energy and commitment to its valves. Theresult is an extensive range of valves, with a choice of actuationmethods, materials and size. Materials of construction have beenuncompromisingly selected for performance in high vacuum.Confidence in Edwards valves begins early in the design process. Weuse techniques such as Finite Element Analysis to optimise thedesign of the valve. An arduous testing program in our environmentaltesting laboratory prior to release to production ensures that everyvalve we supply will meet the needs of your application. Once inproduction, all valves are subject to stringent quality control and areindividually tested with a helium mass spectrometer leak detector.Bellows sealed pipeline valves are manufactured with 100% greasefree O-rings exposed to vacuum delivering unrivalled lowcontamination levels.Selection GuideWhen you design a vacuum system, your choice of valves will bedetermined by the need for certain operating parameters. When youchoose a valve for your vacuum system, consider all of theparameters listed in the left hand column of the table as describedbelow.Actuation The choice is manual, solenoid or pneumatic, which will bedetermined by your system design and what facilities are available tothe machine.Dirty System Tolerance Vacuum valves have a differing ability toremain leak tight in "dirty" vacuum systems. If your system generatesor contains dust or other particulates, choose a valve with a hightolerance.Size Choose a valve which complements the size of your vacuumpipeline. To maintain high pumping speeds and throughputs, do notreduce the size of your pipeline to accommodate a smaller valve.Pressure Range Both the maximum and minimum pressure ratingare important, particularly if the vacuum system is occasionallypressurized to above atmospheric pressure.Port Configuration Depending on the location of the valve, you mayneed either an in-line or a right angle valve.Life The mean time to failure is important for solenoid and pneumaticvalves in rapid cycle duties, or where you have extendedmaintenance intervals.Position Indication You may need local or remote indication of valveposition as part of your control system.Closure Speed Use either a solenoid valve or pneumatic valve if youmust have rapid valve closure.Corrosion Resistance Valves are available in stainless steel forthose applications that process corrosive gases.Shop online at www.edwardsvacuum.com

SpeedivalveEdwards SP Speedivalves are diaphragm sealed in-line, isolation valves. The constructionconsists essentially of a flexible elastomeric dia-phragm which is sealed onto a lightlypolished seat by a screw thread mechanism. The mechanism is isolated from the system bythe diaphragm resulting in an extremely rugged and ‘dirty’ system tolerant valve.The valve terminates in NW flanges and can be pipeline supported or panel mounted.(SP40K is pipeline supported only).Features & BenefitsDimensions●●●●●Easy to operate with visual indication of valve open (SP10K toSP25K)Leak tight to better than 10 -6 mbar ls -1 / 8 x 10 -7 Torr ls -1Diaphragm completely isolates mechanism from vacuum systemExtremely rugged and ‘dirty’ system tolerantWill withstand 9 bar overpressure (SP10K to SP40K, with Co-Seal)5Page169A B C D E F G HOpen ClosedModelSP10K 71 64 33.5 42 60 NW10 8 43SP16K 71 64 33.5 42 80 NW16 8 43SP25K 123 111 51 67 100 NW25 12 72SP40K 130 – – 105 130 NW40 – 96Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationConstruction materialsBodyAluminium alloy to BS1490Hand wheel and bonnet Glass reinforced plasticsDiaphragmsNitrile or FluoroelastomerLeak rate (1 bar / 14.5 psidifferential)Valve (overall and across seat) 10 -6 mbar ls -18 x 10 -7 Torr ls -1Coupling 10 -7 mbar ls -18 x 10 -8 Torr ls -1Molecular conductanceSP10K, SP16K 1.7 ls -1Product DescriptionSP10K, Nitrile DiaphragmSP10K, Fluoroelastomer DiaphragmSP16K, Nitrile DiaphragmSP16K, Fluoroelastomer DiaphramSP25K, Nitrile DiaphramSP25K, Fluoroelastomer DiaphramSP40K, Nitrile DiaphragmSP40K, Fluoroelastomer DiaphragmAccessories & SparesFluoroelastomer Diaphragm for SP10/16Fluoroelastomer Diaphragm for SP25Fluoroelastomer Diaphragm for SP40Order No.C33105000C33155000C33205000C33255000C33305000C33355000C33405000C33455000Order No.C33155800C33355800C33455800SP25K 9.0 ls -1Nitrile Diaphragm for SP10/16C331058005SP40K 23.3 ls -1Pressure rating using Co-Seal 9 bar / 131 psiAmbient operating range 0 to 40 °CNitrile Diaphragm for SP25Nitrile Diaphragm for SP40C33305800C33405800Page170Ambient storage range -10 to 40 °CPanel thickness3 mm / 0.117 in maximumWeightSP10K230 g / 8.1 ozSP16K240 g / 8.4 ozSP25K760 g / 26.6 ozSP40K2300 g / 80.5 ozBaking temperature 60 °CShop online at www.edwardsvacuum.com

IBV series vacuum ball valvesBall valves are popular in applications where fast action and full bore pumping are needed.The Edwards IBV series valves combine these practical everyday features plus ease of useand economy in a high specification design. Manufactured in 316L stainless steel withPTFE seats they deliver robust performance in a wide variety of vacuum duties.Features & BenefitsDimensions●●●●●Low capital costConvenient NW16, 25, 40, 50 sizesOptional BSP threaded versionsEasy to use manual operationHigh conductance full bore pumping5Page171MODEL E H L M FLANGEIBV16MKS 120 56 92.5 - NW10/16IBV16MS 120 56 - 59.7 ½” BSPIBV25MKS 148 70 118.5 - NW25IBV25MS 148 70 - 82.5 1” BSPIBV40MKS 164 84 166.5 - NW40IBV40MS 164 84 - 111 1½” BSPIBV50MKS 164 94 175.5 - NW50IBV50MS 164 94 - 125 2” BSPShop online at www.edwardsvacuum.com

5Page172Technical DataConstruction materialsBodyAISI 316L stainless steelBallAISI 316L stainless steelCupsPTFELeak rate 1 x 10 -6 mbar ls -18 x 10 -7 Torr ls -1Molecular conductanceIBV16MKS 5.3 ls -1IBV25MKS 15.9 ls -1IBV40MKS 46.5 ls -1IBV50MKS 86.0 ls -1Pressure rating (barabsolute) using NW Co-Seal7 bar / 102 psiAmbient operating temprange5 to 65 °CReliability MTTF30000 cyclesWeight (g/lbs)IBV16MKS (MS) 1200 / 2.6 (750 / 1.7)IBV25MKS (MS) 1750 / 3.9 (1500 / 3.3)IBV40MKS (MS) 3100 / 6.8 (2600 / 5.7)IBV50MKS (MS) 4300 / 9.4 (3600 / 7.9)Ordering InformationProduct DescriptionIBV16MKS Ball Valve NW16IBV16MS Ball Valve 1/2" BSPIBV25MKS Ball Valve NW25IBV25MS Ball Valve 1" BSPIBV40MKS Ball Valve NW40IBV40MS Ball Valve 1.1/2" BSPIBV50MKS Ball Valve NW50IBV50MS Ball Valve 2" BSPOrder No.C36000100C36000110C36000200C36000210C36000300C36000310C36000400C36000410Shop online at www.edwardsvacuum.com

PVMK Manual Operation Right Angle Isolation ValvesThe PVMK is a quick acting, bellows sealed, right-angled lever operated valve and isavailable with either an Aluminium or stainless steel body. The lever, connected to a selflubricatingplastic cam-piston, actuates the valve stem and valve plate through PTFEbearings. The valve plate ‘O’ ring groove is vented to prevent gas bursts. The valves aredesigned to operate down to 10 - 9 mbar / 8 x 10 -10 Torr and up to a pressure of 2100 mbar /1575 Torr (30 psi).Technical DataOrdering InformationConstruction materialProduct DescriptionOrder No.BodyHE30TF grade aluminiumBellowsAISI 316L stainless steel‘O’ ringFluoroelastomerLeak rate < 10 - 9 mbar ls - 1< 7.5 x 10 -10 Torr ls -1Operating pressure range 10 - 9 - 2100 mbarPV16MKA Right Angle, Aluminum, NW16PV16MKS Right Angle, Stainless Steel, NW16PV25MKA Right Angle, Aluminum, NW25PV25MKS Right Angle, Stainless Steel, NW25PV40MKA Right Angle, Aluminum, NW40PV40MKS Right Angle, Stainless Steel, NW40PV50MKS Right Angle, Stainless Steel, NW50C31205000C31215000C31305000C31315000C31405000C31415000C315150005Page1738 x 10 -10 - 1575 Torr (30 psi)PV10MKA Right Angle, Aluminum, NW10C31105000Molecular conductanceAccessories & SparesOrder No.PV10MK 3 ls -1PV10/16MK O-Ring KitC41101800PV16MK 4 ls -1PV25MK 10 ls -1PV40MK 38 ls -1PV50MK 50 ls -1PV25MK O-Ring kitPV40MK O-Ring kitPV50MK O-Ring kitPV10/16MK Major overhaul kitPV25MK Major overhaul kitC41301810C41401800C41501800C31105826C31305826Maximum baking temperature 100 °CPV40MK Major Overhaul kitC31405826Reliability (MTTF)100000 operationsPV50MK Major overhaul kitC31515826Weight Aluminium Stainless SteelValve Body PV10KAC41101816PV10MK 170 g / 6 oz -Valve body PV16KAC41201816PV16MK 180 g / 6.3 oz 500 g / 17.5 ozValve Body PV16KSC41602801PV25MK 490 g / 17.1 oz 1050 g / 36.8 ozPV40MK 1400 g / 49 oz 3300 g / 116 ozPV50MK - 3800 g / 133 ozValve Body PV25KAValve Body PV25KSValve Body PV40KSValve Body PV50KSC41301816C41622801C41642801C41662801DimensionsA B C D E FPV10MK 30 76.5 105 38 38 NW10PV16MK 40 85.6 114 38 38 NW16PV25MK 50 120 149 51 51 NW25PV40MK 65 169 222 86 77 NW40PV50MK 70 186 239 86 89 NW50Shop online at www.edwardsvacuum.com

IPVMK Manual Operation In-line Isolation ValvesThe IPVMK is a quick acting, bellows sealed, right-angled lever operated valve and isavailable with either an Aluminium or stainless steel body. The lever, connected to a selflubricatingplastic cam-piston, actuates the valve stem and valve plate through PTFEbearings. The valve plate O-ring groove is vented to prevent gas bursts. The valves aredesigned to operate down to 10 - 9 mbar / 8 x 10 -10 Torr and up to a pressure of 2100 mbar /1575 Torr (30 psi).Technical DataOrdering Information5Construction materialBodyHE30TF grade aluminium orAISI304 grade stainless steelProduct DescriptionIPV16MKA, Aluminum, NW16IPV16MKS, Stainless Steel, NW16Order No.C41218000C41219000Page174BellowsAISI 316L stainless steelO-ringFluoroelastomerLeak rate < 10 - 9 mbar ls - 1< 7.5 x 10 -10 Torr ls -1Operating pressure range 10 - 9 - 2100 mbar8 x 10 -10 - 1575 Torr (30 psi)Molecular conductanceIPV16MK 2 ls -1IPV25MKA, Aluminum, NW25IPV25MKS, Stainless Steel, NW25IPV40MKS, Stainless Steel, NW40IPV40MKA, Aluminum, NW40Accessories & SparesPV10/16MK O-Ring KitPV25MK O-Ring kitPV40MK O-Ring kitPV10/16MK Major overhaul kitC41321000C41322000C41421000C41420000Order No.C41101800C41301810C41401800C31105826IPV25MK 6 ls -1PV25MK Major overhaul kitC31305826IPV40MK 22 ls -1Maximum baking temperature 100 °CReliability (MTTF)100000 operationsWeight Aluminium Stainless SteelIPV16MK 180g / 6.3oz 500g / 17.5ozIPV25MK 490g / 17.1oz 1050g / 36.8ozIPV40MK 1400g / 49oz 3300g / 116ozPV40MK Major Overhaul kitValve body IPV16KAValve Body IPV16KSValve Body IPV25KAValve Body IPV25KSValve Body IPV40KAValve Body IPV40KSC31405826C41201802C41602811C41621802C41622811C41641802C41642811DimensionsA B C D E F G HIPV10MK 30 76.5 105 38 38 NW10 - -IPV16MK 40 85.6 114 38 38 NW16 70 99IPV25MK 50 120 149 51 51 NW25 112 141IPV40MK 65 169 222 86 77 NW40 155 208IPV50MK 70 186 239 86 89 NW50 - -Shop online at www.edwardsvacuum.com

PVPK Pneumatic Operation Right Angle Isolation ValveThe range of single acting cylinder, spring return pipeline valves is designed for high speedactuation from standard pneumatic lines, and are offered in sizes NW10, 16, 25, 40 and 50.They are available with aluminium or stainless steel bodies with either O-ring (shaft sealAluminium only) or bellows seal.The valves are designed for long life duties, with a MTTF of 5000000 cycles for bothbellows and ‘O’ ring sealed versions providing long intervals between services.Features & BenefitsDimensions●●●●●Improved lifetime, mean-time-to-failure now 5000000 cyclesElectrical and visual indication of valve statusFast acting - 20 ms to close (PV16)Available in aluminum or stainless steelChoice of bellows or ‘O’ ring shaft sealing with aluminum bodies5Page175A B C D E F G H J K L MPV10PK 30 139.5 38 41 25 122 20 10 40 88 19 59PV16PK 40 149.5 38 41 25 132 20 10 40 88 19 59PV25PK 50 171.3 50.8 47.6 28 153.7 20 10 40 88 19 59PV40PK 65 200.6 76.2 57.8 41 183 20 10 40 88 19 59PV50PK 70 218 92 70 41 200 20 10 40 88 19 591 Optional control valveShop online at www.edwardsvacuum.com

5Page176Technical DataValve actuation typeSingle acting, pneumaticallyopened, spring closedPressure range1 x 10 -9 to 2100 mbar8 x 10 -10 to 1575 TorrMax pressure differentialOpening1000 mbar / 750 TorrClosing2100 mbar / 1575 TorrLeak rate < 1 x 10 -9 mbar ls - 1< 8 x 10 -10 Torr ls - 1Pneumatic connector Rp 1/8 (1/8 inch BSP) *Pneumatic operating pressure 2.8 to 4.2 bar / 41 to 61 psiElectrical indicator Single microswitch ‡Microswitch electrical rating 24 V, 1.5 A a.c. or d.c.Max cycle frequency 900 h -1Bellows reliability, MTTF 5000000 cyclesAmbient operating temp 5 - 100 °CMaximum baking temp 100 °CConstruction materialsPVPKAHE30TF aluminiumPVPKSAISI304 stainless steelBellowsAISI316L stainless steelO-ringFluoroelastomerMolecular conductance (ls -1 ) Right angledPV10PK 3PV16PK 4PV25PK 10PV40PK 40PV50PK 50‡ Twin microswitch versions are available on request.Time to open (ms)* Time to close (ms)*PV10/16PK 60 20PV25PK 15 41PV40PK 50 155PV50PK 50 155Weight Aluminium Stainless SteelPV16PK 310g / 10.9oz 520g / 18.2ozPV25PK 610g / 21.4oz 980g / 34.3ozPV40PK 1500g / 52.5oz 2300g / 80.5ozPV50PK 2000g / 70.5oz 4000g / 140oz* With optional control valve fittedOrdering InformationProduct DescriptionOrder No.PV10PKAO, O-ring sealed, aluminiumC41113000PV10PKA, bellows sealed, aluminiumC41111000PV16PKAO, O-ring sealed, aluminiumC41213000PV16PKA, bellows sealed, aluminiumC41211000PV16PKS, bellows sealed, stainless steelC41215000PV25PKAO, O-ring sealed, aluminiumC41313000PV25PKA, bellows sealed, aluminiumC41311000PV25PKS, bellows sealed, stainless steelC41315000PV40PKAO, O-ring sealed, aluminiumC41413000PV40PKA, bellows sealed, aluminiumC41411000PV40PKS, bellows sealed, stainless steelC41415000PV50PKA, bellows sealed, aluminiumC41510000PV50PKS, bellows sealed, stainless steelC41515000Accessories & SparesOrder No.Spares Kit Valve Seals PVPK10/16C41111800Spares Kit Valve Seals PV25PKC41311800Spares Kit Valve Seals PV40PKC41411800PV50MK O-Ring kitC41501800Top Cap Assembly PV10/16PC41111821Top Cap Assy PV25PC41311821Top Cap Assembly PV40PC41411821PV10PO Ring Actuator AssemblyC41113035Bellows Actuator Assy PV10PC41111035PV25PO Ring Actuator AssemblyC41313035Bellows Actuator Assy PV25PC41311035O Ring Actuator Assy PV40PC41413035Bellows Actuator Assy PV240PC41411035Bellows Actuator Assy PV50PC41515035Valve Body PV10KAC41101816Valve body PV16KAC41201816Valve Body PV16KSC41602801Valve Body PV25KAC41301816Valve Body PV25KSC41622801Valve Body PV40KAC41401816Valve Body PV40KSC41642801Valve body PV50KAC41662816Valve Body PV50KSC416628013 Port Electropneumatic Control Valve 24V d.c. H062001243 Port Electropneumatic Control Valve 24V a.c. H062001253 Port Electropneumatic Control Valve 110V a.c. H062001263 Port Electropneumatic Control Valve 230V a.c. H06200138Shop online at www.edwardsvacuum.com

IPVPK Pneumatic Operation In-Line Isolation valvesThe Edwards range of in-line single acting cylinder, spring return pipeline valves aredesigned for high speed actuation from standard pneumatic lines, and are offered in sizesNW16, 25, 40 and 50. They are available with aluminium or stainless steel bodies witheither O-ring (shaft seal, aluminium only) or bellows sealed.The valves are designed for long life duties, with a MTTF of 5000000 cycles for bothbellows and ‘O’ ring sealed versions providing long intervals between services.Features & BenefitsDimensions●●●●●Improved lifetime, mean-time-to-failure now 5000000 cyclesElectrical and visual indication of valve statusFast acting - 20 ms to close (PV16)Available in aluminum or stainless steelChoice of bellows or ‘O’ ring shaft sealing with aluminum bodies5Page177A B C D E F G H J K L MPV16PK 40 132.9 38 49.4 22.9 115.4 20 10 40 88 19 59PV25PK 50 161.9 50.8 68.2 25.8 144.3 20 10 40 88 19 59PV40PK 65 192.2 76.2 86.9 38.2 174.6 20 10 40 88 19 59PV50PK 70 216.9 92 101.6 38.8 199.3 20 10 40 88 19 591 Optional control valveShop online at www.edwardsvacuum.com

5Page178Technical DataValve actuation typeSingle acting, pneumaticallyopened, spring closedPressure range1 x 10 -9 to 2100 mbar8 x 10 -10 to 1575 TorrMaximum pressure differentialOpening1000 mbar / 750 TorrClosing2100 mbar / 1575 TorrLeak rate < 1 x 10 -9 mbar ls - 1< 8 x 10 -10 Torr ls - 1Pneumatic connector Rp 1/8 ( 1/8 inch BSP) *Recommended pneumaticoperating pressure2.8 to 4.2 bar / 41 to 61 psiElectrical indicator Single micro switch ‡Micro switch electrical rating 24 V, 1.5 A a.c. or d.c.Max cycle frequency 900 h -1Bellows reliability, MTTF 5000000 cyclesAmbient operating temperature 5 - 100 °CMaximum baking temperature 100 °CConstruction materialsIPVPKAHE30TF aluminiumIPVPKSAISI304 stainless steelBellowsAISI316L stainless steelO-ringFluoroelastomer‡ Twin micro switch versions are available on request.IPV16PK IPV25PK IPV40PK IPV50PKMolecular conductance(ls -1 )2 6 18 30Time to open (ms)* 60 15 50 50Time to close (ms)* 20 41 155 155WeightAluminiumStainless Steel310 /10.9520 /18.2· With optional control valve fitted610 /21.4980 /34.31500 /52.52300 /80.5-4000 /140Ordering InformationProduct DescriptionOrder No.IPV16PKAO, O-ring sealed, aluminiumC41603000IPV16PKA, bellows sealed, aluminiumC41601000IPV16PKS, bellows sealed, stainless steelC41602000IPV25PKAO, O-ring sealed, aluminiumC41623000IPV25PKA, bellows sealed, aluminiumC41621000IPV25PKS, bellows sealed, stainless steelC41622000IPV40PKAO, O-ring sealed, aluminiumC41643000IPV40PKA, bellows sealed, aluminiumC41641000IPV40PKS, bellows sealed, stainless steelC41642000IPV50PKS, bellows sealed, stainless steelC41662000Accessories & SparesOrder No.Spares Kit Valve Seals PVPK10/16C41111800Spares Kit Valve Seals PV25PKC41311800Spares Kit Valve Seals PV40PKC41411800PV50MK O-Ring kitC41501800Top Cap Assembly PV10/16PC41111821Top Cap Assy PV25PC41311821Top Cap Assembly PV40PC41411821PV10PO Ring Actuator AssemblyC41113035Bellows Actuator Assy PV10PC41111035PV25PO Ring Actuator AssemblyC41313035Bellows Actuator Assy PV25PC41311035O Ring Actuator Assy PV40PC41413035Bellows Actuator Assy PV240PC41411035Bellows Actuator Assy PV50PC41515035Valve body IPV16PKAC41601802Valve Body IPV16KSC41602811Valve Body IPV25KAC41621802Valve Body IPV25KSC41622811Valve Body IPV40KAC41641802Valve Body IPV40KSC41642811Valve body IPV50KSC416628113 Port Electropneumatic Control Valve 24V d.c. H062001243 Port Electropneumatic Control Valve 24V a.c. H062001253 Port Electropneumatic Control Valve 110V a.c. H062001263 Port Electropneumatic Control Valve 230V a.c. H06200138Shop online at www.edwardsvacuum.com

PVEK Solenoid Operation Right Angle Isolation valvesThe Edwards PVEK series valves are compact, light-weight electromagnetic vacuum valvessuitable for use in vacuum pipeline systems down to 1 x 10 -9 mbar. A double wound coilcombined with an electronic switching circuit ensures low energy consumption, lowoperating temperatures and extended operating life.Bellows sealed, the PVEK solenoid operated right angle valves are available with eitheraluminum (A) or stainless steel (S) bodies, with an overall MTTF of up to 500,000 cycles.Features & BenefitsDimensions●●●●●Transient high power for opening - electronically switchedLow energy consumption in the ‘hold open’ positionEnclosure rating to IP55Grease free vacuumMTTF up to 500000 cycles5Page179F Connectors for electrical supply and reed switch cables.B C D E G (mm) A H J KPV10EK 30 150 38 116 NW10 59 M4 x 7 20 41PV16EK 40 160 38 126 NW16 69 M4 x 7 20 41PV25EK 50 182 51 142 NW25 82 M4 x 7 20 41PV40EK 65 230 76 170 NW40 110 M6 x 9 40 41(inches) A B C D E G H J KPV10EK 1.17 5.85 1.48 4.52 NW10 2.3 M4 x 7 0.78 1.6PV16EK 1.56 6.24 1.48 4.91 NW16 2.69 M4 x 7 0.78 1.6PV25EK 1.95 7.1 1.99 5.54 NW25 3.2 M4 x 7 0.78 1.6PV40EK 2.54 8.97 2.96 6.63 NW40 4.29 M6 x 9 1.56 1.6Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationValve actuation typeSingle acting, electrically opened,spring closedProduct DescriptionPV10EKA, 110-127V 1-ph 50/60Hz, aluminiumOrder No.C41103000Pressure range valveopen1 x 10 -9 to 2000 mbarPV10EKA, 220-240V 1-ph 50/60Hz, aluminiumPV16EKA, 110-127V 1-ph 50/60Hz, aluminiumC41101000C412030007.5 x 10 -10 to 1500 Torr (30 psi)Maximum pressdifferentialopening/closing1000 mbar / 750 TorrLeak rate < 1 x 10 -9 mbar ls - 1PV16EKA, 220-240V 1-ph 50/60Hz, aluminiumPV16EKS, 110-127V 1-ph 50/60Hz, stainless steelPV16EKS, 220-240V 1-ph 50/60Hz, stainless steelPV25EKA, 110-127V 1-ph 50/60Hz, aluminiumPV25EKA, 220-240V 1-ph 50/60Hz, aluminiumC41201000C41204000C41202000C41303000C41301000Reed switch (peakratings)< 7.5 x 10 -10 Torr ls - 1PV25EKS, 110-127V 1-ph 50/60Hz, stainless steelPV25EKS, 220-240V 1-ph 50/60Hz, stainless steelPV40EKA, 110-127V 1-ph 50/60Hz, aluminiumC41304000C41302000C41403000Maximum voltage24 V a.c. or d.c.PV40EKA, 220-240V 1-ph 50/60Hz, aluminiumC414010005Page180Maximum current 0.25 AMaximum power 3 VAMaximum cyclefrequency 400 h -1Ambient operatingtemperaturePV10/16 5 °C to 45 °CPV25/40 5 °C to 50 °CPV40EKS, 110-127V 1-ph 50/60Hz, stainless steelPV40EKS, 220-240V 1-ph 50/60Hz, stainless steelAccessories & SparesPV10/16MK O-Ring KitSpares Kit Pad & Body O-ring PV25EKPV40MK O-Ring kitMoving Pole Assy PV10EMoving Pole Assy PV25EKC41404000C41402000Order No.C41101800C41301800C41401800C41101007C41301007Valve temperature aboveambientMoving Pole Assy PV40EValve Body PV10KAC41401007C41101816Rapid cyclingValve body PV16KAC41201816PV10/16

IPVEK Solenoid Operation In-Line Isolation valvesThe Edwards IPVEK series valves are compact, light-weight electromagnetic vacuumvalves suitable for use in vacuum pipeline systems down to 1 x 10 -9 mbar. A double woundcoil combined with an electronic switching circuit ensures low energy consumption, lowoperating temperatures and extended operating life.Bellows sealed, the IPVEK solenoid operated in-line valves are available with eitheraluminum (A) or stainless steel (S) bodies, with an overall MTTF of up to 500,000 cycles.Features & BenefitsDimensions●●●●●Transient high power for opening - electronically switchedLow energy consumption in the ‘hold open’ positionEnclosure rating to IP55Grease free vacuumMTTF up to 500000 cycles5Page181(mm) A B C D E G H J K MIPV16EK 19 142.9 38 85 NW16 37.4 M4 x 7 20 41 40IPV25EK 25.4 172 51 93 NW25 72.5 M4 x 7 20 41 50IPV40EK 38.1 222 76 111 NW40 101.5 M6 x 9 40 41 65(inches) A B C D E G H J K MIPV16EK 0.7 5.57 1.48 3.32 NW16 1.46 M4 x 7 0.78 1.6 1.56IPV25EK 1.0 6.7 1.99 3.63 NW25 2.83 M4 x 7 0.78 1.6 1.95IPV40EK 1.5 8.69 2.96 4.33 NW40 3.96 M6 x 9 0.78 1.6 2.54F Connectors for electrical supply and reed switch cables.Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationValve actuation typePressure range valveopenSingle acting, electrically opened,spring closed1 x 10 -9 to 2000 mbarProduct DescriptionIPV16EKA, 220-240V, 1-ph 50/60Hz, aluminiumIPV16EKA, 110-127V 1-ph 50/60Hz, aluminiumIPV16EKS, 110-127V 1-ph 50/60Hz, stainless steelOrder No.C41610000C41611000C416130005Page1827.5 x 10 -10 to 1500 Torr (30 psi)Maximum pressdifferentialOpening/closing 1000 mbar / 750 TorrLeak rate < 1 x 10 -9 mbar ls -1< 7.5 x 10 -10 Torr ls -1Reed switch (peakratings)Maximum voltage 24 V a.c. or d.c.Maximum current 0.25 AMaximum power 3 VAMaximum cyclefrequency 400 h -1Ambient operatingtemperature5 °C to 45 °CValve temperature aboveambientRapid cycling

LCPVEK Solenoid Operation Isolation valvesEdwards’ aluminum right angle LCPVEK valves are designed for vacuum applicationswhich need a compact, simple, solenoid operation valve to control gas flow. Theseeconomical valves are ideal for a number of duties ranging from simple laboratory pumpisolation to OEM vacuum system integration and design. Their versatility makes themeffective both in vacuum pipelines and in chamber admittance applications.Careful design of the solenoid power control and vacuum isolation components deliversefficient magnetic actuation with optimum vacuum performance at an affordable price. Thisfacilitates the use of an electrically actuated valve in many applications where previouslythis had been uneconomic.Features & BenefitsDimensions●●●●●Economical design can be used in low budget applicationsElectrical actuationLow power requirementsElectronic boost power supplyEfficient magnetic design5Page183(mm) A B C D ELCPV16EK 95 40 135 NW16 17.5LCPV25EK 92.5 50 142.5 NE25 25(inches) A B C D ELCPV16EK 3.33 1.56 4.89 NW16 0.69LCPV25EK 3.24 1.95 5.19 NW25 0.98Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationValve actuation typeSingle acting, electricallyopened, spring returnMolecular conductance 3 ls -1Product DescriptionLCPV16EKA, 110V, 50/60Hz, aluminiumLCPV16EKA, 230V 50/60Hz aluminiumOrder No.C41751100C41751000Pressure rangeMax pressure differential(open/close)1 x 10 -6 - 1000 mbar7.5 x 10 -7 - 750 Torr1000 mbar / 750 TorrLCPV25EKA, 110V 50/60Hz, aluminiumLCPV25EKA, 230V, 50/60Hz, aluminiumC41752100C41752000Time to open60 msTime to close

LCPVEK Solenoid Operation Isolation valves 24VEdwards’ aluminum LCPVEK valves are designed for vacuum applications which need acompact, simple, solenoid operation valve to control gas flow. These economical valves areideal for a number of duties ranging from simple laboratory pump isolation to OEM vacuumsystem integration and design. Their versatility makes them effective both in vacuumpipelines and in chamber admittance applications.Careful design of the solenoid power control and vacuum isolation components deliversefficient magnetic actuation with optimum vacuum performance at an affordable price. Thisfacilitates the use of an electrically actuated valve in many applications where previouslythis had been uneconomic.Features & BenefitsDimensions●●●●●Economical design can be used in low budget applicationsElectrical actuationLow power requirementsElectronic boost power supplyEfficient magnetic design5Page185Shop online at www.edwardsvacuum.com

5Page186Technical DataValve actuation typeSingle acting, electricallyopened, spring returnMolecular conductance 1.5 ls -1Pressure range1 x 10 -6 - 1000 mbar7.5 x 10 -7 - 750 TorrMax pressure differential(open/close)1000 mbar / 750 TorrTime to open20 msTime to close50 msMax cycle frequency 600 h -1Leak rate Typically 1 x 10 -6 mbar ls -1Typically 7.5 x 10 -7 Torr ls -1Power consumptionOpen72W for 400 msHoldTypically 5WOperating temperature range -10 to 55 ºCWeightLCPV16EK900g / 31ozLCPV25EK900g / 31ozEnclosure ratingIP65Voltage24V a.c/d.c. +/- 10%Construction materialsBodyAluminium, stainless steel, silverSealsFKM FluoroelastomerOrdering InformationProduct DescriptionLCPV16EKA, 24V ac,dc, aluminiumLCPV25EKA, 24V ac,dc, aluminiumOrder No.C41780200C41790200Shop online at www.edwardsvacuum.com

BRV Backing/Roughing ValveEdwards backing/roughing valves with ISO NW roughing and forepump terminations featuremanual or pneumatic actuation. They combine the function of separate backing/roughingvalves in one integral 3 port unit.A flexible neoprene connector is supplied for the backing connection. The roughing andforepump ports terminate in the appropriate NW termination.Features & Benefits●●●●Easy to operate - both ports closed positionLong life - 100,000 operations or morePosition indicator on pneumatic valveLeak tight to better than 10 -9 mbar ls -1 /8 x 10 -10 Torr ls -1Dimensions(mm) A B C D E F GBRV10K 30 90 134 169 52.5 49 NW10BRV10PK 30 90 - 198 52.5 49 NW10BRV25K 50 98 155 195 82 75 NW25BRV25PK 50 98 - 203 82 75 NW25Applications●The valves have been designed particularly for the Diffstak ®pumping systems, but have applications where a compactchange-over valve is required in the pressure range 10 -7 - 2000mbar / 8 x 10 -8 - 1500 Torr.Ordering InformationProduct DescriptionBRV10K, Manual OperationBRV10PK Backing/Roughing Valve Pneumatic OperationBRV25K Backing/Roughing Valve, Manual OperationBRV25PK Backing/Roughing Valve, Pneumatic OperationBRV25PK Backing/Roughing Valve, Pneumatic Operation, InlineFlangesBRV25PK Backing/Roughing Valve, Pneumatic Operation, AllNW25 FlangesAccessories & SparesNW10 Flexible Sleeve For 15mm OD TubeNW25 Flexible Sleeve For 28mm OD TubeO Ring Viton 1119 Pk 2O Ring Viton 0215 Pk 5O Ring Viton 024 Pk 5O Ring Viton Vit 031 Pk 2Order No.C32103000C32104000C32303000C32304000C32304900C32303500Order No.C26501002C26501004H02106119H02106025H02106261H021062625 Port Lightweight Electropneumatic Control Valve 24V a.c. B287030305 Port Lightweight Electropneumatic Control Valve 24V d.c. B287030555 Port Lightweight Electropneumatic Control Valve 110V a.c. B287030315 Port Lightweight Electropneumatic Control Valve 230V a.c. B287030325Page187(inches) A B C D E F GBRV10K 1.17 3.51 5.23 6.59 2.05 1.91 NW10BRV10PK 1.17 3.51 - 7.72 2.05 1.91 NW10BRV25K 1.95 3.82 6.05 7.61 3.2 2.93 NW25BRV25PK 1.95 3.82 - 7.92 3.2 2.93 NW25Shop online at www.edwardsvacuum.com

Technical DataConstruction materials5Page188Body and pneumatic cylinder HE 30TF aluminumLever and bonnet (manual) Glass reinforced plasticOperating shaft/valve seat Stainless steelBody seals, port seals, shaftseal ‘O’ ringFluoroelastomerLeak rateOverall < 10 -9 mbar ls -1< 8 x 10-10 Torr ls -1Across ports < 10 -9 mbar ls -1< 8 x 10-10 Torr ls -1NW coupling < 10 -9 mbar ls -1< 8 x 10-10 Torr ls -1Operating pressure range 10 -7 - 2100 mbar8 x 10 -8 - 1575 TorrMax baking temperaturePneumatic 70 °CManual 90 °CReliability (MTTF)100000 cyclesRecommended air pressure 2.8 - 4.2 bar / 40.6 - 61 psiMaximum air pressure7.0 bar / 102 psiMinimum air pressure2.4 bar / 35 psiAir connections1/8 in BSP, for 6 mm Ø plasticor copper tubeMicroswitch rating24 V 1.5 A a.c. or d.c.WeightBRV10K350g / 12ozBRV10PK380g / 13ozBRV25K860g / 30ozBRV25PK900g / 31.7ozShop online at www.edwardsvacuum.com

SIPVP Soft-Start Isolation ValvesSoft-start, pneumatically operated, in-line valves with interchangeable orifices for thecontrolled pumpdown of processes where turbulent flow can cause problems withparticulate contamination.Slave and master valve combination allows slow initial pumping tominimise disturbance. Both slave and master valves require separate pneumaticconnections.Features & Benefits●●●●●MTTF of 5000000 cyclesControlled pump down to match processAluminum bodiesFast acting valves in the event of power failureSupplied with 5 mm, 6 mm and 7 mm interchangeable orificesDimensionsApplications●When the slave valve is opened gas flows at a low rate betweenthe two sides of the valve through interchangeable orificesallowing slow pumping. Having reached a predeterminedpressure level specified by the user, the master valve is openedby means of a user supplied signal allowing full bore pumping.The bellows sealed valves are single acting with pneumaticopening and spring closure. They are supplied with threeinterchangeable orifices to enable pumping characteristics to bematched to your process. A microswitch is supplied as standardto indicate valve status. Both the valve and the microswitch canbe baked to 100°C to speed up degassing, and to preventprocess gases from condensing inside the valve. While designedprimarily for the semiconductor industry the valve can also beused in other applications requiring controlled pump-down.Performance Curves5Page189Typical pump-down curve of initial pumping phase with 80 m3h-1 pump on a 66l chamberSIPV25P A B C D E Fmm 50 161.9 50.8 68.2 25.8 144.3inches 1.95 6.31 1.98 2.66 1 5.63SIPV40Pmm 65 192.2 76.2 68.2 38.2 174.6inches 2.54 7.49 2.97 2.66 1.49 6.81SIPV25P / SIPV40P G H J K L Mmm 145 43.5 49 86 127 20inches 5.66 1.69 1.91 3.35 4.95 0.78N P Q R Smm 10 40 88 19 59inches 0.39 1.56 3.43 0.74 2.3Shop online at www.edwardsvacuum.com

5Page190Technical DataValve actuation typeSingle acting, pneumaticallyopened, spring closedPressure range1 x 10 -9 to 2100 mbar8 x 10 -10 to 1575 TorrMaximum pressure differentialOpening1000 mbar / 750 TorrClosing2100 mbar / 1575 TorrLeak rate 10 -9 mbar ls - 110 -10 Torr ls - 1Pneumatic connectorRp 1/8 ( 1/8 inch BSP)*Pneumatic operating pressure 2.8 to 4.2 bar / 41 to 61 psiElectrical indicatorSingle microswitchMicroswitch electrical rating 24 V, 1.5 A a.c. or d.c.Max cycle frequency 900 h -1Bellows reliability, MTTF 5000000 cyclesAmbient operating temperature 5 - 100 °CMaximum baking temperature 100 °CConstruction materialsHE30TF aluminumO-ringFluoroelastomerTime to open/close at 4 bar (ms) SIPV25P (SIPV40P)Slave valve 60/20 (60/20)Master valve 15/41 (50/155)Weight (g / oz)SIPV25P 920 / 32SIPV40P 1760 / 62* With optional control valve fittedOrdering InformationProduct DescriptionOrder No.SIPV25P, pneumatic, bellows sealed, aluminium bodyC41624000SIPV40P, pneumatic, bellows sealed, aluminium bodyC41644000Accessories & SparesOrder No.3 Port Electropneumatic Control Valve 110V a.c. H062001263 Port Electropneumatic Control Valve 230V a.c. H062001383 Port Electropneumatic Control Valve 24V a.c. H062001253 Port Electropneumatic Control Valve 24V d.c. H06200124Shop online at www.edwardsvacuum.com

BGV Manual Gate ValvesThe BGV basement gate valves are a range of stainless steel, bellows-sealed basementisolation valves. They have been designed, in conjunction with VAT, to enable pumps to bekept running during foreline maintenance in order to maximise the reliability and up-time ofpumps operating on harsh processes. The BGV valves are designed for an operatingpressure range of 1 x 10 -9 mbar to 1.2 bar absolute (1 x 10 -7 to 1.2 x 10 5 Pa). The valveswithstand 1.2 bar absolute in either direction and can tolerate against a 1 bar differentialpressure across the valve seal.Although principally designed for isolation of pumps in a semiconductor fab basement, theBGV valves are ideal for other applications where a 1 bar differential at opening is desirableand 20000 cycles is acceptable.Features & BenefitsDimensions●●●●●Jointly developed with VAT, a world leader in sealing technology.Stainless steel construction and robust patented design for along service lifeSimple grease-free mechanism minimizes damage due toparticulates in dusty processesCan be operated with 1 bar pressure differential so pressureequalization is not requiredEasy servicing with only inexpensive consumables for low costof ownership5Page191NW50 ISO63 ISO80 ISO100 ISO160A mm/inch 60/2.36 70/2.75 70/2.75 70/2.75 90/3.54B mm/inch 36/1.41 43/1.69 43/1.69 43/1.69 64/2.52C mm/inch 63/2.48 69/2.71 69/2.71 69/2.71 87/3.42D mm/inch 62/2.44 62/2.44 62/2.44 62/2.44 62/2.44E mm/inch 60/2.36 68/2.67 68/2.67 68/2.67 87/3.42F mm/inch 120/4.72 160/6.3 200/7.87 200/7.87 260/10.23G mm/inch 62.5/2.46 71/2.79 71/2.79 71/2.79 91/3.58H mm/inch 70.5/2.77 75/2.95 75/2.95 75/2.95 85/3.34I mm/inch 119/4.68 138/5.43 155/6.09 174.5/6.86 241/9.47J mm/inch 110/4.32 123/4.83 142/5.58 160/6.29 210/8.25K mm/inch 268/10.53 314/12.34 364/14.31 413.5/16.25 578/22.72L mm/inch 149/5.86 176/6.92 209/8.21 239/9.39 337/13.24M mm/inch 45/1.77 53.5/2.1 72/2.83 72/2.83 97/3.81N mm/inch 90/3.54 105/4.13 124/4.87 142/5.58 192/7.55Shop online at www.edwardsvacuum.com

Technical DataOrdering Information5Page192Leak rateBody < 1 x 10 -9 mbar ls -1Valve seat < 1 x 10 -7 mbar ls -1Pressure range1 x 10 -9 mbar to 1.2 baraDifferential pressure on the gate 1.2 bar in either directionDifferential pressure at opening 1 barCycles until first service 20, 0000Maximum operating tempsValve body 120 °CManual actuator 80 °CPneumatic actuator 80 °CPosition indicator 60 °CSolenoid 50 °CMolecular flow conductanceNW50 300 ls -1ISO63 400 ls -1ISO80 1100 ls -1ISO100 1700 ls -1ISO160 4600 ls -1Product DescriptionBGV manual gate valve NW50Accessories & SparesVacuum seals kit NW50Vacuum seals kit ISO63Vacuum seals kit ISO80Vacuum seals kit ISO100Vacuum seals kit ISO160Bellows feed-through NW50Bellows feed-through ISO63Bellows feed-through ISO80Bellows feed-through ISO100Bellows feed-through ISO160Spare gate NW50Spare gate ISO63Spare gate ISO80Spare gate ISO100Spare gate ISO160Spare solenoid 24V a.c./d.c.Order No.B90000195Order No.B90000595B90000600B90000605B90000610B90000620B90000625B90000630B90000635B90000640B90000650B90000655B90000660B90000665B90000670B90000680B90000790WeightNW503.3 kg (7.3 lbs)ISO636.6 kg (14.6 lbs)ISO807.0 kg (15.4 lbs)ISO1008.5 kg (18.7 lbs)ISO16017.7 kg (39.0 lbs)Materials of construction:BodyAISI 304 stainless steelBonnetBlack anodized aluminiumGateAISI 304 stainless steelGlidersPEEKBellowsAISI 633 stainless steelSealsFluoroelastomerGate fixation screwA2 stainless steel Ni-tefloncoatedHandleReinforced polyamideManual ValvesTurns of the handle toopen/closeNW50 22ISO63 27ISO80 33ISO100 39ISO160 41Shop online at www.edwardsvacuum.com

BGV Pneumatic Gate ValvesThe BGV basement gate valves are a range of stainless steel, bellows-sealed basementisolation valves. They have been designed, in conjunction with VAT, to enable pumps to bekept running during foreline maintenance in order to maximise the reliability and up-time ofpumps operating on harsh processes. The BGV valves are designed for an operatingpressure range of 1 x 10 -9 mbar to 1.2 bar absolute (1 x 10 -7 to 1.2 x 10 5 Pa). The valveswithstand 1.2 bar absolute in either direction and can tolerate against a 1 bar differentialpressure across the valve seal.Although principally designed for isolation of pumps in a semiconductor fab basement, theBGV valves are ideal for other applications where a 1 bar differential at opening is desirableand 20000 cycles is acceptable.Features & BenefitsDimensions●●●●●Jointly developed with VAT, a world leader in sealing technology.Stainless steel construction and robust patented design for along service lifeSimple grease-free mechanism minimizes damage due toparticulates in dusty processesCan be operated with 1 bar pressure differential so pressureequalization is not requiredEasy servicing with only inexpensive consumables for low costof ownership5Page193NW50 ISO63 ISO80 ISO100 ISO160A mm/inch 60/2.36 70/2.75 70/2.75 70/2.75 90/3.54B mm/inch 36/1.41 43/1.69 43/1.69 43/1.69 52.5/2.06C mm/inch 63/2.48 69/2.71 69/2.71 69/2.71 87/3.42D mm/inch 60/2.36 68/2.67 68/2.67 68/2.67 87/3.42E mm/inch 57/2.24 57/2.24 57/2.24 57/2.24 73/2.87F mm/inch 13/0.51 15.5/0.61 15.5 /0.61 15.5/0.61 20.3/0.8G mm/inch 120/4.71 160/6.3 200/7.87 200/7.87 260/10.23H mm/inch 62.5/2.46 71/2.79 71/2.79 71/2.79 91/3.58I mm/inch 110/4.32 123/4.84 142/5.58 160/6.3 210/8.26J mm/inch 134/5.27 149/5.86 165/6.49 185/7.28 264/10.39K mm/inch 333/13.09 375/14.76 424/16.66 474/18.66 651/25.62L mm/inch 149/5.86 176/6.92 209/8.21 239/9.4 337/13.27M mm/inch 45/1.77 53.5/2.1 72/2.83 72/2.83 97/3.83N mm/inch 90/3.54 105/4.13 124/4.87 142/5.59 192/7.55Shop online at www.edwardsvacuum.com

Technical DataOrdering Information5Page194Leak rateBody < 1 x 10 -9 mbar ls -1Valve seat < 1 x 10 -7 mbar ls -1Pressure range1 x 10 -9 mbar to 1.2 baraDifferential pressure onthe gate1.2 bar in either directionDifferential pressure atopening1 barCycles until first service 20, 0000Maximum operatingtemperaturesValve body 120 °CManual actuator 80 °CPneumatic actuator 80 °CPosition indicator 60 °CSolenoid 50 °CMolecular flowconductanceNW50 300 ls -1ISO63 400 ls -1ISO80 1100 ls -1ISO100 1700 ls -1ISO160 4600 ls -1Product DescriptionBGV pneumatic gate valve NW50BGV pneumatic gate valve ISO63BGV pneumatic gate valve ISO80BGV pneumatic gate valve ISO100BGV pneumatic gate valve ISO160Accessories & SparesVacuum seals kit NW50Vacuum seals kit ISO63Vacuum seals kit ISO80Vacuum seals kit ISO100Vacuum seals kit ISO160Bellows feed-through NW50Bellows feed-through ISO63Bellows feed-through ISO80Bellows feed-through ISO100Bellows feed-through ISO160Spare gate NW50Spare gate ISO63Spare gate ISO80Spare gate ISO100Spare gate ISO160Spare solenoid 24V a.c./d.c.BGV mk2 TIM interface cableOrder No.B90003105B90003110B90003125B90003130B90003140Order No.B90000595B90000600B90000605B90000610B90000620B90000625B90000630B90000635B90000640B90000650B90000655B90000660B90000665B90000670B90000680B90000790B90003388WeightNW50ISO63ISO80ISO100ISO160Materials of construction:BodyBonnetGateGlidersBellowsSealsGate fixation screwHandlePneumatic valvesSolenoid ratingStandard solenoidPosition indicator contactratingPneumatic supply3.3 kg (7.3 lbs)6.6 kg (14.6 lbs)7.0 kg (15.4 lbs)8.5 kg (18.7 lbs)17.7 kg (39.0 lbs)AISI 304 stainless steelBlack anodized aluminumAISI 304 stainless steelPEEKAISI 633 stainless steelFluoroelastomerA2 stainless steel Ni-teflon coatedReinforced polyamide24 V - 15% / + 10%, AC/DC, 2.4 W12 - 30 V AC/DC, max 500 mA, max 10WMin supply pressure58 psig (4 bar gauge, 5 bar absolute, 5x 10 5 Pa)Max supply pressurePneumatic connection100 psig (7 bar gauge, 8 bar absolute,8 x 10 5 Pa)R1/8 inch (1/8 inch NPT for valvesordered in USA)Shop online at www.edwardsvacuum.com

GV Manual and Pneumatic Gate ValvesThe Edwards GV range of stainless steel, bellows sealed gate valves is designed forapplications requiring overall leak tightness and a minimum of hydrocarbon in the residualatmosphere.These superior quality valves offer high vacuum integrity coupled with maximum conductance.The valves are available with flange options of ISO, CF (metal sealed) for applications at ultrahigh vacuum requiring increased bakeout temperatures.The stainless steel valve bodies are vacuum brazed, a specialprocess which includes a bakeout at 1100 °C. This eliminates anypossibility of virtual leaks and ensures a product with low outgassingcharacteristics.A laser welded stainless steel bellows effectively seals the actuatorfrom the valve. The concept provides ease of servicing and allows thegate and linkage mechanism to be removed while the valve remainsin situ.Features & Benefits• In situ removal of gate and linkage mechanism for easy servicing• Virtual leaks eliminated due to vacuum brazed manufacture• Electropolished finish inside and outside• Compact design with high conductance• Manual or pneumatic options• Microswitch position indicator as standard on pneumatic version• Long periods of use between maintenance• Low vibration and shock• Free choice of orientation• Wide range from 40 mm / 1.56 inch bore up to 320 mm / 12.48 inchbore• Flange options – ISO, CF (metal sealed)• High reliability – 1000000 cycle option• Optional 3 position operation• Vacuum brazed to 1100 °C to eliminate virtual leaksDimensionsLGHKGHBAAE1 2BC1 Carriage side 2 Seal sideFCØD1 2Technical DataPressure range 10 -9 mbar to 1 bar (absolute) /8 x 10 -10 – 750 TorrLeak rate < 10 -9 mbar l s -1 /8 x 10 -10 Torr l s -1Maximum differential pressureon the valve plate1 bar / 750 Torr in either directionMaximum differential pressureon the valve plate at opening 20 mbar / 15 TorrPosition indicator switch,breaking capacity24 V d.c., 5 AMaterial of constructionBody, valve plateAISI 304 stainless steelMechanismAISI 304 stainless steelBearingsHardened high carbon chrome steelCirclipsSS PH 15-7 MoBellowsAM 350 stainless steelSeals, valve plateFluoroelastomerBonnetMetal sealed valves OFHCOther valvesFluoroelastomerBakeout temperatureValve body, valve open 150 °C (fluoroelastomer bonnetseal)Valve body, valve open 250 °C (metal bonnet seal)Valve closed 200 °CActuator, manual 200 °CActuator, pneumatic 100 °CAverage life until first service1 100000 closuresMounting positionAny orientationPneumatic operating pressure 4 – 5.5 bar / 60 – 80 psi1 Dependent on the vacuum environment and the opening and closing speedFlange Boremm inConductance inHigh Vacuum l s -1Pneumatic ValveMinimum Closing &Opening Time at5 bar, SecondsApproxWeight, kg40 1.5 130 0.5 550 2 250 0.5 663 2.5 520 1 8100 4 2000 1.5 15160 6 6300 1.5 23200 8 15000 2 (close) 343 (open)250 10 23000 3 (close) 734 (open)320 12 39000 3 (close) 774 (open)1 Special versions available, including 1 million cycle types, 3 position types, largervalves, and pneumatic versions with reed switch position indicators.5Page195Shop online at www.edwardsvacuum.com

NW ØMBody Dimensions (mm) Flange Dimensions (mm)ØSModel No. A B C Ø D E F G H K L Ø M Ø N P Ø S Ø T VØNØVGVI 040 84.1 26.2 50.5 50.8 69.3 50.7 86.1 33.0 134.9 91.7 55.0 38.1 – 41.2 – 12.7GVI 050 96.8 75.2 50.5 50.8 69.3 50.7 104.5 37.6 134.9 91.7 75.0 50.8 – 52.2 – 12.75Page196ISO GVI 063 111.0 89.4 51.6 50.8 69.3 50.7 122.1 43.1 134.9 91.7 130.1 63.5 4 110.0 M8 12.7ØMGVI 080 125.0 109.1 51.6 50.8 69.3 50.7 145.9 72.8 134.9 91.7 145.1 75.9 8 126.0 M8 12.7ØSGVI 100 177.8 143.5 61.2 75.5 93.5 76.2 206.4 66.9 175.6 201.3 165.1 101.6 8 145.0 M8 12.7VØNGVI 160 222.3 191.8 67.0 75.5 93.5 76.2 270.5 87.6 175.6 201.3 225.0 152.4 8 200.0 M10 16.0GVI 200P x ØT285.8 254.5 67.6 75.5 93.5 76.2 353.4 114.6 175.6 201.3 285.8 203.2 12 260.0 M10 15.9GVI 250 341.1 303.5 80.0 88.9 120.4 120.4 460.6 146.6 240.7 231.7 335.0 254.0 12 310.0 M10 19.0GVI 320 408.2 362.7 80.0 88.9 120.4 120.4 560.5 174.9 240.7 231.7 425.0 304.8 12 395.0 M12 19.0CF GVC 015 84.1 62.5 51.6 50.8 69.3 50.7 86.1 33.0 134.9 91.7 69.3 38.1 6 58.7 M6 12.7ØMGVC 020 96.8 75.2 57.9 50.8 69.3 50.7 104.5 37.6 134.9 91.7 85.7 50.8 8 72.4 M8 15.9ØSGVC 025 111.0 89.4 61.2 50.8 69.3 50.7 122.1 43.1 134.9 91.7 113.5 63.5 8 92.2 M8 17.5VØNGVC 040 177.8 143.5 75.4 75.9 93.5 76.2 206.4 66.9 175.6 190.6 151.6 101.9 16 130.3 M8 19.8GVC 060 222.3 191.8 80.5 75.9 93.5 76.2 270.5 87.6 175.6 200.2 202.4 152.4 20 181.1 M8 22.4P x ØTGVC 080 285.8 254.5 85.1 75.9 93.5 76.2 353.4 114.6 175.6 200.2 253.2 203.2 24 231.9 M8 24.6GVC 100 341.4 303.5 98.8 88.9 120.4 101.6 460.6 146.6 240.7 231.7 304.8 254.0 32 284.0 M8 28.5GVC 120 403.2 362.7 98.8 88.9 120.4 101.6 560.5 174.9 240.7 231.7 354.6 304.8 30 325.4 M10 28.5Ordering InformationType Model Flange sealsNo.seals1 Fixing kitNo.kits 2ISO GVI 063 B27158170 1 B22417187 1GVI 100 B27158171 1 B22417187 2GVI 160 B27158172 1 B22417217 2GVI 200 B27158081 1 B22417217 2GVI 250 B27158143 1 B22417247 2GVI 320 B27158166 1 B22417247 2CF GVC 015 C10001290 10 B22417157 2GVC 020 C10005290 10 B22417187 2GVC 025 C10007490 10 B22417188 2GVC 040 C10009290 10 B22417189 2GVC 060 C10011290 5 B22417190 2GVC 080 C10012290 5 B22417190 2GVC 100 C10013290 5 B22417190 21 Number of seals in each pack.2 Number of fixing kits that are needed to mount both flanges of the valve.Ordering InformationTypeISOManualISOPneumaticCFManualCFPneumaticNominalValveBoreOrderingFlange mm/in Model (Number)NW40 40/1½ GVI040 B65001000NW50 50/2 GVI050 B65101000ISO63 63/2½ GVI063 B65201000ISO80 75/3 GVI080 N03933800ISO100 100/4 GVI100 B65301000ISO160 160/6 GVI160 B65401000ISO200 200/8 GVI200 B65501000ISO250 250/10 GVI250 B65601000ISO320 320/12 GVI320 B65701000NW40 40/1½ GVI040 B65051000NW50 50/2 GVI050 B65151000ISO63 63/2½ GVI063 B65251000ISO80 75/3 GVI080 U30002092ISO100 100/4 GVI100 B65351000ISO160 160/6 GVI160 B65451000ISO200 200/8 GVI200 B65551000ISO250 250/10 GVI250 B65651000ISO320 320/12 GVI320 B657510002.37 inch od CF 40/1½ GVC015 B650030003.37 inch od CF 50/2 GVC020 B651030004.47 inch od CF 63/2½ GVC025 B652030006.00 inch od CF 100/4 GVC040 B653030008.00 inch od CF 160/6 GVC060 B6540300010.00 inch od CF 200/8 GVC080 B6550300012.00 inch od CF 250/10 GVC100 B6560300014.00 inch od CF 320/12 GVC120 B657030002.37 inch od CF 40/1½ GVC015 B650530003.37 inch od CF 50/2 GVC020 B651530004.47 inch od CF 63/2½ GVC025 B652530006.00 inch od CF 100/4 GVC040 B653530008.00 inch od CF 160/6 GVC060 B6545300010.00 inch od CF 200/8 GVC080 B655530002.00 inch od CF 250/10 GVC100 B6565300014.00 inch od CF 320/12 GVC120 B65753000Shop online at www.edwardsvacuum.com

QSB Quarter Swing Butterfly ValveThe QSB quarter swing valves are compact, quick acting, high conductance isolationvalves. The QSB valves have a polished, stainless steel, ISO flanged body withfluoroelastomer ‘O’ ring sealed valve plate and shaft. The valve plate ‘O’ ring groove isvented to help maintain a stable high vacuum. The valve shaft ‘O’ rings and bearings arelubricated with Fomblin® grease to prevent gas bursts from behind the shaft seals.This valve is supplied with a Co-Seal.Features & BenefitsDimensions●●●●●Manual operationHigh conductivityResists atmosphere in either directionCompact and quick actingCorrosion resistant construction5Page197A B C E F G H I J K ØL63 130 63 4 111 130 23.5 24.5 19 - - 11063P 130 63 4 105 - 23.5 24.5 19 235 108 110100 165 96 8 125 130 26 41 33 - - 145100P 165 96 8 123 - 26 41 33 238 126 145160 225 142.5 8 170 180 43.5 55 48.5 - - 200160P 225 142.5 8 166 - 43.5 55 48.5 263 166 2001 Actuator cylinder support bracket (QSB63P, QSB100P and QSB160P only)Shop online at www.edwardsvacuum.com

5Page198Technical DataValve plate materialOperating pressure rangeAISI 304 stainless steel10 -9 - 3000 mbar8 x 10 -10 - 2250 TorrMax pressure differential 1000 mbar / 750 TorrOperating temp range 5 - 40 °CMax baking temp200 °C (without actuator)Leak rate < 10 -9 mbar ls -18 x 10 -10 Torr ls -1Pneumatic valves only:Reliability (MTTF)>1.5 x 10 5 cyclesPneumatic connectors 1/8 inch BSP, for 6mm OD tubeNumber of connectorsQSB63, QSB100, QSB160 2Reed switch ratingMax voltage30VMax current500mAMax Power6WReed switch connectors 3m flying leadsMicroswitch rating5A at 48VMicroswitch connectorsQSB63, QSB100, QSB160 Solder tagsFlange SizeISO63 up to ISO250Conductance * 420 ls -1QSB63 420 ls -1QSB100 1250 ls -1QSB160 2700 ls -1Recommended pneumaticpressure~ (bar)QSB63, QSB100, QSB160 2.8 to 4.2* Conductance of equivalent tube length~ Pneumatic operationOrdering InformationProduct DescriptionOrder No.QSB63, Manual OperationB42402000QSB100, Manual OperationB42602000QSB160, Manual OperationB42802000QSB63P, Double Pneumatic OperationB42403000QSB100P, Double Pneumatic OperationB42603000QSB160P, Double Pneumatic OperationB42803000QSB63P, Double Pneumatic Operation with reed switchesB42409000QSB100P, Double Pneumatic Operation with reed switchesB42609000Accessories & SparesOrder No.O Ring Viton 1161 Pk 1H02106161O Ring Viton 0340 Pk 1H02106055O Ring Viton Vit 1208 Pk 1H02106208Valve shaft seal O-Ring Vit0012 Pk5H02106010O Ring Viton Vit 0111 Pk 5H021060115 Port Lightweight Electropneumatic Control Valve 24V a.c. B287030305 Port Lightweight Electropneumatic Control Valve 24V d.c. B287030555 Port Lightweight Electropneumatic Control Valve 110V a.c. B287030315 Port Lightweight Electropneumatic Control Valve 230V a.c. B28703032Shop online at www.edwardsvacuum.com

AV5A Air Admittance Valve With CouplingsThe AV5A is manufactured in aluminum alloy. It has a control knob attached to a screwactuatedplunger: turn the control knob clockwise to close the valve. A nitrile ‘O’ ring sealsthe plunger to the valve body.The valve can be connected directly, pipeline supported or panel mounted, and isconnected to the vacuum system with the Edwards SC5 coupling (supplied).DimensionsOrdering InformationTechnical DataMaterials of constructionBodyPlungerSealHE30 aluminum / nickel platedbrassHE30 aluminumNitrileLeak rate across seat 10 -7 mbar ls -1 /8 x 10 -8 Torr ls -1Leak rate through body 10 -1 mbar ls -1 /8 x 10 -2 Torr ls -1Panel mountingVacuum connectionsWeightØ 17 mm / Ø 0.66 in hole, 3 mm/ 0.117 in maximum thicknessSC5 couplings or 3/8 inch BSPthreaded body and bonded seal85 g / 3 oz5Page199Product DescriptionAV5A Air Admittance Valve With CouplingsAccessories & SparesO Ring Nitrile Vor 2A Pk 10Dowty Seal 3/8 BSP MkCOrder No.C35003000Order No.H02105115H02104003Shop online at www.edwardsvacuum.com

AV10K Air Admittance ValveThe AV10K is manufactured in aluminum alloy. It has a control knob attached to a screwactuatedplunger: turn the control knob clockwise to close the valve. A nitrile ‘O’ ring sealsthe plunger to the valve body.The valve can be pipeline supported only, and is connected to the vacuum system with anNW10 fitting.5Page200DimensionsOrdering InformationTechnical DataMaterials of constructionBodyHE30 aluminumControl knob Nylon 6SealNitrileLeak rate across seat 10 -7 mbar ls -1 /8 x 10 -8 Torr ls -1Leak rate through body 10 -1 mbar ls -1 /8 x 10 -2 Torr ls -1Vacuum connectionsNW10Weight100 g / 3.5 ozProduct DescriptionAV10K Air Admittance ValveAccessories & SparesO Ring Nitrile Vor 2A Pk 10Order No.C35103000Order No.H02105115Shop online at www.edwardsvacuum.com

LV10K Leak Valve NW10 FlangesThe LV10K needle valve provides fine control of gas bleed into a vacuum chamber or aregulated leak to control pressure in a vacuum system and is suitable for gas admissiondown to 10 - 5 mbar / 8 x 10 -6 Torr. Suitable for pipeline or panel mounting.DimensionsTechnical DataMaterials of constructionBodyAluminium HE30SeatBrass BS2784 C2112NeedleMartensitic stainless steelEN56AMFilterBrass BS249Max flow rate (approx)* 0.1 ls -1Max inlet pressure2000 mbar / 1500 Torr5Page201Max leak rate, across seat 10 -7 mbar ls -1 /8 x 10 -8 Torr ls -1Max leak rate, across body 10 -7 mbar ls -1 /8 x 10 -8 Torr ls -1Vacuum connectionNW10Weight (g/oz)138 g / 4.8 ozOrdering Information* Flow rate relates to a pressure differential across valve of onebar.Product DescriptionLV10K Leak Valve NW10 FlangesAccessories & SparesSpares Kit Valve SeatOrder No.C37102000Order No.C37102812Shop online at www.edwardsvacuum.com

Electropneumatic Control ValveElectropneumatic control valves can be used to control the operation of pneumaticallyactivated vacuum valves. Control valves are available with different electrical supplyvoltages and frequencies to suit your application.DimensionsOrdering Information5Page202Product Description3-Port, 24V d.c, 1/8 Inch BSP3-Port, 24 V a.c, 50/60 Hz, 1/8 Inch BSP3-Port, 48 V d.c, 1/8 Inch BSP, North America3-Port, 110 V a.c, 50/60 Hz, 1/8 Inch BSP3-Port, 230 V a.c, 50/60 Hz, 1/8 Inch BSP5-Port, 24 V d.c, 6mm BSP5-Port, 24 V a.c, 50/60 Hz, 6mm BSP5-Port, 110 V a.c, 50/60 Hz, 6mm BSP5-Port, 230 V a.c, 50/60 Hz, 6mm BSPOrder No.H06200124H06200125H06200130H06200126H06200138B28703055B28703030B28703031B28703032Figure 1 - Pneumatic circuit for 3-port control valveFigure 2 - Pneumatic circuit for two 5-port lightweight control valvesFigure 3 - Pneumatic circuit 5-port lightweight control valveFigure 4 - Pneumatic circuit for 5-port control valveShop online at www.edwardsvacuum.com

Technical DataValveGV gate valvesPVPK pipelinevalves soft startBRV backing/roughing valveQSB63/100/160quarter swingbutterfly valves,Diffstak isolationvalvesValve TypeRecommendControl ValveConfigurationSchematicDouble-actingcylinder with no 1 x 5-port 3spring returnSingle-actingcylinder with 1 x 3-port 1spring returnDouble-actingcylinder withspring return tothe midposition(thatis, isolatedposition)Double-actingcylinder with nospring return2 x 5-port or (1x 5-port)1 x 5-port 42*(4†)Supply pressure 3-port 5-portbar gauge 2.1 - 8 3.4 – 4.8Psig 30 – 115 50 - 70* This configuration allows the use of the isolated position of thevacuum valve.† This configuration only allows the use of the roughing andbacking positions of the vacuum valve.5Page203Shop online at www.edwardsvacuum.com


Fittings and FlangesProduct Summary 210NW fittings 211ISO fittings 223CF Flange Fittings 230Cord and Tubing 2386Page205Oils, Fluids, Sealants and Greases 239Vapour Pump Fluids 243Greases and Waxes 245Shop online at www.edwardsvacuum.com

Flange Fittings6Page206• Fast availability from responsive local supply centers• Edwards worldwide support• International ISO, Pneurop and British Standards• Complete range for all common sizes in aluminium and stainlesssteel• Stainless fittings made in 316L for highest corrosion resistance• Precision material control ensures low outgassing and dependablevacuum performanceWhen you buy flange fittings from Edwards, you can expect theservice that only a leading international supplier can offer you.Whether you are an OEM (needing scheduled deliveries ofcomponent kits for series production) or a unique system builder, youcan rely on your local supplier to meet all your requirements.90+ Years of Vacuum ExperienceFrom our experience in vacuum technology we enjoy solving yourvacuum problems. You can rely on our library of vacuum applicationsand let us advise you on the most cost effective solutions. Our trainedengineers will resolve any problem you have in choosing the rightproduct for your application or troubleshooting a product that's notdoing what you expected.Partnership with EdwardsEdwards offers complete vacuum solutions. With our wide range ofpumping technologies and sophisticated distribution networks we canoffer flexible supply partnerships to match your competitive needsand offer the best value for your budget.The Edwards AdvantageOne Source Shopping• Simplifies administration and purchasing costs• Creates more purchasing power• Ensures total quality performanceKitting• All components supplied for system build in one kit• Simplifies ordering• Ensures no missing parts in production• Easier administration• Reduces inventory levels, stock costs and warehousing space• Easier control of usageConsignment Stocks• Only pay for when used• Stocks on your premises• No delivery problems• Stocks regularly replenished when usedTotal Quality• Accredited ISO9001 supplier• Customer contracts performance measuresVacuum Fittings in GeneralEdwards vacuum fittings are designed to be leak-tight in vacuumapplications. However, they are not intended to provide full structuralsupport. When designing vacuum systems, it is essential thatconsideration be given to the static and dynamic loads imposed oneach connection. If necessary, additional mechanical support shouldbe provided.Regular inspection including leak-checking and, where appropriate,periodic replacement of components should be considered.These accessories are primarily designed for vacuum applicationshowever some will withstand a small over-pressure, which isindicated in the tables below where appropriate. For the purpose ofthe European Union's Pressure Equipment Directive (97/23/EC),these items are considered to be piping for Group 2 gases (i.e. gasmixtures which are not explosive, flammable, toxic or oxidising) andare manufactured according to sound engineering practice as definedwithin the Directive.NW and ISO Flange FittingsChoose the optimum material to match your application and budget.Aluminium is ideal for achieving dependable cost-effectiveperformance down to 10 -7 mbar. Edwards also offers 316L/DIN1.4404 stainless steel fittings for rugged corrosion resistance insemiconductor processing and excellent repeatability in high vacuumapplications. In addition, careful quality control of elastomerspecifications ensures critical sealing materials deliver the lowoutgassing performance your vacuum system performance dependson. Edwards attention to detail on all specifications delivers fit-andforgetdependability for your vacuum equipment.UHV ConFlat ® Flange FittingsSealing Principle A copper seal is squeezed axially and radiallybetween two CF flanges, where knife-edges force the copper to coldflow. This flow is severely limited by the vertical flange wall whichgenerates high pressures and fills surface imperfections to give a leaktight joint. At high bakeout temperatures, the flange geometrymaintains high internal pressures despite softening of the gasket. Aradial groove extends right up to the sealing ring and provides for leaktesting of the vacuum connection.Materials Our range of CF flanges is manufactured from AISI 304stainless steel, which offers optimum performance at an affordablecost. Stainless steel 304 is used for the majority of UHV applicationswhere a bakeout temperature of up to 450 °C is needed. AISI 316LNstainless steel is recommended for special applications where aharder material, higher bakeout temperature and much lowermagnetic permeability are needed: these fittings are available onspecial order terms.Dimensions Edwards CF flanges are manufactured to internationalstandards and are compatible with all leading manufacturers. Metricflanges common in Europe and Asia use metric tapped holes andbored holes in flanges suitable for metric tubing. Flanges specified ininches, more commonly used in the USA, use UNF tapped flangethreads and bored holes compatible with inch sized tube. Edwardsoffers both options.Shop online at www.edwardsvacuum.com

CF Flange Names There are many descriptions used to describe thesame flange sizes. Use the table below to cross-reference betweencommon names.Flange ODCF Flange Name Equivalentsmm inchDN16CF NW16 CF34 NW16CF 1⅓ inch 34.00 1.33DN25CF NW25CF 2⅛ inch 53.60 2.11DN40CF NW35 CF70 NW35CF 2¾ inch 70.00 2.73DN50CF NW50CF 3¾ inch 85.70 3.37DN63CF NW63 CF114 NW63CF 4½ inch 114.00 4.47DN80CF NW75CF 4⅝ inch 117.35 4.62DN100CF NW100 CF150 NW100CF 6 inch 152.00 5.97DN125CF NW130CF 6¾ inch 171.45 6.75DN160CF NW150 CF200 NW150CF 8 inch 202.00 7.97DN200CF NW200 CF250 NW200CF 10 inch 253.00 9.97DN250CF NW250 CF300 NW250CF 12 inch 306.00 13.25NW Polymer Clamping RingsIn addition to the traditional aluminium hinged clamp, Edwards alsooffers a range of coupling clamps manufactured from high technologypolymer, offering important advantages for the vacuum systembuilder.Compared to aluminium, the high flexural modulus and betterstrength-to-weight ratio has enabled Edwards to design andmanufacture clamps which are lighter and more compact thanexisting aluminium products. The CX4 crystalline aryl polymer clampscan be used at temperatures up to 100 °C and are unaffected by mostcommon solvents.These clamps are competitively priced and the high quality finish willenhance the appearance of any vacuum system. The range isavailable in swing and quick release hinged versions covering thefollowing flange sizes: NW10/16, 20/25, 25/32, 32/40 and 50. WithEdwards Co-Seals, swing clamps are suitable for use in the pressurerange 10 -7 mbar to 10 bar. Electrical continuity across the clamps isachieved by built-in earth strips.Co-SealThe introduction of our Co-Seal represented a major advance in themethod of sealing NW and ISO flange connections. Discerning usersappreciate the benefits of a seal design which eliminates crevices andtrapped volumes. Our NW Co-Seals with polymer carriers offer amore economical seal with even wider appeal.A Co-Seal has a split outer ring, or carrier, which retains a mouldedelastomer sealing ring. When fitted, the inner face of the Co-Seal isdirectly exposed to the vacuum system, eliminating any crevices ortrapped volumes which can generate gas bursts and inhibit pumpdown.Unlike the regular centring-ring and O-ring, the NW Co-Seal isfully restrained externally and is therefore suitable from 10 -7 mbar to10 bar. Available with either nitrile or fluoroelastomer seals.For ISO bolted flanges, cut-outs around the external circumference ofthe Co-Seal are positioned so that the securing bolts centralise theCo-Seal precisely. For ISO collar flanges, claw clamps also centralisethe seal and are themselves spaced around the flange by the cut-outsin the Co-Seal.Centring Rings in High Technology PolymerWe complement our aluminium centring-rings with a rangemanufactured from a high-tech polymer. These centring-rings have aunique slotted design which prevents gas bursts. The CX2 polymercan be used at temperatures up to 100 °C and is unaffected by mostcommon solvents. The material has an outgassing rate of6.6 × 10 -8 mbar l s -1 cm -2 which makes it suitable for use in mostvacuum systems, whilst giving additional benefits in terms of lowerweight and cost.Technical DataPhysical DataOperating pressure range (absolute)C clamp and centring-ring 10 -7 mbar – 1 bar /14.5 psiStainless steel clamping ring andCo-Seal10 -7 mbar – 10 bar /145 psiStainless steel clamp and metal seal 10 -8 mbar – 3 bar /44 psiStainless steel clamp and Co-Seal (all 10 -7 mbar – 10 bar /sizes)145 psiPolymer and aluminium clamps and Co-SealNW10 to NW25 10 -7 mbar – 10 bar /145 psiNW40 to NW50 10 -7 mbar – 10 bar /145 psiNW trapped O-ring 10 -7 mbar – 10 bar /145 psiISO trapped O-ring 10 -7 mbar – 1 bar /14.5 psiO-ring and centring-ring (vacuum use only) 10 -7 mbar – 1 bar /14.5 psiBellows 10 -7 mbar – 1 bar /14.5 psiFlexible pipelines 1 10 -7 mbar – 1.5 bar /21 psiBraided flexible pipelines 1 10 -7 mbar – 10 bar /145 psi1 Depends on sizeOperating TemperatureThe maximum temperature for continuous operation with fluoroelastomer is 150 °C. Itmay be intermittently baked to 200 °C.Polymer Co-Seal -10 to 80 °CAluminium Co-Seal and nitrile seal -10 to 100 °CAluminium Co-Seal and fluoroelastomer -10 to 200 °CsealPolymer centring-ring and nitrile O-ring -10 to 100 °CPolymer centring-ring and-10 to 125 °Cfluoroelastomer sealNitrile O-ring -10 to 100 °CFluoroelastomer O-ring -10 to 200 °CPolymer clampConstant vacuum use -10 to 100 °CIntermittent vacuum use -10 to 125 °CStainless steel clamping ring -10 to 125 °CAluminium swing/hinge clamp -10 to 200 °CStainless steel clamp -10 to 200 °CStandards complianceNW and ISO fittings Pneurop 6606 (1981),ISO1609 (1986)DIN28403, DIN28404CF fittingsISO3669Stainless steel equivalents6Page207Shop online at www.edwardsvacuum.com

AISI Number German Steel Number DIN Standard304 1.4301 X5 CrNi 18 10303 1.4305 X10 CrNi 5 18 9304L 1.4306 X2 CrNi 19 10301 1.4310 X12 CrNi 17 7316 1.4401 X5 CrNiMo 18 10316L 1.4404 X2 CrNiMo 17 13 2316Ti 1.4571 X6 CrNiMoTi 17 12 2321 1.4541 X10 CrNiTi 18 9Chemical ResistanceThis information is provided as a general guide only. Furtherguidance should be sought with respect to specific chemicals andtheir applicationsMaterial Generally Resistant To Generally Attacked ByNitrileButadieneAcrylonitrilecopolymerMany hydrocarbonsfats, oils greases,hydraulic fluidsOzone, ketones,esters, aldehydes,chlorinated and nitrohydrocarbons6Page208NeopreneChloroprene polymer Moderate chemicalsand acids, ozone, oilyfats, greases, manyoils and solventsFluoroelastomerFluorocarbon polymer All aliphatic, aromaticand halogenatedhydrocarbons, acids,animal and vegetablefatsStrong oxidizing acidsand esters, ketones,chlori-nated aromaticand nitrohydrocarbonsKetones, lowmolecular weightesters and nitrocontainingcompoundsAluminiumOrganic acids, fattyacids, freons, nitricacidStrong acids, alkalischlorinated solvents,mercuryStainless steelOrganic acids, alkalis,nitric acid. Sulphuricacid (10%)Oxidizing chlorines,some organic acids,hydrochloric acid,hydrofluoric acidPolymerLiquid crystal polymer Organic acids,glycols, chlorinatedsolvents, ketones,mineral and oxidisingacids, causticsolutions freonsSodium hydroxide,sulphuric acid (70%)Shop online at www.edwardsvacuum.com

DimensionsNW Dimensions2.5ØAØBISO Flange Assembly with Co-SealsTwo Fixed Collar Flanges with Claw Clamps15± 10’30.05±CØDA B C DNW10 30 12.2 2 14NW16 30 17.2 2 20NW20 40 22.2 2 25NW25 40 26.2 2 28NW32 55 34.2 2 38NW40 55 41.2 2 44.5NW50 75 52.2 2 57ISO-K, ISO-F DimensionsKG x HTwo Rotatable Flanges6J22.5RPage209ØBØC x 3.2ØD max.ØAØFØEA B C D E F G H J K RISO63 95 70 76.1 80 130 110 9 4 10 5 1.5ISO80 110 83 88.9 95 145 125 9 8 10 5 1.5ISO100 130 102 114.3 115 165 145 9 8 10 5 1.5ISO160 180 153 160.3 165 225 200 11 8 10 5 2.5ISO200 240 213 219 225 285 260 11 12 10 5 2.5ISO250 290 261 273 275 335 310 11 12 10 5 2.5ISO320 370 318 324 355 425 395 14 12 15 7.5 2.5ISO400 450 400 406 435 510 480 14 16 15 7.5 4ISO500 550 501 508 535 610 580 14 16 15 7.5 4ISO630 690 630 660 660 750 720 14 20 20 10 5CF dimensionsEDOne Fixed Collar Flange, with One Rotatable FlangeCABNominal A, mm A, inch B C D E BoltHolesDN16CF 34 1⅓ 27 4.4 – – 6DN40CF 70 2¾ 58.7 6.6 – – 6DN63CF 114 4½ 92.1 8.4 6 3 8DN100CF 152 6 130.2 8.4 6 3 16DN160CF 202 8 181 8.4 6 3 20DN200CF 253 10 231.8 8.4 6 3 24DN250CF 306 12 284 8.4 6 3 32Shop online at www.edwardsvacuum.com

Product summaryProduct Summary6Page210SemiconductorScientificR & DIndustrialDescription Features PageClampsClamping Ring – ✓ ✓ ✓ Low cost, compactStainless steelPolymer Clamp – ✓ ✓ ✓ Low cost, lightweightNeat appearanceAluminium Clamp ✓ ✓ ✓ ✓ RuggedPneurop standardCompetitive priceMetal Clamp – ✓ ✓ – Suitable for aluminium and indium sealsWide temperature rangeClaw Clamps and Bolts ✓ ✓ ✓ ✓ Wide range optimised for many applicationsHigh strength CF bolts for UHV flangesNW ISO CF6-6 – –6-6 – –6-6 – –6-6 – –6-7 6-18 6-31SealsPolymer Centring Ring – ✓ ✓ ✓ Low cost6-7 – –Gas vents – no gas burstsResistant to solventsTrapped O-Rings ✓ ✓ ✓ ✓ No gas bursts 6-9 6-19 –Polymer Co-Seal – ✓ ✓ ✓ No gas bursts6-8 6-19 –Suitable for up to 10 barMetal Centring Ring ✓ ✓ ✓ ✓ Stainless steel and aluminium carrier6-7 6-20 –Pneurop standardFluoroelastomer and nitrile versionsMetal Seal – ✓ ✓ – Aluminium all metal sealsCopper gaskets for UHV seals6-9 – 6-30Pipeline ComponentsAluminium – ✓ ✓ ✓ NW10 to NW50 components 6-9 6-21 –Stainless Steel ✓ ✓ ✓ ✓ NW10 to NW50 componentsNW and ISO fittings in 316L for corrosionresistanceCF fittings in 304L for cost effectiveness6-9 6-21 6-27Bellows and Flexible PipelinesBellows ✓ ✓ ✓ ✓ NW and ISO fittings in 316L, CF fittings in 304LSuitable for minimising transfer of vibration frompump to vacuum systemsFlexible Pipelines – ✓ ✓ ✓ Use to simplify connection of two components orcorrect misalignmentUse braided versions for positive pressureapplications(like dry pump exhausts)6-16 6-24 6-306-16 6-24 –Shop online at www.edwardsvacuum.com

NW fittingsSize A B C D E F Ordering NumberBClamping RingCopper free (black wing nut)NW10/16 44 46 34 C10512501ANW20/25 60 60 48 C10514501NW32/40 73 75 63 C10516501NW50 90 96 84 C10517501CStainless steel (red wing nut)NW10/16 44 46 34 C10512401NW20/25 60 60 48 C10514401NW32/40 73 75 63 C10516401NW50 90 96 84 C10517401BACHinged ClampaluminiumNW10/16 68 40 57 C10512402NW20/25 80 50 57 C10514402NW32/40 95 66 57 C105164026Page211PolymerNW10/16 68 40 57 C10512303NW20/25 80 50 57 C10514303NW32/40 95 66 57 C10516303NW50 125 86 57 C10517303Swing ClampBACaluminiumNW10/16 62 40 35 C10512403NW20/25 75 50 35 C10514403NW32/40 90 66 35 C10516403NW50 120 86 35 C10517403BACPolymerNW10/16 62 40 35 C10512304NW20/25 75 50 35 C10514304NW32/40 90 66 35 C10516304NW50 120 86 35 C10517304Clamp (Metal Seals)Stainless steelNW10/16 54 22 C10512404ABNW20/25 64 32 C10514404NW32/40 82 47 C10516404NW50 112 62 C10517404We recommend the use of thread lubricant, 1764 00030.Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberEACDFB"C" ClampNickel plated brass including screw packNW10/16 59 35 38 45 6.3 22 C11002340NW25 70 44 54 54 2 8.3 25.4 C11004340NW40 1 100 73.5 79 81 8.3 50 C110053401 Stainless steel; 2?Non slottedCADBBulkhead Clampaluminium Europe N. AmericaNW10/16 9.2 50.8 38.1 5.1 C10512007 C90512007NW25 9.8 60.3 48.0 5.1 C10514007 C90514007NW40 9.3 74.6 62.0 5.1 C10516007 C90516007NW50 10.3 95.2 83.0 5.1 C10517007 C90517007All sizes supplied with6 x 10-32 UNF x 5/8" hex head stainless steel bolts6 x 10-32 UNF stainless steel plain washers6Page212APVC Hose ClampStainless steelNW10/16 25 C10512408NW25 36 C10514408NW40 50 C10516408NW50 60 C10517408BACCentring Ring with O-RingFluoroelastomer/stainless steel carrierNW10 12 3.9 8 C10511395NW16 17 3.9 8 C10512395NW25 26 3.9 8 C10514395NW40 41 3.9 8 C10516395NW50 52 3.9 8 C10517395Fluoroelastomer/aluminium carrierNW10 12 3.9 8 C10511397NW16 17 3.9 8 C10512397NW25 26 3.9 8 C10514397NW40 41 3.9 8 C10516397Fluoroelastomer/polymer carrierNW10 12 3.9 8 C10511394NW16 17 3.9 8 C10512394NW25 26 3.9 8 C10514394NW40 41 3.9 8 C10516394Nitrile/stainless steel carrierNW10 12 3.9 8 C10511396NW16 17 3.9 8 C10512396NW25 26 3.9 8 C10514396NW40 41 3.9 8 C10516396NW50 52 3.9 8 C10517396Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberNitrile/aluminium carrierNW10 12 3.9 8 C10511398NW16 17 3.9 8 C10512398NW25 26 3.9 8 C10514398NW40 41 3.9 8 C10516398Nitrile/polymer carrierNW10 12 3.9 8 C10511393NW16 17 3.9 8 C10512393NW25 26 3.9 8 C10514393NW40 41 3.9 8 C10516393BACCentring Ring with ScreenFluoroelastomer/stainless steel AISI 316L DIN 1.4404 Stainless Steel wire Ø0.5 Aperture size 1 mm 2NW16 9.5 3.9 8 C10512085NW25 19.5 3.9 8 C10514085NW40 32 3.9 8 C10516085NW50 43 3.9 8 C10517085ACentring Ring with Optical BaffleFluoroelastomer/stainless steel AISI 304L DIN 1.43016BCNW25 26 3.9 8.5 D02110000Page213Centring Ring Sintered FilterNW10NW40D02158020D15405110ACo-SealNitrile/aluminium carrierBCNW10/16 32 3.9 7 B27158480NW20/25 42 3.9 7 B27158490NW32/40 57 3.9 7 B27158500Nitrile/polymer carrierNW10/16 32 3.9 7 B27158426NW20/25 42 3.9 7 B27158447NW32/40 57 3.9 7 B27158454NW50 77.5 3.9 7 B27158467Fluoroelastomer/aluminium carrierNW10/16 32 3.9 7 B27158481NW20/25 42 3.9 7 B27158491NW32/40 57 3.9 7 B27158501Fluoroelastomer/polymer carrierNW10/16 32 3.9 7 B27158427NW20/25 42 3.9 7 B27158448NW32/40 57 3.9 7 B27158453NW50 77.5 3.9 7 B27158466Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberBACMetal SealsaluminiumUse with clamps (metal seals) C105-XX-404.NW10/16 32 2.0 7 C27159004NW20/25 42 2.0 7 C27159005NW32/40 57 2.0 7 C27159006NW50 77 2.0 7 C27159007DBACAdapting Centring Ring with O-RingNitrileNW10/16 stainless steel 10 12 8 3.9 17 C10512346NW10/16 polymer 10 12 8 3.9 17 C10512349EFluoroelastomerNW10/16 stainless steel 10 12 8 3.9 17 C10512345NW10/16 polymer 10 12 8 3.9 17 C105123506Page214DEFBCNW Trapped O-RingFluoroelastomer/stainless steel/aluminiumNW10/16 32.5 27.5 30.2 7 18.5 16 C10512490NW25 42.5 37.5 40.2 7 28.5 25 C10514490NW40 57.5 52.0 55.2 7 43 40 C10516490NW50 77.5 64.5 75.2 7 55.5 50 C10517490ABAO-Ring (Pack of 10)NitrileNW10 15 5 H02124012NW16 18 5 H02124013NW25 28 5 H02124015NW40 42 5 H02124017NW50 50 5 H02124018BAO-Ring (Pack of 5)FluoroelastomerNW10 15 5 H02124032NW16 18 5 H02124033NW25 28 5 H02124035NW40 42 5 H02124037NW50 50 5 H02124038AA▲ Dimensions shown dotted in diagramElbow 90°aluminium BS LM25 DIN 3.2371▲NW10 30 C10511410NW16 40 C10512410NW25 50 C10514410NW40 65 C10516410Stainless Steel AISI 316L DIN 1.4404NW10 30 C10511420NW16 40 C10512420NW25 50 C10514420NW40 65 C10516420NW50 70 C10517420Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberAElbow 45°Stainless Steel AISI 316L DIN 1.4404NW16 23.2 C10512405NW25 28.5 C10514405NW40 42.7 C10516405NW50 50.6 C10517405Long Radius ElbowStainless Steel AISI 316L DIN 1.4404NW40 130 C10516406NW50 140 C10517406AABAT-Piecealuminium BS LM25 DIN 3.2371NW10 30 60 C10511411NW16 40 80 C10512411NW25 50 100 C10514411NW40 65 130 C105164116Page215AStainless Steel AISI 316L DIN 1.4404NW10 30 60 C10511421NW16 40 80 C10512421NW25 50 100 C10514421NW40 65 130 C10516421NW50 70 140 C10517421ACross Piecealuminium BS LM25 DIN 3.2371NW10 60 C10511412NW16 80 C10512412NW25 100 C10514412NW40 130 C10516412AStainless Steel AISI 316L DIN 1.4404NW10 60 C10511422NW16 80 C10512422NW25 100 C10514422NW40 130 C10516422NW50 140 C10517422AReducing Crossaluminium ISO 6082 DIN 3.2315NW25/10 70 70 26.2 12.2 C10514413NW40/10 80 90 41.2 12.2 C10516413CBDShop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberAReducing CrossStainless Steel AISI 316L DIN 1.4404NW25/10 70 70 26.2 12.2 C10514423NW25/16 100 80 26.2 17.2 C10514424CBNW40/16 130 80 41.2 17.2 C10516424NW40/25 130 100 41.2 26.2 C10516425NW50/25 140 100 52.2 26.2 C10517425DAReducing Piecealuminium ISO 6082 DIN 3.2315NW25/10 10 40 C10514436NW25/16 16 40 C10514437BNW40/25 24 40 C10516439NW40/16 16 40 C10516438NW50/16 16 40 C10517040NW50/25 24 40 C105170436NW50/40 41 40 C10517041Page216ABReducing PieceStainless Steel AISI 316L DIN 1.4404NW25/10 10 40 C10514446NW25/16 16 28 C10514447NW40/16 16 28 C10516448NW40/25 24 28 C10516449NW50/16 16 28 C10517450NW50/25 24 40 C10517051NW50/40 40 28 C10517452AReducing T-PieceStainless Steel AISI 316L DIN 1.4404NW25/16 100 40 50 C10514427NW40/16 130 40 65 C10516428CBNW40/25 130 50 65 C10516429NW50/16 140 50 70 C10517430NW50/25 140 65 70 C10517431Blanking Flangealuminium BS LM 25 DIN 3.2371DBACNW10 30 12.2 6 2.5 C10511368NW16 30 17.2 6 2.5 C10512368NW25 40 26.2 6 2.5 C10514368NW40 55 41.2 6 2.5 C10516368Stainless Steel AISI 316L DIN 1.4404NW10 30 12.2 6 2.5 C10511366NW16 30 17.2 6 2.5 C10512366NW25 40 26.2 6 2.5 C10514366NW40 55 41.2 6 2.5 C10516366NW50 75 52.2 6 2.5 C10517366Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberAFull Nipplealuminium BS LM 25 DIN 3.2371NW10 60 C10511409NW16 80 C10512409NW25 100 C10514409NW40 130 C10516409Stainless Steel AISI 316L DIN 1.4404NW10 60 C10511433NW16 80 C10512433NW25 100 C10514433NW40 130 C10516433NW50 140 C10517433BCFor inch tube: D= tube ODALong Flange Weld StubStainless Steel AISI 316L DIN 1.4404For metric tubeNW10 70 15 10 C10511316NW16 70 20 16 C10512316NW25 70 28 24 C10514316NW40 70 44.5 41 C10516616NW50 70 57 51 C10517316For inch tubeNW10 40 12.7 9.3 ½ C10504080NW16 40 19.1 15.7 ¾ C10504101NW25 40 25.4 22 1 C10504223NW40 40 38.1 34.7 1½ C10504324NW50 40 50.8 47.4 2 C105043516Page217BCFor inch tube: D= tube ODAShort Flange Weld StubStainless Steel AISI 316L DIN 1.4404For metric tubeNW10 30 15 10 C10511311NW16 30 20 16 C10512311NW25 30 28 24 C10514311NW40 30 44.5 41 C10516611NW50 30 57 51 C10517311For inch tubeNW10 12.7 12.7 9.3 ½ C10504079NW16 12.7 19.1 15.7 ¾ C10504100NW25 12.7 25.4 22 1 C10504222NW40 19.1 38.1 34.7 1½ C10504323NW50 19.1 50.8 47.4 2 C10504350DABCE= tube OD, mmF= tube OD, inchesWeld Socket Flange for Inch TubeStainless Steel AISI 316L DIN 1.4404NW16 15.5 13 11.4 12.7 12.7 ½ C10504102NW16 22.1 19.3 17.3 12.7 19.1 ¾ C10504103NW25 28.6 25.9 22.1 12.7 25.4 1 C10504224NW40 44.5 38.6 34.9 12.7 38.1 1½ C10504325NW50 57.2 51.3 47.5 12.7 50.8 2 C10504353Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberBACAdaptor NW/ISOStainless Steel AISI 316L DIN 1.4404NW25/ISO63 95 25 50 C10007115NW40/ISO63 95 40 50 C10007116NW40/ISO80 110 40 118 C10008002NW40/ISO100 130 40 50 C10009122NW50/ISO63 95 50 50 C10007118NW50/ISO80 110 50 118 C10008003NW50/ISO100 130 50 50 C10009123ABAdaptor NW/CFStainless Steel AISI 316L DIN 1.4404NW16/DN16CF/1⅓ 52.7 15.8 C10503104NW16/DN40CF/2¾ 45.3 15.8 C10503105NW25/DN40CF/2¾ 45.3 22 C10503207NW40/DN40CF/2¾ 45.3 40 C10503305NW50/DN63CF/4½ 49.5 50 C105034056Page218CDBAdaptor NW/ASA with O-Ring GrooveStainless Steel AISI 316L DIN 1.4404NW40/2 inch ASA 46 40 152 86.9 C10503310NW40/3 inch ASA 46 40 190 118 C10503311NW50/2 inch ASA 46 50 152 86.9 C10503410ACBAdaptor NW/ASA without O-Ring GrooveStainless Steel AISI 316L DIN 1.4404NW40/1½ inch ASA 46 40 127 C10503303NW40/2 inch ASA 46 40 152 C10503300NW50/2 inch ASA 46 50 152 C10503400AABAdaptor NW/NPT Threaded Pipe MaleStainless Steel AISI 316L DIN 1.4404NW16/⅛ inch NPT male 40 4.7 C10501102NW16/¼ inch NPT male 50 7.1 C10501103NW25/⅛ inch NPT male 40 4.7 C10501217NW25/¼ inch NPT male 50 7.1 C10501218NW25/½ inch NPT male 75 11.9 C10501219NW25/¾ inch NPT male 75 15.9 C10501220NW40/¼ inch NPT male 50 7.1 C10501303NW40/½ inch NPT male 75 11.9 C10501304NW40/¾ inch NPT male 75 15.9 C10501305NW40/1 inch NPT male 75 22.2 C10501306NW50/½ inch NPT male 75 11.9 C10501501NW50/1 inch NPT male 75 22.2 C10501503Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberABAdaptor NW/NPT Threaded Pipe Femalealuminium ISO 6082 DIN 3.2315NW10/⅛ inch NPT female 15.8 19.1 C10501070NW16/⅛ inch NPT female 15.8 19.1 C10501104NW25/⅛ inch NPT female 22.4 19.1 C10501221NW40/⅛ inch NPT female 31.8 25.4 C10501307NW10/¼ inch NPT female 15.8 19.1 C10501071NW16/¼ inch NPT female 15.8 19.1 C10501105NW25/¼ inch NPT female 22.4 19.1 C10501222NW40/¼ inch NPT female 31.8 25.4 C10501308Stainless Steel AISI 316L DIN 1.4404NW10/⅛ inch NPT female 15.8 19.1 C10501072NW16/⅛ inch NPT female 15.8 19.1 C10501106NW25/⅛ inch NPT female 22.4 19.1 C10501223NW40/⅛ inch NPT female 31.8 25.4 C10501309NW10/⅛ inch NPT female 15.8 19.1 C10501073NW16/¼ inch NPT female 15.8 19.1 C10501107NW25/¼ inch NPT female 22.4 19.1 C10501224NW40/¼ inch NPT female 31.8 25.4 C105013106BAAdaptor NW/VCR MaleStainless Steel AISI 316L DIN 1.4404NW16/¼ inch VCR male 35.6 4.8 C10501108NW16/½ inch VCR male 41.4 10.4 C10501110NW25/¼ inch VCR male 35.6 4.8 C10501225NW25/½ inch VCR male 40.6 10.4 C10501227NW40/¼ inch VCR male 35.6 4.8 C10501311NW40/½ inch VCR male 40.6 10.4 C10501313NW50/¼ inch VCR male 35.6 4.8 C10501508Page219Adaptor NW/VCR FemaleStainless Steel AISI 316L DIN 1.4404NW16/¼ inch VCR female 35.6 4.8 C10501109BNW16/½ inch VCR female 41.4 10.4 C10501111NW25/¼ inch VCR female 35.6 4.8 C10501226NW25/½ inch VCR female 40.6 10.4 C10501228ANW25/¾ inch VCR female 54.4 15.7 C10501230NW40/¼ inch VCR female 35.6 4.8 C10501312NW40/½ inch VCR female 40.6 10.4 C10501314ABCD= hose internal diameterAdaptor PVC HoseStainless Steel AISI 316L DIN 1.4404NW10/½ inch hose 12.7 32 20 12.7 C10504081NW16/½ inch hose 12.7 32 20 12.7 C10504104NW16/¾ inch hose 19.1 32 20 19.1 C10504105NW25/¾ inch hose 19.1 38.1 26 19.1 C10504266NW25/1 inch hose 25.4 38.1 26 25.4 C10504225NW40/1½ inch hose 38.1 50 38.1 38.1 C10504326NW50/2 inch hose 47.4 55 41 50.8 C10504352Shop online at www.edwardsvacuum.com

ASize A B C D E F Ordering NumberACBD= tube od in mmE= tube OD in inchesGauge Tube Adaptor and Compression O-RingStainless Steel AISI 316L DIN 1.4404 Fluoroelastomer O-ringNW10 13.1 50 33 12.7 ½ C10502001NW16 6.7 32 – 6.4 ¼ C10502101NW16 13.1 50 33 12.7 ½ C10502102NW16 19.4 56 40 19.1 ¾ C10502103NW25 13.1 50 33 12.7 ½ C10502201NW25 19.4 58 40 19.1 ¾ C10502202NW25 25.8 62 46 25.4 1 C10502203NW40 13.1 58 33 12.7 ½ C10502300NW40 19.4 63.5 40 19.1 ¾ C10502301NW40 25.8 71 46 25.4 1 C10502302NW40 29 74 49 28.6 1⅛ C10502303NW40 38.4 84 63.5 38.1 1½ C10502304NW50 19.4 63.5 40 19.1 ¾ C10502400NW50 25.8 71 46 25.4 1 C10502401NW50 51.1 87 66 50.8 2 C105024046Page220CBACompression FittingaluminiumNW10 44 43 14/15 C10520050CABNozzlealuminium ISO 6082 DIN 3.2315NW10 7 12 40 C10511645NW25 7 12 40 C10514645NW40 7 12 40 C10516645DABCCoupling BodyBrassNW10 18 15.2 13 6 C10511328NW25 32 28.2 20 8 C10514328NW40 46 42.2 18 8 C10516628NW Optical ViewpointBody: Stainless Steel AISI 316L DIN 1.4404; Mounting: Nilo K; Glass: Borosilicate (8250 Schott)NW40 23.6 C10516407NW50 31.8 C10517407Temperature range -40 to 380 °CTemperature gradient

Size A B C D E F Ordering NumberABCC= minimum bend radius, staticD= minimum bend radius, dynamicE= maximum operating pressure, bar absoluteBraided Flexible Exhaust PipelineStainless Steel AISI 316L DIN 1.4404NW25 26.2 135 50 320 10.0 C10514294NW40 41.2 135 80 400 10.0 C10516294NW50 52.2 135 100 450 10.0 C10517294NW25 26.2 250 50 320 10.0 C10514295NW40 41.2 250 80 400 10.0 C10516295NW50 52.2 250 100 450 10.0 C10517295NW25 26.2 500 50 320 10.0 C10514296NW40 41.2 500 80 400 10.0 C10516296NW50 52.2 500 100 450 10.0 C10517296NW25 26.2 1000 50 320 10.0 C10514297NW40 41.2 1000 80 400 10.0 C10516297NW50 52.2 1000 100 450 10.0 C10517297ABC= maximum operating pressure, bar absoluteFlexible BellowsStainless Steel AISI 316L DIN 1.4404NW10 102 123 1.2 C10511670NW16 102 123 1.2 C10512670NW25 102 123 1.2 C10514670NW40 102 123 1.2 C10516670NW50 102 123 1.2 C105176706Page221ABCC= minimum bend radius, staticD= minimum bend radius, dynamicE= maximum operating pressure, bar absoluteFlexible PipelinesStainless Steel AISI 316L DIN 1.4404NW10 12.2 250 30 100 1.5 C10511285NW16 17.2 250 30 130 1.5 C10512285NW25 26.2 250 50 210 1.5 C10514285NW40 41.2 250 80 260 1.5 C10516285NW50 52.2 250 100 320 1.5 C10517285NW10 12.2 500 30 100 1.5 C10511286NW16 17.2 500 30 130 1.5 C10512286NW25 26.2 500 50 210 1.5 C10514286NW40 41.2 500 80 260 1.5 C10516286NW50 52.2 500 100 320 1.5 C10517286NW10 12.2 750 30 100 1.5 C10511300NW16 17.2 750 30 130 1.5 C10512300NW25 26.2 750 50 210 1.5 C10514300NW40 41.2 750 80 260 1.5 C10516300NW50 52.2 750 100 320 1.5 C10517300NW10 12.2 1000 30 100 1.5 C10511287NW16 17.2 1000 30 130 1.5 C10512287NW25 26.2 1000 50 210 1.5 C10514287NW40 41.2 1000 80 260 1.5 C10516287NW50 52.2 1000 100 320 1.5 C10517287Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberAReinforced PVC Tube with NW Flanges and Hose ClampsStainless Steel AISI 316L DIN 1.4404NW10 500 C10511055NW16 500 C10512055NW25 500 C10514055NW40 500 C10516055NW50 500 C10517055NW10 1000 C10511155NW16 1000 C10512155NW25 1000 C10514155NW40 1000 C10516155NW50 1000 C10517155Maximum operating pressure 1 bar absolute, Temperature 5 to 60 °C6Page222Reinforced PVC Tube, 1 metreEurope N. America½ inch ID tube N/A A63012220¾ inch ID tube H02100016 U300021731 inch ID tube H02100017 A630123431⅓ inch ID tube H02100018 U300004842 inch ID tube H02100019 U30003837Maximum operating pressure 1 bar absolute, Temperature 5 to 60 °CCBANeoprene Rubber Tube5 × 19 mm 5 19 1000 H021000027 × 17 mm 7 17 1000 H021000039 × 25 mm 9 25 1000 H0210000412 × 28 mm 12 28 1000 H0210000520 mm × 34 mm 20 34 1000 H02100006Reinforced hose 25 32 305 C06600025CMoulded SleeveNeopreneNW10 13 21 38 23 C26501002NW25 27 36 55 38 C26501004BADShop online at www.edwardsvacuum.com

ISO fittingsSize A B C D E F Ordering NumberAD = Ø, nCBn= number of holesERotatable Flange with Fitting KitMild steel nickel platedISO63 130 110 95.5 Ø9, 4 12 C10007010ISO80 145 125 110 Ø9, 8 12 C10008012ISO100 165 145 130.5 Ø9, 8 12 C10009010ISO160 225 200 180.7 Ø11,8 16 C10011010ISO200 285 260 240.7 Ø11,12 16 C10012010ISO250 335 310 290.7 Ø11,12 16 C10013010ISO320 425 395 371 Ø14,12 20 C10014012BACD= number requiredHalf Claw Clamp for use with Centring Ring (Tapped Holes)Zinc plated mild steel body, stainless steel boltISO63 22.5 35 M8 4 C10007151ISO100 22.5 35 M8 8 C10007151ISO160 23 40 M10 8 C10011151ISO200 23 40 M10 12 C10011151ISO250 23 45 M10 12 C10011151ISO320 36.5 60 M12 12 C10014151ISO400 36.5 60 M12 16 C10014151ISO500 36.5 60 M12 16 C100141516Page223BACD= number requiredHalf Claw Clamp for use with Centring Ring (Clear Holes)Zinc plated mild steel body, stainless steel boltISO63 22.5 35 M8 4 C10007150ISO100 22.5 35 M8 8 C10007150ISO160 23 40 M10 8 C10011150ISO200 23 40 M10 12 C10011150ISO250 23 45 M10 12 C10011150ISO320 30.5 60 M12 12 C10014150ISO400 30.5 60 M12 16 C10014150ISO500 30.5 60 M12 16 C10014150BACD= number requiredHalf Claw Clamp for use with O-ring groove (tapped holes)Zinc plated mild steel body, stainless steel boltISO63 18.6 35 M8 4 C10007093ISO100 18.6 35 M8 8 C10007093ISO160 19 40 M10 8 C10011093ISO200 19 40 M10 12 C10011093ISO250 19 40 M10 12 C10011093ISO320 31 50 M12 12 C10014093ISO400 31 50 M12 16 C10014093ISO500 31 50 M12 16 C10014093BACHalf Claw Clamp for use with O-ring Groove (Clear Holes)Zinc plated mild steel body, stainless steel boltISO63 18.6 45 M8 4 C10007149ISO100 18.6 45 M8 8 C10007149D= number requiredShop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberADClaw ClampsZinc plated 1.1181 steelISO63/ISO250 60 22 33 M10 C10007090ISO320/ISO500 75 32 42 M12 C10014090B - CISO63 requires 4 clamps; ISO80-160requires 4-8 clamps; ISO200-320 requires6-12 clamps; ISO400-500 requires 8-16clampsB - CAClaw ClampsaluminiumISO63/100 – 22 33 M8 C10007156ISO160/250 – 24 38 M10 C10011094ISO320/500 – 35 56 M12 C100140946Page224ABCUse ISO polymer Co-Seals only for highvacuum applications

Size A B C D E F Ordering NumberACentring-ring with O-RingStainless steel AISI 316L centring-ringBCNitrileISO63 70 3.9 8 C10007173ISO80 83 3.9 8 C10008173ISO100 102 3.9 8 C10009173ISO160 153 3.9 8 C10011173ISO200 213 3.9 8 C10012173ISO250 261 3.9 8 C10013173ISO320 318 5.6 14 C10014173ISO400 400 5.6 14 C10015173ISO500 501 5.6 14 C10016173FluoroelastomerISO63 70 3.9 8 C10007174ISO80 83 3.9 8 C10008174ISO100 102 3.9 8 C10009174ISO160 153 3.9 8 C10011174ISO200 213 3.9 8 C10012174ISO250 261 3.9 8 C10013174ISO320 318 5.6 14 C10014174ISO400 400 5.6 14 C10015174ISO500 501 5.6 14 C100161746Page225ATrapped O-RingStainless steel AISI 316L centring ring with aluminium outer ringNitrileDBCISO40 63 41 3.9 8 B27158175ISO63 95 70 3.9 8 B27158176ISO80 109 83 3.9 8 B27158169ISO100 128 102 3.9 8 B27158177ISO160 179 153 3.9 8 B27158178ISO200 239 213 3.9 8 B27158080ISO250 287 261 3.9 8 B27158180ISO320 358 318 5.6 14 B27158182ISO400 440 400 5.6 14 B27158183ISO500 541 501 5.6 14 B27158184FluoroelastomerISO40 63 41 3.9 8 B27158165ISO63 95 70 3.9 8 B27158170ISO80 109 83 3.9 8 B27158181ISO100 128 102 3.9 8 B27158171ISO160 179 153 3.9 8 B27158172ISO200 239 213 3.9 8 B27158081ISO250 287 261 3.9 8 B27158143ISO320 358 318 5.6 14 B27158166ISO400 440 400 5.6 14 B27158167ISO500 541 501 5.6 14 B27158168AISO Centring-ring and ScreenBCStainless steel AISI 316l DIN 1.4404 Mesh Ø 3.3 mm aperture, Ø 0.9 mm wire Fluoroelastomer O-ringISO63 70 3.9 8 C10521085ISO80 83 3.9 8 C10522085ISO100 102 3.9 8 C10523085ISO160 153 3.9 8 C10524085Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberBABlanking Flange for use with Collar FlangeStainless steel AISI 316L DIN 1.4404ISO63 12 95 C10007049ISO80 12 110 C10008015ISO100 12 130 C10009049ISO160 12 180 C10011049ISO200 12 240 C10012049ISO250 12 290 C10013049ISO320 17 370 C10014003ISO500 17 550 C10016003CBAISO Bored FlangeStainless steel AISI 316L DIN 1.4404ISO63 60.2 63.5 5.5 C10007138ISO100 98.3 102 5.5 C10009157ISO160 148 152 5.5 C10011068ISO200 197 203 5.5 C10012053ISO250 248 254 5.5 C100130596Page226EACBDCollar Weld StubStainless steel AISI 316L DIN 1.4404ISO63 95 76 70 100 3.2 C10007032ISO80 110 76 83 100 3.2 C10008013ISO100 130 108 102 100 3.2 C10009032ISO160 180 159 153 100 3.2 C10011032ISO200 240 219.1 213 100 3.2 C10012032ISO250 290 267 261 100 3.2 C10013032ANippleStainless steel AISI 316L DIN 1.4404ISO63 176 C10007140ISO100 216 C10009160ISO160 276 C10011071ISO200 356 C10012054ISO250 416 C10013060AAElbow 90°Stainless steel AISI 316l DIN 1.4404ISO63 88 C10007203ISO100 108 C10009203ISO160 1 138 C10011203ISO200 1 178 C10012203ISO250 1 208 C100132031Shown dottedShop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberBAT-pieceStainless steel AISI 316L DIN 1.4404ISO63 88 176 C10007207ISO100 108 216 C10009207ISO160 138 276 C10011207ISO200 178 356 C10012207ABCross PieceStainless steel AISI 316L DIN 1.4404ISO63 88 176 C10007211ISO100 108 216 C10009211ABA6BACISO to NW Reducing CrossStainless steel AISI 316L DIN 1.4404ISO63/NW40 95 55 102 76 C10007232ISO100/NW25 130 40 130 98 C10009231ISO160/NW40 180 55 160 121 C10011232Page227DNW16Connector with Two Lateral FlangesStainless steel AISI 316L DIN 1.4404BISO63 88 60 95 C10007215ISO100 108 75 130 C10009215CISO160 138 100 180 C10011215NW40AABDCISO/ISO Adapting PieceStainless steel AISI 316L DIN 1.4404ISO80/ISO63 95 60 105 110 95 C10008021ISO80/ISO100 110 73 105 130 110 C10009158ISO100/ISO63 95 70 50 130 95 C10009111ISO160/ISO63 95 70 50 180 95 C10011110ISO160/ISO80 110 73 242 180 110 C10011069ISO160/ISO100 130 102 50 180 130 C10011111Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberDBCAdaptor ISO Bolted/ISO CollarStainless steel AISI 316L DIN 1.4404ISO40 bolted/ISO63 106 41 100 95 C10007087ISO63 bolted/ISO63 160 70 130 95 C10007155ASupplied with bolts for tapped holes andbolts plus nuts and washers for plain holesBACAdaptor ISO/NWStainless steel AISI 316L DIN 1.4404ISO63/NW25 95 25 50 C10007115ISO63/NW40 95 40 50 C10007116ISO100/NW40 130 40 50 C10009122ISO63/NW50 95 50 50 C10007118ISO80/NW50 110 50 118 C10008003ISO100/NW50 130 50 50 C10009123ISO80/NW40 110 40 118 C100080026Page228BCA* Supplied with bolts for tapped holes and boltsplus nuts and washers for plain holesAdaptor ISO Bolted/NWStainless steel AISI 316L DIN 1.4404 Europe N. AmericaISO40 bolted/NW50* 50 41 100 C10005080 C10005080ISO40 bolted/NW40 69 40 100 No bolts supplied N/A A1516ISO63 bolted/NW50 50 50 130 No bolts supplied N/A A1509ISO63 bolted/NW40 68 40 130 No bolts supplied N/A A1448ISO63 bolted/NW40 50 40 130 No bolts supplied N/A A1574ISO40/ISO63 bolt kit forclear and tapped holesN/A NGV515000DAAdaptor ISO/CFStainless steel AISI 316L DIN 1.4404ISO63/DN63CF/4½ 110 60 114 95 C10007130ISO100/DN100CF/6 111 98 152 130 C10009149ISO100/DN160CF/8 113 148 203 180 C10011063BCDBECAAdaptor ISO/ASAStainless steel AISI 316L DIN 1.4404Without O-ring grooveISO63/2 inch ASA 106 60.2 152 95 C10007131ISO80/3 inch ASA 106 72.9 190 110 C10008011ISO100/3 inch ASA 106 98.3 190 130 C10009152ISO100/4 inch ASA 106 98.3 229 130 C10009154ISO160/6 inch ASA 112 148 279 180 C10011066With O-ring grooveISO63/2 inch ASA 106 60.2 152 95 88.5 C10007132ISO63/3 inch ASA 106 60.2 190 95 114.5 C10007134Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberABFlexible BellowsStainless steel AISI 316L DIN 1.4404ISO63 106 127 1.5 C10007670ISO80 106 127 1.5 C10008028ISO100 107 127 1.5 C10009670ISO160 170 220 1.5 C10011670ISO200 170 220 1.5 C10012670ISO250 170 220 1.5 C10013670C= maximum pressure, bar absoluteACC= minimum band radius, staticD= minimum band radius, dynamicE= maximum pressure, bar absolutePump Hook-Up KitsFlexible PipelinesStainless steel AISI 316L DIN 1.4404ISO63 250 140 360 1.4 C10007285ISO100 250 200 550 1.3 C10009285ISO63 500 140 360 1.4 C10007286ISO100 500 200 550 1.3 C10009286ISO63 750 140 360 1.4 C10007288ISO80 750 160 420 1.4 C10008024ISO100 750 200 550 1.3 C10009288ISO63 1000 140 360 1.4 C10007287ISO100 1000 200 550 1.3 C10009287Ordering Information6Page229Pump hook-up kits are available as convenient boxed sets containing components, sealsand clamps to connect pumps to mating flanges.Product DescriptionStraight inlet, no gate valve, 40 mm fore-lineStraight inlet, no gate valve, 50 mm fore-lineStraight inlet, no gate valve, 63 mm fore-lineStraight inlet, no gate valve, 100 mm fore-lineStraight inlet, pneumatic gate valve, 63 mm fore-lineStraight inlet, pneumatic gate valve, 100 mm fore-lineDead-leg inlet, pneumatic gate valve, 100 mm forelineCatchpot, pneumatic gate valve, 100 mm fore-lineDead-leg inlet, pneumatic gate valve, 100 mm forelinefor water cooled trap (not included)Order No.KIT710040KIT710050KIT710063KIT710100KIT712064KIT712101KIT713101KIT714101KIT715101We offer a number of standard hook-up kits to simplify the installationof dry vacuum pumps.Each kit has the required spool piece (if needed), bellows, seals andclaw-clamps for direct connection of the dry pump to the appropriatesize fore-line. All exhaust lines include NW40 braided flexibles.Kits are available with gate valves and can include a dead leg toreduce particulates from falling directly into the pump inlet.For greater protection, KIT714101 includes an ITO catchpot.KIT715101 can be used with (but does not include) a Water CooledTrap. Consult Edwards for more details.Shop online at www.edwardsvacuum.com

BCF Flange FittingsSize A B C D E F Ordering NumberCAD number of boltsBlank Flange Non-Rotatable ClearStainless steel AISI 304L DIN 1.4306MetricInchDN16CF 1⅓ 34 7.6 4.3 6 C10001200DN40CF 2¾ 70 12.7 6.7 6 C10005200DN63CF 4½ 114 17.4 8.3 8 C10007400DN100CF 6 152 19.9 8.3 16 C10009400DN160CF 8 203 22.3 8.3 20 C10011300DN200CF 10 254 24.6 8.3 24 C100123006Page230ACD number of boltsACD – number of bolts, E – size of boltsBBBlank Flange Rotatable ClearStainless steel AISI 304L DIN 1.4306MetricInchDN16CF 1⅓ 34 7.6 4.3 6 C10001201DN40CF 2¾ 70 12.7 6.7 6 C10005201DN100CF 6 152 19.9 8.3 16 C10009401Blank Flange Non-Rotatable TappedStainless steel AISI 304L DIN 1.4306MetricInchDN16CF 1⅓ 34 7.6 4.3 6 M4 C10001202DN40CF 2¾ 70 12.7 6.7 6 M6 C10005202DN63CF 4½ 114 17.4 8.3 8 M8 C10007402DN100CF 6 152 19.9 8.3 16 M8 C10009402ACD – number of bolts, E – size of boltsBBlank Flange Rotatable TappedStainless steel AISI 304L DIN 1.4306MetricInchDN100CF 6 152 19.9 8.3 16 M8 C10009403DN160CF 8 203 22.3 8.3 20 M8 C10011303ACDFor inch tube: C,D,E – dimensions ininchesFor inch tube: E – tube ODBBored Weld Flange Non-Rotatable ClearStainless steel AISI 304L DIN 1.4306For metric tubeMetricInchDN40CF 2¾ 70 12.7 36.9 38.2 C10005207DN40CF 2¾ 70 12.7 40.1 41.3 C10005208DN63CF 4½ 114 17.4 49.6 51.1 C10007405DN100CF 6 152 19.9 99.4 101.9 C10009405DN200CF 10 254 24.6 200.4 203.5 C10012305For inch tubeMetricInchDN63CF 4½ 114 17.4 1.875 2.01 2 C10007405DN100CF 6 152 19.9 3.81 4.01 4 C10009405DN200CF 10 254 24.6 7.812 8.02 8 C10012305Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberACDEFor inch tube: C, D, F – dimensions ininchesFor inch tube: F – tube ODBBored Weld Flange Rotatable ClearStainless steel AISI 304L DIN 1.4306For metric tubeMetricInchDN40CF 2¾ 70 12.7 36.9 38.2 38.7 C10005213DN63CF 4½ 114 17.4 49.6 51.1 68.0 C10007407DN63CF 4½ 114 17.4 61.2 63.6 68.0 C10007408For inch tubeMetricInchDN40CF 2¾ 70 12.7 1.375 1.51 38.7 1½ C10005213DN63CF 4½ 114 17.4 1.875 2.01 68.0 2 C10007407DN63CF 4½ 114 17.4 2.375 2.51 68.0 2½ C10007408ACDFor inch tube: C,D,F – dimensions ininchesE – size of boltsFor inch tube: F – tube ODBBored Weld Flange Non-Rotatable TappedStainless steel AISI 304L DIN 1.4306For metric tubeMetricInchDN16CF 1⅓ 34 7.6 12.7 12.7 M4 C10001218DN40CF 2¾ 70 12.7 36.9 38.2 M6 C10005219DN40CF 2¾ 70 12.7 40.1 41.3 M6 C10005220DN63CF 4½ 114 17.4 49.6 51.1 M8 C10007409DN100CF 6 152 19.9 99.4 101.9 M8 C10009407DN160CF 8 203 22.3 149.7 152.6 M8 C100113076Page231ACDEBFor inch tube: C,D – dimensions in inchesF – size of boltsDimensions of suitable inch tube are shownin the table for non-rotatable tappedflanges(above)Bored Weld Flange Rotatable TappedStainless steel AISI 304L DIN 1.4306For metric tubeMetricInchDN40CF 2¾ 70 12.7 36.9 38.2 38.7 M6 C10005227DN63CF 4½ 114 17.4 61.2 63.6 68.0 M8 C10007414For inch tubeMetricInchDN63CF 4½ 114 17.4 1.875 2.01 68.0 5 ⁄16-24 C10007415DN100CF 6 152 19.9 3.81 4.01 104.9 5 ⁄16-24 C10009410ABDouble-Sided Blank Flange ClearStainless steel AISI 304L DIN 1.4306MetricInchDN16CF 1⅓ 34 7.6 C10001233DN40CF 2¾ 70 12.7 C10005233ACBDouble-Sided Bored Flange ClearStainless steel AISI 304L DIN 1.4306MetricInchDN100CF 6 152 19.8 99.4 C10009412Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberHalf-Nipple Non-Rotatable ClearStainless steel AISI 304L DIN 1.4306MetricInchACDN16CF 1⅓ 34 38 19 C10001250DN40CF 2¾ 70 63 38 C10005250DN63CF 4½ 114 105 64 C10007450BDN100CF 6 152 135 102 C10009450DN160CF 8 203 167 152 C10011450Half-Nipple Rotatable ClearStainless steel AISI 304L DIN 1.4306MetricInchACDN40CF 2¾ 70 63 38 C10005251DN63CF 4½ 114 105 64 C10007451DN100CF 6 152 135 102 C10009451BDN160CF 8 203 167 152 C100114516Full-Nipple Non-Rotatable ClearPage232ACStainless steel AISI 304L DIN 1.4306MetricInchDN40CF 2¾ 70 126 38 C10005260BACFull-Nipple Rotatable ClearStainless steel AISI 304L DIN 1.4306MetricInchDN40CF 2¾ 70 126 38 C10005261DN63CF 4½ 114 210 64 C10007461DN100CF 6 152 270 102 C10009461BReducing Nipple Rotatable ClearStainless steel AISI 304L DIN 1.4306MetricInchDN40/16CF 2¾/1⅓ 70 34 70 19 C10005370ADBDN63/40CF 4½/2¾ 114 70 70 38 C10007570DN100/40CF 6/2¾ 152 70 70 38 C10009570CShop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberElbow 90 ° RotatableStainless steel AISI 304L DIN 1.4306AMetricInchBDN16CF 1⅓ 34 38 19 C10001300DN40CF 2¾ 70 63 38 C10005300CDN63CF 4½ 114 105 64 C10007500BCTee RotatableStainless steel AISI 304L DIN 1.4306AMetricInchBDN40CF 2¾ 70 63 126 38 C10005310DN63CF 4½ 114 105 210 64 C10007510DCReducing Tee RotatableStainless steel AISI 304L DIN 1.4306ABDMetricInchDN40/16CF 2¾/1⅓ 70 34 126 60 C10005350DN63/40CF 4½/2¾ 114 70 210 77 C10007551DN100/40CF 6/2¾ 152 70 270 95 C10009551DN160/63CF 8/4½ 203 114 334 120 C100115526Page233C4-Way Cross RotatableStainless steel AISI 304L DIN 1.4306MetricInchADN40CF 2¾ 70 63 126 38 C10005320BDDReducing Cross RotatableStainless steel AISI 304L DIN 1.4306MetricInchDN40/16CF 2¾/1⅓ 70 34 120 126 C10005360ACDN100/40CF 6/2¾ 152 70 190 270 C10009561BBAAdaptors NW/CFStainless steel AISI 316L DIN 1.4404Metric/inchNW16/DN16CF/1⅓ 52.7 15.8 C10503104NW16/DN40CF/2¾ 45.3 15.8 C10503105NW25/DN40CF/2¾ 45.3 22 C10503207NW40/DN40CF/2¾ 45.3 40 C10503305NW50/DN63CF/4½ 49.5 50 C10503405Shop online at www.edwardsvacuum.com

DCSize A B C D E F Ordering NumberAdaptors ISO/CFStainless steel AISI 316L DIN 1.4404Metric/inchCBDISO63/DN63CF/4½ 110 60 114 95 C10007130ISO100/DN100CF/6 111 98 152 130 C10009149AISO160/DN160CF/8 113 148 203 180 C10011063CADBZero Length Adaptor Major Clear/Minor TappedStainless steel AISI 304L DIN 1.4306MetricInchDN40/16CF 2¾/1⅓ 70 12.7 M4 13.2 C10005240DN63/40CF 4½/2¾ 114 17.5 M6 36.9 C10007440DN100/40CF 6/2¾ 152 19.9 M6 36.9 C10009440DN100/63CF 6/4½ 152 19.9 M8 61.2 C10009441DN63/40CF 4½/2¾ 114 17.5 ¼-28 36.9 C100074416Page234ABBakeable to 350 °C, at no greater than 2 to3 °C per minute.Use annealed copper gaskets.NW Zero Length Kodial ViewportStainless steel AISI 304L DIN 1.4306MetricInchDN16CF 1⅓ 34 16 12.7 1 C10001600DN40CF 2¾ 70 38 12.7 2.5 C10005600DN63CF 4½ 114 63 17.4 3 C10007600DN100CF 6 152 89 19.9 4 C10009600DN160CF 8 203 136 22.3 6.5 C10011600100Ultra-violet Visible Infra-red80Transmission %6040200200 300 400 600 800 1000 1500 2000 3000Kodial transmission curveWavelength nmShop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberDABCBakeable to 200 °C, at no greater than 2 to3 °C per minute.Use annealed copper gaskets.Zero Length Quartz ViewportStainless steel AISI 304L DIN 1.4306MetricInchDN40CF 2¾ 70 29.5 12.7 4 C10005610DN63CF 4½ 114 60 17.3 5 C1000761010080Transmission %604020A0100200 300 400 1000 2000 3000 4000Wavelength nmQuartz transmission curve.Hydroformed Bellows RotatableStainless steel AISI 304L DIN 1.4306MetricInchDN16CF 1⅓ 34 110 1.2 C10001340DN40CF 2¾ 70 160 1.2 C100053406Page235BC – maximum pressure, bar absoluteBC – Minimum bend radius, staticD – Minimum bend radius, dynamicE – Maximum pressure, bar absoluteAFlexible Hose RotatableStainless steel AISI 304L DIN 1.4306MetricInchDN40CF 2¾ 70 250 80 260 1.5 C10005330DN63CF 4½ 114 250 140 360 1.5 C10007530DN16CF 1⅓ 34 500 30 130 1.5 C10001331DN40CF 2¾ 70 500 80 260 1.5 C10005331DN63CF 4½ 114 500 140 360 1.5 C10007531DN100CF 6 152 750 200 550 1.5 C10009532DN40CF 2¾ 70 1000 80 260 1.5 C10005333DN63CF 4½ 114 1000 140 360 1.5 C10007533ABCD – For flange OD, mm; E – For flange OD,inchF – Number per packCopper GasketsMetricInchDN16CF 1⅓ 21 16 2 34 1.33 10 C10001290DN40CF 2¾ 48 37 2 70 2.75 10 C10005290DN63CF 4½ 82 63 2 114 4.5 10 C10007490DN100CF 6 120 101 2 152 6 10 C10009290DN160CF 8 171 152 2 203 8 5 C10011290DN200CF 10 222 203 2 254 10 5 C10012290DN250CF 12 270 254 2 304 12 5 C10013290Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberABCD – For flange OD, mm; E – For flange OD,inchF – Number per packAnnealed Copper GasketsMetricInchDN16CF 1⅓ 21 16 2 34 1.33 5 C10001270DN40CF 2¾ 48 37 2 70 2.75 5 C10005270DN63CF 4½ 82 63 2 114 4.5 5 C10007270DN100CF 6 120 101 2 152 6 5 C10009270DN160CF 8 171 152 2 203 8 5 C10011270DN200CF 10 222 203 2 254 10 5 C10012270DN250CF 12 270 254 2 304 12 5 C100132706Page236ABD – For flange OD, mm; E – For flange OD,inchF – Number per packABCCD – For flange OD, mm; E – For flange OD,inchF – Number per packSilver Plated Copper GasketsMetricInchDN16CF 1⅓ 21 16 2 34 1.33 5 C10001280DN40CF 2¾ 48 37 2 70 2.75 5 C10005280DN63CF 4½ 82 63 2 114 4.5 5 C10007280DN100CF 6 120 101 2 152 6 5 C10009280DN160CF 8 171 152 2 203 8 5 C10011280DN200CF 10 222 203 2 254 10 5 C10012280Fluoroelastomer GasketsMetricInchDN16CF 1⅓ 29 19 2 34 1.33 2 C10001620DN40CF 2¾ 50 38 3 70 2.75 2 C10005620DN63CF 4½ 76 64 3 114 4.5 2 C10007620DN100CF 6 112 100 3 152 6 2 C10009620DN160CF 8 162 150 3 203 8 2 C10011620AC – number per packBHEX Head Nut, Bolt and Washers for Clear Hole CF FlangesStandardMetricInchDN16CF 1⅓ 20 M4 25 C10001630DN40CF 2¾ 35 M6 25 C10005630DN63CF 4½ 45 M8 25 C10007630DN100CF 6 50 M8 25 C10009630DN160CF 8 60 M8 25 C10011630DN200CF 10 60 M8 25 C10012630DN40CF 2¾ 35 ¼-28 25 C10005640DN200CF 10 60 5⁄16-24 25 C10012640Silver PlatedMetricInchDN40CF 2¾ 35 M6 25 C10005650DN63CF 4½ 45 M8 25 C10007650DN100CF 6 50 M8 25 C10009650DN160CF 8 60 M8 25 C10011650DN200CF 10 60 M8 25 C10012650Shop online at www.edwardsvacuum.com

Size A B C D E F Ordering NumberAC – number per packBHEX Head Bolt and Washers for Tapped Hole CF FlangesStandardMetricInchDN40CF 2¾ 25 M6 25 C10005670DN63CF 4½ 30 M8 25 C10007730Silver PlatedMetricInchDN40CF 2¾ 25 M6 25 C10005690DN63CF 4½ 30 M8 25 C10007690DN100CF 6 35 M8 25 C10009690ABPlate NutsMetricInchDN40CF 2¾ 41 11 29 M6 25 C10005710DN63CF 4½ 51 12 35 M8 25 C10007710ØDCE – number per packDN40CF 2¾ 41 11 29 ¼-28 25 C100057206Page237Shop online at www.edwardsvacuum.com

Cord and TubingLubrication All O-rings, nitrile rubber extruded cord and sheet used inlow vacuum applications should be lubricated with either vapourpump fluid, Fomblin ® vacuum grease or Apiezon ® grease M.Lubrication will prolong the life of the material and facilitate sealing.Apply the oil or grease very sparingly and evenly, coating the seal togive it no more than a shining surface with no visible smears.Excessive lubrication may cause leaks.In general, but with certain exceptions dictated by common sense,seals used in high vacuum applications should be lubricated, buteven more sparingly, using vapour pump fluid.Cleaning The only necessary and recommended method of cleaningO-rings and nitrile rubber extruded cord or sheet is by wiping with adry, lint free, soft cloth. Most solvent fluids are liable to be absorbedby fluoroelastomer and nitrile rubber, swelling these materials andsubsequently outgassing into the system.Nitrile Rubber Cord6Page238Nitrile cord should be cut perfectly square and to a length which is 5%above the mean circumference of the groove in which it is laid.Compression and sealing of the butt joint is thereby assured.Ordering InformationProduct DescriptionOrder No.Nitrile rubber cord0.275 inch (7 mm) diameter H021010080.312 inch (8 mm) diameter H021010090.500 inch (12.7 mm) diameter H02101015State exact length required (per metre).Vacuum TubingThis high quality neoprene rubber vacuum tubing is suitable for usedown to approximately 10 -4 mbar. We recommend that you use theshortest length possible.Ordering InformationProduct DescriptionOrder No.Rubber vacuum tube, 1 m lengths5 mm bore, 19 mm external diameter H021000027 mm bore, 17 mm external diameter H021000039 mm bore, 25 mm external diameter H0210000412 mm bore, 28 mm external diameter H0210000520 mm bore, 34 mm external diameter H02100006Flexible hose connection 1C066000251 Neoprene, steel reinforced, 12 inch (305 mm) long, to suit 1⅛ inch external diametertubeApiezon ® is a registered trademark of M & I Materials, UKShop online at www.edwardsvacuum.com

Oils, Fluids, Sealants and GreasesWe strongly recommend that you use only the recommended gradesand qualities of fluids and sealants, to maintain the high performanceof Edwards products. If you use inferior materials, this can lead to areduction in the pump or system efficiency, partial or complete failureof the equipment, and excessive outgassing. We think it is a falseeconomy to use cheaper fluids and sealants which are untried formany demanding applications.All our fluids and sealants are tested under formal laboratoryconditions. In addition, we have gained considerable on-siteexperience through our own use of these materials and bymaintaining close contact with users who have specific problems. Asmany cases of suspected equipment under-performance areeventually traced to the use of unsuitable or unsatisfactory fluids andsealants, we are pleased to advise on the correct selection of fluidsand sealants for your application.Mineral Based MaterialsThese materials include rotary pump oils, Diffstak and diffusion pumpoils and greases. They are available with or without various additivesfor different applications.Silicone Based MaterialsThese materials are used for Diffstak and diffusion pump fluids andgreases. They comprise either di-methyl siloxanes or phenyl methylsiloxanes.Synthetic-Organic CompoundsThese include various hindered esters, phenyl ethers and napthalenebased compounds. They are offered for use in Diffstak and diffusionpumps, but they can also be used as a rotary pump oils in certainunique applications. Edwards can advise on the matching of the fluidsto particular applications.Fluorinated Materials (PFPE)These are perfluoropolyethers. Perfluoropolyether is a fullyfluorinated material free from other halogens and from hydrogen, andso is of particular value where freedom from hydrocarbons isimportant. It is inert to most reactive chemicals such as UF 6 , F 2 , O 2 ,O 3 , and so on, and it does not polymerise when exposed to electronand most ion bombardment.Perfluoropolyether fluid is available in grades suitable for use in rotarypumps. A low vapour pressure Fomblin ® grease (AR555) is availablewhich combines good lubrication properties with superior vacuumproperties.PFPE for Semiconductor ApplicationsThe major growth in the use of perfluoropolyether (PFPE) compoundshas been in applications where hostile process conditions quicklydestroy normal hydrocarbon pump oils. This applies particularly insemiconductor processing. The corrosion resistant properties andchemical inertness of PFPE result in greatly increased operationtimes between oil changes and pump maintenance, and this providesa cost effective solution to many difficult pumping applications.These are the basic properties of PFPE and the advantages for usein vacuum systems:• Chemically Inert Ideal for pumping aggressive materials,particularly in semiconductor processes.• High Oxidation Resistance Fluid is not damaged by repeatedexposure to air at operating temperatures.• Non-Inflammable No fire risk.• High Thermal Resistance No residual tar compounds formed byoverheating. Eventually reduced to gaseous products.• Oxygen Compatible Allows absolutely safe pumping of oxygen(NASA approved for liquid oxygen systems). Maximumrecommended operation temperature and pressure for 100%oxygen is 250 °C and 91.4 kg cm -2 and 60 °C, 175.75 kg cm -2 .• Non-Polymerization Does not polymerise on exposure toenergetic particle bombardment (except hydrogen ions). Thisreduces the impact of backstreamed vapours, and is an importantproperty where polymers cannot be tolerated (for example, inelectron microscopes).• Miscible with Most Common Solvents Allows pumping ofsolvent even without gas ballast.Before charging with PFPE, thoroughly clean the pumps to achievemaximum advantage. If you do not have skilled technicians available,we recommend that you return the pumps to a Edwards ServiceCenter to be cleaned and filled. Some models of high vacuum rotarypumps and mechanical booster pumps adapted for use with PFPEare available as standard and can be found in the appropriatesections of this catalogue: these pumps are assembled and testedwith PFPE.Safety note Perfluoropolyether is a fluorinated compound and willgive-off toxic vapours if exposed to temperatures above 280 °C. Donot expose PFPE to naked flames and prohibit smoking in workareas.Mechanical Pump OilsMechanical pump oilsEdwards supplies the widest range of oils of different viscosities andspecifications to enable customers to obtain the best performancefrom mechanical pumps under different application conditions.Mineral oils are manufactured by a hydro treatment process to reducecarcinogenic risk. All are specially prepared for high vacuum use,having low vapour pressures even at high temperatures. Theparticular mechanical pump specification should be consulted to findwhich oil to use.6Page239Shop online at www.edwardsvacuum.com

6Page240Ultragrade ® Mineral OilsEdwards offers a range of new oils, Ultragrade ® 15, 19, 20 and 70,which result from a new process. Most manufacturers use a solventrefining process, whereas these oils are produced by a uniquehydrotreating process. This process eliminates nitrogen, sulphur andoxygen and the aromatic hydrocarbons, leaving a clear base stockessentially free of impurities.When combined with additives, the Ultragrade ® oils give improvedvacuum performance, thermal and oxidation stability and rustinhibition. The anti-oxidants included in the oils enable the pump towithstand high operating temperatures without oil degradation, soextending intervals between oil changes.The properties of the oils allow them to be used in a wide range of applications. NewUltragrade ® 70 oils are the best choice for large pumps used in heavy-duty, cyclingapplications. Contact Edwards or your local supplier for detailed recommendations.Ultragrade Oil Use In ReplacesUltragrade 15 E2M0.7, E2M1.5. Also Edwards 8Asuitable for cold startapplications.Ultragrade 19 RV pumps, E2M18 Supergrade A, Edwards17 and 20Ultragrade 70 E2M40 to E2M275 –Ultragrade 20 EH boosters Edwards 16 and 18Ordering InformationProduct DescriptionOrder No.Ultragrade 15 1 litre H1102601512 × 1 litre H110260124 litre H110260134 × 4 litre H11026011205 litre H11026010Ultragrade 19 1 litre H1102501512 × 1 litre H110250124 litre H110250134 × 4 litre H11025011205 litre H11025010Ultragrade 20 1 litre H1102401512 × 1 litre H110240124 litre H110240134 × 4 litre H11024011205 litre H11024010Ultragrade 70 4 litre H110280134 × 4 litre H11028011205 litre H11028010Edwards TW has been developed for applications where rotary pumpoils are likely to be exposed to reactive or corrosive gases. The oil isdistilled hydrocarbon containing no additives, but unsaturates andaromatic links have been removed. The result is that the oil will lastup to 20 times longer, depending on process, than refined mineraloils. Longer oil life significantly extends the intervals between oilchanges.Ordering InformationProduct DescriptionEdwards TWmineral oilOrder No.Europe N. America1 litre H11012015 H02100001TW4 litre H11012013 H02100002TW20 litre H11012026 H02100003TW205 litre(55 US gal)N/A H02100004TWEdwards 45 OilEdwards 45 is a hydrocarbon synthetic polymer whose molecularstructure offers chemical inertness, high temperature stability and lowvapour pressure (

Mechanical Pump Oil Selection ChartKrytox ®1525Fomblin ®25/6Krytox ®1514Fomblin ®16/6Krytox ®1506Fomblin ®06/6Ultragrade 15 Ultragrade 19 Ultragrade 20 Ultragrade 70 EdwardsTWMass spectrometers Electron microscopes Thin film sputtering Surface studies UHV systems Leak detection TV tubes Power valves Distillation Space studies Furnaces ApplicationEB welders Semiconductors Impregnation Chemical pumping Oxygen pumping Radioactive Packaging Mechanical booster Metallisation vapour pressure mbar 20 °C0 5.8 × 10 -6 1 × 10 -8 2.1 × 10 -7 2.1 × 10 -7 1.3 × 10 -6† 4 × 10 -6 5.2 × 10 -7 3 × 10 -6 2.6 × 10 -7 4 × 10 -8 1.3 × 10 -7100 °C0 3.0 × 10 -2 1.0 × 10 -3 3.0 × 10 -3 3 × 10 -3 – 5 × 10 -3 1.3 × 10 -3 1 × 10 -3 1.3 × 10 -4 6 × 10 -5 3.9 × 10 -5Molecular weight 385 420 500 600 430 1900 2400 2700 3500 3300 4600Specific gravity at 15 °C 0.86 0.86 0.86 0.86 0.860 1.88 1.88 1.89 1.89 1.9 1.9Viscosity cSt at 20 °C0 104.2 143.7 352 222 155 64 70 168 140 276 250at 40 °C0 38.1 48.6 103 70 65 25 22 48 48 80 80Pour point °C -18 -16 -12 -12 -12 -50 -45 -45 -40 -35 -35Flash point °C 220 230 260 230 243 none 1 none 1 none 1 none 1 none 1 none 1Technical DataAuto ignition point °C 355 355 365 360 270 none 1 none 1 none 1 none 1 none 1 none 1Sulphur content% mass/mass 0 0 0 0 0 0 0 0 0 0 0Energetic particle impact Conducting polymers formed No polymers formed (except with H 2 ions)Thermal stability good good good good poor Excellent – decomposes to gas only above 300 °C 1Oxidation resistance good good good good poor to fair ExcellentChemical resistance fair fair fair fair poor to good ExcellentPropertiesRadiation resistance fair fair fair fair fair Good – but reacts with electro-positive metals (for example, sodium)1 WARNING – Perfluoropolyether is a fluorinated compound which will give off toxic vapours if exposed to temperatures above 280 °C. The fluid should not be exposed to naked flames and smoking should be prohibited in the working area. Suitable for this application.Vapour pressure at 25 °C.†Krytox ® is a registered trademark of Dupont Dow Elastomers6Page241Shop online at www.edwardsvacuum.com

6Page242Perfluoropolyether OilsEdwards now offers an extended range of Fomblin ® and Krytox ® ,perfluoropolyether oils for use in rotary vacuum pumps. Fomblin ®YVAC 06/6 and Krytox ® 1506 are recommended for Edwards oilsealed rotary pumps and are practically a direct replacement formineral oil in terms of viscosity and vapour pressure. Krytox ® 1525 issuitable for use in rotary pumps requiring a viscosity equivalent toFomblin ® Y25 fluid. Fomblin ® Y16/6 and Krytox ® 1514 arerecommended for use in perfluoropolyether adapted mechanicalbooster pumps.Edwards, in conjunction with Ausimont UK, has developed Drynertfluid which contains anti-rust and anti-wear additives soluble inFomblin ® . These additives cover metallic surfaces with a protective,corrosion resistant film.Ordering InformationProduct DescriptionOrder No.Europe N. AmericaFomblin ® YVAC 06/6 100 ml N/A H026004001240 ml N/A H0260040020.5 kg N/A H0260040031 kg (532 ml) H11301019 H113010192 kg N/A H0260040055 kg H11301020 H113010208 kg N/A H026004006Krytox ® 1506 fluid 0.5 kg N/A H113070171 kg (532 ml) H11307018 H113070185 kg (2660 ml) H11307020 H11307020Krytox ® 1525 fluid 0.5 kg N/A H113090171 kg (526 ml) H11309018 H113090185 kg H11309020 H11309020Fomblin ® Y16/6 fluid 0.5 kg N/A H0260010031 kg (529 ml) H11306019 H113060192 kg N/A H0260010055 kg H11306020 H113060208 kg N/A H026001006Krytox ® 1514 fluid 0.5 kg N/A H113080171 kg (529 ml) H11308018 H113080185 kg (2646 ml) H11308020 H11308020Fomblin ® 25/6 fluid 100 ml N/A H0260080010.5 kg N/A H0260080031 kg (529 ml) H11312019 H113120192 kg N/A H0260080055 kg (2646 ml) H11312020 H113120208 kg N/A H02600800650 kg N/A H026008007Drynert 25/6 fluid 1 kg (529 ml) H11312021 H113120215 kg (2646 ml) H11312025 H11312025Single Stage and Rough Pump Oil Selection ChartPropertiesTechnical DataLOWVAC 60 V-Lube CD V-Lube F V-Lube G V-lube HVapour pressure mbar 20 °C0 7.5 × 10 -5

Vapour Pump FluidsEdwards supplies a range of fluids of different vapour pressures andphysical properties. From this range, you can choose the optimumfluid for your applications.In general, the more volatile fluids are used with vapour boosterpumps and for vapour diffusion pumps used on industrial processes(for example, decorative coating and vacuum furnaces) where highgas loads are encountered and high critical backing pressure isadvantageous. The less volatile fluids are used for processes orexperiments requiring more exacting high vacuum conditions. Theleast volatile fluids are used for clean or ultra high vacuumapplications (mass spectrometry, electron probe apparatus, surfacestudies, and so forth). Fluid selection depends also on the particularphysical and chemical characteristics of the fluids (apart from vapourpressure).Edwards has a long history of co-operation with various fluidmanufacturers in the development of new pumping fluids and is wellplaced to advise in cases of uncertainty.AP201 Vapour Booster PumpFluidApiezon ® AP201 is a hydrocarbon fluid prepared by moleculardistillation and protected against oxidation by a thermally stableadditive of matched vapour pressure. It has an auto ignitiontemperature of 305 °C.It exhibits a fair degree of resistance to chemical degradation (so thathigh throughputs of air and water vapour can be pumped withoutdamage to the fluid) and it can withstand limited accidental admissionof atmospheric air at operating temperature. The fluid has lowviscosity which permits easy filling and draining. It does not attacksynthetic rubbers used for seals and gaskets in vacuum systems. It isnon-irritant, non-toxic and environmentally non-polluting.Ordering InformationProduct DescriptionOrder No.AP201 vapour booster pump fluid4 litres H0260105420 litres H02601052200 litres H02601050Edwards L9 Diffusion Pump FluidEdwards L9 fluid has been developed for use in Diffstak and diffusionpumps. It is a naphthalene based synthetic material which is ideal foruse in applications where silicones (which form insulating films)cannot be tolerated.L9 fluid is rugged, has a very good vacuum performance and gives anultimate pressure of typically 5 × 10 -9 mbar (at 20 °C).In addition, the fluid is chemically stable and is resistant to acids,alkalis, halogens and oxides of nitrogen. It does not react withcommon engineering metals or elastomers. It is immiscible to thecommon solvents alcohol, acetone and trichlorotrifluoroethane. Thetoxicity level of L9 is very low.Safety note: When changing to this fluid the pump should be cleanedusing a proprietary fluid. The pump should then be rinsed in acetoneand dried prior to re-charging.Ordering InformationProduct DescriptionEdwards L9 fluid 1 litreOrder No.H11501015Silicone DC702, DC704EU andDC705 Diffusion Pump FluidsThese synthetic fluids are organo-silicon oxide polymers and haveexceptional chemical stability both at high temperature and when incontact with most gases and vapours. They provide a range ofgeneral purpose fluids for ultimate vacuum from about 10 -5 to 10 -9mbar, and are particularly useful in industrial processing applicationsdue to their exceptional ruggedness. High throughputs of air, watervapour and corrosive gases can be pumped without fluiddegradation. The fluids can withstand repeated admission ofatmospheric air while at operating temperature and are widely usedin valveless quick-cycle pumping processes. They have low toxicityand good resistance to gamma radiation.Fluid breakdown products (due to bombardment and so on) tend tobe electrically insulating and so we do not recommend these fluids forphysical electronic applications such as mass spectrometers andsurface analysis systems. The fluids are indifferent lubricants. Theirdecomposition is catalysed by traces of alkali metals (for example,caesium) and their use should be avoided where possible.Ordering InformationProduct DescriptionOrder No.Europe N. AmericaSilicone 702500 ml H02400007 H024000071 US gal N/A H024000085 kg (4673 ml) H02400038 N/ASilicone 704EU500 ml H11201040 H024000431 US gal N/A H024000115 kg (4673 ml) H11201041 N/ASilicone 705500 ml H02400027 H02400027Santovac ® 5 Diffusion Pump FluidThis synthetic fluid is a polyphenyl ether developed from fluidsoriginally produced as lubricants for space vehicles. It hasexceptionally low vapour pressure, exceptional thermal stability anda tendency to wet surfaces less readily and "creep" to a lesser extentthan is common with most fluids. The fluid is employed for thecleanest high vacuum and ultra high vacuum applications down toless than 10 -9 mbar (for example, electron microscopes, massspectrometers and surface physics studies) where its excellent highvacuum performance and low tendency to migrate into the pumpsystem particularly recommend it. The fluid is chemically stable,non-corrosive, safe and non-toxic at normal operating temperatures.Fluid breakdown products (due to bombardment and so forth) tend tobe electrically conducting. Lubricating qualities are good and the fluidfinds application to lubricate mechanisms in vacuum systems.Ordering InformationProduct DescriptionOrder No.Europe N. AmericaSantovac ® 5 fluid100 ml H11401001 H02300045500 ml H11401002 H023000466Page243Shop online at www.edwardsvacuum.com

Vapour Pump Fluid Selection ChartApiezon ® Silicone Santovac ® 5 L9AP201 702 704EU 705Mass Spectrometers Electron Microscopes Thin Film SputteringSurface StudiesUHV Systems Leak DetectionTV Tubes Power Valves Spaces StudiesFurnacesRadioactiveVapour BoosterMetallisation Typical ultimate6Page244vacuum achievableat 20 °C (mbar) 6.5 × 10 -5 6.5 × 10 -6 6.5 × 10 -8 1.3 × 10 -9 1.3 × 10 -9 5 × 10 -9Vapour pressure(mbar) at 20 °C 5 × 10 -6 6.5 × 10 -7 1.3 × 10 -8 2.6 × 10 -10 2.6 × 10 -10 7.8 × 10 -10at 100 °C 2.4 × 10 -2 1.3 × 10 -3 2.6 × 10 -4 1.3 × 10 -5 6.5 × 10 -6 2.6 × 10 -5at 150 °C 6.5 × 10 -1 < 10 -1 1.3 × 10 -2 < 10 -3 4 × 10 -4 2.3 × 10 -3Boiling temperatureat 1.3 mbar (°C)(approximate) 160 185 223 254 295 251Molecular weight(average) 310 530 484 546 446 407Viscosity cSt at20 °C 34 55 47 240 2400 71.3100 °C 5.0 4.9 4.3 7.9 12 5.6150 °C 2.7 2.4 2.2 3.3 4.5 1.2Pour point (°C)(approximate) -30 < -20 < -20 -10 +5 -5Flash point (°C) 196 193 221 243 288 241Fire point (°C)(approximate) 204 275 275 275 350 281Auto ignition point (°C)(approximate) 305 500 500 500 590 370Specific heat (cal/g/°C) 0.46 0.42 0.41 0.42 – 0.46Latent heat (cal/g) 69 40.9 52.7 51.6 49.2 42Specific gravity at 25 °C 0.862 1.07 1.07 1.09 1.195 0.901Coefficient ofexpansion per deg C 0.0007 0.0008 0.0008 0.0006 0.0008 0.00042(10 – 30 °C) (25 – 50 °C) (25 – 50 °C) (25 – 50 °C) (25 – 50 °C) (25 – 50 °C)Refractive index atroom temperature 1.476 1.516 1.557 1.579 1.6306 1.5154(25 °C) (25 °C)Energetic ParticleBombardmentconductinginsulating polymers formedconducting polymers formedpolymers formedThermal Stability poor very good excellent goodOxidation Resistance Poor to fair excellent very good goodChemical Resistance poor very good but decomposed by alkali metal good very goodRadiation Resistance fair good very good fairRecommended for this applicationShop online at www.edwardsvacuum.com

Greases and WaxesGreases and waxesSilicone GreaseA high vacuum grade grease, which is for use at system pressureslower than 10 -6 mbar.Ordering InformationProduct DescriptionSilicone, high vacuum grease, tube 50 gSilicone, high vacuum grease, pack 5 kgFomblin ® GreaseThis grease is an excellent lubricant for sliding elastomer seals, andexhibits the chemical inertness typical of the Fomblin ® range.It has a very low vapour pressure and is suitable for use in thepresence of gaseous and liquid oxygen under severe conditions.The general purpose AR555 grease offered by Edwards has thebasic properties of Fomblin ® , but the vapour pressure is notspecifically controlled. The vapour pressure is

Lubricant (unmodified)LMMelting point 47 °C 44 °CRadiation resistant Yes YesVapour pressure at

Semiconductor PumpsiXL Dry Pumps 248EPX on-tool High Vacuum Pumps 250GX Dry Pumps 266Exhaust Management for Semiconductor Processes 2727Page247Shop online at www.edwardsvacuum.com

iXL120 Dry Pump SystemiXL120 is a compact, low energy, 110 m 3 h -1 dry pump for wafer handling and other cleanduty applications. It provides fast pump down of load lock chambers with extremely lowenergy consumption.iXL120 is one of the smallest and lightest pumps available for load lock and cleanapplications. Its low vibration and low noise levels make it ideal for mounting on-tool orwithin a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allowsreduced utilities usage during idle periods, lowering utility costs and helping to save theenvironment!.Features & BenefitsDimensions7Page248●●●●●Class leading chamber pump down time reduces Total AverageCycle Time (TACT)Only 0.55kW power consumption helps minimise customer costof ownershipGreen Mode can reduce power consumption by up to 92%during idle periodsUp to 35 o C water supply helps reduce facility cooling waterrequirementsExtremely small and light, helping to save valuable fab spacePerformance CurvesOrdering InformationProduct DescriptioniXL120 E 200-460V 3/8 QC Water FittingsOrder No.A54113010iXL120 E 200-460V 1/4 QC Water FittingsA54113020iXL120 E 200-460V HIT 3/8 QC Water FittingsA54113610iXL120 E 200-460V MCM 3/8 QC Water FittingsA54113710iXL120 E 200-460V 3/8 QC Water Fittings Flow Cont ValveiXL120 E 200-460V SPI 1/4 QC Water Fittings Flow ContValveiXL120 E 200-460V HIT 3/8 QC Water Fittings Flow ContValveiXL120 E 200-460V MCM 3/8 QC Water Fittings Flow ContValveiXL120N E 200-460V 3/8 QC Water FittingsA54113011A54113221A54113611A54113711A54114010iXL120N E 200-460V 1/4 QC Water FittingsA54114020iXL120N E 200-460V SPI TIM 3/8 QC Water FittingsA54114210iXL120N E 200-460V TEL 3/8 QC Water FittingsA54114410iXL120N E 200-460V 3/8 QC Water Fittings Flow Cont ValveiXL120N E 200-460V TEL 3/8 QC Water Fittings Flow ContValveA54114011A54114411Shop online at www.edwardsvacuum.com

Technical DataProductiXL120Peak speed 110 m 3 h -165 cfm1833 lmin -1Ultimate pressure (typical) 0.013 mbar0.009 Torr1.3 PaPower at ultimate0.55 kWPower in Green Mode0.045 kWInlet connectionVerticalISO63HorizontalNW50Outlet connectionNW25Cooling water connection OptionalWater flow 1 lmin -1Weight59 kg7Page249Shop online at www.edwardsvacuum.com

EPX180L Dry pumpThe new compact EPX180 high vacuum drypump offers enhanced performance withreduced cost of ownership. Using a unique patent protected mechanism the EPX180 iscapable of pumping from atmosphere to ultimate pressures of

Technical DataPeak speedUltimate vacuum170 m 3 h -1105 ft 3 min -12835 lmin -1

EPX180LE Dry PumpThe new compact EPX180 high vacuum drypump offers enhanced performance withreduced cost of ownership. Using a unique patent protected mechanism the EPX180 iscapable of pumping from atmosphere to ultimate pressures of


EPX180N Dry pumpThe new compact EPX180 high vacuum drypump offers enhanced performance withreduced cost of ownership. Using a unique patent protected mechanism the EPX180 iscapable of pumping from atmosphere to ultimate pressures of

Technical DataOrdering InformationPeak speedUltimate vacuum170 m 3 h -1105 ft 3 min -12835 lmin -1

EPX180NE Dry pumpThe new compact EPX180 high vacuum drypump offers enhanced performance withreduced cost of ownership. Using a unique patent protected mechanism the EPX180 iscapable of pumping from atmosphere to ultimate pressures of


EPX500L Dry PumpThe new compact EPX500 high vacuum drypump offers enhanced performance withreduced cost of ownership. Using a unique patent protected mechanism the EPX500 iscapable of pumping from atmosphere to ultimate pressures of


EPX500LE Dry pumpThe new compact EPX500 high vacuum drypump offers enhanced performance withreduced cost of ownership. Using a unique patent protected mechanism the EPX500 iscapable of pumping from atmosphere to ultimate pressures of

Technical DataPeak speedUltimate vacuum500 m 3 h -1295 ft 3 min -18338 l min -1

EPX500N Dry PumpThe new compact EPX500 high vacuum drypump offers enhanced performance withreduced cost of ownership. Using a unique patent protected mechanism the EPX500 iscapable of pumping from atmosphere to ultimate pressures of


EPX500NE Dry pumpThe new compact EPX500 high vacuum drypump offers enhanced performance withreduced cost of ownership. Using a unique patent protected mechanism the EPX500 iscapable of pumping from atmosphere to ultimate pressures of


GX100 Dry PumpThe GX Dry Vacuum Pump Series sets new standards for zero maintenance between majoroverhauls. Improved efficiency lowers the cost of ownership and provides continuouspumping duty throughout the pressure range.GX pumps are available in a wide range of peak speeds and variants to addressapplications from clean through to medium-duty processes. A modular design allows usersto configure GX drypumps to suit individual fab requirements. An ultra-compact footprintallows installation options including on-tool, close proximity, or remote.7Features & Benefits●●●●●Reduced Cost of OwnershipUp to a 50% reduction in utilities cost compared to iL/iHdrypumpsNo preventative maintenanceFlexible Installation OptionsSmall and light for easy installationDimensionsApplications●●●Load LockTransferMetrologyPerformance CurvesPage2661. Inlet flange 2. Exhaust flange1. m 3 h -1 2. ft 3 min -1Shop online at www.edwardsvacuum.com

Technical DataPerformancePeak speed 105 m 3 h -162 ft 3 min -11750 lmin -1Ultimate pressure5 x 10 -3 mbar3.75 x 10 -3 Torr0.5 PaPower at 700 Torr exhaustUltimate1 kWAUC (Active Utility Controller) 0.05 kWWater *Water inlet1 slmNitrogen0 slmInstallation DetailsFootprint (excluding exhaust) 0.20 m 2Weight120 kgInlet connection ISO 63Outlet connectionNW25Noise at ultimate

GX600 Dry PumpThe GX Dry Vacuum Pump Series sets new standards for zero maintenance between majoroverhauls. Improved efficiency lowers the cost of ownership and provides continuouspumping duty throughout the pressure range.GX pumps are available in a wide range of peak speeds and variants to addressapplications from clean through to medium-duty processes. A modular design allows usersto configure GX drypumps to suit individual fab requirements. An ultra-compact footprintallows installation options including on-tool, close proximity, or remote.7Features & Benefits●●●●●Reduced Cost of OwnershipUp to a 50% reduction in utilities cost compared to iL/iHdrypumpsNo preventative maintenanceFlexible Installation OptionsSmall and light for easy installationDimensionsApplications●●●Load LockTransferMetrologyPerformance CurvesPage2681. m 3 h -1 2. ft 3 min -1Shop online at www.edwardsvacuum.com

Technical DataPerformancePeak speed 620 m 3 h -1365 ft 3 min -110333 lmin -1Ultimate pressure7 x 10 -4 mbar5.25 x 10 -4 Torr0.07 PaPower at 700 Torr exhaustUltimate1.6 kWAUC (Active Utility Controller) 0.05 kWWater *Water inlet2 slmNitrogen0 slmInstallation DetailsFootprint (excluding exhaust) 0.20 m 2Weight220 kgInlet connection ISO 100Outlet connectionNW25Noise at ultimate

GX1000 Dry PumpThe GX Dry Vacuum Pump Series sets new standards for zero maintenance between majoroverhauls. Improved efficiency lowers the cost of ownership and provides continuouspumping duty throughout the pressure range.GX pumps are available in a wide range of peak speeds and variants to addressapplications from clean through to medium-duty processes. A modular design allows usersto configure GX drypumps to suit individual fab requirements. An ultra-compact footprintallows installation options including on-tool, close proximity, or remote.7Features & Benefits●●●●●Reduced Cost of OwnershipUp to a 50% reduction in utilities cost compared to iL/iHdrypumpsNo preventative maintenanceFlexible Installation OptionsSmall and light for easy installationDimensionsApplications●●●●●Load LockTransferMetrologyLithographyPVD ProcessPerformance CurvesPage2701. m 3 h -1 2. ft 3 min -1Shop online at www.edwardsvacuum.com

Technical DataPerformancePeak speed 800 m 3 h -1471 ft 3 min -113333 lmin -1Ultimate pressure1 x 10 -3 mbar7.5 x 10 -4 Torr0.10 PaPower at 700 Torr exhaustUltimate1.6 kWAUC (Active Utility Controller) 1.05 kWWater *Water inlet2 slmNitrogen 4 or 14 slm **Installation DetailsFootprint (excluding exhaust) 0.20 m 2Weight230 kgInlet connection ISO 100Outlet connectionNW25Noise at ultimate

Exhaust Management for Semiconductor Processes7Page272Comprehensive RangeEdwards is unique in offering the broadest range of exhaustmanagement technologies, demonstrated in a series of products andsystems designed to meet all customer requirements – from low-costfacility management to full environmental protection. We arecommitted to supplying exhaust management systems that matchcustomer specific application requirements. We strive to minimisecost of ownership while introducing innovative designs to achievegreater reliability, longer service intervals, reduced space and utilitiesrequirements and lower waste emissions.Leading-Edge ManufacturingOur primary manufacturing facility is located at Clevedon in the UK.The site comprises a factory with flexible production lines, assemblyfeed cells, just-in-time manufacturing techniques and one of thelargest exhaust management research centers in the world.Additional manufacturing sites located at Chunan (Korea) and Ina(Japan) complement the global production capability. Underpinningour whole operation is a commitment to quality and world classmanufacturing standards. An ISO 9001 and ISO 14001 managementsystem, supported by TQM and Kaizen methodologies, is at the coreof the operation. Product certification to the relevant internationalstandard is conducted by ITS, the independent external test house.Thermal ProcessingEffective exhaust management of CVD processes must be able tohandle the deposition gases and the associated powders. Thefluoride wastes from cleaning gases also require suitable treatmentalong with the global warming gases. Abatement systems must beable to comply with these requirements in one complete unit.The TPU (Thermal Processing Unit) is the industry standardabatement system for CVD. One model is suitable for all CVD andmany etch applications. Each inlet can be configured for high levelabatement of all Global Warming PFC gases, F 2 or CIF 3 . The TPUcan accommodate total input flows up to 280 slpm.Where PFCs are not used, the TCS (Thermal Conditioning System)provides a cost-effective means of handling both hazardous fluoridewaste and deposition gases.The Helios is an advanced solution for the abatement of highhydrogen flows designed to handle both toxic and carrier gases fromLow Pressure Epitaxy and MOCVD processes.Atlas The Atlas range is the lastest addition to the inward firedcombustor range available in TPU, TCS and Kronis variants, therange offers the same excellent performance with added benefits ofreduced utilities and cost of ownership savings as standard.The Kronis provides effective treatment for low k CVD processexhausts.The HOx (Hot Oxidation System) offers an innovative electricalheated oxidation unit and the proven three-stage wet scrubber of thecombustor product line, it combines superior performance for theabatement of CVD processes in facilities which do not have the abilityto use fuel gas.Gas Reactor ColumnsEdwards offers a range of low-cost, point-of-use dry abatementsystems for semiconductor processing. Each system uses the uniquehot bed reactor technology developed for the GRC (Gas ReactorColumn) range. The Inline 250 is the highest performance of any dryabatement technology for etch exhausts. It provides treatment bychemical reaction to stable inert salts and treats the widest range ofgases from halogens and acids to CIF 3 , NF 3 , SF 6 and other halideetch compounds. The D150 Dual GRC provides dual-cartridgeoperation thus minimising the cost of ownership with 100% uptime.The M150 Single GRC is a compact dry gas treatment system forremoving hazardous etch and CVD emissions at the source,converting them into harmless solids within an easily changed anddisposable cartridge.Wet ScrubbersEdwards new range of wet scrubbers provide exhaust managementat minimal cost for preservation of assets and regulatory compliance.Tempest is a point of use wet scrubber suitable for the treatment ofsemiconductor process tool exhausts containing water-soluble andwater-reactive gases such as HCl, Cl 2 and NH 3 .Pyrophoric ConditioningFor the removal of silane and pyrophoric gases to below lowerexplosion level (LEL) the PCS (Pyrophoric Conditioning System)offers an advanced solution. Specifically designed for the safehandling of silane, the PCS incorporates a unique particle handlingsystem to keep ducts free from powders.Integrated Vacuum and Exhaust ManagementSystemsVacuum equipment and exhaust management devices aretraditionally installed side-by-side, beneath the process tool. TheZenith range now offers a series of process-specific, fully integratedvacuum pump and exhaust management systems designed to safelyhandle the process exhausts from a wide range of applications.Enhanced safety, process tool compatibility, minimum footprint andreduced cost of ownership are key benefits derived from our uniqueapproach, resulting in improved uptime, process efficiency andprofitability.TMS Temperature Management SystemEdwards offers TMS (Temperature Management System) forprocesses involving condensable byproducts. TMS ensures thatthese compounds remain volatile until they enter the abatementdevice. The TMS is designed to heat both forelines and pumpexhaust lines to the inlet of the abatement device. Moulded highsurface area heaters maximize contact with pipes and are designedto maintain the temperature of the pipe between 90° and 150 °C. TMSmonitoring is available as an option to provide both local and remoteverification that the line is at a sufficient temperature. TMS has beensuccessfully used in conjunction with the entire range of Edwardsexhaust management equipment to alleviate the problems historicallyassociated with solid deposition and corrosion.Product SelectionUsing our product selection guide customers have the opportunity todecide which Edwards point-of use abatement equipment is mostsuitable for their particular application on the basis of their exhaustgas management goals. Edwards will provide their experience andexpertise to specify the exhaust management product for the chosenapplication.GRC technology has been used to abate the exhaust gas streamson a wide range of semiconductor applications. (Photographcourtesy of TI, Dallas, USA.)Shop online at www.edwardsvacuum.com

Product Selection GuideVacuumPROCESS GASES ISSUES Zenith Fuel Non Fuel ExhaustManagementGXiHTMSWESPWCTPCSGANCATGRC M150i250TEMPESTMISTRALHOXSPECTRA GSPECTRA ZKRONIS /ATLASHeliosTPU /ATLAS TPUTCS /ATLAS TCSIII-VEPIETCHCVD● ● ▲ ▲ ▲Corrosive and toxic by-productsHigh use of global warming PFC gasesETCH Dielectric CHF 3 /NF 3 /CF 4 /C 2 F 6 /C 4 F 8 /SF 6 /C 4 F 6 /C 5 F 8 /CH 3 F● ● ▲ ▲ ▲ ▲● ● ▲ ▲ ● ▲Conductive – poly silicon Cl 2 /HBr/ SF 6 /CF 4 /CHF 3 Toxic and corrosive by-productsUse of global warming PFC gasesConductive – metal Cl 2 /BCl 3 /CF 4 /CHF 3 Exhaust blockages from condensing vapoursToxic and corrosive by-productsSiH 4 /NH 3 /N 2 O/ PH 3 /SiF 4 Flammable/incompatible gas mixtureswith PFC clean Very high use of global warming PFC gases ● ● ▲ ▲ ▲ ▲with NF 3 clean Use of global producedwarming PFCs, high quantities of fluorine● ● ● ▲ ▲PECVD Silane-based oxide/nitride/HDPTEOS based oxide/BPSG TEOS/TEB/TEP Flammable/incompatible gas mixturesLiquid sources can condensewith PFC clean Very high use of global warming PFC gases ● ● ▲ ▲ ● ▲with NF 3 clean Use of global producedwarming PFCs, high quantities of fluorine● ● ● ● ▲● ● ▲ ● ▲Low k CVD 3MS/4MS/TMCTS Flammable/incompatible gas mixturesLiquid sources can condensewith NF 3 clean Use of global warming PFCs, high quantities of fluorineproducedCVD Metalisation – tungsten SiH 4 /WF 6 /H 2 Flammable/incompatible gas mixturesClean step with PFC clean Very high use of global warming PFC gases ● ● ▲ ● ▲with NF 3 clean Use of global warming PFCs high quantities of fluorineproduced● ● ● ● ▲ ● ▲with CIF 3 clean Highly toxic/corrosive gas used ● ● ● ▲ ●Metalisation – titanium TiCl 4 /NH 3 /ClF 3 /CI 2 Flammable/incompatible gas mixturesHighly toxic/corrosive gases used● ● ● ▲ ▲ ● ▲High k CVD High k precursors ● ● ● ▲ ▲ ▲LPCVD Polysilicon SiH 4 /PH 3 /AsH 3 Highly toxic/flammable gases usedClean step none ● ● ● ▲ ▲ ▲with F 2 /HF Highly toxic/corrosive incompatible gases used sequentially ● ● ● ▲ ▲with CIF 3 ● ● ● ▲ ▲LPCVD Nitride HCD/DCS/NH 3 Highly toxic/flammable gases usedClean step None ● ● ▲ ▲ ▲ ● ▲with F 2 /HF Highly toxic/corrosive incompatible gases used sequentially ● ● ● ▲ ● ▲EPITAXY Low pressure EPI H 2 /DCS/PH 3 /SiH 4 / AsH 3 /B 2 H 6 / Very high flows of explosive gas usedGeH 4/HCI Highly toxic/flammable and corrosive gases used● ● ▲IMPLANT BF 3 /PH 3 /AsH 3 Highly toxic/flammable gases used ▲ ▲MOCVD Phosphide H 2 /AsH 3 /PH 3 /TMG/TMA/TMI Highly toxic gases used● ● ▲ ● ▲Exhaust blockages from condensing vapoursVery high flows of explosive gas used● ● ● ▲Nitride N 2 /H 2 /NH 3 /TMG/TMA/TMI Highly toxic gases usedVery high flows of explosive gas usedEtch H 2 /O 2 /CF 4 /CI 2 /HCI/He/SF 6 Highly flammable/corrosive gases used● ● ▲ ▲Exhaust blockages from solids formationUse of global warming PFC gasesCVD SiH 4 /NH 3 /NF 3 /F 2 /SF 6 Pyrophoric and flammable gases usedFLAT PANELDISPLAY &SOLAR CELL● ● ▲ ▲ ▲Corrosive gases usedSolids management required● Full environment safety and health management ▲ Health safety and capital asset protectionATLAS CVD ETCH EPI ERIX III-V TPU TCS Helios Kronis Spectra Z Spectra GHOX Mistral Tempest i250 GRC M150 GANCAT PCS WCT WESP TMS iH GX7Page273Shop online at www.edwardsvacuum.com


Industrial Pumps and Pumping SystemsGXS Dry Pumps 280Drystar 80 Pumps 288IDX Dry pumps 290Medium and Large EM Oil Sealed Rotary Vane Pumps 294Large Pump Accessories 302Stokes Microvac Series Oil Sealed Pumps 308Stokes Microvac Accessories 312MB/MV Series Vertically Oriented Booster Combinations 3158Page275Stokes Microvac / 6" Booster combinations 316Stokes 1700 Series Mechanical Booster Combinations 319EV Single Stage Oil Sealed Rotary Vane Pumps 340Accessories for Single Stage Oil Sealed Pumps 349EV Single Stage Oil Sealed Pump Combinations 350EH Mechanical Booster Pumps 353Mechanical Booster Pump Accessories 363Stokes 6" Series Mechanical Booster Pumps 365HV Mechanical Booster Pumps 373Shop online at www.edwardsvacuum.com

Large Pumps and Pumping Systems8Page276IntroductionEdwards range of industrial dry pumps, oil sealed rotary pumps, oilsealed piston pumps and mechanical boosters are the mostcomprehensive available to the industrial user. Add our extensiverange of accessories and the pumps can be configured for a widerange of applications. The pumps and accessories can be suppliedeither as individual components or as fully systemized, factory testedcombinations.The range consists of:• GXS dry pumps• IDX dry pumps• Drystar ® 80 dry pumps• EM oil sealed rotary vane pumps• Stokes Microvac oil sealed piston pumps• EV oil sealed rotary vane pumps• EH, Stokes Vacuum 6" and HV booster pumpsGXS Dry PumpsEdwards, a pioneer in dry pumping technology, launches a newgeneration of dry pumps for industrial applications.Edwards has over 90 years of experience in harsh process vacuumapplications, including dust and process contaminants handling, withmore than 150,000 dry pumps installed worldwide.The GXS industrial dry screw pump incorporates innovative, patenteddesign features that establish a new standard in dry pumping.Fast - Dry pumping down to 5 x 10 -4 mbar / 3.7 x 10 -4 Torr ultimatevacuum (without purge)Robust - Reliable operation in harsh industrial applicationsCompact - Smaller footprint than pumps of similar capabilitiesEconomical - Affordable capital investment and low cost of ownershipEnvironmental - Smooth, quiet running with low power and utilitiesconsumptionIDX and Drystar ® 80 Dry PumpsThe Drystar ® 80 is based on the well proven Edwards reverse clawmechanism reaching a peak speed of 560 m 3 h -1 / 330 ft 3 min -1 . Thereverse claw mechanism results in short gas paths within theoperating mechanism, providing the ability to handle large amountsof dust and water vapour, when compared to oil sealed pumps,without deterioration of performance.The IDX 1000 and 1300 use the latest double ended screwtechnology to provide a peak speed of up to 1300 m 3 h -1 /767 ft 3 min -1 . Many features are patented and as with the GV rangeare able to handle large amounts of dust and water vapour with littleor no effect on performance.• Low cost of ownership in harsh conditions• High reliability – dry mechanism proven in 100,000 installations• Oil free mechanism – reduced maintenance• Higher dust and water vapour tolerance• Accessories to optimise pump performance to process variables• Fast pump down with Edwards hydrokinetic drive booster pumps.EM Oil Sealed Rotary PumpsEdwards rugged two stage mechanical oil sealed pumps areavailable in sizes from 40 - 275 m 3 h -1 / 30 - 206 ft 3 min -1 . They feature:• Advanced oil lubrication circuit• High reliability• Accessories to match your application needsStokes Microvac Oil Sealed Rotary Piston PumpsStokes Microvac oil sealed piston pumps are available in sizes255 - 1240 m 3 h -1 / 150 - 728 ft 3 min -1 . They feature:• Proven rugged robust design• Internal oil piping to eliminate potential leaks• Oil sight glass and flow indicator to provide easy monitoring of oillevel and flow• O-ring sealed covers to eliminate potential oil leaks• Integral gas ballast valveShop online at www.edwardsvacuum.com

EV Oil Sealed Single Stage Rotary Vane PumpsHV8000 Industrial, ATEX and Explosion ProofMechanical Booster PumpsOil sealed rotary vane pumps 20 to 630 m 3 h -1 /11 to 360 ft 3 min -1 .Standard features include:• Dual frequency, wide band motor operates in most countriesworldwide• Efficient mist filter for economical operation and environmentalprotection• Integral anti suckback valve protected by fine mesh filter• Gas ballast valve• High pumping speed at low pressure• Ultimate vacuum better than 0.5 mbar• Continuously rated at any pressure from atmosphere to ultimate• Fine mesh inlet filterThe new EV range of vacuum pumps provides an economicalsolution for industrial applications where high ultimate vacuums arenot required.EH Mechanical Booster PumpsPHOTO REQUIREDThe Edwards HV8000 high vacuum mechanical booster has anominal pumping speed of 7200 m 3 h -1 (4241 ft 3 min -1 ), at 50 Hz.• Derived from the successful range of SN pressure blowers, theHV8000 booster is designed for arduous duty cycles and highpower applications.• Ideal for larger scale harsh industrial and chemical applications,HV boosters are available in Industrial, ATEX or Explosion Proofconfigurations.• HV boosters may be ordered as either 'bareshaft' or with motorfitted. Variable frequency drives may be specified for greaterversatility.• HV boosters are available in vertical or horizontal gas flowconfiguration.• For long service life, the external shaft seal is water-cooled.• Five bearing construction and rugged helical gears make for a veryrobust construction.HV Mechanical Booster Pumps8The EH mechanical booster pumps feature the unique hydrokineticdrive, providing an efficient power transmission with benefits ineconomy, performance and compactness. The hydrokinetic driveprovides the following features:• Capacities for 250 to 4200 m 3 h -1• Pump down times cut by 50%, when compared with direct drivepumps• No bypass lines or pressure switches required• Reduced capital and operating costs• Air cooled motors• Quiet, minimum vibrationStokes 6" Series Mechanical Booster PumpsPHOTO REQUIREDStokes 6" series mechanical booster pumps are available in sizes1020-5100 m 3 h -1 / 600-3000 ft 3 min -1 . Features include:• Rugged design for reliable and extended operation• Simple maintenance features incorporated in design• Options of direct drive motors or bare shaft machines• Options of 5 seal process isolation boosters for optimum protectionfrom dust and particulate• Options of by pass technology to reduce pump down time• Dynamically balanced impellersThe HV30000 direct drive mechanical booster has a pumping speedof up to 36000 m 3 h -1 / 21204 ft 3 min -1 at 60 Hz. The speed of thepump motor can be controlled by an inverter.In addition, the pumps offer the following features:• Water cooled shaft seals and after cooler• Fitted with thermal snap-switch, to protect the pump from overtemperature• Nitrogen purge inlet fitted as standard• Vertical flow, direct drive• Control with inverter, or interlock with a pressure switch input.SystemizationEdwards comprehensive range of pumps forms the basis for themanufacture of factory tested combination systems, withdisplacements from 310 m 3 h -1 to 30000 m 3 h -1 / 180 ft 3 min -1 to17700 ft 3 min -1 . With a wide and robust range of accessories tochoose from, the pumping system can be optimised for yourapplication. Edwards systemization service offers fully factory testedcombinations with appropriate accessories.Page277Shop online at www.edwardsvacuum.com

GXS, IDX and Drystar® 80 Pumps8Page278Edwards is a market leader in dry pump technology and haspioneered the use of dry vacuum in some of the harshestapplications.The Edwards GXS range incorporates our unique screw technologywith a world leading high efficiency drive to achieve excellent vacuumperformance with low running costs.The IDX uses the very latest in double ended screw pumpingtechnology, whilst the Drystar 80 range utilises a reverse clawmechanism, proven over more than 10 years and 100,000installations worldwide. Both provide reliable and economicalsolutions to the demands of today's industrial processes.The product range is available from 80 m 3 hr -1 / 47 ft 3 min -1 to3450 m 3 hr -1 / 2031 ft 3 min -1 .Why Dry?Dry Vacuum pumps - why not you? The competitive nature of today’sbusiness means changes are required to improve performance, lowercosts, and provide optimal process solutions. The Dry pumpingsolution is the change from traditional oil sealed pumps to a proventechnology for this industry. Edwards, a world leader in dry pumptechnology, has demonstrated the ability to provide a low-cost,custom tailored solution to your vacuum application. The benefitsoffered by the GXS/Drystar 80/IDX Dry pumping solutions are:• Maintenance- Low capital cost and minimal maintenance requirements lead tolowest cost of ownership- Extended periods between user intervention- Lower consumable costs• Environmental- No oil disposal- No oil emissions into atmosphere• Performance- Very stable pumping speed gives repeatability to processes- Continuous pumping at atmosphere- Ability to handle particulates- Dry eliminates back-streaming, thus protecting reactive alloysfrom contamination- Significantly higher capacity for water vapour pumping thantraditional oil sealed pumps• Safety- Unobtrusive noise levels- No unsightly oil spills- No hazardous oil vapoursAll Edwards dry pump ranges are ideally suited to:• Metallurgy- Vacuum Induction Melting (VIM)- Precision Investment Casting (PIC)- Vacuum Arc Refining (VAR)- Electron beam welding- Vacuum sintering- Steel degassing• LED manufacture• Lithium Battery manufacture• Solar- Lamination- Silicon Crystal growing- Solar coating• Heat treatment- Hardening- Plasma & LP nitriding- LP carburization- Vacuum brazing• Coating- Roll coating- Architectural glass coating- Optical filters & lenses- Vacuum metallising• Drying- Lithium Ion Battery (Drying and Degassing)- Transformers, capacitors & cables- Leather- Spices & fragrances- Nuclear industryand many more.With such a range of pumping speeds combinations and applicationsavailable, Edwards retains a comprehensive ApplicationsEngineering capability and are able to offer a solutions package thatincludes:• Process design• Equipment specification and selection• Safety and operating procedures• Vacuum system and control integration• Commissioning adviceSolutions EngineeringShop online at www.edwardsvacuum.comThe range and complexity of industrial applications means a 'one sizefits all' policy does not result in system optimization. A detailedappreciation of the process, environmental and safety issues isrequired to tailor systems to match performance and process.Applications Design & Support Edwards comprehensive designservice is based on in-depth knowledge of the industries andapplications involved. This expertise is held in the highly focused andexperienced applications team, which consists of a CentralApplications Group supported by a regional network of ApplicationsSpecialists. Proprietary software is used to define pumpingrequirements and a suite of optional accessories or modules areavailable. For larger or more unusual applications a customengineering service is available.Solutions could cover:• Process design• Equipment selection• Safety and Operating Parameters• Integration with plant control system(s)• Commissioning advice and more...Contact your local office to request an initial discussion with anApplications Specialist. Typically, discussions will include gases /materials to be pumped, cycle times and duty pressures, systemcapacities, control systems, utilities, system footprint and all otheraspects of the vacuum system to ensure that we are able to offer themost effective solution for your application.

GXS industrial Dry Screw PumpDesigned for high reliability Edwards patented screw-rotor designdelivers excellent pumping speed and is part of an advanced thermalmanagement system that maximizes pump performance and life ofthe seals, bearings, and motor to ensure long pump service life.Adaptable to a wide range of applications GXS pumps are offeredwith a range of purge options, filters, catchpots, inlet isolation valvesand silencers; together with our special high flow purge and solventflush accessory enabling the inside of the pump to be kept cleanwithout disassembly.Long service intervals and easy swap-out Long-life non-oxidizinggearbox oil enables service intervals of up to 5 years to be achieved.Quick-connect utility interfaces provide for rapid pump installationand exchange to improve factory up-time.Low cost of ownership Custom high-efficiency motor and drivesystem with advanced seal technology provides for greatly reducedpower consumption. Minimal cooling water and purge gasrequirements coupled with improved powertrain technology providefor long service intervals and near maintenance-free operation.Minimum workplace and environmental impact GXS pumps areincredibly compact. Edwards advanced screw-rotor design providesfor remarkably quiet, low vibration operation even without a silencer.Simple to install and operate GXS pumps are easily wheeled or forkliftedinto position, coupled to the process and services using thesupplied mating connectors and run at the push of a button.Ideal for integration into larger systems GXS pumps andcombinations are supplied with serial (RS232) communication andLAN-based web-serving capability as standard. Optional modules areavailable to add Parallel (digital I/O) and Profibus control functionality.At your service Edwards has highly skilled applications specialistswho will advise on the optimum configuration for your process orapplication.GXS innovative technologyBearing and Lubrication• Oil lubricated gears eliminate grease and the need for periodicmaintenance.• Advanced quality bearings and special purpose oil is used, withlow vapour pressure for application compatibility and greatlyimproved life.Double ended shaft support• Non-cantilever design provides secure rotor support for extremelylow vibration and superior starting reliability, especially on harshprocesses.• In tests superior liquid and powder handling has demonstrated thata five litre water slug and one kilogram fine powder slug handlingcapability.Built in control panel• All pumps are fitted with a built-in control panel for direct localcontrol of the pump.• Full start / stop control with indication of running mode and state ofthe pump with a connector for an optional Pump Display Terminal(PDT) for improved diagnostic and configuration capability.Advanced shaft sealing technology• Non-contacting long-life seals with integral oil blocking labyrinthseal provides for highly effective sealing.• Combined with a four litre per minute seal purge the gearbox isprotected from contamination and the vacuum space is kept free ofoil.World leading motor and drive technology• Extremely high efficiency motors with electronic drives delivermaximum torque performance for difficult processes.• Hermetically sealed motor eliminates oil leaks and improves pumpreliability.• Water-cooled motors and drives provide for improved reliability andlong life to reduce service costs.Advanced pumping mechanism design• Enhanced screw-type rotor design results in smooth, gradualcompression along the length of the rotor for improved thermalcontrol and optimised pumping at all inlet pressures.• Integrated heat management and unique rotor and stator designfeatures provide argon gas pumping capability at full concentration.• Advanced machining techniques and design features eliminate theneed for rotor coatings while maintaining superb ultimate vacuumperformance.• Improved manufacturing technology and design contributes to lowvibration and extremely quiet running of

GXS160/1750 Dry PumpEdwards, a pioneer in dry pumping technology, has more than 90 years experience in harshprocess vacuum applications, including dust and process contaminants handling, with morethan 150,000 pumps installed worldwide.The GXS industrial dry screw pump incorporates innovative, patented design features thatestablish a new standard in dry pumping.Features & Benefits●●●●●Designed for high reliabilityAdaptable to a wide range of applicationsLong service interval and easy swap outLow cost of ownershipMinimum workplace and environmental impactDimensionsApplications●●●●●SolarSilicon crystal growingLithium Ion battery manufactureFreeze dryingPharmaceuticalPerformance Curves8Page280(mm) A B C D E F G H J K L M160 195 220 285.9 346.5 879.5 83 209.4 568 150 1092 390 250160/1750 195 220 311.6 346.5 853.8 83 209.4 829.5 - 1092 390 250(inches) A B C D E F G H J K L M160 7.7 8.7 11.3 13.6 34.6 3.3 8.2 22.4 5.9 43 15.4 9.8160/1750 7.7 8.7 12.3 13.6 33.6 3.3 8.2 32.7 - 43 15.4 9.8Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationGXS160GXS160/1750Peak PumpingSpeed 160 m 3 h -1 1200 m 3 h -1(95 cfm) (706 cfm)Ultimate Pressure-2 1.2 x 10 mbar-4 7 x 10 mbarwith Purge (9 x 10 -3 Torr) (5.3 x 10 -4 Torr)Ultimate Pressure-3 7 x 10 mbar-4 7 x 10 mbarwithout Purge (5.3 x 10 -3 Torr) (5.3 x 10 -4 Torr)Full Load Power@ ultimatepressure3.8 kW (5.1 hp) 5.1 kW (6.8 hp)@ peak pumpingload5 kW (6.7 hp) 7.4 kW (9.9 hp)Inlet connectionLight/med duty ISO63 ISO100Med duty + ISO100 ISO100ExhaustconnectionNW40NW40Cooling WaterFlow 4 lmin -1 (1.1 galmin -1 ) 7 lmin -1 (1.9 galmin -1 )Supply pressure(max)6.9 bar (100 psig) 6.9 bar (100 psig)DP across pump(min)1 bar (14.7 psig) 1 bar (14.7 psig)Temperature 5-40 °C (41-104 °F) 5-40 °C (41-104 °F)Mass 305 Kg (672 lb) 475 Kg (1047 lb)Volume 0.7 l (0.2 gal) 1.4 l (0.4 gal)Purge Gas*Pressure2.5-6.9 bar (36-100 psig)Light Duty12 slmMedium Duty18-52 slmHigh flow purge/solvent flushsupply pressure2.5-6.9 bar (36-100 psig)Noise

GXS250/2600 Dry PumpEdwards, a pioneer in dry pumping technology, launches a new generation of dry pumps forindustrial applications.Edwards has over 90 years of experience in harsh process vacuum applications, includingdust and process contaminants handling, with more than 150,000 dry pumps installedworldwide.The GXS industrial dry screw pump incorporates innovative, patented design features thatestablish a new standard in dry pumping.Features & Benefits●●●●●Designed for high reliabilityAdaptable to a wide range of applicationsLong service interval and easy swap outLow cost of ownershipMinimum workplace and environmental impactDimensionsApplications●●●●●SolarTouch display manufactureLaminationFreeze dryingLithium Ion battery manufacturePerformance Curves8Page282(mm) A B C D E F G H J K L M250 195 220 285.9 346.5 879.5 83 209.4 568 150 1092 390 250250/2600 195 220 311.6 346.5 853.8 83 209.4 829.5 - 1092 390 250(inches) A B C D E F G H J K L M250 7.7 8.7 11.3 13.6 34.6 3.3 8.2 22.4 5.9 43 15.4 9.8250/2600 7.7 8.7 12.3 13.6 33.6 3.3 8.2 32.7 - 43 15.4 9.8Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationGXS250GXS250/2600Peak PumpingSpeed 250 m 3 h -1 1900 m 3 h -1(148 cfm) (1118 cfm)Ultimate Pressure-3 9 x 10 mbar-4 5 x 10 mbarwith purge (6.8 x 10 -3 Torr) (3.8 x 10 -4 Torr)Ultimate Pressure-3 4 x 10 mbar-4 5 x 10 mbarwithout purge (3 x 10 -3 Torr) (3.8 x 10 -4 Torr)Full Load Power@ ultimatepressure4 kW (5.4 hp) 5.3 kW (7.1 hp)@ peak pumpingload9 kW (12.1 hp) 9.7 kW (13 hp)Inlet connectionLight/med duty ISO63 ISO160Med duty + ISO100 ISO160ExhaustconnectionNW40NW40Cooling WaterFlow 4 lmin -1 (1.1 galmin -1 ) 7 lmin -1 (1.9 galmin -1 )Supply pressure(max)6.9 bar (100 psig) 6.9 bar (100 psig)DP across pump(min)1 bar (14.7 psig) 1 bar (14.7 psig)Temperature 5-40 °C (41-104 °F) 5-40 °C (41-104 °F)Mass 305 Kg (672 lbs) 515 Kg (1035 lbs)Volume 0.7 l (0.2 gal) 1.4 l (0.4 gal)Purge Gas*Pressure2.5-6.9 bar (36-100 psig)Light Duty12 slmMedium Duty18-52 slmHigh flow purge/solvent flushsupply pressure2.5-6.9 bar (36-100 psig)Noise

GXS450/2600/4200 Dry PumpEdwards, a pioneer in dry pumping technology, has more than 90 years experience in harshprocess vacuum applications, including dust and process contaminants handling, with morethan 150,000 pumps installed worldwide.The GXS industrial dry screw pump incorporates innovative, patented design features thatestablish a new standard in dry pumping.Features & Benefits●●●●●Designed for high reliabilityAdaptable to a wide range of applicationsLong service interval and easy swap-outLow cost of ownershipMinimum workplace and environmental impactDimensionsApplications●●●●●SolarFreeze dryingSterilisationCoatingMetallurgyPerformance Curves8Page2841. Fast 2. Slow(mm) A B C D E F G H J K L M450 258.5 283.5 394 300 871.6 83 261.4 717 150 1186 517 250450/2600 258.5 283.5 362 332 903.8 83 261.4 1031 - 1186 517 250450/4200 258.5 283.5 362 332 903.8 83 261.4 1031 - 1186 517 250(inches) A B C D E F G H J K L M450 10.2 11.2 15.5 11.8 34.3 3.3 10.3 28.2 5.9 46.7 20.4 9.8450/2600 10.2 11.2 14.2 13.1 33.6 3.3 10.3 40.6 - 46.7 20.4 9.8450/4200 10.2 11.2 14.2 13.1 33.6 3.3 10.3 40.6 - 46.7 20.4 9.8Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationGXS450 GXS450/2600 GXS450/4200Peak PumpingSpeed 450 m 3 h -1 2200 m 3 h -1 3026 m 3 h -1(265 cfm) (1295 cfm) (1781 cfm)Ultimate Pressure-2 5.4 x 10 -41 x 10 mbarmbar5.4 x 10 -4mbarwith purge(7.5 x 10 -3Torr)(3.8 x 10 -4Torr)(3.8 x 10 -4Torr)Ultimate Pressure-3 -4 5 x 10 mbar 5 x 10 mbar-4 5 x 10 mbarwithout purge(3.8 x 10 -3Torr)(3.8 x 10 -4Torr)(3.8 x 10 -4Torr)Full Load Power@ ultimatepressure7.2 kW 8.8 kW 9.4 kW(9.6 hp) (11.8 hp) (12.6 hp)@ peak pumpingload17.3 kW 20 kW 21.1 kW(23.2 hp) (26.8 hp) (28.3 hp)Cooling water flow@ min DP 6 lmin -1 12 lmin -1 12 lmin -1(1.6 galmin -1 ) (3.2 galmin -1 ) (3.2 galmin -1 )Cooling water DPacross pump1 barg 1.5 barg 1.5 barg(15 psig) (22 psig) (22 psig)Inlet connection ISO100 ISO160 ISO160ExhaustconnectionNW50 NW50 NW50Mass 640 Kg 860 Kg 868 Kg(1411 lbs) (1996 lbs) (1914 lbs)Lubrication volume 1.8 l (0.5 gal) 2.5 l (0.7 gal) 3.6 l (1.0 gal)Cooling Water supply pressure (max) 6.9 bar (100 psig)Cooling Water temperature5-40 °C (41-104 °F)Purge gas - pressure*2.5-6.9 bar (36-100 psig)Purge gas – light duty*12 slmPurge gas – medium duty*18-146 slmHigh flow purge/solvent flush supplypressure2.5-6.9 bar (36-100 psig)Noise

GXS750/2600/4200 Dry PumpEdwards, a pioneer in dry pumping technology, has more than 90 years experience in harshprocess vacuum applications, including dust and process contaminants handling, with morethan 150,000 pumps installed worldwide.The GXS industrial dry screw pump incorporates innovative, patented design features thatestablish a new standard in dry pumping.Features & Benefits●●●●●Designed for high reliabilityAdaptable to a wide range of applicationsLong service interval and easy swap-outLow cost of ownershipMinimum workplace and environmental impactDimensionsApplications●●●●●SolarFreeze dryingSterilisationCoatingMetallurgyPerformance Curves8Page2861. Fast 2. Slow(mm) A B C D E F G H J K L M750 258.5 283.5 576 413 1134 83 261.4 717 150 1622 517 250750/2600 258.5 283.5 657 332 1053 83 261.4 1031 - 1622 517 250750/4200 258.5 283.5 657 332 1053 83 261.4 1031 - 1622 517 250(inches) A B C D E F G H J K L M750 10.2 11.2 15.5 11.8 34.3 3.8 10.3 28.2 5.9 46.7 20.4 9.8750/2600 10.2 11.2 25.9 13.1 41.5 3.8 10.3 40.6 - 63.9 20.4 9.8750/4200 10.2 11.2 25.9 13.1 41.5 3.8 10.3 40.6 - 63.9 20.4 9.8Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationGXS750 GXS750/2600 GXS750/4200Peak PumpingSpeed740 m 3 h -1(436 cfm)2300 m 3 h -1(1354 cfm)3450 m 3 h -1(2031 cfm)Ultimate Pressure-3 -4 8 x 10 mbar 5 x 10 mbar-4 5 x 10 mbarwith purge(6 x 10 -3Torr)(3.8 x 10 -4Torr)(3.8 x 10 -4Torr)Ultimate Pressure-3 -4 3 x 10 mbar 5 x 10 mbar-4 5 x 10 mbarwithout purge(2.3 x 10 -3Torr)(3.8 x 10 -4Torr)(3.8 x 10 -4Torr)Full Load Power@ ultimatepressure10 kW 11.1 kW 11.5 kW(13.4 hp) (14.9 hp) (15.4 hp)@ peak pumpingload37 kW 40 kW 40 kW(49.6 hp) (53.6 hp) (53.6 hp)Cooling Water flow@ min DP 10 lmin -1 12 lmin -1 12 lmin -1Cooling Water DPacross pump(2.6 galmin -1 ) (3.2 galmin -1 ) (3.2 galmin -1 )2 bar (29 2.5 bar (36 2.5 bar (36psig) psig)psig)Inlet connection ISO100 ISO160 ISO160ExhaustconnectionNW50 NW50 NW50Mass 640 Kg 908 Kg 953 Kg(1411 lb) (2002 lb) (2101 lb)Lubrication volume 2.4 l (0.6 gal) 3.1 l (0.8 gal) 4.2 l (1.1 gal)Cooling Water supply pressure (max) 6.9 bar (100 psig)Cooling Water temperatureHigh volts5-40 °C (41-104 °F)Low Volts5-30 °C (41-86 °F)Purge gas - pressure*2.5-6.9 bar (36-100 psig)Purge gas – light duty*12 slmPurge gas – medium duty*18-146 slmHigh flow purge/solvent flush supplypressure2.5-6.9 bar (36-100 psig)Noise

Drystar 80 Pump and Booster PackageEdwards DRYSTAR 80 dry vacuum pump is configured for ease of installation andcommissioning while providing a clean, robust and cost effective alternative to traditional oilsealedpumps.The DRYSTAR 80 is designed to handle large volumes of condensable vapours andparticulate loads to provide a consistent pumping performance, minimal service interventionand low cost of ownership. The use of dry pumping technology and unique seal design willeliminate contamination throughout the vacuum process making the DRYSTAR 80 suitablefor a range of applications and environments.8Features & Benefits●●●●●Extended periods between user intervention to achievemaximum uptimeNo exhaust filters to service offering lower consumable cost andinventoryAvailable in hydrocarbon or PFPE fluid (for oxygen) versionsmaking it suitable for a wide range of applications andenvironmentsContinuous pumping from atmosphereConsistent performance in demanding applicationsDimensionsApplications●●●●●Vacuum metallurgy processesHeat treatment carburisationThin film coating technologiesPharmaceutical freeze dryingRefrigeration and air conditioning system evacuation, drying, andbackfillingPerformance CurvesPage2881. GV80/EH500 2. GV80/EH500 3. GV80 4. GV8060Hz 50Hz 60Hz 50Hz1. Process Inlet 2. Process Outlet 3. Estimated centre of gravityShop online at www.edwardsvacuum.com

Technical DataOrdering InformationDrystar 80 Drystar 80/EH500Peak Pumping Speed50 Hz 80 m 3 h -1 390 m 3 h -1 (230(47 cfm)cfm)60 Hz 94 m 3 h -1 471 m 3 h -1 (277(56 cfm)cfm)Ultimate Pressure

IDX 1000/1300The IDX1000 is the new benchmark in performance for fast pumpdown of large chambersand high capacity pumping for industrial processes.Based on the double-ended screw technology, the IDX Dry Vacuum Pump will give you allthe reliability and performance you want for your process. The IDX outperforms all other drypumps in robustness, performance and ease of operation, giving you faster pump-downfrom atmosphere and managing higher throughput at low pressures. Dry pumping systemsreduce energy costs, eliminate effluent and can give significant improvements in productquality, making them the ideal solution for many coating and metallurgy processes.Features & Benefits●●●●●Improved Performance and ReliabilityContinuous performance from atmosphere to ultimateExcellent thermal profile and temperature controlTolerates liquid and particlesDoes not contaminate your processDimensionsApplications●●●●●MetallurgyVacuum Induction Melting (VIM)Vacuum Arc Refining (VAR)Precision Investment Casting (PIC)Steel DegassingPerformance Curves8Page2901. IDX1300 2. IDX1000IDX1000IDX1300A 50Hz 2250mm (88.5”) 2465mm (97”)60Hz 2290mm (90.1”) 2515mm (99”)B 854mm (33.6”) 1005mm (39.6”)C 750mm (29.5”) 750mm (29.5”)Shop online at www.edwardsvacuum.com

Technical DataMass IDX1000 IDX130050 Hz 1560 kg 1590 kg(3439 lb) (3506 lb)60 Hz 1630 kg 1660 kg(3594 lb) (3660 lb)Pumping SpeedNominal 1000 m 3 h -1 1300 m 3 h -1(589 cfm) (766 cfm)Actual 900 m 3 h -1 1250 m 3 h -1(560 cfm) (736 cfm)Ultimate pressure 5 x 10 -2 mbar 5 x 10 -2 mbar(3.75 x 10 -2 Torr) (3.75 x 10 -2 Torr)Noise 82 dB(A) 82 dB(A)Motor 30 kW (40 hp) 30 kW (40 hp)Optional22 kW (30 hp)Ordering InformationProduct DescriptionIDX1300 30kW DIN Safe AreaIDX1300 40hp ANSI Safe AreaIDX1000 22 kW 50 Hz safe areaIDX1000 30 kW 50 Hz safe area extended performanceIDX1000 30 hp 60 Hz safe areaIDX1000 40 hp 60 Hz safe area extended performanceAccessories & SparesGear Box Oil 4 Ltr Mobil SHC 629Coolant 0.9/2L DrystarIDX Routine maintenance kitIDX Heat exchanger cleaning kitIDX Cooling system overhaul kitIDX Motor fitting kitIDX Drive coupling kitIDX Bearing and seal replacement kitIDX Oil pump replacement kitIDX Strip and rebuild kitIDX Flame arrestor cleaning kitIDX Hoses kitIDX Flame arrestor replacement kit (inlet)IDX Flame arrestor replacement kit (outlet)IDX Flame arrestor tooling kitOrder No.A70904985A70914985A70803985A70804985A70813985A70814985Order No.H11023011H12810003A70801800A70801801A70801802A70801803A70801804A70801805A70801806A70801807A70801808A70801809A70801810A70801811A708018128Page291Shop online at www.edwardsvacuum.com

EM Oil Sealed Rotary PumpsATEX compliant EM primary pumps are suitable for operation inATEX systems rated as follows:PumpClassificationInternalClassificationExternalClassificationE2M40 & E2M80 II 3 Gc IIB T4 II 2 G IIB T4E2M175 & E2M275 II 3 Gc IIB T3 II 2 G IIB T1608Page292Edwards rugged two stage mechanical oil sealed pumps areavailable in sizes from 40 to 275 m 3 h -1 / 30-206 ft 3 min -1 . Theyfeature:• Advanced oil lubrication circuit• High reliability• Accessories to match your application needsApplication and AccessoryInformation EM Rotary PumpsThe use of Edwards rotary pumps with our comprehensive range ofaccessories will result in enhanced performance and reliability. Theinformation below will help you to select the correct accessories foryour application. However, we recommend that you treat this as aguide only, because the final selection of components can beinfluenced by the operation of your vacuum system and the processby-products. If in doubt, please contact Edwards or your local supplierfor further advice from an Edwards application specialist.When you select accessories for your system, the major aim is toprolong the life and the safe operation of the pumps and to ensurethat the system continues to perform at its ultimate specification. Todo this, you need to ensure that the system is able to accommodatethe process media and any process by-products, including vapours,liquids or particulates, which may damage the pumps. At the sametime, you should ensure that any materials discharged from thesystem to atmosphere are not harmful to the environment and topeople nearby.Broad Application CoverageIndustrialIndustrial EM primary pumps are annotated with the suffix "IND".EM primary pumps are safe to handle non-flammable gases andvapours within the normal operating parameters of the pump.Flammable gases and vapours may also be pumped, provided theyare outside the flammable range, please consult Edwards for advice.PFPEEM primary pumps may be supplied for use with PFPE oil. Thisenables them to be used in harsh (corrosive) processes, or where thepresence of Oxygen will result in rapid degradation of hydrocarbonoils.ATEX• EM primary pumps (hydrocarbon oil only) may be supplied withATEX classification either as part of a pump system or stand-alone.Please consult Edwards.• ATEX compliance is typically specified for use in Europe, but mayalso be required in other areas.Where the following classification...SymbolMeaningSpecifies that an ATEX-compliant EM pump canbe used in a potentially explosive atmosphereIIEquipment Group – II = non-mining equipment3 (Int) 2 (Ext) G Equipment Category 3 (or 2) – G = GascConstructional safetyIIBGas Group – Suitable to pump gases in gas groupIIB Where no gas group is mentioned, there are nolimitationsT4 T160 T3 Temperature Class – Gas auto-ignitiontemperature greater than: – T4 = 135 °C,T160 = 160 °C, T3 = 200 °CA four-pole, three-phase ATEX approved flameproof motor providesdirect drive through an ATEX certified flexible coupling to the E2M40,E2M80, E2M175 and E2M275 pumps. A cooling fan is attached to thedrive coupling on the E2M40 and E2M80 pumps. The E2M175 andE2M275 pumps are water-cooled.Lubrication is provided by a sliding vane oil pump, which deliverspressurized oil to the vacuum pumping mechanism.Pumps are supplied with sealed Gas Ballast. Plugs have been fittedto prevent flammable atmospheres accidentally entering the pump. Ifthe gas ballast facility is required, an N 2 purge must be used, or cleanair supplied from a safe area.For much of the operating cycle the pump operates at pressuressignificantly below 0.8 bar (11.6 psi) absolute. However, the finalstage of the pump will exhaust to atmosphere and there is a startupand shutdown period where the whole pump is briefly operating atatmospheric pressure.A surface temperature thermal snap switch is fitted to the body of theE2M175 and E2M275 rotary pumps. This must be connected to anintrinsically safe circuit suitable for the hazardous zone in which itmay be located; otherwise it must be located in a safe area. If thepump temperature should rise due to a fault condition, the snapswitch activates and the pump will shut-off.Trapping ParticulatesIn any application, first ensure that particulates in the process streamare trapped before they get into the pump: use the ITM or ITF inletfilters which are suitable for use with oil-sealed and dry pumps.However, in processes which generate or contain large amounts ofparticulates, some will enter the pump: use our EOF an external oilfilter to remove particulates from the pump oil during operation.ITF inlet dust filters If the mechanical pump is a backing pump for adiffusion pump, the diffusion pump will trap particulates during normaloperation, but the diffusion pump will not trap dust during the roughingstage of the process cycle. We recommend you fit an ITF filter to themechanical pump inlet (that is, in the foreline): this filter has areplaceable element. Note that the impedance of a clean filter willcause the pumping speed to decrease by about 10% at 1 mbar and20% at 10 -2 mbar. The ITF filter is more that 96% efficient, whentested in accordance with BS2831.Shop online at www.edwardsvacuum.com

ITM High Capacity Inlet Dust Filters Use an ITM filter forapplications where there is a high load of dust and particulates. Fit theITM directly to the inlet of a rotary or mechanical booster pump. Thisfilter has a stainless steel mesh element that can be washed and reused.It is ideal for use when backing diffusion pumps or for wetprocesses where a paper filter may become blocked quickly. The ITMfilter has high conductance and is therefore ideal for applicationswhich require fast pump down times. The ITM filter has an efficiencyof 90%, when tested in accordance with BS3831.EOF External Oil Filters Use the EOF’s with the EM oil-sealed rotarypumps, to remove particulates trapped in the pump oil.The EOFA and EOFM filters use the internal pressurized oil systemof the pump to continually filter a proportion of the pump oil. Thesefilters are only suitable for hydrocarbon oil. The EOFM filter removesparticulates down to 0.5 microns, and the EOFA filter both removesparticulates and includes an active element to remove acidic andother aggressive contaminants from the oil.Pumping VapoursThe use of gas ballast significantly improves vapour handlingcapability of oil sealed rotary pumps. We offer a number ofaccessories to improve the utility of gas ballast.EBV Gas Ballast Control Valve Fit EBV gas ballast control valve toallow remote or automated control of gas ballast.TCV Temperature Control Valve The vapour pumping performanceof the larger oil sealed pumps can be enhanced by fitting a TCV. Usethe TCV both to warm-up the pump faster (which reduces the amountof condensation in the pump) and to reduce water usage and cost.ITC Inlet Chemical Traps Fit an ITC trap to the inlet of the pump toprotect against the aggressive process vapours that may corrode thepump or degrade the oil.Trapping LiquidsThe use of gas ballast allows an oil sealed pump to processsignificant quantities of vapour. However, oil sealed pumps can notpump liquid streams and it is important both to remove liquids beforethey reach the pump inlet and to prevent condensed liquids fromflowing back into the pump outlet. The following accessories may besuitable for your application:ITO Inlet Trap The ITO inlet trap is ideal for processes where thereis a risk of liquids in the process entering the pump inlet. Fit the ITOtrap to the pump inlet or elsewhere in the foreline.CP Catchpot Process vapours passing through the pump maycondense after the pump outlet, in the exhaust line. Fit a CP catchpotto the pump outlet to trap the condensates and prevent them flowingback into the pump.Exhaust ManagementYou should aim to minimise the impact of gases and vapours whichexhaust from the pump outlet. Edwards offers a range of exhaustmanagement systems for the most exacting applications. However,for most straight-forward applications of oil sealed rotary pumps, werecommend that you fit an oil mist filter to the pump outlet to removeoil mist vapour. A mist filter is not required if you vent the exhaustgases remotely or pass them through exhaust scrubbing equipment.MF Oil Mist Filters The MF filters remove oil mist (vapour) from theprocess gases exhausted from the outlet of an oil sealed pump. Thefilters remove both odour and oil vapour and so prevent it fromreaching the atmosphere and the workplace.Back MigrationWhen operated at ultimate pressure for extended periods of time, anyoil sealed pump allows oil vapour to back migrate into the processchamber. The back-migration of oil vapour could contaminate yourprocess or your vacuum system.ITC Inlet Chemical Trap Fit an ITC inlet chemical trap (filled with analumina charge) to the pump inlet to trap oil vapour and to preventback migration.Applications• Refrigeration dehydration• Brake line evacuation• TV aluminisers• Vacuum metallurgy• Fluorescent light tube pumping• Thin film coating• IT hard disc coating• Vacuum distillation• Cryogenic vessel evacuation• Transformer and cable drying• Pharmaceutical freeze drying• Space simulation• Crystal growing• Automotive• Chemical processing8Page293Shop online at www.edwardsvacuum.com

E2M40 Two Stage Rotary Vacuum PumpsEdwards E2M40 series two stage oil sealed rotary vane vacuum pumps are renowned fortheir high ultimate vacuum, rapid pumping speeds, quiet operation and ability to handlewater vapour. These direct drive rotary vane pumps are inherently compact and vibrationfree, and with their finger-proof fan and coupling housings they offer excellent operatorprotection.A comprehensive range of accessories is available to allow use on the widest variety ofvacuum applications.Supplied with Ultragrade 70 Oil. Fomblin® must be purchased separately for PFPEprepared pumps E2M40FX, E2M80FX, and E2M175FX.8Features & Benefits●●●●●Advanced pressurised oil circuit to give effective lubrication evenunder high gas loadsWhen the pump is switched off, the spring loaded distributorvalve provides oil and air suck-back protectionGas Ballast control to assist in handling high water vapour loadsIndustrial roller bearings on drive shaft for ultimate reliability andlong, trouble free lifeFull height oil sight glass for easy checking of oil level andconditionDimensionsApplications●●●●●Vacuum metallurgy processesThin film coating technologiesPharmaceutical freeze dryingRefrigeration and air conditioning system evacuation, drying, andbackfillingTransformer and cable drying and impregnation, insulating oiltreatment plantPerformance CurvesPage2941. Without gas ballast 2. With gas ballastShop online at www.edwardsvacuum.com

Technical DataDisplacement50Hz 42.5 m 3 h -1 / 25 ft 3 min -160Hz 50.5 m 3 h -1 / 29.7 ft 3 min -1Speed (Pneurop)50Hz 37 m 3 h -1 / 21.8 ft 3 min -160Hz 44 m 3 h -1 / 25.9 ft 3 min -1Number of stages 2Ultimate vacuum (total pressure)Without gas ballast1 x 10 -3 mbar / 7.7 x 10 -4 TorrWith gas ballast7 x 10 -3 mbar / 5.4 x 10 -3 TorrUltimate with Fomblin®Without gas ballast1 x 10 -2 mbarInlet connectionISO40Outlet connection25 mm flange suitable for NW25Max outlet pressure0.5 bar gaugeMax inlet pressure for watervapour7 mbar / 5.3 TorrMax water vapour pumping rate-1 -10.2 kg h / 0.4 lb hWeight82 kg / 179 lbMotor protection rating IP55Motor power50Hz1.1 kW / 1.5 hp60Hz1.5 kW / 2 hpStandard oil capacitymaximum3.5 litre / 3.2 qtminimum1.32 litre / 1.6 qtPFPE oil capacitymaximum3.5 litre / 3.2 qtminimum1.32 litre / 1.6 qtRecommended oil Ultragrade 70Noise level65 dB (A)Ordering InformationProduct DescriptionE2M40 220-240 / 380-415V, 3-ph, 50HzE2M40 208-230/460V, 3-ph, 60HzE2M40 200/380V, 3-ph, 50/60HzE2M40FX 220-240/380-415V, 3-ph, 50HzE2M40FX 208-230/460V, 3-ph 60HzE2M40FX 200/380V, 3-ph, 50/60HzE2M40T4 400V, 3-ph, 50HzAccessories & SparesSpares Kit C&O E1/2M40 HC/FSpares Kit Blade E1M40Spares Kit Blade E2M40Spares Kit Major E1M40Spares Kit Major Service E2M40Order No.A36401935A36402982A36401934A36411935A36412982A36411934A36418993Order No.A34401131A34401050A36401050A34401814A364018148Page295Shop online at www.edwardsvacuum.com

E2M80 Two Stage Rotary Vacuum PumpsEdwards E2M80 series two stage oil sealed rotary vane vacuum pumps are renowned fortheir high ultimate vacuum, rapid pumping speeds, quiet operation and ability to handlewater vapour. These direct drive rotary vane pumps are inherently compact and vibrationfree, and with their finger-proof fan and coupling housings they offer excellent operatorprotection.This pump is suitable for most duties and is safe to handle non-flammable gases andvapours within the normal operating parameters of the pump.Supplied with Ultragrade 70 Oil. Fomblin® must be purchased separately for PFPEprepared pumps E2M40FX, E2M80FX, and E2M175FX.8Features & Benefits●●●●●Advanced pressurised oil circuit to give effective lubrication evenunder high gas loadsWhen the pump is switched off, the spring loaded distributorvalve provides oil and air suck-back protectionGas Ballast control to assist in handling high water vapour loadsIndustrial roller bearings on drive shaft for ultimate reliability andlong, trouble free lifeFull height oil sight glass for easy checking of oil level andconditionDimensionsApplications●●●●●Vacuum metallurgy processesThin film coating technologiesPharmaceutical freeze dryingRefrigeration and air conditioning system evacuation, drying, andbackfillingTransformer and cable drying and impregnation, insulating oiltreatment plantPerformance CurvesPage2961. Without gas ballast 2. With gas ballastShop online at www.edwardsvacuum.com

Technical DataDisplacement50Hz 80 m 3 h -1 / 47.1 ft 3 min -160Hz 96 m 3 h -1 / 56.5 ft 3 min -1Speed (Pneurop)50Hz 74 m 3 h -1 / 43.6 ft 3 min -160Hz 90 m 3 h -1 / 53 ft 3 min -1Number of stages 2Ultimate vacuum (total pressure)Without gas ballast1 x 10 -3 mbar / 7.7 x 10 -4 TorrWith gas ballast7 x 10 -3 mbar / 5.4 x 10 -3 TorrUltimate with Fomblin®Without gas ballast1 x 10 -2 mbarInlet connectionISO40Outlet connection25 mm flange suitable for NW25Max outlet pressure0.5 bar gaugeMax inlet pressure for watervapour5 mbar / 3.8 TorrMax water vapour pumping rate-1 -10.3 kg h / 0.7 lb hWeight125 kg / 275 lbMotor protection rating IP55Motor power50Hz2.2 kW / 3 hp60Hz3 kW / 4 hpStandard oil capacitymaximum6.3 litre / 6.7 qtminimum4 litre / 4.2 qtPFPE oil capacitymaximum4.01 litre / 4.2 qtminimum2.19 litre / 2.3 qtRecommended oil Ultragrade 70Noise level70 dB (A)Ordering InformationProduct DescriptionE2M80 220-240/380-415V, 3-ph, 50HzE2M80 208-230/460V, 3-ph, 60HzE2M80 200/380V, 3-ph, 50/60HzE2M80FX 220-240/380-415V, 3-ph, 50HzE2M80FX, 208-230/460V, 3-ph, 60HzE2M80FX 200/380V, 3-ph, 50/60HzE2M80T4 400V, 3-ph, 50HzAccessories & SparesSpares Kit C&O E1/2M80 HC/FSpares Kit Blade E2M80Spares Kit Blade E1M80Spares Kit Major Service E1M80Spares Kit Major Service E2M80Order No.A36501935A36502982A36501934A36511935A36512982A36511934A36518993Order No.A34501131A36501050A34501050A34501814A365018148Page297Shop online at www.edwardsvacuum.com

E2M175 Two Stage Rotary Vacuum PumpsEdwards E2M175 series two stage oil sealed rotary vane vacuum pumps are renowned fortheir high ultimate vacuum, rapid pumping speeds, quiet operation and ability to handlewater vapour. These direct drive rotary vane pumps are inherently compact and vibrationfree, and with their finger-proof fan and coupling housings they offer excellent operatorprotection.This pump is suitable for most duties and is safe to handle non-flammable gases andvapours within the normal operating parameters of the pump.Supplied with Ultragrade 70 Oil. Fomblin® must be purchased separately for PFPEprepared pumps E2M40FX, E2M80FX, and E2M175FX.8Features & Benefits●●●●●Advanced pressurised oil circuit to give effective lubrication evenunder high gas loadsWhen the pump is switched off, the spring loaded distributorvalve provides oil and air suck-back protectionGas Ballast control to assist in handling high water vapour loadsIndustrial roller bearings on drive shaft for ultimate reliability andlong, trouble free lifeFull height oil sight glass for easy checking of oil level andconditionDimensionsApplications●●●●●Vacuum metallurgy processesThin film coating technologiesPharmaceutical freeze dryingRefrigeration and air conditioning system evacuation, drying, andbackfillingTransformer and cable drying and impregnation, insulating oiltreatment plantPerformance CurvesPage2981. Without gas ballast 2. With gas ballastA Union for oil return connection from oil mist filterB Gas ballast control valveC Water connections (tapped 3/8 in BSP)D Oil drain tap (tapped ½ in BSP)E Oil filter mounting plate (allow 330mm to withdraw filter from pump)F Oil pressure take-off (tapped 1/8 in BSP)Shop online at www.edwardsvacuum.com

Technical DataDisplacement50Hz 178 m 3 h -1 / 105 ft 3 min -160Hz 214 m 3 h -1 / 126 ft 3 min -1Speed (Pneurop)50Hz 160 m 3 h -1 / 94 ft 3 min -160Hz 196 m 3 h -1 / 115 ft 3 min -1Number of stages 2Ultimate vacuum (total pressure)Without gas ballast1 x 10 -3 mbar / 7.7 x 10 -4 TorrWith gas ballast7 x 10 -3 mbar / 5.4 x 10 -3 TorrUltimate with Fomblin®Without gas ballast1 x 10 -2 mbarInlet connectionISO63 blank flange with sealOutlet connectionISO40 flange centre tappedMax outlet pressure0.5 bar gaugeMax inlet pressure for watervapor20 mbar / 15 TorrMax water vapor pumping rate 0.3 kg h -1 / 0.7 lb h -1Weight230 kg / 508 lbMotor protection rating IP55Motor power50Hz5.5 kW / 7.5 hp60Hz6.5 kW / 8.5 hpStandard oil capacitymaximum25 litre / 26 qtminimum16 litre / 17 qtPFPE oil capacitymaximum18 litre / 19 qtminimum6.5 litre / 6.9 qtRecommended oil Ultragrade 70Noise level75 dB (A)Water cooling requirement 1.3 lmin -1Ordering InformationProduct DescriptionE2M175 220-240/380-415V, 3-ph, 50HzE2M175 208-230/460V, 3-ph, 60Hz 4 poleE2M175 200/380V, 3-ph, 50/60HzE2M175FX 220-240/380-415V, 3-ph, 50HzE2M175FX 208-230/460V, 3-ph, 60HzE2M175T3 220-240/380-415V, 3-ph, 50HzAccessories & SparesSpares Kit C&O E1M175/275SSpares Kit C&O E2M175/275Service Interior Assy E1M175Service Interior Assy E2M175Spares Kit Blade E2M175Spares Kit Blade Springless E1M175Spares Kit Major E1M175SSpares Kit Major Service E2M175Order No.A36601935A36603982A36601934A36615935A36616982A36618993Order No.A34601131A36601131A34601100A36601100A36601134A34601134A34601831A366018318Page299Shop online at www.edwardsvacuum.com

E2M275 Two Stage Rotary Vacuum PumpsEdwards E2M275 series two stage oil sealed rotary vane vacuum pumps are renowned fortheir high ultimate vacuum, rapid pumping speeds, quiet operation and ability to handlewater vapour. These direct drive rotary vane pumps are inherently compact and vibrationfree, and with their finger-proof fan and coupling housings they offer excellent operatorprotection.This pump is suitable for most duties and is safe to handle non-flammable gases andvapours within the normal operating parameters of the pump.Supplied with Ultragrade 70 Oil.8Features & Benefits●●●●●Advanced pressurised oil circuit to give effective lubrication evenunder high gas loadsWhen the pump is switched off, the spring loaded distributorvalve provides oil and air suck-back protectionGas Ballast control to assist in handling high water vapour loadsIndustrial roller bearings on drive shaft for ultimate reliability andlong, trouble free lifeFull height oil sight glass for easy checking of oil level andconditionDimensionsApplications●●●●●Vacuum metallurgy processesThin film coating technologiesPharmaceutical freeze dryingRefrigeration and air conditioning system evacuation, drying, andbackfillingTransformer and cable drying and impregnation, insulating oiltreatment plantPerformance CurvesPage3001. Without gas ballast 2. With gas ballastA Union for oil return connection from oil mist filterB Gas ballast control valveC Water connections (tapped 3/8 in BSP)D Oil drain tap (tapped ½ in BSP)E Oil filter mounting plate (allow 330mm to withdraw filter from pump)F Oil pressure take-off (tapped 1/8 in BSP)Shop online at www.edwardsvacuum.com

Technical DataDisplacement50Hz 292 m 3 h -1 / 172 ft 3 min -160Hz 350 m 3 h -1 / 206 ft 3 min -1Speed (Pneurop)50Hz 255 m 3 h -1 / 150 ft 3 min -160Hz 306 m 3 h -1 / 180 ft 3 min -1Number of stages 2Ultimate vacuum (total pressure)Without gas ballast1.0 x 10 -3 mbar / 7.7 x 10 -4 TorrWith gas ballast5.0 x 10 -3 mbar / 3.8 x 10 -3 TorrInlet connectionISO63 blank flange with sealOutlet connectionISO40 flange centre tappedMax outlet pressure0.5 bar gaugeMax inlet pressure for watervapour12 mbar / 9 TorrMax water vapour pumping rate-1 -12.3 kg h / 5.1 lb hWeight253 kg / 558 lbMotor protection rating IP55Motor power50Hz7.5 kW / 10 hp60Hz8.5 kW / 11 hpStandard oil capacitymaximum28 litre / 29.5 qtminimum19 litre / 20 qtRecommended oil Ultragrade 70Noise level75 dB (A)Water cooling requirement 2 lmin -1Ordering InformationProduct DescriptionE2M275 220-240/380-415V, 3-ph, 50HzE2M275 208-230/460V, 3-ph, 60HzE2M275 200/380V, 3-ph, 50/60HzE2M275T3 400V, 3-ph, 50HzAccessories & SparesSpares Kit C&O E1M175/275SSpares Kit C&O E2M175/275Service Interior Assy E1M275Service Interior Assy E2M275Spares Kit Blade E2M275Spares Kit Blade Springless E1M275Spares Kit Major E1M275SSpares Kit Major Service E2M275Order No.A36701935A36703982A36701934A36718993Order No.A34601131A36601131A34701100A36701100A36701134A34701134A34701831A367018318Page301Shop online at www.edwardsvacuum.com

Large Pump Accessories8Page302MF Outlet Mist FiltersThe MF30, MF100 and MF300 mist filters are suitable for pumps fromE2M28 to E2M275. They are very efficient at 99.85% DOP test(pre-wetted filter; 99.5% with dry element). The oil level sight-glassprovides easy monitoring of mist filter status.The MF100AE is a version of the MF100, designed for use withcorrosive gases and vapours and for greater security whenprocessing toxic substances. It is very efficient at 99.1% DOP test(pre-wetted; 98.4% with dry element). This version is leak tested to1×10 -4 mbar l s -1 / 3.8 x 10 -3 Torr. The filter element, sight-glassesand seals are resistant to chemical attack. The MF100AE is fitted withan acrylic sight-glass (for use with fluorinated processes); a glasssight-glass is also supplied with the filter (for use with chlorinatedprocesses).A version of the EMF clean application oil return kit is available for allthe MF filters, except the MF100AE.Ordering InformationProduct DescriptionOrder No.Model MF100 mist filter (12 kg/26.5 lb) 1A46203000Model MF100AE mist filter (12 kg/26.5 lb) 1A46211000Model MF300 mist filter (28 kg/62 lb) 2A462040001 Supplied with two NW25 "C" clamps, NW25 elbow, two NW25 centring-ring and O-rings,bolts, washers, mounting brackets and studs2 Supplied with two ISO40 "C" clamps, ISO40 elbow, two 40 mm Co-Seals, bolts,washers, mounting brackets and studsAccessoriesOrder No.Clean application oil return kit (E1M40 to E2M80) A50004000Clean application oil return kit (E1M175 to E2M275) A50005000SparesOrder No.MF100A22304020MF100AEA22304052MF300A22304021Spares kitsMF100, MF100AEA46203800MF300A46204800MF100AE sight-glass kitA50080000CP Outlet CatchpotsIn some industrial applications it is desirable for pumps to be providedwith piped exhaust arrangements to carry gases and vapours to theoutside of the building.There is always a risk that some vapour carried out with the effluentgas will cool and condense as it travels up the exhaust line and theliquid produced will drain back into the pump causing seriouscontamination.For this reason, it is good practice to use a catchpot between thepump outlet and the exhaust line to prevent this from happening.These catchpots are designed for fitting directly to the pump outlet, orcan be remotely mounted if required. A "high level" sight glass isprovided to indicate the need for draining the catchpot when thenominal capacity is reached. A drain plug is also provided.Note: When an oil mist filter is used, a separate catchpot is generallyunnecessary.Ordering InformationProduct DescriptionModel CP100 outlet catchpot,6.5 litre/6.2 qt capacity (12.0 kg/26.5 lb) 1Model CP300 outlet catchpot,23.0 litre/22 qt capacity (28.0 kg/62 lb) 2External Oil Filters: EOF100A/300A(Chemical) and EOF100M/300M(Dust)These filters are operated by the internal pressurized oil system of thepump, which by-passes a proportion of the oil through the filter. Thefilters are easy to install – just connect the flexible hoses supplied tothe oil outlet and return connectors on the pump. The oil capacitiesare approximately 6 litres / 5.7 qt (EOF100) and 15 litres / 14.3 qt(EOF300).The EOF100A and EOF300A chemical filters have a renewable highcapacity,activated earth element. The filters purify the oil byremoving acidic and other aggressive contaminants. These filters areintended for use with hydrocarbon oils, and they will greatly increasethe interval between oil changes.The EOF100M and EOF300M dust filters have pleated paperelements which trap small dust particles (down to 0.5 microndiameter). Use these filters for applications which produce largequantities of abrasive dust (for example, vacuum furnaces).Ordering InformationOrder No.A46103000A461040001 Supplied with two NW25 "C" clamps, NW25 elbow, two NW25 centring-rings andO-rings, bolts, washers, mounting bracket and studs.2 Supplied with two ISO40 "C" clamps, ISO40 elbow, two 40 mm O-rings and centringrings,bolts, washers, mounting brackets and studs.Product DescriptionExternal oil filter, without connection kitEOF100AEOF100MExternal oil filter, with E1M/E2M175 and 275connection kitEOF300AEOF300MConnection kit for E1M/E2M40 and E1M/E2M80EOF100A and MEOF300A and MProduct DescriptionActivated earth elementEOF100AEOF300ADust filter elementEOF100MEOF300MOrder No.A50024000A50025000A50003000A50023000A50039000A36401020Order No.A22304043A22304033A22304044A22304042Shop online at www.edwardsvacuum.com

Vibration IsolatorsYou may need to fit vibration isolators to your pump if you mount it intoa frame or system, if the mounting points are not level or if you needto minimise the transmission of vibration and noise in yourapplication. You must fit flexible bellows or other flexible pipes to thepump inlet and outlet.Ordering InformationPumpApproximateReduction inHeight with PumpFitted (mm)OLM100 Oil Level MonitorFit the OLM100 in place of the oil sight glass on the E1M/E2M 40 and80 pumps. The OLM100 continues to allow visual inspection of the oillevel and condition, while also providing a switched output for remoteindication. Technical data: 24 V a.c. or d.c., maximum current 0.5 A,switching power 10 W (12 VA).Ordering InformationEBV Gas Ballast Control ValvesFit the EBV valve (EBV20 for RVs and E2M1.5 to E2M28, EBV300Dfor E2M40, 80, 175 and 275) to allow remote operation of the pump’sgas ballast control. For example, the EBV can be configured to switchoff the gas ballast when the pump is switched off, to provide suckbackprotection. The EBV can also be configured to prevent the 175and 275 from running backwards when the gas ballast valve is openand the pumps are stopped under vacuum.Ordering InformationTCV300 Temperature ControlValveUse the TCV300 with the E1M/E2M175 and 275 pumps. The valvefacilitates rapid pump warm-up and higher operation temperatures.This improves the pump’s vapour pumping performance. TheTCV300 also reduces the use of cooling water and reduces operationcosts.Ordering InformationWeight Setof FourOrder No.E1M40/E2M40 .5 0.6 kg/1.3 lb A24801405E1M80/E2M80 2.5 0.6 kg/1.3 lb A24801405E1M175/E2M175 3 0.9 kg/2 lb A24801406E1M275/E2M275 3.5 0.9 kg/2 lb A24801406Details of vibration isolators for use with rotary/mechanical booster pump combinations areavailable on request.Product DescriptionOLM100 oil level monitorProduct DescriptionEBV20 (0.5 kg) 220 – 240 V s.ph 50/60 HzEBV300D (1.0 kg) 220 – 240 V s.ph 50/60 HzProduct DescriptionTCV300 (1.2 kg/2.6 lb)Order No.A50433000Order No.A50006930A50017930Order No.A50001000ITF Inlet Dust FiltersThe ITF inlet dust filters prevent the entry of dust particles into thepump. The impedance of a clean filter reduces the pumping speed ofa 20 m 3 h-1 / 12 ft 3 min -1 pump by about 20% at 1 mbar / 0.75 Torr and25% at 10 mbar / 7.5 Torr.Depending on your application, you can normally clean the filterelement with a vacuum cleaner or a clean air blast, and then re-usethe element.The benefits of the ITF filters include:• Thick aluminium casting, to withstand abrasion• Tangential entry port, to promote centrifugal separation of dustparticles• Filter efficiency better than 96% (tested to BS2831, dust number 2)Ordering InformationProduct DescriptionITF100 inlet dust filter (7.0 kg/15 lb)*ITF300 inlet dust filter (8.3 kg/18 lb) †ITF800 inlet dust filter (20.2 kg/44 lb)**ITF3000 inlet dust filter ††* Supplied with bolts, washers, 40 mm O-ring and centring-ring† Supplied with 63 mm Co-Seal, bolts and washers** Supplied with 100 mm Co-Seal, bolts and washers†† Supplied with 160 mm Co-Seal, bolts and washersSparesITF100 element and gasket kitITF300 element and gasket kitITF800 element and gasket kitITF3000 element (2 required)ITM High Capacity Inlet Dust FiltersThe ITM deep, stainless steel mesh elements are ideal forapplications where fast pump-down times are required and whichproduce high levels of dust and grit (which would normally clog theITF filters very quickly). You can wet the stainless steel mesh elementwith oil to improve dust adhesion. You can wash the mesh elementsand re-use them indefinitely.The benefits of the ITM filters include:• Thick aluminium casting, to withstand abrasion• Tangential entry port, to promote centrifugal separation of dustparticles• Filter efficiency better than 90% (tested to BS2831, dust number 2)• Glass cover, to allow a visual check of the filter elementOrdering InformationProduct DescriptionITM100 high capacity dust filter (7.2 kg/16 lb)*ITM300 high capacity dust filter (8.7 kg/19 lb) †ITM800 inlet dust filter (20.2 kg/44 lb)**ITM3000 inlet dust filter ††ITM5000 inlet dust filter* Supplied with bolts, washers, 40 mm O-ring and centring-ring† Supplied with 63 mm Co-Seal, bolts and washers** Supplied with 100 mm Co-Seal, bolts and washers†† Supplied with 160 mm Co-Seal, bolts and washersSparesITM100 filter elementITM300 filter elementITM800 filter elementITM3000 filter element (2 required)Order No.A44202000A44203000A44204000A44212000Order No.A44202800A44203800A44204800A22304037Order No.A44302000A44303000A44304000A44312000A44313000Order No.A22305020A22305019A22305018A223050338Page303Shop online at www.edwardsvacuum.com

ITO Inlet CatchpotsThese catchpots minimise the entry of condensable vapours into thepump. Benefits of the catchpots include:• Capture condensable vapours• Helps prevent froth or spray from the process from carrying over tothe pump• Corrosion-resistant body• Visual indication of trapped liquid level• Hand-tightened drain plug, for easy drainageOrdering InformationProduct DescriptionOrder No.ITO100 inlet catchpot, 5.47 litres/5.2 qt capacity A44102000(6.8 kg, 15 lb)*ITO300 inlet catchpot, 7.87 litres/7.5 qt capacity A44103000(8.0 kg/18 lb) †IT0800 inlet catchpot, 9.5 litres/10 qt capacity A44104000(19.5 kg/43 lb)*** Supplied with bolts, washers, 40 mm O-ring and centring-ring† Supplied with 63 mm Co-Seal, bolts and washers** Supplied with 100 mm Co-Seal, bolts and washersITC Inlet Chemical Traps8Page304The ITC series of chemical traps provides the following benefits:• Protection against various aggressive vapours, which may attackthe pump or pump oil• Prevent high molecular weight vapours (such as might arise in aresin treatment plant), from reaching the pump. These vapourscould cause lacquering or clogging• The standard sorbent (activated charcoal), has relatively hightrapping properties (absorbs around 25% of its own weight), evenwhen large amounts of water vapour are being pumped• When filled with activated alumina on two-stage pumps,backstreaming of pump oil can be controlledOrdering InformationProduct DescriptionOrder No.ITC100 inlet chemical trap*A44402000Charcoal charge 0.75 kg/1.7 lb, weight 16.5 kg/1.7 lbITC300 inlet chemical trap †A44403000Charcoal charge 1.1 kg/2.4 lb, weight 9 kg/20 lbITC800 inlet chemical trap **A44404000Charcoal charge 3.3 kg/2.4 lb, weight 21 kg/20 lb* Supplied with bolts, washers, 40 mm O-ring and centring-ring† Supplied with 63 mm Co-Seal, bolts and washers** Supplied with 100 mm Co-Seal, bolts and washersSparesOrder No.0.5 kg/1.1 lb activated charcoal H122050013 kg/6.6 lb activated charcoal H122050020.45 kg/1 lb activated alumina H026000500.2 kg/0.5 lb activated alumina H02600056Shop online at www.edwardsvacuum.com

Ordering Information – All Territories Except North AmericaRCRotary Pump(includes pump, frame and coupling components)2 E2M40 – with ultragrade oil3 E2M40F – with PFPE oil5 E2M80 – with ultragrade oil6 E2M80F – with PFPE oil8 E2M175 – with ultragrade oil9 E2M175F – with PFPE oilB E2M275 – with ultragrade oilC E2M275F – with PFPE oilD E2M40FX – PFPE prepared no oilE E2M80FX – PFPE prepared no oilF E2M175FX – PFPE prepared no oilG E2M275FX – PFPE prepared no oilBooster Pump(includes booster and coupling components)0 No booster1 EH250 – with ultragrade oil2 EH250F – with PFPE oil3 EH500 – with ultragrade oil4 EH500F – with PFPE oil5 EH1200 – with ultragrade oil6 EH1200F – with PFPE oil7 EH2600 – with ultragrade oil8 EH2600F – with PFPE oil9 EH4200 – with ultragrade oilA EH4200F – with PFPE oilB EH250FX – PFPE prepared no oilC EH500FX – PFPE prepared no oilD EH1200FX – PFPE prepared no oilE EH2600FX – PFPE prepared no oilF EH4200FX – PFPE prepared no oilMist Filter0 No mist filter1 MF1002 MF100AE3 MF3004 MF100 with oil return5 Not available6 MF300 with oil returnTerritory0 English1 French2 German3 Italian4 Chinese5 Japanese6 Korean7 Spanish8 Dutch9 Other EUA Other EuropeanB Other AsianVibration Isolators0 No vibration isolators1 Vibration isolators – small2 Vibration isolators – largeVoltage1 380/415 V, 50 Hz2 230/460 V, 60 Hz3 380 V, 60 Hz4 200 V, 50/60 HzOil Level Monitor0 No oil level monitor1 Oil level monitor – rotary pump only2 Oil level monitor – booster pump only3 Oil level monitor – both pumpsElectric Control0 No on-line starter1 On line starter EM40/80 (both pumps)2 On line starter EM175/275 (both pumps)Oil Filtration (includes connection kit)0 No oil filtration1 EOF100A2 EOF100M3 EOF300A4 EOF300M8Page305Shop online at www.edwardsvacuum.com

Ordering Information – North AmericaDM- -DM – Simple Direct Mount, fully assembledsystem and testedG - - G – Easy Roll Around Frame, fullyassembled system and tested8Page306Rotary Pump(includes pump, frame, and coupling components)0 None1 E2M402 E2M803 E2M40 + oil level4 E2M80 + oil levelB E2M175C E2M275Booster Pump(includes booster and coupling components)0 None1 EH2502 EH5003 EH12004 EH250 + oil level5 EH500 + oil level6 EH1200 + oil level7 EH26008 EH4200Mist Filter0 None1 MF100AE (for E1/E2M40, E1/E2M80)2 MF100AE with semi-automatic oil return3 MF100AE with oil return7 MF3008 MF300 with semi-automatic oil return9 MF300 with oil returnOil (prices included with pump)Electrical Supply (no additional charge)0 None 11 208 V, 60 Hz2 230 V, 60 Hz3 460 V, 60 Hz4 575 V, 60 Hz5 220 V, 60 Hz6 380 V, 60 Hz7 415 V, 60 HzElectrical Controls – motor control module, stop/startswitches and interlocks (credit)SXFlow Control0 None-PFPE prepared only2 PFPE3 Edwards TW4 Ultragrade oilControls SuppliedNo Controls SuppliedEH250, EH500 and EH1200 CombinationsEH2600 and EH4200 Combinations0 None1 Dry Nitrogen Box Purge (OB100)2 Dry Nitrogen Gas BallastOil Filtration (includes connection kit)0 NoneShop online at www.edwardsvacuum.com

Stokes Microvac Series Oil Sealed Rotary Piston PumpsIn today’s globally competitive environment, the need formanufacturing and process equipment delivers maximumperformance and reliability is greater than ever. Whether you operateat low pressure, handle large gas loads, or simply need increasedcapacity for your existing system, Edwards can help meet yourpumping requirements.Rugged, Reliable OperationEvery design consideration, feature and detail is thoroughlyengineered to maximize uptime and extend operating life. Below arejust a few features that testify to the integrity of these ruggedmultistage vacuum pumps.• Efficient, time proven design to deliver ease of maintenance• Low 500 rpm operation for longest pump life cycle• Low ultimate blank-off – pressures down to < 10 -2 Torr• Robust cast and ductile iron construction• Hardened replaceable shaft sleeve enhances wear resistance• Efficient design provides maximum uptime with minimal movingparts, low rotational speed and large clearance• New valve design virtually eliminates valve maintenance and noise• Application specific seals maximize resistance to heat andcorrosion while providing protection from gas stream oilcontamination• Standard, totally enclosed fan-cooled motors• Space saving design – saves up to 50% of valuable floor space• Complete and self-contained – delivered and ready to install• Automatic lubrication – system provides proper flow of oil tobearings and sealing surfaces, prevents back flow into system• Controlled balancing – reduces vibration to a practical minimum• Gas ballast- standard on all models• Total capability – includes the manufacturing and servicecapabilities to keep your equipment in top operation – with a broadrange of vacuum system accessories• Oxygen service models availableSolutions to Fit Your NeedsOur total vacuum capabilities include a full line of pumping systemsfrom 150 to 7880 ft 3 min -1 capacities. Choose from Stokes microvacrotary piston pump (J series), Stokes 1700 series high capacitymechanical booster pump combinations, and MV Series Matrixselection series mechanical booster packages, or a custom designedpackage to meet all your pumping needs.J Series OverviewThe Stokes J series microvac rotary piston pump sets the standardfor performance and reliability as the industry's most efficient, spacesavingdesign. The Stokes microvac rotary piston pump has beenimproved, upgraded, and fine-tuned to deliver even betterdependability and productivity combined with minimal maintenanceand process downtime.An integral oil distribution system eliminates external piping anddelivers leak-free operation in a more stylized design for the J series.A larger oil sight glass and paddle wheel design flow indicatorprovides easier viewing of the oil system function. A stiffer motormounting platform cuts flexibility to minimise motor belt wear. Astylized oil reservoir cover and side cover O-rings improve sealing toeliminate oil leakage. An integral gas ballast valve built into the sidecover allows quick adaptation to automatic gas ballast.Most importantly, these improvements don’t increase the industryleading space saving footprint. Inlet, outlet and mounting dimensionsare exactly the same as the H series microvac rotary piston pump.Applications• Automotive• General applications• Metallurgy• Vacuum coating• Vacuum melting• Chemical processing• Heat treatment• Leak detection• PET processing• Pharmaceuticals• Transformer drying and cable fluid conditioningBy combining over a century of technical experience with a globalsales and service network, Edwards adds value to your process. Ourapplications specialists can offer advice on a single pump orcomponent through to a complete pumping system, custom tailoredto your specifications.8Page307Shop online at www.edwardsvacuum.com

Stokes Microvac Model 212JThe Stokes Microvac rotary piston pump sets the standard for performance and reliability asthe industries most efficient, space-saving design. The Stokes Microvac rotary piston pumphas been improved, upgraded, and fine-tuned to deliver even better dependability andproductivity combined with minimal maintenance and process downtime.DimensionsAn integral oil distribution system eliminates external piping and delivers leak-free operationin a stylized design. A stiffer motor mounting platform cuts flexibility to minimize motor beltwear. A stylized oil reservoir cover and side cover ‘O’ rings improve sealing to eliminate oilleakage. An integral gas ballast valve built into the side cover allows quick adaptation toautomatic gas ballast.Performance Curves81. Without gas ballast 2. With gas ballastPage308Technical DataDisplacement (swept volume)255 m 3 h -1 / 150 ft 3 min -1Pumping Speed 234 m 3 h -1 / 138 ft 3 min -1Ultimate vacuum (total pressure)without gas ballast

Stokes Microvac Model 412JThe Stokes Microvac rotary piston pump sets the standard for performance and reliability asthe industries most efficient, space-saving design. The Stokes Microvac rotary piston pumphas been improved, upgraded, and fine-tuned to deliver even better dependability andproductivity combined with minimal maintenance and process downtime.An integral oil distribution system eliminates external piping and delivers leak-free operationin a stylized design. A stiffer motor mounting platform cuts flexibility to minimize motor beltwear. A stylized oil reservoir cover and side cover ‘O’ rings improve sealing to eliminate oilleakage. An integral gas ballast valve built into the side cover allows quick adaptation toautomatic gas ballast.DimensionsPerformance Curves1. Without gas ballast 2. With gas ballast8Page309Technical DataDisplacement (sweptvolume)(AVS) 510 m 3 h -1 / 300 ft 3 min -1Pumping Speed 442 m 3 h -1 / 260 ft 3 min -1Ultimate vacuum (total pressure)without gas ballast

Stokes Microvac Model 612JThe Stokes Microvac rotary piston pump sets the standard for performance and reliability asthe industrys most efficient, space-saving design. The Stokes Microvac rotary piston pumphas been improved, upgraded, and fine-tuned to deliver even better dependability andproductivity combined with minimal maintenance and process downtime.DimensionsAn integral oil distribution system eliminates external piping and delivers leak-free operationin a stylized design. A stiffer motor mounting platform cuts flexibility to minimize motor beltwear. A stylized oil reservoir cover and side cover ‘O’ rings improve sealing to eliminate oilleakage. An integral gas ballast valve built into the side cover allows quick adaptation toautomatic gas ballast.Performance Curves8Page310Technical DataDisplacement (swept volume)1020 m 3 h -1 / 600 ft 3 min -1Pumping speed 884 m 3 h -1 / 520 ft 3 min -1Ultimate vacuum (total pressure)without gas ballast

Stokes Microvac Model 912JThe Stokes Microvac rotary piston pump sets the standard for performance and reliability asthe industrys most efficient, space-saving design. The Stokes Microvac rotary piston pumphas been improved, upgraded, and fine-tuned to deliver even better dependability andproductivity combined with minimal maintenance and process downtime.An integral oil distribution system eliminates external piping and delivers leak-free operationin a stylized design. A stiffer motor mounting platform cuts flexibility to minimize motor beltwear. A stylized oil reservoir cover and side cover ‘O’ rings improve sealing to eliminate oilleakage. An integral gas ballast valve built into the side cover allows quick adaptation toautomatic gas ballast.DimensionsPerformance Curves1. Without gas ballast 2. With gas ballast8Page311Technical DataDisplacement (sweptvolume)(AVS) 1240 m 3 h -1 / 728 ft 3 min -1Pumping speed 1132 m 3 h -1 / 670 ft 3 min -1Ultimate vacuum (total pressure)without gas ballast

Stokes Microvac Accessories8Page312Water MiserFeatures & Benefits• Saves cooling water, improves efficiency• Remote bulb temperature sensor in oil reservoir of vacuum pump• Throttles valve on cooling water to control oil temperature• Fits most water cooled vacuum pumpsOrdering InformationProduct Description For Pump Order No.Water Miser 149H-412J 900412124Gas Ballast SilencerFeatures & Benefits• Cuts noise level• Simple thread-in unit reduces noise level• Filters gas ballast intake airOrdering InformationProduct Description For Pump Order No.151 Series Gas BallastSilencer/Filter# Required1 146H, 148H, 149H/S 9001510011 212J 9001510022 or 4 412J / 612J 9001510022 912J 900151003Min-Max CoolerThe Edwards Model 170-116 mini-max compact cooler providesclosed circuit cooling specially designed for mobile pumping systems.It includes pump, radiator, fan, motor (115/60/1), on-off switch,connection kit for the microvac pumps, and has a cooling capacity of14000 BTU/hr. The mini-max cooler is ideal when cooling water is notconvenient or clean enough to ensure peak performance.Technical DataFor use with Model 149, 212 & 412 Rotary Piston PumpsMotorMotor VoltageCooling CapacityHose LengthReservoir Tank CapacityOverall DimensionsWeightOrdering Information1/4 hp (Pump and Fan)115 V, 1-ph, 60 Hz230 V, 1-ph, 60 Hz14000 BTU/hour5 feet3 gallons12 1/4" W x 23 1/4" l X 13 1/4" H50 lbsProduct DescriptionOrder No.Minimax Cooling System 900170116Includes: Pump, Radiator, Fan, Motors, On-OffSwitch, Piping, Wiring and Hoses.Oil Mist SeparatorsThe 291 series oil mist separators are high performance air/oilcoalescing separators that will virtually eliminate all liquids and solidsfrom a gas stream. These units produce exhaust liquid levels as lowas 0.05 PPMW and solids removal in excess of 99.79% efficiency forparticulate as small as 0.3 micron.Features & Benefits• Clean pump exhaust, saves oil• Two-stage design removes ail smog and traps particles as small as0.3 microns• Standard and heavy models availableHeavy Duty Oil Mist FilterHeavy-duty oil mist separators are designed to handle the mostsevere oil exhaust situations from rotary oil sealed mechanicalpumps. For true measure of efficiency, it is important to go beyond theweight to consider the actual number of particles collected. Theheavy-duty oil mist separators efficiency by weight approaches 100%and total particle collection 97.8%. Edwards guarantees to collect andremove the stated percentage of particles by size, not by weightalone. The HD mist separator will effectively prevent fume emissionsunlike existing separators that do not remove the sub micronparticles.Ordering InformationProductDescription For Pump CFMReplacementElementsOrder No.Oil Mist Separators with Fiberglass Element291-30S 146H 085021473 900291021291-50S 148H 085021474 900291022291-100S 149H 085021475 900291023291-150S 212H 085052035 900291024291-150J 212J only 085052263 900291J24291-300S 412H, 612H 085052036 900291025291-300J 412J only 085052264 900291J25291-750S 912J 085021478 900291026291-750MB 612MB 085021478 900291027Oil Mist Separator with Polypropylene Element291-30SO 146H 085039836 900291031291-50SO 148H 085039837 900291032291-100SO 149H 085039838 900291033291-150SO 212H 085039839 900291034291-300SO 412H, 612H 085039840 900291035291-750SO 912J, 612MB 085039841 900291036Heavy Duty Oil Mist Separators291-150HD 212H and 150 085038239 900291048smaller291-300HD 412H 300 085038125 900291049291-600HD 612H 600 085038226 900291050291-1000HD Combinations 1000 085044934 900291054291-1500HD Combinations 1500 085045429 900291055Shop online at www.edwardsvacuum.com

Oil Reservoir HeaterEdwards model 212 and 412 oil reservoir heaters are recommendedfor pre-heating oil in the reservoir prior to pump start up attemperatures below 55 °F. Below 1 Torr., it will help maintain the oilat a temperature high enough to prevent condensation of watervapour in the oil when running with full gas ballast. The 212 and 412oil reservoir heaters consist of an immersion heater to be inserted intothe oil reservoir and an over-temperature switch with sensing bulb tocontrol power to the heater. The heater arrangement can be factoryor field installed.Vacuum Break SolenoidFeatures & Benefits• 2-way 240 V 3/8 inch FNPT• 2-way 110 V 3/8 inch FNPTOrdering InformationProduct description For pump Order No.Vacuum Break Solenoid All 240 V 085046623All 110 V 085046998Gask-O-SealFeatures & Benefits• For tight joint seals• Combination anodised aluminium retainer with Buna-N seals• Range to 0.0001 micronsOrdering InformationProduct DescriptionOrder No.Gask-O-SealPipe Size (inch)1.5 9003180052 9003180063 9003180074 9003180086 9003180108 90031801110 90031801212 90031801314 90031801416 90031801518 90031801620 90031801724 900318018Flex HoseThe model 820 high vacuum hose from Edwards is an all-plastic hosewith aluminium flanges tough enough for easy handling streamlineuse. This rugged, reliable hose is suitable for use in a temperaturerange of -50 °F to 150 °F, tested to 10 -2 Torr absolute pressureOrdering InformationProduct Description Flange Gasket Order No.Series 820 High Vacuum HoseSize2" x 20' long 08510028 9008202203" x 20' long 023001141 9008202064" x 20' long 023001129 900820208Flex ConnectorsModel 315 flexible connectors feature rugged type 321 stainless steelbellows to sharply ease potential alignment and thermal expansionproblems, while significantly reducing vibration transmissions fromother equipment. They are designed to provide years of trouble-freeservice.Features & Benefits• Free-formed bellows minimise stress concentration• Solve alignment problems• Convoluted bellows of AISI 321 stainless steel• ASA standard carbon steel flanges• Sizes from 1.5 inch to 24 inchOrdering InformationProduct DescriptionOrder No.Type Standard: Flexible connector, vacuum service, convoluted,stainless steel bellows, carbon steel pipe flange, 150# ASA – bothends – 63 micro finish, Mass spec tested.Pipe Size (inch)1-1/2 9003150052 9003150063 9003150084 9003150096 9003150118 90031501210 90031501312 900315014Type CE: Flexible connector, vacuum service, convoluted, stainlesssteel bellows, carbon steel weld band – one end – to fit over ASApipe for lap weld, carbon steel pipe flange, 150# ASA – one end –63 micro finish, Mass spec tested.Pipe Size (inch)1-1/2 9003150993 9003151024 9003151036 900315105Type PP: Flexible connector, vacuum service, convoluted, stainlesssteel bellows, carbon steel pipe ends – both ends – for butt welding,Mass spec tested.Pipe Size (inch)1-1/2 9003150692 9003150703 9003150724 9003150736 9003150758 90031507610 90031507712 900315078Type EE: Flexible connector, vacuum service, convoluted, stainlesssteel bellows, carbon steel weld band – both ends – to fit over ASApipe for lap weld, Mass spec tested.Pipe Size (inch)2 9003150904 9003150936 9003150958 90031509610 90031509712 900315098Type CP: Flexible connector, vacuum service, convoluted, stainlesssteel bellows, carbon steel pipe end – one end – for butt welding,carbon steel pipe flange, 150# ASA – one end – 63 micro finish,Mass spec tested.Pipe Size (inch)2 9003150803 9003150824 9003150836 9003150858 90031508612 9003150888Page313Shop online at www.edwardsvacuum.com

8Page314High Volume Inlet FiltersFeatures & Benefits• Traps particulates ahead of pump• Recommended ahead of all vacuum pumps• Provide protection to pump internals• Extends the change interval up to 10 times• Variety of filter elements available• 146H pump has a 2 inch flange – 333-30A has a 1 inch flange. 333-100A (2 inch flange) can be used as an option• 1754 and 1755 have 8 inch flange. Customer must supply anadaptor to mate with 10 inch flange on filter• Polyester replacement element max temp 200 °F, Glastexreplacement element 450 °F• 1700 Series requires 2 replacement elementsOrdering InformationProductDescription For Pump CFM Order No.Intake Pipeline Filters333-30A* 146H 30 900333031333-50A 148H 50 900333032333-100A 149H 100 900333033333-165A 212J 165 900333034333-330A 412J 400 900333035333-750A 612J, 912J 850 900333036333-1125A 1721, 1722, 1738 2000 900333037333-2250A † 1739, 1733, 1754 2800 900333038SparesOrder No.Replacement Glastex Elements ‡333-30A* 085032573333-50A 085032576333-100A 085032579333-165A 085032582333-330A 085032585333-750A 085032079333-1125A 085032588**333-2250A † 085032591**Replacement Polyester Elements ‡333-30A* 085039010333-50A 085039011333-100A 085039012333-165A 085039013333-330A 085039014333-750A 085039077333-1125A 085039015**333-2250A † 085039016*** 146H Pump has a 2" Flange, Filter 333-30A has a 1" Flange. Use Filter 333-100A w/2"Flange as an Option.†1754 and 1755 have 8" Flange. Customer must supply an adapter to mate w/10" Flangeon Filter.‡Replacement Element is Polyester w/Maximum Temp of 200°F, Glastex has aMaximum Temp. of 450°F.** Two Elements Are Required.Small Volume Inlet FilterFeatures & Benefits• For small volumes and fast pump down cycles• Effective protection from harmful solid particles of 0.01 inch orlarger• Less expensive than conventional filtersOrdering InformationProductDescriptionFlangeSize For PumpReplacementElements Order No.Small Volume Inlet Filters332-3 3" 212J 085036701 900332003332-4 4" 412J 085036702 900332004332-6 6" 612J-912J 085036703 900332006332-8 8" 1721-1722 085036704 900332008Oil PurifiersOil purifiers continuously supply clean oil to the vacuum pump toassure peak uptime while prolonging the life of both the oil and thepump. Oil purifiers from Edwards are designed for use with rotary oilsealed pumps used in dirty applications or for corrosive andhazardous gases. These oil purifiers are commonly used in heatcreating, annealing, sintering, brazing, nitriding, and metal melting.The Edwards models are available to handle hydrocarbon and inertoils for rotary oil sealed pumps up to 750 ft 3 min -1 and can filter outsolids to 3 microns.Features & Benefits• Keep pump fluids cleaner• Self-contained and portable• Suitable for mechanical vacuum pumps up to 730 ft 3 min -1• Models available for hydrocarbon and inert oilsOrdering InformationProduct DescriptionForPump GPMElementsRequired Order No.Vacuum Pump OilPurifiers339-015146, 148, 1.5 1 900339015(115 V, 1-ph, 60 Hz) 149339-015 CE 146, 148, 1.2 1 900339015501(230 V, 1-ph, 50 Hz) 149339-015 CE 146, 148, 1.2 1 900339015502(200/400 V, 3-ph,50 Hz)149339-030212, 412 3 1 900339030(115 V, 1-ph, 60 Hz)339-030 CE 212, 412 2.3 1 900339030501(230 V, 1-ph, 50 Hz)339-030 CE(200/400 V, 3-ph,50 Hz)212, 412 2.3 1 900339030502339-150 All 1.5 2 900339150339-215 All 1.5 2 900339215339-070 912 7 2 900339070Special Service (allpumps)339-15 (115 V,1-ph, 60 Hz)*146, 148,1491.5 1 900339151339-152 (115 V, 146-412 1.5 2 9003391521-ph, 60 Hz) †339-251(115 V, 146-412 1.5 2 9003392511-ph, 60 Hz)*339-252 (115 V, 146-412 1.5 4 9003392521-ph, 60 Hz) †SparesOrder No.Model 339 Replacement Oil Purifier ElementsStandard 339 Filter Fullers Earth 10 microns 085033395Standard 339 Filter Pleated Paper 3 microns 085039432Standard 339 Filter Activated Alumna 085039890Special Service 339 Fullers Earth 10 microns N/A (use 3MicronsOption)Special Service 339 Pleated Paper 3 microns 085037794Special Service 339 Activated Alumna 085039956* Single element canister† Double element canisterShop online at www.edwardsvacuum.com

MB/MV Series VerticallyOriented BoosterCombinations1700 Series HighCapacity MechanicalBooster PumpCombinationsOverviewEdwards multi-stage pumping systems, backed by over a century ofin-depth applications knowledge and technical experience.These compact, efficient pumping systems feature a Stokes microvacpump and rugged, proven Stokes 6" Series boosters or the EdwardsEH series with patented hydrokinetic drive. MB series configurationsare comprised of the Stokes 412J piston pumps coupled with a model607 mechanical booster. The configuration has the ability to start atatmospheric pressure without the need for a pressure switch,packages are offered as a cost-effective alternative for low to mediumrange capacity requirement.The MV Series Mechanical Booster Pump Packages comprises ofeither the Stokes 212J or 412J rotary piston pump. Each can bedirectly coupled with a range of mechanical booster pumps. Therange includes Edwards EH series offering the patented HydrokineticDrive or the full range of Stokes 6" series. All are vertical gas floworientation for a compact space saving design. The MV Series offersa broad selection of configurations which enables the flexibility to mixand match the complete range of Stokes Microvac accessories alongwith various electrical control options. This enables the user tocustomize the pumping package to meet their applicationrequirements.OverviewWhether you need to increase the capacity of your existing system orachieve peak performance for a new installation; Edwards makestaking advantage of the latest technology easy. These field-provenpumping systems are the workhorse of countless industrial and largechamber applications. Each Stokes 1700 series mechanical boostercombinations includes a Stokes microvac backing pump and a beltdriven, Stoke 6" series mechanical booster pump horizontal flow. Inharsh applications where chemical or particulate contamination ispresent, process isolation boosters are available as an option.Controls for Stokes 1700 series mechanical booster combinationsinclude a pressure switch, motor starters, fuses and overload.The Stokes 1700 series combinations deliver the high capacityneeded to achieve faster pump-downs. Most importantly, thesesystems achieve the task more cost effectively than larger singlestage pumps. Depending on the specific application, they canimprove blank-off by a factor of ten over large, single stage pumps.Pumping capacities range from 1300 to 7880 ft 3 min -1 .8Page315Shop online at www.edwardsvacuum.com

Stokes 412MBX Multi-Stage Pumping SystemStokes MB Multi-stage pumping systems are available in two options, consisting of aMicrovac piston pump and a Stokes 607 mechanical booster pump. The compact directmounted packages provide high performance pumping from atmosphere. The MB systemsare ideal for high cycling arduous applications.DimensionsPerformance Curves8Page316Technical DataBlower displacement (sweptvolume) (AVS) 1040 m 3 h -1 / 612 ft 3 min -1Pump displacement (sweptvolume) (AVS) 510 m 3 h -1 / 300 ft 3 min -1Blower motor size15 kW / 20 hpMicrovac motor size7.5 kW / 10 hpBlower motor1800 rpmMicrovac motor1800 rpmInlet connection6 inch ASA/ANSI flangeExhaust connection3 inch ASA/ANSI flange or 3inch NPTMicrovac water inlet/outletconnection½ inch NPTRecommended cooling flow @30 ºC/85 ºF 7.6 lmin -1 / 1 US galmin -1Booster oil capacity4.2 litre / 22 US galMicrovac oil capacity46 litre / 12 US galBooster recommended oil V lube HMicrovac recommended oil V lube FDimensions (L x W x H) 973 x 1022 x 1365 mm47 x 55.69 x 51.75 inchHeight to inlet868 mm / 34.19 inchWeight1202 kg / 2650 lbsOrdering InformationProduct DescriptionOrder No.412MBX Multi-stage Pumping System 230/460V, 3Ø, 60 Hzwith 230/460V Coil900412072Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Replacement parts kit for 412H pump 429638012Shop online at www.edwardsvacuum.com

Stokes 612MB Multi-Stage Pumping SystemStokes MB Multi-stage pumping systems are available in two options, consisting of aMicrovac piston pump and a Stokes 607 mechanical booster pump. The compact directmounted packages provide high performance pumping from atmosphere. The MB systemsare ideal for high cycling arduous applications. The 612MB Multi-stage pumping systemsincorporate an integral bypass valve which offers increased speed at atmospheric pressure.DimensionsPerformance Curves8Page317Technical DataBlower displacement (sweptvolume) (AVS) 1040 m 3 h -1 / 612 ft 3 min -1Pump displacement (sweptvolume) (AVS) 510 m 3 h -1 / 300 ft 3 min -1Pressure switch required NoBlower motor size ***15 kW / 20 hpMotor1800 rpmInlet connection6 inch ASA/ANSI flangeExhaust connection4 inch NPTMicrovac water inlet/outletconnection½ inch NPTRecommended cooling flow @30 ºC/85 ºF 7.6 lmin -1 / 2 US galmin -1Booster oil capacity4.7 litre / 7 US galMicrovac oil capacity46 litre / 12 US galBooster recommended oil V lube HMicrovac recommended oil V lube FDimensions (L x W x H) 1181 x 1022 x 1434 mm47 x 55.69 x 51.75 inchHeight to inlet1434 mm / 56.44 inchWeight1452 kg / 3200 lbsOrdering InformationProduct DescriptionOrder No.612MBX Multi-stage Pumping System 230/460V, 3Ø, 60 Hzwith 230/460V Coil900612J30Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002*** 612 MB incorporates double shafted single motorShop online at www.edwardsvacuum.com

MV Series Oil Sealed Piston Pumps and MechanicalBooster CombinationsOrdering Information8Page318CE Marking0 No CE mark required1 CE marked systemMicrovac Pump1 212J2 412J3 212J with base4 412J with baseBooster0 No booster1 EH2502 EH5003 EH12004 EH26005 EH42006 EH250 with 3 inch ASA inlet7 EH500 with 4 inch ASA inlet8 EH1200 with 6 inch ASA inlet9 EH2600 with 8 inch ASA inletA 607MV05B 607MV20C 615MV10D 615MV15E 61BMV10F 61BMV25M 622MV25Oil Mist Filter0 No mist filter1 MF 291-150J2 MF 291-300JCooling OptionsMVManual Selection0 English1 French2 German3 Italian4 Chinese5 Japanese6 Korean7 Spanish8 Dutch9 Other EUA Other EuropeanB Other AsianMotor Control Module0 No motor control/pressure switch1 Motor starter control box pedestal mount withoutpressure switch****2 Motor starter control box wall mount withoutpressure switch****3 Motor starter control box pedestal mount withpressure switch****4 Pressure switch only5 Motor starter control box wall mount with pressureswitch****Coil Voltage1 24 V a.c. 50 Hz2 24 V a.c. 60 Hz3 120 V 60 Hz/110 V 50 Hz4 240 V 60 Hz/220 V 50 Hz5 380 V 50 Hz6 415 V 50 Hz7 480 V 60 Hz/440 V 50 Hz8 380 V 60 Hz0 No cooling options1 Water miser2 Min max cooler 115 V 1-ph 60 Hz3 Min max cooler 230 V 1-ph 60 HzOil Purification and Connection Kit0 No oil purifier1 OP 339-030 115 V 1-ph 60 Hz2 OP 339-030CE 230 V 1-ph 50 Hz3 OP 339-030CE 230/400 V 1-ph 50 Hz4 OP 339-215 115 V 1-ph 60 HzMotor Voltage (All TEFC Motors)1 230 V 3-ph 60 Hz2 460 V 3-ph 60 Hz3 400 V 3-ph 50 Hz CE4 220 V 3-ph 50 Hz5 380 V 3-ph 50 Hz6 440 V 3-ph 50 Hz7 380 V 3-ph 60 HzGas Ballast Silencer and Vacuum Break0 No gas ballast, no silencer, no vacuum break1 Gas ballast silencer2 Auto gas ballast 24 V a.c. 60 Hz3 Auto gas ballast 24 V d.c. din4 Auto gas ballast 120 V 60 Hz/110 V 50 HzNote* Above booster combinations are direct mount vertical flow.Note** Oil mist filters and min max coolers will ship separately unless ordered with base frame.Note*** Oxygen service pumps are available, please contact your local Edwards representative to discuss your requirements.Note**** Not applicable in CE versions.For other possible combinations, please contact your local Edwards representative to discuss your requirements.Shop online at www.edwardsvacuum.com

Stokes 1721 Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page319Technical DataBooster displacementBooster speedBooster orientation2210 m 3 h -1 / 1300 ft 3 min -11800 rpmHorizontalPump displacement 255 m 3 h -1 / 150 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionYes20 mbar / 10 Torr4 mbar / 3 Torr5.6 kW / 7.5 hp5.6 kW / 7.5 hp8 inch ASA/ANSI flange2 inch ASA/ANSI flange, 2 inchNPT½ inch NPTRecommended cooling flow @30ºC/85 ºF 5.7 lmin -1 / 1.5 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 15 litre / 4 US galInlet height1035 mm / 40.75 inchFootprint (L x W x H)1419 x 919 x 1260 mm55.87 x 36.18 x 49.61 inchWeight1225 kg / 2700 lbsOrdering InformationProduct DescriptionOrder No.1721 230/460V, 3-ph, 60Hz (230/460V Coil) 900170061Accessories & SparesOrder No.Replacement parts kit 429638016Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1721S Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page320Technical DataBooster displacementBooster speedBooster orientation2720 m 3 h -1 / 1600 ft 3 min -12200 rpmHorizontalPump displacement 255 m 3 h -1 / 150 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionYes13 mbar / 10 Torr2.6 mbar / 2 Torr7.5 kW / 10 hp6.5 kW / 7.5 hp8 inch ASA/ANSI flange2 inch ASA/ANSI flange, 2 inchNPT½ inch NPTRecommended cooling flow @30ºC/85 ºF 5.7 lmin -1 / 1.5 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 15 litre / 4 US galInlet height1035 mm / 40.75 inchFootprint (L x W x H)1419 x 919 x 1260 mm55.87 x 36.18 x 49.61 inchWeight1270 kg / 2800 lbsOrdering InformationProduct DescriptionOrder No.1721S 230/460V, 3-ph, 60Hz (230/460V Coil) 900170074Accessories & SparesOrder No.Replacement parts kit 429638016Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1722 Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance CurvesTechnical DataBooster displacementBooster speedBooster orientation2210 m 3 h -1 / 1300 ft 3 min -11800 rpmHorizontalPump displacement 510 m 3 h -1 / 300 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionYes33 mbar / 25 Torr20 mbar / 15 Torr5.6 kW / 7.5 hp7.5 kW / 10 hp8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT½ inch NPTRecommended cooling flow @30ºC/85 ºF 7.6 lmin -1 / 2 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 46 litre / 12 US galInlet height1035 mm / 40.75 inchFootprint (L x W x H)1407 x 1048 x 1438 mm55.40 x 41.26 x 56.61 inchWeight1588 kg / 3500 lbsOrdering InformationProduct DescriptionOrder No.1722 230/460V, 3-ph, 60Hz (230/460V Coil) 900170062Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 6075520028Page321Shop online at www.edwardsvacuum.com

Stokes 1722S Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page322Technical DataBooster displacementBooster speedBooster orientation2720m 3 h -1 / 1600 ft 3 min -12200 rpmHorizontalPump displacement 510 m 3 h -1 / 300 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionYes20 mbar / 15 Torr10.7 mbar / 8 Torr7.5 kW / 10 hp7.5 kW / 10 hp8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT½ inch NPTRecommended cooling flow @30ºC/85ºF 7.6 lmin -1 / 2 galmin -1Booster oil capacity (V lube H) 1.9 liter / 0.51 US galMicrovac oil capacity (V lube F) 46 liter / 12 US galInlet height1035 mm / 40.75 inchFootprint (L x W x H)1407 x 1048 x 1438 mm55.40 x 41.26 x 56.61 inchWeight1633 kg / 3600 lbsOrdering InformationProduct DescriptionOrder No.1722S 230/460V, 3-ph, 60Hz (230/460V Coil) 900170075Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1733 Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page323Technical DataBooster displacement6538 m 3 h -1 / 3840 ft 3 min -1Booster speed3600 rpmBooster orientationHorizontalPump displacement 510 m 3 h -1 / 300 ft 3 min -1Pressure switch required YesNormal cut-in pressure 6.7 mbar / 5 TorrContinuous operation pressurelimit0.8 mbar / 0.6 TorrBooster drive18.5 kW / 25 hpPump drive7.5 kW / 10 hpInlet connections8 inch ASA/ANSI flangeDischarge connections3 inch ASA/ANSI flange, 3 inchNPTWater inlet connection ½ inch NPT (2)Water outlet connection ½ inch NPTRecommended cooling flow @30ºC/85 ºF 7.61 lmin -1 / 2 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 46 litre / 12 US galWeight1710 kg / 3770 lbsOrdering InformationProduct DescriptionOrder No.1733 230/460V, 3-ph, 60Hz (230/460V Coil) 900170S33Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1733HC Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page324Technical DataBooster displacementBooster speedBooster orientation6538 m 3 h -1 / 3840 ft 3 min -13600 rpmHorizontalPump displacement 1020 m 3 h -1 / 600 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump driveInlet connectionsDischarge connectionsWater inlet/outlet connectionRecommended cooling flow @30ºC/85ºFBooster oil capacity (V lube H)Microvac oil capacity (V lube F)WeightYes13.3 mbar / 10 Torr1.3 mbar / 1 Torr22.5 kW / 30 hp7.5 kW (x2) / 10 hp (x2)8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT (x2)½ inch NPT (x2)7.61 lmin -1 (x2) / 2 galmin -1 (x2)1.9 litre / 0.51 US gal92 litre / 24 US gal2767 kg / 6100 lbsOrdering InformationProduct DescriptionOrder No.1733HC 230/460V, 3-ph, 60Hz (230/460V Coil)900170S34Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1733HD Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page325Technical DataBooster displacementBooster speedBooster orientation6538 m 3 h -1 / 3840 ft 3 min -13600 rpmHorizontalPump displacement 1240 m 3 h -1 / 730 ft 3 min -1Pressure switch required YesNormal cut-in pressure 20 mbar / 15 TorrContinuous operation pressurelimit2 mbar / 1.5 TorrBooster drive22.5 kW / 30 hpPump drive22.5 kW / 30 hpInlet connections8 inch ASA/ANSI flangeDischarge connections 3 inch NPTWater inlet/outlet connection 1 inch NPTRecommended cooling flow @30ºC/85 ºF 18.9 lmin -1 / 5 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 76 litre / 20 US galWeight3538 kg / 7800 lbsOrdering InformationProduct DescriptionOrder No.1733HD 230/460V, 3-ph, 60Hz (230/460V Coil)900170S35Accessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Replacement oil seal 085018191Replacement roller bearing 085033795Roller bearing with adaptive sleeve 085033794Valve deck stainless steel clappers 272963002Valve deck springs 274172001Shop online at www.edwardsvacuum.com

Stokes 1738 Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page326Technical DataBooster displacementBooster speedBooster orientation3398 m 3 h -1 / 2000 ft 3 min -12750 rpmHorizontalPump displacement 510 m 3 h -1 / 300 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionYes13 mbar / 10 Torr4 mbar / 3 Torr7.5 kW / 10 hp7.5 kW / 10 hp8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT½ inch NPTRecommended cooling flow @30ºC/85 ºF 7.6 lmin -1 / 2 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 46 litre / 12 US galInlet height1035 mm / 40.75 inchFootprint (L x W x H)1407 x 1048 x 1438 mm55.40 x 41.26 x 56.61 inchWeight1633 kg / 3600 lbsOrdering InformationProduct DescriptionOrder No.1738 230/460V, 3-ph, 60Hz (230/460V Coil) 900170038Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1738BP Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page327Technical DataBooster displacementBooster speedBooster orientation3398 m 3 h -1 / 2000 ft 3 min -12750 rpmHorizontalPump displacement 510 m 3 h -1 / 300 ft 3 min -1Pressure switch requiredContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionNo4 mbar / 3 Torr11 kW / 15 hp7.5 kW / 10 hp8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT½ inch NPTRecommended cooling flow @30ºC/85 ºF 7.6 lmin -1 / 2 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 46 litre / 12 US galWeight1690 kg / 3725 lbsOrdering InformationProduct DescriptionOrder No.1738BP 230/460V, 3-ph, 60Hz (230/460V Coil)90017038BAccessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1738HC Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page328Technical DataBooster displacementBooster speedBooster orientation3398 m 3 h -1 / 2000 ft 3 min -12750 rpmHorizontalPump displacement 1020 m 3 h -1 / 600 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outelt connectionRecommended cooling flow @30ºC/85ºFBooster oil capacity (V lube H)Microvac oil capacity (V lube F)WeightYes33 mbar / 25 Torr6.7 mbar / 5 Torr7.5 kW / 10 hp7.5 kW (x2) / 10 hp (x2)8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT (x2)½ inch NPT (x2)7.6 lmin -1 (x2) / 2 galmin -1 (x2)1.9 litre / 0.51 US gal92 litre / 24 US gal2404 kg / 5300 lbsOrdering InformationProduct DescriptionOrder No.1738HC 230/460V, 3-ph, 60Hz (230/460V Coil)90017C038Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1738 HCBP Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page329Technical DataBooster displacementBooster speedBooster orientation3398 m 3 h -1 / 2000 ft 3 min -12750 rpmHorizontalPump displacement 1020 m 3 h -1 / 600 ft 3 min -1Pressure switch requiredContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionRecommended cooling flow @30ºC/85ºFBooster oil capacity (V lube H)Microvac oil capacity (V lube F)WeightNo6.7 mbar / 5 Torr11.2 kW / 15 hp7.5 kW (x2) / 10 hp (x2)8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT (x2)½ inch NPT (x2)7.6 lmin -1 (x2) / 2 galmin -1 (x2)1.9 litre / 0.51 US gal92 litre / 24 US gal2449 kg / 5400 lbsOrdering InformationProduct DescriptionOrder No.1738HCBP 230/460V, 3-ph, 60Hz (230/460V Coil)90017C38BAccessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1738HD Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page330Technical DataBooster displacementBooster speedBooster orientation3398 m 3 h -1 / 2000 ft 3 min -12750 rpmHorizontalPump displacement 1240 m 3 h -1 / 730 ft 3 min -1Pressure switch required YesNormal cut-in pressure 53 mbar / 40 TorrContinuous operation pressurelimit16 mbar / 12 TorrBooster drive11 kW / 15 hpPump drive (TEFC)22.5 kW / 30 hpInlet connections8 inch ASA/ANSI flangeDischarge connections 5 inch NPTWater inlet/outlet connection 1 inch NPTRecommended cooling flow @30ºC/85ºF 18.9 lmin -1 / 5 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 76 litre / 20 US galWeight3187 kg / 7025 lbsOrdering InformationProduct DescriptionOrder No.1738HD 230/460V, 3-ph, 60Hz (230/460V Coil)90017D038Accessories & SparesOrder No.Replacement roller bearing 085033795Replacement oil seal 085018191Roller bearing with adaptive sleeve 085033794Valve deck stainless steel clappers 272963002Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Valve deck springs 274172001Shop online at www.edwardsvacuum.com

Stokes 1738HDBP Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page331Technical DataBooster displacementBooster speedBooster orientation3398 m 3 h -1 / 2000 ft 3 min -12750 rpmHorizontalPump displacement 1240 m 3 h -1 / 730 ft 3 min -1Pressure switch required NoContinuous operation pressurelimit16 mbar / 12 TorrBooster drive11 kW / 15 hpPump drive (TEFC)22 kW / 30 hpInlet connections8 inch ASA/ANSI flangeDischarge connections 5 inch NPTWater inlet/outlet connection 1 inch NPTRecommended cooling flow @30ºC/85 ºF 18.9 lmin -1 / 5 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 76 litre / 20 US galWeight3221 kg / 7100 lbsOrdering InformationProduct DescriptionOrder No.1738HDBP 230/460V, 3-ph, 60Hz (230/460V Coil)90017D38BAccessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Replacement oil seal 085018191Replacement roller bearing 085033795Roller bearing with adaptive sleeve 085033794Valve deck stainless steel clappers 272963002Valve deck springs 274172001Shop online at www.edwardsvacuum.com

Stokes 1739 Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page332Technical DataBooster displacementBoosterBooster orientation4420 m 3 h -1 / 2600 ft 3 min -13600 rpmHorizontalPump displacement 510 m 3 h -1 / 300 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionYes13 mbar / 15 Torr2.7 mbar / 2 Torr22.4 kW / 30 hp7.5 kW / 10 hp8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT½ inch NPTRecommended cooling flow @30ºC/85 ºF 7.6 lmin -1 / 2 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 46 litre / 12 US galInlet height1067 mm / 42 inchFootprint (L x W x H)1905 x 1270 x 1318 mm75 x 50 x 51.89 inchWeight1803 kg / 3975 lbsOrdering InformationProduct DescriptionOrder No.1739 230/460V, 3-ph, 60Hz (230/460V Coil) 900170039Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1739BP Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page333Technical DataBooster displacement4420 m 3 h -1 / 2600 ft 3 min -1Booster speed3600 rpmBooster orientationHorizontalPump displacement 510 m 3 h -1 / 300 ft 3 min -1Pressure switch required NoContinuous operation pressurelimit2.7 mbar / 2 TorrBooster drive22 kW / 30 hpPump drive (TEFC)7.5 kW / 10 hpInlet connections8 inch ASA/ANSI flangeDischarge connections3 inch ASA/ANSI flange, 3 inchNPTWater inlet/outlet connection ½ inch NPTRecommended cooling flow @30ºC/85 ºF 7.6 lmin -1 / 2 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 46 litre / 12 US galWeight1837 kg / 4050 lbsOrdering InformationProduct DescriptionOrder No.1739BP High Capacity Mechanical Booster Pump Combination230/460V, 3Ø, 60 Hz with 230/460V Coil90017039BAccessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1739HC Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page334Technical DataBooster displacementBooster speedBooster orientation4420 m 3 h -1 / 2600 ft 3 min -13600 rpmHorizontalPump displacement 1020 m 3 h -1 / 600 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionRecommended cooling flow @30ºC/85ºFBooster oil capacity (V lube H)Microvac oil capacity (V lube F)WeightYes33 mbar / 20 Torr3.4 mbar / 2.5 Torr18.6 kW / 25 hp7.5 kW (x2) / 10 hp (x2)8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT (x2)½ inch NPT (x2)7.6 lmin -1 (x2) / 2 galmin -1 (x2)1.9 litre / 0.51 US gal92 litre / 24 US gal2733 kg / 6025 lbsOrdering InformationProduct DescriptionOrder No.1739HC 230/460V, 3-ph, 60Hz (230/460V Coil)90017C039Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1739HCBP Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page335Technical DataBooster displacementBooster speedBooster orientation4420 m 3 h -1 / 2600 ft 3 min -13600 rpmHorizontalPump displacement 1020 m 3 h -1 / 600 ft 3 min -1Pressure switch requiredContinuous operation pressurelimitBooster drivePump drive (TEFC)Inlet connectionsDischarge connectionsWater inlet/outlet connectionRecommended cooling flow @30ºC/85ºFBooster oil capacity (V lube H)Microvac oil capacity (V lube F)WeightNo4 mbar / 3 Torr18.6 kW / 25 hp7.5 kW (x2) / 10 hp (x2)8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT (x2)½ inch NPT (x2)7.6 lmin -1 (x2) / 2 galmin -1 (x2)1.9 litre / 0.51 US gal92 litre / 24 US gal2767 kg / 6100 lbsOrdering InformationProduct DescriptionOrder No.1739HCBP 230/460V, 3-ph, 60Hz (230/460V Coil)90017C39BAccessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1739HD Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page336Technical DataBooster displacementBooster speedBooster orientation4420 m 3 h -1 / 2600 ft 3 min -13600 rpmHorizontalPump displacement 1240 m 3 h -1 / 730 ft 3 min -1Pressure switch required YesNormal cut-in pressure 47 mbar / 25 TorrContinuous operation pressurelimit4 mbar / 3 TorrBooster drive18.5 kW / 25 hpPump drive (TEFC)22.5 kW / 30 hpInlet connections8 inch ASA/ANSI flangeDischarge connections 5 inch NPTWater inlet/outlet connection 1 inch NPTRecommended cooling flow @30ºC/85 ºF 18.9 lmin -1 / 5 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 76 litre / 20 US galWeight3504 kg / 7725 lbsOrdering InformationProduct DescriptionOrder No.1739HD 230/460V, 3-ph, 60Hz (230/460V Coil)90017D039Accessories & SparesOrder No.Replacement roller bearing 085033795Replacement oil seal 085018191Roller bearing with adaptive sleeve 085033794Valve deck stainless steel clappers 272963002Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Valve deck springs 274172001Shop online at www.edwardsvacuum.com

Stokes 1739HDBP Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page337Technical DataBooster displacementBooster speedBooster orientation4420 m 3 h -1 / 2600 ft 3 min -13600 rpmHorizontalPump displacement 1240 m 3 h -1 / 730 ft 3 min -1Pressure switch required NoContinuous operation pressurelimit4 mbar / 3 TorrBooster drive18.5 kW / 25 hpPump drive22.5 kW / 30 hpInlet connections8 inch ASA/ANSI flangeDischarge connections 5 inch NPTWater inlet/outlet connection 1 inch NPTRecommended cooling flow @30ºC/85ºF 18.9 lmin -1 / 5 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 76 litre / 20 US galWeight3538 kg / 7800 lbsOrdering InformationProduct DescriptionOrder No.1739HDBP 230/460V, 3-ph, 60Hz (230/460V Coil)90017D39BAccessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Replacement oil seal 085018191Replacement roller bearing 085033795Roller bearing with adaptive sleeve 085033794Valve deck stainless steel clappers 272963002Valve deck springs 274172001Shop online at www.edwardsvacuum.com

Stokes 1754 Mechanical Booster Pump CombinationDimensionsWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.Performance Curves8Page338Technical DataBooster displacement5100 m 3 h -1 / 3000 ft 3 min -1Booster speed2750 rpmBooster orientationHorizontalPump displacement 510 m 3 h -1 / 300 ft 3 min -1Pressure switch required YesNormal cut-in pressure 20 mbar / 15 TorrContinuous operation pressurelimit1.3 mbar / 1 TorrBooster drive15 kW / 20 hpPump drive7.5 kW / 10 hpInlet connections8 inch ASA/ANSI flangeDischarge connections3 inch ASA/ANSI flange, 3 inchNPTWater inlet connection ½ inch NPT (2)Water outlet connection ½ inch NPTRecommended cooling flow @30ºC/85ºF 7.61 lmin -1 / 2 galmin -1Booster oil capacity (V lube H) 1.9 litre / 0.51 US galMicrovac oil capacity (V lube F) 46 litre / 12 US galWeight1678 kg / 3700 lbsOrdering InformationProduct DescriptionOrder No.1754 230/460V, 3-ph, 60Hz (230/460V Coil) 900170054Accessories & SparesOrder No.Replacement parts kit 429638015Replacement 6" booster Mseal - seal kit 607552001Bearings 085019757Valve deck assembly 607417001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

Stokes 1754HC Mechanical Booster Pump CombinationWhether you need to increase the capacity of your existing system or achieve peakperformance for a new installation; Edwards makes taking advantage of the latesttechnology easy. These field-proven pumping systems are the workhorse of countlessindustrial and large chamber applications. Each Stokes1700 series mechanical boosterpump combination includes a Stokes Microvac backing pump and a belt driven, horizontalflow, high vacuum Stokes 6” series mechanical booster pump. In harsh applications wherechemical or particulate contamination is present, process isolation boosters are available asan option. Controls for Stokes 1700 series mechanical booster pump combination include apressure switch, motor starters, overloads, remote booster selection switch and lights forpump running and fault indication.DimensionsPerformance Curves8Page339Technical DataBooster displacementBooster speedBooster orientation5100 m 3 h -1 / 3000 ft 3 min -12750 rpmHorizontalPump displacement 1020 m 3 h -1 / 600 ft 3 min -1Pressure switch requiredNormal cut-in pressureContinuous operation pressurelimitBooster drivePump driveInlet connectionsDischarge connectionsWater inlet/outlet connectionRecommended cooling flow @30ºC/85ºFBooster oil capacity (V lube H)Microvac oil capacity (V lube F)WeightYes40 mbar / 30 Torr4 mbar / 3 Torr18.5 kW / 25 hp7.5 kW (x2) / 10 hp (x2)8 inch ASA/ANSI flange3 inch ASA/ANSI flange, 3 inchNPT (x2)½ inch NPT (x2)7.61 lmin -1 (x2) / 2 galmin -1 (x2)1.9 litre / 0.51 US gal92 litre / 24 US gal2722 kg / 6000 lbsOrdering InformationProduct DescriptionOrder No.1754HC 230/460V, 3-ph, 60Hz (230/460V Coil) 900170055Accessories & SparesOrder No.Replacement parts kit 429638015Bearings 085019757Valve deck assembly 607417001Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Shop online at www.edwardsvacuum.com

EV20 Oil Sealed PumpFeatures & BenefitsThe EV rotary vane pumps are designed to be used in a wide range of industrial andscientific applications. They can be used individually or with mechanical booster pumps toincrease both performance and ultimate vacuum. They can operate continuously fromatmosphere to ultimate.With reliability and ease of service in mind, the EV range of pumps are designed for theindustrial and scientific markets. Edwards Applications Specialists have unrivalledknowledge and can advise on pump selection, configuration and operation to suit anycustomers’ requirements. The EV range can be supplied individually or as part of preengineeredcombinations using Edwards EH mechanical boosters.Applications●●●●●Continuous operation from atmosphere to ultimate vacuumHigh pumping speed at low pressureGas ballast valve fitted as standardLow noise and vibrationAir cooledDimensions●●●●●Furnaces and metallurgy industriesFood processing and packagingLiftingVacuum coatingVacuum transportingPerformance Curves8Page3401. 50Hz 2. 60HzTechnical DataPumping speed 50 Hz18 m 3 h -1 / 11 ft 3 min -1Pumping speed 60 Hz 21 m 3 h -1 / 13 ft 3 min -1Ultimate pressure without GasBallast0.5 mbarWater vapour capacity 0.4 kg h -1 @ 10 mbar /Ordering InformationProduct DescriptionEV20 175-260/300-450V, 50Hz, 190-290/330-500V, 60HzOrder No.A35010940Electricity supply 50 HzElectricity supply 60 HzMotor Power 50 HzMotor Power 60 HzNoise 50 HzNoise 60 HzWeightOil capacityOil Type0.9 lb h -1 @ 10 mbar175-260 / 300-450 V190-290 / 330-500 V0.55 kW / 0.75hp0.66 kW / 1.0 hp63 dB(A)67 dB(A)20 kg / 44 lbs0.5 litre / 0.13 US galUG20Shop online at www.edwardsvacuum.com

EV40 Oil Sealed PumpThe EV rotary vane pumps are designed to be used in a wide range of industrial andscientific applications. They can be used individually or with mechanical booster pumps toincrease both performance and ultimate vacuum. They can operate continuously fromatmosphere to ultimate.With reliability and ease of service in mind, the EV range of pumps are designed for theindustrial and scientific markets. Edwards Applications Specialists have unrivalledknowledge and can advise on pump selection, configuration and operation to suit anycustomers’ requirements. The EV range can be supplied individually or as part of preengineeredcombinations using Edwards EH mechanical boosters.Features & BenefitsApplications●●●●●Continuous operation from atmosphere to ultimate vacuumHigh pumping speed at low pressureGas ballast valve fitted as standardLow noise and vibrationAir cooledDimensions●●●●●Furnaces and metallurgy industriesFood processing and packagingLiftingVacuum coatingVacuum transportingPerformance Curves8Page3411. 50Hz 2. 60HzTechnical DataPumping speed 50 Hz41 m 3 h -1 / 25 ft 3 min -1Pumping speed 60 Hz 48 m 3 h -1 / 29 ft 3 min -1Ultimate pressure without GasBallast0.5 mbarWater vapour capacity 0.3 kg h -1 @ 10 mbar /Ordering InformationProduct DescriptionEV40 190-255/330-440V, 50Hz, 190-290/330-500V, 60HzOrder No.A35015940Electricity supply 50 HzElectricity supply 60 HzMotor Power 50 HzMotor Power 60 HzNoise 50 HzNoise 60 HzWeightOil capacityOil Type0.7 lb h -1 @ 10 mbar190-255 / 330-440 V190-290 / 330-500 V1.5 kW / 2.0 hp1.8 kW / 2.5 hp69 dB(A)71 dB(A)38 kg / 84 lbs1 litre / 0.26 US galUG20Shop online at www.edwardsvacuum.com

EV70 Oil Sealed PumpFeatures & BenefitsThe EV rotary vane pumps are designed to be used in a wide range of industrial andscientific applications. They can be used individually or with mechanical booster pumps toincrease both performance and ultimate vacuum. They can operate continuously fromatmosphere to ultimate.With reliability and ease of service in mind, the EV range of pumps are designed for theindustrial and scientific markets. Edwards Applications Specialists have unrivalledknowledge and can advise on pump selection, configuration and operation to suit anycustomers’ requirements. The EV range can be supplied individually or as part of preengineeredcombinations using Edwards EH mechanical boosters.Applications●●●●●Continuous operation from atmosphere to ultimate vacuumHigh pumping speed at low pressureGas ballast valve fitted as standardLow noise and vibrationAir cooledDimensions●●●●●Furnaces and metallurgy industriesFood processing and packagingLiftingVacuum coatingVacuum transportingPerformance Curves8Page3421. 50Hz 2. 60HzTechnical DataPumping speed 50 Hz58 m 3 h -1 / 35 ft 3 min -1Pumping speed 60 Hz 73 m 3 h -1 / 44 ft 3 min -1Ultimate pressure without gasballast0.5 mbarWater vapour capacity 0.57 kg h -1 @ 10 mbar /Ordering InformationProduct DescriptionEV70 190-255/330-440V, 50Hz, 190-290/330-500V, 60HzOrder No.A35020940Electricity supply 50 HzElectricity supply 60 HzMotor Power 50 HzMotor Power 60 HzNoise 50 HzNoise 60 HzWeightOil capacityOil Type1.3 lb h -1 @ 10 mbar190-255 / 330-440 V190-290 / 330-500 V2.4 kW / 3.25hp3 kW / 4.0hp67 dB(A)68.5 dB(A)62 kg / 136 lbs2 litre / 0.53 US galUG20Shop online at www.edwardsvacuum.com

EV100 Oil Sealed PumpThe EV rotary vane pumps are designed to be used in a wide range of industrial andscientific applications. They can be used individually or with mechanical booster pumps toincrease both performance and ultimate vacuum. They can operate continuously fromatmosphere to ultimate.With reliability and ease of service in mind, the EV range of pumps are designed for theindustrial and scientific markets. Edwards Applications Specialists have unrivalledknowledge and can advise on pump selection, configuration and operation to suit anycustomers’ requirements. The EV range can be supplied individually or as part of preengineeredcombinations using either Edwards EH mechanical boosters.Features & BenefitsApplications●●●●●Continuous operation from atmosphere to ultimate vacuumHigh pumping speed at low pressureGas ballast valve fitted as standardLow noise and vibrationAir cooledDimensions●●●●●Furnaces and metallurgy industriesFood processing and packagingLiftingVacuum coatingVacuum transportingPerformance Curves8Page3431. 50Hz 2. 60HzTechnical DataPumping speed 50 Hz100 m 3 h -1 / 60 ft 3 min -1Pumping speed 60 Hz 117 m 3 h -1 / 70 ft 3 min -1Ultimate pressure without gasballast0.5 mbarWater vapor capacity 0.36 kg h -1 @ 10 mbar /Ordering InformationProduct DescriptionEV100 190-255/330-440V, 50Hz, 190-290/330-500V, 60HzOrder No.A35025940Electricity supply 50 HzElectricity supply 60 HzMotor Power 50 HzMotor Power 50 HzNoise 50 HzNoise 60 HzWeightOil capacityOil Type0.8 lb h -1 @ 10 mbar190-255 / 330-440 V190-290 / 330-500 V2.4 kW / 3.25 hp3 kW / 4.0 hp67.5 dB(A)69 dB(A)65 kg / 143 lbs2 litre / 0.53 US galUG20Shop online at www.edwardsvacuum.com

EV160 Oil Sealed PumpFeatures & BenefitsThe EV rotary vane pumps are designed to be used in a wide range of industrial andscientific applications. They can be used individually or with mechanical booster pumps toincrease both performance and ultimate vacuum. They can operate continuously fromatmosphere to ultimate.With reliability and ease of service in mind, the EV range of pumps are designed for theindustrial and scientific markets. Edwards Applications Specialists have unrivalledknowledge and can advise on pump selection, configuration and operation to suit anycustomers’ requirements. The EV range can be supplied individually or as part of preengineeredcombinations using Edwards EH mechanical boosters.Applications●●●●●Continuous operation from atmosphere to ultimate vacuumHigh pumping speed at low pressureGas ballast valve fitted as standardLow noise and vibrationAir cooledDimensions●●●●●Furnaces and metallurgy industriesFood processing and packagingLiftingVacuum coatingVacuum transportingPerformance Curves8Page3441. 50Hz 2. 60HzTechnical DataPumping speed 50 Hz160 m 3 h -1 / 96 ft 3 min -1Pumping speed 60 Hz 192 m 3 h -1 / 116 ft 3 min -1Ultimate pressure without gasballast0.5 mbarWater vapour capacity 1.2 kg h -1 @ 10 mbar /Ordering InformationProduct DescriptionEV160 190-255/330-440V, 50Hz, 190-290/330-500V, 60HzOrder No.A35030940Electricity supply 50 HzElectricity supply 60 HzMotor Power 50 HzMotor Power 60 HzNoise 50 HzNoise 60 HzWeightOil capacityOil Type2.6 lb h -1 @ 10 mbar190-255 / 330-440 V190-290 / 330-500 V4 kW / 5.5 hp4.8 kW / 6.5 hp71 dB(A)74 dB(A)129 kg / 284 lbs7 litre / 1.84 US galUG20Shop online at www.edwardsvacuum.com

EV200 Rotary vane pumpThe EV rotary vane pumps are designed to be used in a wide range of industrial andscientific applications. They can be used individually or with mechanical booster pumps toincrease both performance and ultimate vacuum. They can operate continuously fromatmosphere to ultimate.With reliability and ease of service in mind, the EV range of pumps are designed for theindustrial and scientific markets. Edwards Applications Specialists have unrivalledknowledge and can advise on pump selection, configuration and operation to suit anycustomers’ requirements. The EV range can be supplied individually or as part of preengineeredcombinations using Edwards EH mechanical boosters.Features & BenefitsApplications●●●●●Continuous operation from atmosphere to ultimate vacuumHigh pumping speed at low pressureGas ballast valve fitted as standardLow noise and vibrationAir cooledDimensions●●●●●Furnaces and metallurgy industriesFood processing and packagingLiftingVacuum coatingVacuum transportingPerformance Curves8Page3451. 50Hz 2. 60HzTechnical DataPumping speed 50 Hz184 m 3 h -1 / 111 ft 3 min -1Pumping speed 60 Hz 221 m 3 h -1 / 133 ft 3 min -1Ultimate pressure without gasballast0.5 mbarWater vapour capacity 1.33 kg h -1 @ 10 mbar /Ordering InformationProduct DescriptionEV200 200V, 50/60HzEV200 340-430/588-745V, 50Hz, 340-500/590-865V, 60HzOrder No.A35035934A35035940Electricity supply 50 HzElectricity supply 60 HzMotor Power 50 HzMotor Power 60 HzNoise 50 HzNoise 60 HzWeightOil capacityOil Type2.9 lb h -1 @ 10 mbar340-430V / 588-745V or 200V340-500V / 590-865V or 200V5.5 kW / 7.5 hp6.4 kW / 8.5 hp73 dB(A)76 dB(A)163 kg / 359 lbs7 litre / 1.84 US galUG20Shop online at www.edwardsvacuum.com

EV300 Rotary vane pumpFeatures & BenefitsThe EV rotary vane pumps are designed to be used in a wide range of industrial andscientific applications. They can be used individually or with mechanical booster pumps toincrease both performance and ultimate vacuum. They can operate continuously fromatmosphere to ultimate.With reliability and ease of service in mind, the EV range of pumps are designed for theindustrial and scientific markets. Edwards Applications Specialists have unrivalledknowledge and can advise on pump selection, configuration and operation to suit anycustomers’ requirements. The EV range can be supplied individually or as part of preengineeredcombinations using Edwards EH mechanical boosters.Applications●●●●●Continuous operation from atmosphere to ultimate vacuumHigh pumping speed at low pressureGas ballast valve fitted as standardLow noise and vibrationAir cooledDimensions●●●●●Furnaces and metallurgy industriesFood processing and packagingLiftingVacuum coatingVacuum transportingPerformance Curves8Page3461. 50Hz 2. 60HzTechnical DataPumping speed 50 Hz240 m 3 h -1 / 145 ft 3 min -1Pumping speed 60 Hz 274 m 3 h -1 / 165 ft 3 min -1Ultimate pressure without gasballast0.5 mbarWater vapour capacity 1.4 kg h -1 @ 10 mbar /Ordering InformationProduct DescriptionEV300 200V, 50/60HzEV300 340-430/588-745V, 50Hz, 340-500/590-865V, 60HzOrder No.A35040934A35040940Electricity supply 50 HzElectricity supply 60 HzMotor Power 50 HzMotor Power 60 HzNoise 50 HzNoise 60 HzWeightOil capacityOil Type3.1 lb h -1 @ 10 mbar340-430V / 588-745V or 200V340-500V / 590-865V or 200V7.8 kW / 10.5 hp9.3 kW / 12.5 hp73 dB(A)76 dB(A)178 kg / 392 lbs7 litre / 1.84 US galUG20Shop online at www.edwardsvacuum.com

EV400 Rotary vane pumpThe EV rotary vane pumps are designed to be used in a wide range of industrial andscientific applications. They can be used individually or with mechanical booster pumps toincrease both performance and ultimate vacuum. They can operate continuously fromatmosphere to ultimate.With reliability and ease of service in mind, the EV range of pumps are designed for theindustrial and scientific markets. Edwards Applications Specialists have unrivalledknowledge and can advise on pump selection, configuration and operation to suit anycustomers’ requirements. The EV range can be supplied individually or as part of preengineeredcombinations using Edwards EH mechanical boosters.Features & BenefitsApplications●●●●●Continuous operation from atmosphere to ultimate vacuumHigh pumping speed at low pressureGas ballast valve fitted as standardLow noise and vibrationAir cooledDimensions●●●●●Furnaces and metallurgy industriesFood processing and packagingLiftingVacuum coatingVacuum transportingPerformance Curves8Page3471. 50Hz 2. 60HzTechnical DataPumping speed 50 Hz 400 m 3 h -1 / 241 ft 3 min -1Pumping speed 60 Hz 480 m 3 h -1 / 289 ft 3 min -1Ultimate pressure without gasballast0.5 mbarWater vapour capacity 6.0 kg h -1 @ 10 mbar /Ordering InformationProduct DescriptionEV400 200V, 50/60HzEV400 340-430/588-745V, 50Hz, 340-500/590-865V, 60HzOrder No.A35045934A35045940Electricity supply 50 HzElectricity supply 60 HzMotor Power 50 HzMotor Power 60 HzNoise 50 HzNoise 60 HzWeightOil capacityOil Type13.2 lb h -1 @ 10 mbar340-430V / 588-745V or 200V340-500V / 590-865V or 200V11 kW / 15 hp12.5 kW / 17 hp78 dB(A)81 dB(A)400 kg / 880 lbs15 litre / 3.96 US galUG20Shop online at www.edwardsvacuum.com

EV630 Rotary vane pumpFeatures & BenefitsThe EV rotary vane pumps are designed to be used in a wide range of industrial andscientific applications. They can be used individually or with mechanical booster pumps toincrease both performance and ultimate vacuum. They can operate continuously fromatmosphere to ultimate.With reliability and ease of service in mind, the EV range of pumps are designed for theindustrial and scientific markets. Edwards Applications Specialists have unrivalledknowledge and can advise on pump selection, configuration and operation to suit anycustomers’ requirements. The EV range can be supplied individually or as part of preengineeredcombinations using Edwards EH mechanical boosters.Applications●●●●●Continuous operation from atmosphere to ultimate vacuumHigh pumping speed at low pressureGas ballast valve fitted as standardLow noise and vibrationAir cooledDimensions●●●●●Furnaces and metallurgy industriesFood processing and packagingLiftingVacuum coatingVacuum transportingPerformance Curves8Page3481. 50Hz 2. 60HzTechnical DataPumping speed 50 Hz630 m 3 h -1 / 380 ft 3 min -1Pumping speed 60 Hz 750 m 3 h -1 / 452 ft 3 min -1Ultimate pressure without gasballast0.5 mbarWater vapour capacity 10.4 kg h -1 @ 4 mbar /Ordering InformationProduct DescriptionEV630 200V, 50/60HzEV630 400/690V, 50/60HzOrder No.A35050934A35050940Electricity supply 50 HzElectricity supply 60 HzMotor Power 50 HzMotor Power 60 HzNoise 50 HzNoise 60 HzWeightOil capacityOil Type22.9 lb h -1 @ 4 mbar400V / 690V* or 200V400V / 690V* or 200V15 kW / 20 hp18.5 kW / 25 hp80 dB(A)83 dB(A)525 kg / 1155 lbs15 litre / 3.96 US galUG20Shop online at www.edwardsvacuum.com

Accessories for Single Stage Oil Sealed PumpsOil Level SwitchAn oil level switch is available to order as a separate item that can befitted to give an indication or warning of low oil level in the pump. Thisallows the user to remotely monitor the oil level and add oil or planmaintenance to prevent potentially serious damage occurring to thepump.Ordering InformationProduct DescriptionOil level switch EV20, EV40Oil level switch EV70, EV100, EV160, EV200, EV300,EV400, EV630Inlet FilterA full range of inlet filters for all models are available for use whenthere is the possibility of harmful dust or debris entering the pumpduring operation and potentially causing damage or increased wearto the pump mechanism.Ordering InformationProduct DescriptionInlet filters complete with fittingsInlet filter EV20Inlet filter EV40Inlet filter EV70, EV100Inlet filter EV160, EV200, EV300Inlet filter EV400, EV630SparesInlet filter element EV20Inlet filter element EV40Inlet filter element EV70, EV100Inlet filter element EV160, EV200, EV300Inlet filter element EV400, EV630Order No.A35010300A35020300Order No.A35010310A35015310A35025310A35030310A35045310Order No.A35010700A35015700A35025700A35030700A35045700SparesThree levels of spares kits are available. Filter kit containing exhaustmist filters, Service kit containing filter kit, seals and blades and anOverhaul kit containing service kit and parts to completely rebuild apump such as bearings, etc.Ordering InformationSparesFilter kit EV20 (index A-B)Service kit EV20 (index A)Service kit EV20 (index B)Overhaul kit EV20 (index A)Overhaul kit EV20 (index B)Filter kit EV40Service kit EV40Service kit EV40 (index A)Overhaul kit EV40Overhaul kit EV40 (index A)Filter kit EV70 (index D-G)Service kit EV70 (index D-F)Service kit EV70 (index G)Overhaul kit EV70 (index F)Overhaul kit EV70 (index G)Filter kit EV100 (index D-G)Service kit EV100 (index D-F)Service kit EV100 (index G)Overhaul kit EV100 (index F)Overhaul kit EV100 (index G)Filter kit EV160 (index F)Service kit EV160 (index F)Overhaul kit EV160 (index F)Filter kit EV200 (index E-F)Service kit EV200 (index F)Overhaul kit EV200 (index F)Filter kit EV300 (index E-F)Service kit EV300 (index F)Overhaul kit EV300 (index F)Filter kit EV400 (index A&D)Service kit EV400 (index A&D)Overhaul kit EV400 (index D)Filter kit EV630 (index C-D)Service kit EV630 (index C-D)Overhaul kit EV630 (index C-D)Order No.A35010800A35010810A35010811A35010820A35010821A35015800A35015810A35015811A35015820A35015821A35020801A35020811A35020812A35020822A35020823A35025801A35025811A35025812A35025822A35025823A35030802A35030812A35030822A35035801A35035812A35035822A35040801A35040812A35040822A35045800A35045810A35045821A35050800A35050810A350508208Page349Shop online at www.edwardsvacuum.com

EV Single Stage Oil Sealed Pump CombinationsOur comprehensive range of EV pumps and mechanical boosters,complete with connection kits to mount the mechanical booster allowsthe user to specify a complete system. The fitting of a mechanicalbooster to an EV rotary vane pump significantly increases pumpingspeed and vacuum performance of the system, as well as increasingthe ultimate vacuum attainable by approximately one decade ofpressure.Specifying a combination is simply a process of selecting the EVpump, selecting the required mechanical booster (from catalogue)and the appropriate connection kit shown below. The connection kitsare supplied as a kit of parts that allows them to be easily assembled,together with the EV pump and mechanical booster on site. Clear andconcise instructions are included with the kits to make this a verysimple process.8Ordering Information Booster ConnectionsBoosterPage350PrimarypumpEH250 EH500 EH1200 607MV05 EH2600 615MV1061BMV10EH4200615MV1561BMV25622MV25EV100 NR7001000 NR7002000 NR7003000 NR7046000EV160 NR7006000 NR7007000 NR7047000 NR7050000EV200 NR7010000 NR7011000 NR7050000EV300 NR7014000 NR7015000 NR7016000 NR7050000 NR7017000 NR7050000EV400 NR7021000 NR7022000 NR7056000 NR7023000 NR7056000EV630 NR7028000 NR7029000 NR7056000 NR7030000 NR7056000 NR7064000To ensure that both pumps and connecting kits are ordered:Select the required EV pump – order as individual itemSelect the required mechanical booster – order as individual itemSelect the connection kit required to mount the booster on the EV pump from the table above – order as individual itemThe three components will be supplied packed individually for assembly on receipt. The mounting kit contains simple instructions detailing theoperations required to assemble the mounting kit and how to connect both the EV and mechanical booster together as a system.Shop online at www.edwardsvacuum.com

EH Mechanical Booster PumpsBroad Application CoverageThe EH mechanical booster pumps feature the unique hydrokineticdrive, providing an efficient power transmission with benefits ineconomy, performance and compactness. The hydrokinetic driveprovides the following features:• Pump down times cut by 50%, when compared with direct drivepumps• No bypass lines or pressure switches required• Universal voltage motors• Reduced capital and operating costs• Air cooled motors – with water cooled options• Quiet, minimum vibrationThe EH mechanical booster pumps, based on the simple Rootsprinciple, remain the favorite pumps for applications where highpumping speeds over 3000 m 3 h -1 / 1776 ft 3 min -1 are required in thepressure region of 0.01 to 50 mbar / 0.0075 to 37.5 Torr. Thesepumps must always be backed by another pump which can deliveragainst a high pressure differential to atmospheric pressure.Operating at relatively low pressures, the mechanical booster pumpis not exposed to the same concentrations of corrosive processmedia as is the backing pump, which makes it highly reliable.High Performance Pumping MechanismThe EH has a high quality, oil-free pumping mechanism. This offers:• Quiet, vibration free operation• Rugged and corrosion resistant• Advanced shaft-seal technology – no oil contamination of processchamberThe corrosion resistant pumping mechanism is manufactured fromhigh grade cast iron. The proven shaft-seal arrangement ensures thatno oil enters the pumping stator, and the absence of internal andexternal by-pass lines and valves which may corrode or stickminimizes maintenance requirements.The design of the shaft seals is optimised to ensure that no lubricantscan migrate into the pumping mechanism. This maintains boosterpump performance in applications which demand the higheststandard of cleanliness. In addition, this prevents the build-up oftrapped particles on the rotor lobes and end-faces which have veryclose tolerances.The dynamically balanced rotors and precision ground gearscontribute to the smooth, quiet operation of the pumps, as demandedby manufacturers of advanced technology equipment.EH mechanical boosters are available to cover a broad range ofindustrial and chemical process applications.IndustrialIndustrial EH boosters are safe to handle non-flammable gases andvapours within the normal operating parameters of the booster.ATEXATEX classified EH boosters are annotated with the suffix "T3" or"T160".• EH boosters may be supplied with ATEX classification either aspart of a pump system or stand-alone, on application. Pleaseconsult Edwards.• ATEX compliance is typically specified for use in Europe, but mayalso be required in other areas.ATEX compliant EH boosters are suitable for operation in ATEXsystems rated as follows:All of the EH1200C, EH1200 T160, EH2600C, EH2600 T3, EH2600T160, EH4200C, EH4200 T3 and EH4200 T160 chemical EH pumpsare fitted with flameproof motors:• Pumps suitable for 50 Hz operation are fitted with a flameproofmotor approved to EEx d. Gas Group IIA, lIB, Temperature ClassT4.• Pumps suitable for 60 Hz operation are fitted with a flameproofmotor approved to CSA, Division 1 area, Gas Class I Group C & D,and Dust Class II Group F & G, Temperature Class T3C.Internal and External ClassificationsorII 2G c IIB T3II 2G c IIB T160The notations used in these ratings are as follows:Symbol MeaningSpecifies that the chemical EH pump can be used in apotentially explosive atmosphereIIEquipment group II2 G Equipment category 2 (gas)cConstructional safetyIIBSuitable to pump gas group IIBT3 / T160 Gas auto-ignition temperatureEquipment CategoryFor equipment category 1 (gas) consult Edwards.Gas Auto-Ignition TemperatureThe temperature classifications applied to the chemical EH pumpsrelate to the auto-ignition temperature of flammable materials that canbe pumped:• The EH1200C, EH2600C, EH4200C and chemical EH pumps thathave a T3 classification are suitable for pumping flammablematerials that have an auto-ignition temperature greater than200 °C.• Chemical EH pumps that have a T160 classification are suitable forpumping flammable materials that have an auto-ignitiontemperature greater than 160 °C.8Page351Shop online at www.edwardsvacuum.com

8Page352Explosion ProofExplosion proof boosters are annotated with the suffix "C".• EH boosters may be ordered with explosion proof motors eitherindividually, or as part of an explosion proof system.• Explosion proof is generally applicable in N. America and the restof the world (excluding Europe).Explosion-proof boosters will be supplied fitted with an explosionproofmotor (suitable for 60 Hz operation) approved to CSA, Division1 area, Gas Class I Group C & D and Dust Class II Group F & G,Temperature Class T3C.EH Pumps with Hydrokinetic DriveEH booster pumps have a unique and patented hydrokinetic fluiddrive, which couples the motor to the pumping mechanism. Thehydrokinetic drive offers the following advantages:• Pump down times cut by up to 50%• Reduced capital and operating costs• No pressure sensors, by-pass lines or valves• Can operate continuously at all pressures – when used with abacking pumpEH booster pumps have universal voltage, air-cooled motors and areavailable with effective pumping speeds of up to 4140 m 3 h -1 /2440 ft 3 min -1 . The pump bodies of the EH1200, EH2600 and EH4200pumps are water-cooled.Two versions of each EH booster pump are available, with differentoils used for the lubrication of the seals and gears. The standardversion uses mineral oils, such as Ultragrade 20. The alternativeversion has PFPE (perfluoropolyether) oils and is suitable forapplications where oxygen or other reactive and corrosive gases areprocessed.Pump-Down Times cut by up to 50% The hydrokinetic drive allowsthe booster pump to be started at the same time as the backing pump(at atmospheric pressure) as it prevents motor overload. The EHbooster pump therefore assists the pumping process from the start ofpump-down. In comparison pumping systems with conventional,direct drive mechanical booster pumps (where the booster pump isswitched on when the chamber pressure has been reduced to,typically, less than 10 mbar / 7.5 Torr), the total evacuation time canbe reduced by as much as 50%. The graph below shows data for a2.8 m 3 / 100 ft 3 chamber, with a 2600 m 3 h -1 / 2600 ft 3 min -1mechanical booster pump and a 255 m 3 h -1 / 150 ft 3 min -1 backingpump.ABCTor r10 310 210 110 0A10 -1 0 200 400 600sWith backing pump and EH mechanical booster pump switched on togetherWith mechanical booster pump switched on at 5 mbarWith backing pump only (pumping through booster pump)Automatic Overload Protection The hydrokinetic drive automaticallyvaries the rotational speed of the pump. This protects the motor fromoverload, prevents over-heating, and allows the pump to operate withhigh pressure differentials. Consequently, EH booster pumps are notdamaged by sudden increases of inlet pressure and even by the entryof solid debris into the pump.Important Cost Savings When you use EH mechanical boosterpumps, you save money on installation and operation. Your capitalcosts are reduced as you do not need valves, by-pass lines andpressure switches, and you can use a smaller backing pump thanwith conventional drive booster pumps. Operation costs are reducedbecause EH booster pumps have smaller motors than direct drivepumps and, when operating at full speed, they use only a fraction ofthe rated power.BC510Pambar10 3 A41010 2C31010 121010 0B11010 -1 0 200 400 600ABCsWith backing pump and EH mechanical booster pump switched on togetherWith mechanical booster pump switched on at 5 mbarWith backing pump only (pumping through booster pump)Shop online at www.edwardsvacuum.com

EH250 Mechanical Booster PumpThe EH mechanical booster pump, based on the simple Roots principle, remains thefavourite pump for applications where high pumping speeds are required for pressures inthe region of 0.01 to 10 mbar. This pump must always be backed by another pump, whichcan deliver against a high-pressure differential to atmospheric pressure.Operating at relatively low pressures, the mechanical booster pump is not exposed to thesame concentrations of corrosive process media as is the backing pump, which makes ithighly reliable.Features & Benefits●●●●●Suitable for applications where high pumping speeds over 3000m 3 h -1 /1776 ft 3 min -1 are required in the pressure region of 0.01 to50 mbar/0.0075 to 37.5 Torr.Operating at relatively low pressures makes it highly reliable.The EH pumps have a high quality, oil-free pumping mechanism.This offers:Quiet, vibration free operation.-Rugged and corrosion resistant.DimensionsApplications●●●●●Semiconductor processingVacuum distillationVacuum packagingSteel de-gassingThin film coatingPerformance Curves8Page353A (mm)EH250 709EH500 797EH1200/EH1200IND 953EH2600 1150EH2600 IND 1289EH4200 1330EH4200IND 1469Pump is shown with inlet and outlet blanking flanges fitted. Dimensions are to the top surface of the pumpflange.Shop online at www.edwardsvacuum.com

8Page354Technical DataDisplacement (swept volume)50Hz 310 m 3 h -1 / 185 ft 3 min -160Hz 375 m 3 h -1 / 220 ft 3 min -1Effective pumping speed withbacking pumpE1M40 or E2M40 240 m 3 h -1 / 141 ft 3 min -1E1M80 or E2M80 274 m 3 h -1 / 161 ft 3 min -1Pressure differential acrosspump50Hz0-180 mbar / 0-140 Torr60Hz0-150 mbar / 0-115 TorrInlet connectionISO63Outlet connectionISO40Rotational speed ‡50Hz0-2900 rpm60Hz0-3500 rpmOperating continuous inletpressure0-1000 mbar / 0-760 TorrMaximum outlet pressure 1000 mbar / 760 TorrRecommended backing pumpsGV80, E1M/E2M40,E1M/E2M80Electrical supply voltage, 3-ph50Hz220 – 240V / 380 – 415V60Hz208-230V / 460VMotor powerHydrocarbon2.2 kW / 3 hpPFPE1.5 kW / 2 hpATEX2.2 kWExplosion proof3 hpAmbient temperature rangeOperating 5 to 40°C / 40 to 104°FStorage -10 to 80°C / 14 to 176°FMaximum operating humidity 90% RHRecommended oil Ultragrade 20Oil capacityCoupling cover1.5 litre / 1.6 qtShaft seal reservoir0.125 litre / 0.25 qtWeight*66 kg / 142 lb*Weight refers to IND versionOrdering InformationProduct DescriptionEH250IND 200V, 3-ph, 60Hz, 3hpEH250IND 200V, 3-ph, 50Hz, 2.2kWEH250IND 220-240/380-415V, 3-ph, 50Hz, 2.2kWEH250IND 208 – 230V or 460V, 3-ph, 60Hz, 3 hpPFPE EH250FX 220-240/380-415V, 3-ph, 50Hz, 1.5kWPFPE EH250FX 208-230/460V, 3-ph, 60Hz, 2 hpEH250C 460V, 3-ph 60Hz, 3 hpEH250T160 220-240/380-415V, 3-ph 50Hz, 2.2kWAccessories & SparesSpares Kit Con C&O EH/QMB250/500ASpares Kit Module EH/QMB250/500ASpares Kit Shim EH/QMB250/500AInlet Mesh Assy 3.3 mm ISO63ISO63 Screen Centring S/S VitonOrder No.NRC221000NRC222000A30151945A30152946A30153935A30154936NRA997000NRA996000Order No.A30151815A30151820A30151825A60041029C10521085Shop online at www.edwardsvacuum.com

EH500 Mechanical booster pumpThe EH mechanical booster pump, based on the simple Roots principle, remains thefavourite pump for applications where high pumping speeds are required for pressures inthe region of 0.01 to 10 mbar. This pump must always be backed by another pump, whichcan deliver against a high-pressure differential to atmospheric pressure.Operating at relatively low pressures, the mechanical booster pump is not exposed to thesame concentrations of corrosive process media as is the backing pump, which makes ithighly reliable.Features & Benefits●●●●●Suitable for applications where high pumping speeds over 3000m 3 h -1 /1776 ft 3 min -1 are required in the pressure region of 0.01 to50 mbar/0.0075 to 37.5 Torr.Operating at relatively low pressures makes it highly reliable.The EH pumps have a high quality, oil-free pumping mechanism.This offers:Quiet, vibration free operation.-Rugged and corrosion resistant.DimensionsApplications●●●●●Semiconductor processingVacuum distillationVacuum packagingSteel de-gassingThin film coatingPerformance Curves8Page355A (mm)EH250 709EH500 797EH1200/EH1200IND 953EH2600 1150EH2600 IND 1289EH4200 1330EH4200IND 1469Pump is shown with inlet and outlet blanking flanges fitted. Dimensions are to the top surface of the pumpflange.Shop online at www.edwardsvacuum.com

Technical DataOrdering InformationDisplacement (swept volume)50Hz 505 m 3 h -1 / 300 ft 3 min -160Hz 605 m 3 h -1 / 335 ft 3 min -1Effective pumping speed withbacking pumpE1M40 or E2M40 350 m 3 h -1 / 206 ft 3 min -1E1M80 or E2M80 400 m 3 h -1 / 236 ft 3 min -1E1M175 or E2M175 440 m 3 h -1 / 259 ft 3 min -1E1M275 or E2M275 460 m 3 h -1 / 271 ft 3 min -1Pressure differential acrosspump †50Hz0-110 mbar / 0-83 Torr60Hz0-90 mbar / 0-68 TorrProduct DescriptionEH500IND 208-230/460V, 3-ph, 60Hz, 3 hpEH500IND 200V, 3-ph 60Hz, 3 hpEH500IND 200V, 3-ph, 50Hz, 2.2kWEH500IND 220-240/380-415V, 3-ph, 50Hz, 2.2kWEH500AFX 220-240/380-415V, 3-ph 50Hz, 1.5 kWEH500AFX 208-230/460V, 3-ph, 60Hz, 2 hpEH500C 460V, 3-ph, 60Hz, 3 hpEH500T3 220-240/380-415V, 3-ph, 50Hz, 2.2kWAccessories & SparesSpares Kit Con C&O EH/QMB250/500ASpares Kit Module EH/QMB250/500ASpares Kit Shim EH/QMB250/500AISO100 Screen Centring S/S VitonOrder No.A30272946NRC219000NRC220000A30271945A30273935A30274936NRA999000NRA998000Order No.A30151815A30151820A30151825C10523085Inlet connectionISO100Inlet Mesh Assembly EH250/EH500AA60041569Outlet connectionISO63Rotational speed50Hz0-2900 rpm60Hz0-3500 rpmOperating continuous inletpressure0-1000 mbar / 0-760 TorrMaximum outlet pressure1000 mbar / 760 TorrRecommended backing pumpsGV80, E2M80Electrical supply50Hz 220-240V / 380-415V860HzMotor power208-230V / 460VPage356HydrocarbonPFPEATEX2.2kW / 3hp1.5 kW / 2hp2.2kWExplosion proof3hpAmbient temperature rangeOperating 5 to 40°C / 40 to 104°FStorage -10 to 80°C / 14 to 176°FMaximum operating humidity90% RHRecommended oilStandard version Ultragrade 20PFPE version Fomblin® YVAC 16/6Oil capacityCoupling cover1.5 litre / 1.6 qtShaft seal reservoir0.125 litre / 0.25 qtWeight*74 kg / 163 lb*Weight refers to IND versionShop online at www.edwardsvacuum.com

EH1200 Mechanical booster pumpThe EH mechanical booster pump, based on the simple Roots principle, remains thefavourite pump for applications where high pumping speeds are required for pressures inthe region of 0.01 to 10 mbar. This pump must always be backed by another pump, whichcan deliver against a high-pressure differential to atmospheric pressure.Operating at relatively low pressures, the mechanical booster pump is not exposed to thesame concentrations of corrosive process media as is the backing pump, which makes ithighly reliable.Features & Benefits●●●●●Suitable for applications where high pumping speeds over 3000m 3 h -1 /1776 ft 3 min -1 are required in the pressure region of 0.01 to50 mbar/0.0075 to 37.5 Torr.Operating at relatively low pressures makes it highly reliable.The EH pumps have a high quality, oil-free pumping mechanism.This offers:Quiet, vibration free operation.-Rugged and corrosion resistant.DimensionsApplications●●●●●Semiconductor processingVacuum distillationVacuum packagingSteel de-gassingThin film coatingPerformance Curves8Page357A (mm)EH250 709EH500 797EH1200/EH1200IND 953EH2600 1150EH2600 IND 1289EH4200 1330EH4200IND 1469Pump is shown with inlet and outlet blanking flanges fitted. Dimensions are to the top surface of the pumpflange.Shop online at www.edwardsvacuum.com

8Page358Technical DataDisplacement (swept volume)50Hz 1195 m 3 h -1 / 715 ft 3 min -160Hz 1435 m 3 h -1 / 845 ft 3 min -1Effective pumping speed withbacking pumpE2M80 840 m 3 h -1 / 495 ft 3 min -1E2M175 930 m 3 h -1 / 548 ft 3 min -1E2M275 1020 m 3 h -1 / 601 ft 3 min -1Pressure differential acrosspump †50Hz0-90 mbar / 0-68 Torr60Hz0-75 mbar / 0-56 TorrInlet connectionISO160Outlet connectionISO100Rotational speed50Hz0-2900 rpm60Hz0-3500 rpmOperating continuous inletpressure0-1000 mbar / 0-760 TorrMaximum outlet pressure 1000 mbar / 760 TorrRecommended backing pumpsGV160, GV250, E2M80,E2M175Electrical supply50Hz 220-240V / 380-415V60Hz208-230V / 460VMotor powerHydrocarbon3kW / 4hpPFPE3kW / 4hpATEX3kWExplosion proof4hpAmbient temperature rangeOperating 5 to 40°C / 40 to 104°FStorage -10 to 80°C / 14 to 176°FMaximum operating humidity 90% RHRecommended cooling waterflow (inlet temperature 20°C)* 120lh -1 / 0.53 gal min -1Recommended cooling watersupply pressure*2-6 barCooling water connections* 3/8 inch BSP maleRecommended oilStandard version Ultragrade 20PFPE version Fomblin® YVAC 16/6Oil capacityGear case1.25 litre / 1.3 qtCoupling cover1.5 litre / 1.6 qtShaft seal reservoir0.125 litre / 0.25 qtWeight**149 kg / 327.8 lb* Under many circumstances, pumps may operate without coolingwater. Apply to Edwards for more information.** Weight refers to IND version†. Depends on pressureOrdering InformationProduct DescriptionEH1200IND 220-240/380-415V, 3-ph, 50Hz, 3kWEH1200IND 208-230/460V, 3-ph, 60Hz, 4 hpEH1200IND 200V, 3-ph, 60Hz, 4 hpEH1200IND 200V, 3-ph, 50Hz, 3 kWEH1200FX 220-240/380-415V, 3-ph, 50Hz, 3 kWEH1200FX 208-230/460V, 3-ph, 60Hz, 4 hpEH1200C 230/460V, 3-ph, 60Hz, 4 hpEH1200T160 380-415V, 3-ph, 50Hz, 3kWAccessories & SparesSpares Kit Con C&O EH/QMB1200Spares Kit Module EH/QMB1200Shim kitISO160 Screen Centring S/S VitonInlet Mesh Assembly EH2600/EH4200Order No.A30590935A30591936NRC217000NRC218000A30592935A30593936A30556982A30557900Order No.A30551815A30551820A30551825C10524085A60041570Shop online at www.edwardsvacuum.com

EH2600 Mechanical booster pumpThe EH mechanical booster pump, based on the simple Roots principle, remains thefavourite pump for applications where high pumping speeds are required for pressures inthe region of 0.01 to 10 mbar. This pump must always be backed by another pump, whichcan deliver against a high-pressure differential to atmospheric pressure.Operating at relatively low pressures, the mechanical booster pump is not exposed to thesame concentrations of corrosive process media as is the backing pump, which makes ithighly reliable.Features & Benefits●●●●●Suitable for applications where high pumping speeds over 3000m 3 h -1 /1776 ft 3 min -1 are required in the pressure region of 0.01 to50 mbar/0.0075 to 37.5 Torr.Operating at relatively low pressures makes it highly reliable.The EH pumps have a high quality, oil-free pumping mechanism.This offers:Quiet, vibration free operation.-Rugged and corrosion resistant.DimensionsApplications●●●●●Semiconductor processingVacuum distillationVacuum packagingSteel de-gassingThin film coatingPerformance Curves8Page359A (mm)EH250 709EH500 797EH1200/EH1200IND 953EH2600 1150EH2600 IND 1289EH4200 1330EH4200IND 1469Pump is shown with inlet and outlet blanking flanges fitted. Dimensions are to the top surface of the pumpflange.* Alternative outlet positionShop online at www.edwardsvacuum.com

8Page360Technical DataDisplacement (swept volume)50Hz 2590 m 3 h -1 / 1525 ft 3 min -160Hz 3110 m 3 h -1 / 1830 ft 3 min -1Effective pumping speed withbacking pumpE2M175 1750 m 3 h -1 / 1031 ft 3 min -1E2M275 1900 m 3 h -1 / 1119 ft 3 min -1Pressure differential acrosspump †50Hz0-80 mbar / 0-60 Torr60Hz0-67 mbar / 0-50 TorrInlet connectionISO160Outlet connectionISO100Rotational speed50Hz0-2900 rpm60Hz0-3500 rpmOperating continuous inletpressure0-1000 mbar / 0-760 TorrMaximum outlet pressure 1000 mbar / 760 TorrRecommended backing pumpsGV250, GV400, E2M175,E2M275Electrical supply50Hz 220-240V / 380-415V60Hz208-230V / 460VMotor powerHydrocarbon11kW / 15hpPFPE7.5kW / 10hpATEX11kWExplosion proof15hpAmbient temperature rangeOperating 5 to 40°C / 40 to 104°FStorage -10 to 80°C / 14 to 176°FMaximum operating humidity 90% RHRecommended cooling waterflow (inlet temperature 20°C)* 250lh -1 / 1.1 gal min -1Recommended cooling watersupply pressure*2-6 barCooling water connections* 3/8 inch BSP maleRecommended oilStandard version Ultragrade 20PFPE version Fomblin® YVAC 16/6Oil capacityGear case3.5 litre / 3.3 qtCoupling cover6.5 litre / 7 qtShaft seal reservoir1.5 litre / 1.4 qtWeight**345 kg / 759 lb* Under many circumstances, pumps may operate without coolingwater. Apply to Edwards for more information.** Weight refers to IND version†. Depends on pressureOrdering InformationProduct DescriptionEH2600IND 380-415V, 3-ph, 50Hz, 11 kWEH2600IND 230/460V, 3-ph, 60Hz, 15 hpEH2600IND 200V, 3-ph, 60Hz, 15 hpEH2600IND 200V, 3-ph, 50Hz, 11 kWEH2600FX 220-240/380-415V, 3-ph, 50Hz, 7.5kWEH2600FX 208-230/460V, 3-ph, 60Hz, 10 hpEH2600C 230/460V, 3-ph, 60Hz, 15 hpEH2600T3 380-415V, 3-ph, 50Hz, 11 kWEH2600T160 380-415V, 3-ph, 50Hz, 11 kWAccessories & SparesSpares Kit Con C&O EH/QMB26/4200Spares Kit Module EH/QMB26/4200Spares Kit Shim EH/QMB12/26/4200ISO160 Screen Centring S/S VitonInlet Mesh Assembly EH2600/EH4200Order No.A30775946A30776982NRB989000NRC216000A30753935A30754936A30756982A30741935A30779900Order No.A30751815A30751820A30751825C10524085A60041570Shop online at www.edwardsvacuum.com

EH4200 Mechanical booster pumpThe EH mechanical booster pump, based on the simple Roots principle, remains thefavourite pump for applications where high pumping speeds are required for pressures inthe region of 0.01 to 10 mbar. This pump must always be backed by another pump, whichcan deliver against a high-pressure differential to atmospheric pressure.Operating at relatively low pressures, the mechanical booster pump is not exposed to thesame concentrations of corrosive process media as is the backing pump, which makes ithighly reliable.Features & Benefits●●●●●Suitable for applications where high pumping speeds over 3000m 3 h -1 /1776 ft 3 min -1 are required in the pressure region of 0.01 to50 mbar/0.0075 to 37.5 Torr.Operating at relatively low pressures makes it highly reliable.The EH pumps have a high quality, oil-free pumping mechanism.This offers:Quiet, vibration free operation.-Rugged and corrosion resistant.DimensionsApplications●●●●●Semiconductor processingVacuum distillationVacuum packagingSteel de-gassingThin film coatingPerformance Curves8Page361A (mm)EH250 709EH500 797EH1200/EH1200IND 953EH2600 1150EH2600 IND 1289EH4200 1330EH4200IND 1469Pump is shown with inlet and outlet blanking flanges fitted. Dimensions are to the top surface of the pumpflange.* Alternative outlet positionShop online at www.edwardsvacuum.com

8Page362Technical DataDisplacement (swept volume)50Hz 4140 m 3 h -1 / 2440 ft 3 min -160Hz 4985 m 3 h -1 / 2935 ft 3 min -1Effective pumping speed withbacking pumpE2M275 3100 m 3 h -1 / 1825 ft 3 min -1Pressure differential acrosspump †50Hz0-60 mbar / 0-45 Torr60Hz0-50 mbar / 0-38 TorrInlet connectionISO250Outlet connectionISO100Rotational speed50Hz0-2900 rpm60Hz0-3500 rpmOperating continuous inletpressure0-1000 mbar / 0-760 TorrMaximum outlet pressure 1000 mbar / 760 TorrRecommended backing pumps GV400, E2M275Electrical supply50Hz 220-240V / 380-415V60Hz208-230V / 460VMotor powerHydrocarbon11kW / 15hpPFPE11kW / 15hpATEX11kWExplosion proof15hpAmbient temperature rangeOperating 5 to 40°C / 40 to 104°FStorage -10 to 80°C / 14 to 176°FMaximum operating humidity 90% RHRecommended cooling waterflow (inlet temperature 20°C)* 250lh -1 / 1.1 gal min -1Recommended cooling watersupply pressure*2-6 barCooling water connections* 3/8 inch BSP maleRecommended oilStandard version Ultragrade 20PFPE version Fomblin® YVAC 16/6Oil capacityGear case3.5 litre / 3.3 qtCoupling cover6.5 litre / 7 qtShaft seal reservoir1.5 litre / 1.4 qtWeight**380 kg / 836 lb* Under many circumstances, pumps may operate without coolingwater. Apply to Edwards for more information.** Weight refers to IND version†. Depends on pressureOrdering InformationProduct DescriptionEH4200IND 380-415V, 3-ph, 50Hz, 11kWEH4200IND 200V, 3-ph, 60Hz, 15 hpEH4200IND 200V, 3-ph, 50Hz, 11 kWEH4200IND 208-230/460V, 3-ph, 60Hz, 15 hpEH4200C 230/460V, 3-ph, 60Hz, 15 hpEH4200T3 380-415V, 3-ph, 50Hz, 11 kWEH4200T160 380-415V, 3-ph, 50Hz, 11 kWAccessories & SparesSpares Kit Con C&O EH/QMB26/4200Spares Kit Module EH/QMB26/4200Spares Kit Shim EH/QMB12/26/4200Inlet Mesh Assembly EH2600Order No.A30975946NRB988000NRC215000A30976982A30956982A30941935A30979900Order No.A30751815A30751820A30751825A60041571Shop online at www.edwardsvacuum.com

Mechanical Booster Pump AccessoriesOLM500 Oil Level MonitorFit the OLM500 in place of the oil sight-glass on the EH250 andEH500 oil seal reservoirs, and on the EH1200, EH2600 and EH4200oil seal reservoirs and gear boxes. The OLM500 provides a switchedoutput for remote activation or warning devices. Technical data: 24 Va.c. or d.c., maximum current 0.5 A.Ordering InformationProduct DescriptionOLM500 oil level monitor** Not suitable for ATEX boostersOrder No.A50434000Inlet Seal with Mesh ScreenDesigned to prevent objects falling into the inlet of our booster pumps,the mesh aperture is 3.3 mm.Ordering InformationProduct DescriptionInlet seal with mesh screenISO63ISO100ISO160Order No.C10521085C10523085C105240858Page363Shop online at www.edwardsvacuum.com

Stokes 6" Series Mechanical Booster Pumps8Page364Edwards Stokes Vacuum 6" Mechanical BoosterPumpsStokes 6" series mechanical boosters are available in sizes 1020-6630 m 3 h -1 / 612-3900 ft 3 min -1 . Features include:• Rugged design for reliable and extended operation• Simple maintenance features incorporated in design• Vertical or horizontal gas flow• Options of direct drive motors or bare shaft machines• Options of by pass technology to reduce pump down time andprocess isolation seals• Dynamically balanced impellersOverviewPHOTO REQUIREDUsed in conjunction with rotary-piston, rotary vane, dry vacuum andliquid ring pumps, Stokes 6" series will increase pumping speed atworking pressures and shorten pump down time significantly.Whether your objective is to reduce valuable time from the front endof your pumping cycle, or to substantially boost pumping capacity forhigh out-gassing applications, the result is the same - significantlyreduced cycle times.Stokes 6" series are compatible with any make or type of vacuumpumping system. The boosters can be mounted separately, or on theinlet of the backing pump. The latter forms a compact integratedpackage as a mechanical booster system. For even lower-pressureapplications, two Stokes 6" series can be used in series with onebacking pump. This results in a significantly lower-cost and spacesavingpumping system.Bypass technology is available in the 615 model to enhance yourproductivity further, while also assuring consistent, reproduciblevacuum processing. The bypass valve limits the maximum differentialpressure, enabling the booster to start from atmosphere and provideincreased pumping capacity over the full pressure range. Eliminatingthe electrical pressure switch insures continuous, booster operationregardless of vacuum level.The 1 11/16 inch extra large shaft diameter engineered into theStokes 6" series provides the capability for use with higher poweredmotors, in addition to ensuring a uniquely rugged and durablemechanical booster. The use of higher powered motors in conjunctionwith the high differential specification, allows the pumps to operate attheir full displacement from atmospheric pressure, with appropriatelysized backing pumps the 612MB offers these advantages in astandard package.The Stokes 6" series is also available in a process isolation series(five mechanical seals) for optimum protection from dust andparticulate contamination in arduous duty applications.All mechanical vacuum boosters must be backed by a primaryvacuum pump designed to discharge to atmospheric pressure. Belowis a list of commonly used backing pumps:• Oil Sealed Pumps (EM or EV)• Liquid Ring Pump (Two-stage LR Series)• Piston Pumps (Stokes Microvac Series)• Dry Pump (GV Drystar or Chemical Drystar)Features & Benefits• Mechanical shaft seal - improved life and serviceability• Ringfeder ® keyless gear locking system - stronger, faster timing• Large shaft diameters - allowing improved performance at highpressures• Belt drive or direct drive capability - flexibility of operating speedsand motor power• Vertical or horizontal gas flow - flexibility of orientation• Drive end roller bearing - resists belt pull and thermal effects• Over-sized anti-friction bearings - increased uptime and longerservice intervals• Rugged proven design and construction• Air Cooled - utility savings• Unique impeller design -Dynamically balanced to minimisevibration• High volumetric efficiency - optimal performance• High differential pressure - operation capability• Available by-pass option for improved pumpdown• Available process isolation seal option-optimum protection fromdust and particulate contaminationApplicationsTypical applications for the Stokes 6" series mechanical boosterpumps includes:• Automotive• Chemical processing• Heat treatment• Leak detection• Metallurgy• PET processing• Pharmaceuticals• Thermal processing• Transformer drying and cable fluid conditioning• Vacuum coating• Vacuum melting• Many other industrial applicationsShop online at www.edwardsvacuum.com

Stokes 607 Series Mechanical Booster PumpsStokes 6" series mechanical boosters are designed to be used in conjunction with rotarypiston,dry vacuum, rotary vane and liquid ring pumps to increase pumping speed atworking pressures and shorten pump down time significantly. The Stokes 6" series can bemounted separately or on the inlet of the backing pump to create a compact integratedpackage.Featuring an extra large diameter shaft, the Stokes 6” series has the capability for use withhigher powered motors in addition to ensuring a uniquely rugged and durable mechanicalbooster. This allows the pumps to operate at their full displacement from atmosphericpressure with an appropriately sized backing pump.Features & BenefitsTechnical Data●●●●●Mechanical shaft seal – improved life and serviceabilityRingfeder® keyless gear locking system – stronger, faster timingLarge shaft diameters – allowing improved performance at highpressuresBelt drive or direct drive capabilityVertical or horizontal gas flowDisplacementV belt 2750 rpm 1589m 3 h -1 / 935ft 3 min -1Direct drive 1800 rpm 1040m 3 h -1 / 612ft 3 min -1Direct drive 3000 rpm 1733m 3 h -1 / 1020ft 3 min -1Direct drive 3600 rpm 2080m 3 h -1 / 1224ft 3 min -1Inlet/outlet flanges6” ASA/ANSIMotor power5 / 20hp (7.5kW)Cooling methodAir CooledOil capacity (horizontal flow) 1.9 litre / 0.51galOil capacity (vertical flow) 4.1 litre / 1.1galMax pressure differential 506mbar / 380TorrMax temp rise 135°C / 275°FMax discharge temp 191°C / 375°FWeight bare shaft215kg / 475lbsWeight TEFC direct drive 408kg / 900lbsRecommended OilV- Lube H8Page365DimensionsOrdering InformationProduct DescriptionOrder No.607 MHR CE, 7.5kW, 230/400V, 3-ph, 50Hz @3000rpm 900607MHR601607 MHR CE, 7.5kW, 200-220V/380V, 3-ph, 50/60Hz@3000/3600rpm900607MHR602607 MVR CE, 7.5kW, 230/400V, 3-ph, 50Hz @ 3000rpm 900607MVR601607 MVR CE, 7.5kW, 200-220V/380V, 3-ph, 50/60Hz @3000/3600rpm900607MVR602607 MHR (Bare shaft) Horizontal flow 900607MHR607 MVR (Bare shaft) Vertical flow 900607MVR607 MH20, 20 hp, 230/460V, 3-ph, 60Hz @ 1800rpm 900-607-MH20607 MV05, 5 hp, 230/460V, 3-ph, 60Hz @ 1800rpm 900607MV05607 MV20, 20 hp, 230/460V, 3-ph, 60Hz @ 1800rpm 900607MV20607 MH05, 5 hp, 230/460V, 3-ph, 60Hz @ 1800rpm 900607MH05Accessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002A 6'' pipe flange connection 11'' (279 mm) OD x (152 mm) ID 8 x 3/4-10 NC-2B x 1 1/8'' (29 mm) holesstraddle both CL both flangesB DIA. Holes1. STD Inlet 2. Optional feetShop online at www.edwardsvacuum.com

Stokes 607 Series Process Isolation BoostersStokes 6" series mechanical boosters are designed to be used in conjunction with rotarypiston,dry vacuum, rotary vane and liquid ring pumps to increase pumping speed atworking pressures and shorten pump down time significantly. They incorporate fivemechanical seals for optimum protection from dust and particulate contamination and canbe mounted separately or on the inlet of the backing pump to create a compact integratedpackage.Features & BenefitsFeaturing an extra large diameter shaft, the Stokes 6” series has the capability for use withhigher powered motors in addition to ensuring a uniquely rugged and durable mechanicalbooster.Technical Data8Page366●●●●●Mechanical shaft seal – improved life and serviceabilityRingfeder® keyless gear locking system – stronger, faster timingLarge shaft diameters – allowing improved performance at highpressuresBelt drive or direct drive capabilityVertical or horizontal gas flowDisplacementV belt (2750 rpm) 1589m 3 h -1 / 935ft 3 min -1Direct drive (3000 rpm) 1733m 3 h -1 / 1020ft 3 min -1Direct drive (3600 rpm) 2080m 3 h -1 / 1224ft 3 min -1Inlet/outlet flanges6” ASA/ANSI flangeMotor power EU/Asia7.5kWMotor power US TEFC 10hpCooling water 7.6-11.4l min -1 / 2-3gal min -1Oil capacity (horizontal flow) 1.9 litre / 0.51galOil capacity (vertical flow) 4. litre / 1.1galMax pressure differential 506 mbar / 380 TorrMax temp rise 135°C / 275°FMax discharge temp 191°C / 375°FWeight bare shaft215kg / 475lbsWeight TEFC direct drive 345kg / 760lbsRecommended OilV- Lube HDimensionsOrdering InformationProduct DescriptionOrder No.607 5HR CE 7.5kW, 230/400V, 3-ph, 50Hz @ 3000rpm 9006075HR601607 5HR CE 7.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm9006075HR602607 5H10, 10hp, 230/460V, 3-ph, 60Hz @1800rpm 9006075H10607 5HR (Bare shaft) Horizontal flow 9006075HR607 5V10, 10hp, 230/460V, 3-ph, 60Hz @ 1800rpm 9006075V10607 5VR (Bare shaft) Vertical flow 9006075VR607 5VR CE 7.5kW, 230/400V, 3-ph, 50Hz @ 3000rpm 9006075VR601607 5VR CE 7.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm9006075VR602Accessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Process isolation seal kit 607552004A 6'' pipe flange connection 11'' (279 mm) OD x (152 mm) ID 8 x 3/4-10 NC-2B x 1 1/8'' (29 mm) holesstraddle both CL both flangesB DIA. Holes1. STD Inlet 2. Optional feetShop online at www.edwardsvacuum.com

Stokes 615 Series Mechanical Booster PumpsStokes 6" series mechanical boosters are designed to be used in conjunction with rotarypiston,dry vacuum, rotary vane and liquid ring pumps to increase pumping speed atworking pressures and shorten pump down time significantly. The Stokes 6" series can bemounted separately or on the inlet of the backing pump to create a compact integratedpackage.Featuring an extra large diameter shaft, the Stokes 6” series has the capability for use withhigher powered motors in addition to ensuring a uniquely rugged and durable mechanicalbooster. This allows the pumps to operate at their full displacement from atmosphericpressure with an appropriately sized backing pump.Features & BenefitsTechnical Data●●●●●Mechanical shaft seal – improved life and serviceabilityRingfeder® keyless gear locking system – stronger, faster timingLarge shaft diameters – allowing improved performance at highpressuresBelt drive or direct drive capabilityVertical or horizontal gas flowDisplacementV belt (2750 rpm) 3375m 3 h -1 / 2000ft 3 min -1Direct drive (1800 rpm) 2210m 3 h -1 / 1300ft 3 min -1Direct drive (3000 rpm) 3685m 3 h -1 / 2170ft 3 min -1Direct drive (3600 rpm) 4420m 3 h -1 / 2600ft 3 min -1Inlet/outlet flanges8” ASA/ANSI flangeMotor power EU/Asia11kWMotor power US TEFC 10hpCooling methodAir cooledOil capacity (horizontal flow) 1.9 litre / 0.51galOil capacity (vertical flow) 4.1 litre / 1.1galMax pressure differential 506mbar / 380TorrMax temp rise 135°C / 275°FMax discharge temp 191°C / 375°FWeight bare shaft234kg / 515 lbsWeight TEFC direct drive 390kg / 860lbsRecommended OilV- Lube H8Page367DimensionsOrdering InformationProduct DescriptionOrder No.615 MHR CE 11kW, 400V, 3-ph, 50Hz @ 3000rpm 900615MHR601615 MHR CE 11kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm900615MHR602615 MV10, 10hp, 230/460V, 3-ph, 60Hz @ 1800rpm 900615MV10615 MV15, 15hp, 230/460V, 3-ph, 60Hz @ 3600rpm 900615MV15615 MVR (Bare shaft) Vertical flow 900615MVR615 MVR CE 11kW, 400V, 3-ph, 50Hz @ 3000rpm 900615MVR601615 MVR CE 11kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm900615MVR602615 MH10, 10hp, 230/460V, 3-ph, 60Hz @ 1800rpm 900615MH10615 MH15, 15hp, 230/460V, 3-ph, 60Hz @ 3600rpm 900615MH15615 MHR (Bare shaft) Horizontal flow 900615MHRAccessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002A 6'' pipe flange connection 11'' (279 mm) OD x (152 mm) ID 8 x 3/4-10 NC-2B x 1 1/8'' (29 mm) holesstraddle both CL both flangesB DIA. Holes1. STD Inlet 2. Optional feetShop online at www.edwardsvacuum.com

Stokes 615 Series Process Isolation BoostersFeatures & BenefitsStokes 6" series process isolation boosters are designed to be used in conjunction withrotary-piston, dry vacuum, rotary vane and liquid ring pumps to increase pumping speed atworking pressures and shorten pump down time significantly. They incorporate fivemechanical seals for optimum protection from dust and particulate contamination, and canbe mounted separately or on the inlet of the backing pump to create a compact integratedpackage.Featuring an extra large diameter shaft, the Stokes 6” series has the capability for use withhigher powered motors in addition to ensuring a uniquely rugged and durable mechanicalbooster. This allows the pumps to operate at their full displacement from atmosphericpressure with an appropriately sized backing pump.Technical Data8Page368●●●●●Mechanical shaft seal – improved life and serviceabilityRingfeder® keyless gear locking system – stronger, faster timingLarge shaft diameters – allowing improved performance at highpressuresBelt drive or direct drive capabilityVertical or horizontal gas flowDisplacementV belt (2750 rpm) 3375m 3 h -1 / 2000ft 3 min -1Direct drive (3000 rpm) 3685m 3 h -1 / 2170ft 3 min -1Direct drive (3600 rpm) 4420m 3 h -1 / 2600ft 3 min -1Inlet/outlet flanges8” ASA/ANSI flangeMotor power EU/Asia11kWMotor power US TEFC 15hpCooling water 7.6-11.4 l min -1 / 2-3 gal min -1Oil capacity (horizontal flow) 1.9 litre / 0.51galOil capacity (vertical flow) 4.1 litre / 1.1galMax pressure differential 506mbar / 380TorrMax temp rise 135°C / 275°FMax discharge temp 191°C / 375°FWeight bare shaft234kg / 515lbsWeight TEFC direct drive 397kg / 875lbsRecommended OilV- Lube HDimensionsOrdering InformationProduct DescriptionOrder No.615 5HR CE 11kW, 230/400V, 3-ph, 50Hz @ 3000rpm 9006155HR601615 5HR CE 11kW, 200-220/380V, 3-ph, 50/60Hz @3000/36000rpm9006155HR602615 5H15, 15hp, 230/460V, 3-ph, 60Hz @ 3600rpm 9006155H15615 5HR (Bare shaft) Horizontal flow 9006155HR615 5V15, 15hp, 230/460V, 3-ph, 60Hz @ 3600rpm 9006155V15615 5VR (Bare Shaft) Vertical flow 9006155VR615 5VR CE 11kW, 230/400V, 3-ph, 50Hz @ 3000rpm 9006155VR601615 5VR CE 11kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm9006155VR602Accessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Process isolation seal kit 607552004A 8'' pipe flange connection 13 1/2'' (343 mm) OD x 8'' (203 mm) ID 8 x 3/4-10 NC-2B x 1 1/8'' (29 mm)holes straddle both CL both flangesB DIA. Holes1. STD Inlet 2. Optional feetShop online at www.edwardsvacuum.com

Stokes 61B Series By-Pass Mechanical Booster PumpsStokes 61B by-pass mechanical boosters are designed to be used in conjunction withrotary-piston, dry vacuum, rotary vane and liquid ring pumps to increase pumping speed atworking pressures and shorten pump down time significantly. The Stokes 61B by-passboosters include an integral by-pass valve enabling the booster to start from atmosphere,eliminating the need for a vacuum pressure switch and ensures continuous operationregardless of vacuum level. The Stokes 61B can be mounted separately or on the inlet ofthe backing pump to create a compact integrated package.Features & BenefitsTechnical Data●●●●●Mechanical shaft seal – improved life and serviceabilityRingfeder® keyless gear locking system – stronger, faster timingLarge shaft diameters – allowing improved performance at highpressuresBelt drive or direct drive capabilityVertical or horizontal gas flowDisplacementV belt (2750 rpm) 3375m 3 h -1 / 2000ft 3 min -1Direct drive (1800 rpm) 2210m 3 h -1 / 1300ft 3 min -1Direct drive (3000 rpm) 3685m 3 h -1 / 2170ft 3 min -1Direct drive (3600 rpm) 4420m 3 h -1 / 2600ft 3 min -1Inlet/outlet flanges8” ASA/ANSI flangeMotor power EU/Asia18.5kWMotor power US TEFC 10/25hpBy-pass availableYesCooling methodAir cooledOil capacity (horizontal flow) 1.9 litre / 0.51galOil capacity (vertical flow) 4.1 litre / 1.1galMax temp rise 135°C / 275°FMax discharge temp 191°C / 375°FWeight bare shaft284kg / 625lbsWeight TEFC direct drive 530kg / 1170lbs8Page369DimensionsOrdering InformationProduct Description61B MHR CE, 18.5kW, 400V, 3-ph, 50Hz @ 3000rpm61B MHR CE, 18.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm61B MH10, 10hp, 230/460V, 3-ph, 60Hz @ 1800rpm61B MH25, 25hp, 230/460V, 3-ph, 60Hz @ 3600rpm61B MHR (Bare shaft) Horizontal flow61B MV10, 10hp, 230/460V, 3-ph, 60Hz @ 1800rpm61B MV25, 25hp, 230/460V, 3-ph, 60Hz @ 3600rpm61B MVR (bare shaft) Vertical flowOrder No.90061BMHR60190061BMHR60290061BMH1090061BMH2590061BMHR90061BMV1090061BMV2590061BMVR61B MVR CE, 18.5kW, 400V, 3-ph, 50Hz @ 3000rpm90061BMVR60161B MVR CE, 18.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm90061BMVR602Accessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002A 8'' pipe flange connection 13 1/2'' (343 mm) OD x 8'' (203 mm) ID 8 x 3/4-10 NC-2B x 1 1/8'' (29 mm)holes straddle both CL both flangesB DIA. Holes1. STD Inlet 2. Optional feetShop online at www.edwardsvacuum.com

Stokes 61B Series Process Isolation BoostersStokes 61B series process isolation boosters are designed to be used in conjunction withrotary-piston, dry vacuum, rotary vane and liquid ring pumps to increase pumping speed atworking pressures and shorten pump down time significantly. It incorporates fivemechanical seals for optimum protection from dust and particulate contamination. It alsoincludes an integral by-pass valve enabling the booster to start from atmosphere,eliminating the need for a vacuum pressure switch to ensure continuous operationregardless of vacuum level. The Stokes 61B series can be mounted separately or on theinlet of the backing pump to create a compact integrated package.8Page370Features & Benefits●●●●●Mechanical shaft seal – improved life and serviceabilityRingfeder® keyless gear locking system – stronger, faster timingLarge shaft diameters – allowing improved performance at highpressuresBelt drive or direct drive capabilityVertical or horizontal gas flowDimensionsTechnical DataDisplacementV belt (2750 rpm) 3375m 3 h -1 / 2000ft 3 min -1Direct drive (3000 rpm) 3685m 3 h -1 / 2170ft 3 min -1Direct drive (3600 rpm) 4420m 3 h -1 / 2600ft 3 min -1Inlet/outlet flanges8” ASA/ANSI flangeMotor power EU/Asia18.5kWMotor power US TEFC 25 hpBy-pass availableYesCooling water 7.6 - 11.4l min -1 / 2 - 3gal min -1Oil capacity (horizontal flow) 1.9 litre / 4.1galOil capacity (vertical flow) 4.1 litre / 8.8galMax temp rise 135°C / 275°FMax discharge temp 191°C / 375°FWeight bare shaft284kg / 625lbsWeight TEFC direct drive 538kg / 1185lbsRecommended OilV- Lube HOrdering InformationProduct Description61B 5HR CE 18.5kW, 230/400V, 3-ph, 50Hz @ 3000rpm61B 5HR CE 18.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm61B 5H25, 25hp, 230/460V, 3-ph, 60Hz @ 3600rpm61B 5HR (Bare Shaft) Horizontal flow61B 5V25, 25hp, 230/460V, 3-ph, 60Hz @ 3600rpm61B 5VR (Bare shaft) Vertical flowOrder No.90061B5HR60190061B5HR60290061B5H2590061B5HR90061B5V2590061B5VR61B 5VR CE 18.5kW, 230/400V, 3-ph, 50Hz @ 3000rpm90061B5VR60161B 5VR CE 18.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm90061B5VR602Accessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002Process isolation seal kit 607552004A 8" pipe flange connection 13 1/2" (343 mm) OD x 8” (203 mm) ID 8 x 3/4-10 NC-2B x 11/8" (29 mm) holes straddle both CL both flangesB DIA. Holes1. STD Inlet 2. Optional feetShop online at www.edwardsvacuum.com

Stokes 622 Series Mechanical Booster PumpsStokes 6" series mechanical boosters are designed to be used in conjunction with rotarypiston,dry vacuum, rotary vane and liquid ring pumps to increase pumping speed atworking pressures and shorten pump down time significantly. The Stokes 6" series can bemounted separately or on the inlet of the backing pump to create a compact integratedpackage.Featuring an extra large diameter shaft, the Stokes 6” series has the capability for use withhigher powered motors in addition to ensuring a uniquely rugged and durable mechanicalbooster. This allows the pumps to operate at their full displacement from atmosphericpressure with an appropriately sized backing pump.Features & BenefitsTechnical Data●●●●●Mechanical shaft seal – improved life and serviceabilityRingfeder® keyless gear locking system – stronger, faster timingLarge shaft diameters – allowing improved performance at highpressuresBelt drive or direct drive capabilityVertical or horizontal gas flowDimensionsDisplacementV belt (2750 rpm) 5100m 3 h -1 / 3000ft 3 min -1Direct drive (3000 rpm) 5525m 3 h -1 / 2350ft 3 min -1Direct drive (3600 rpm) 6630m 3 h -1 / 3900ft 3 min -1Inlet/outlet flanges8” ASA/ANSI flangeMotor power EU/Asia18.5kWMotor power US TEFC 25hpCooling methodAir cooledOil capacity (horizontal flow) 1.9 litre / 0.51galOil capacity (vertical flow) 4.1 litre / 1.1galMax pressure differential 333mbar / 250TorrMax temp rise 151°C / 275°FMax discharge temp 177°C / 350°FWeight bare shaft335kg / 740lbsWeight TEFC direct drive 617kg / 1360lbsRecommended OilV- Lube HOrdering InformationProduct DescriptionOrder No.622 MHR CE 18.5kW, 400V, 3-ph, 50Hz @ 3000rpm 900622MHR601622 MHR CE 18.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm900622MHR602622 MH25, 25hp, 230/460V, 3-ph, 60Hz @ 3600rpm 900622MH25622 MHR (Bare shaft) Horizontal flow 900622MHR622 MV25, 25hp, 230/460V, 3-ph, 60Hz @ 3600rpm 900622MV25622 MVR (Bare shaft) Vertical flow 900622MVR622 MVR CE 18.5kW, 400V, 3-ph, 50Hz @ 3000rpm 900622MVR601622 MVR CE 18.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm900622MVR602Accessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 6075520028Page371A 8" pipe flange connection 13 1/2" (343 mm) OD x 8” (203 mm) ID 8 x 3/4-10 NC-2B x 11/8" (29 mm) holes straddle both CL both flangesB DIA. Holes1. STD Inlet 2. Optional feetShop online at www.edwardsvacuum.com

Stokes 622 Series Process Isolation BoostersStokes 6" series process isolation boosters are designed to be used in conjunction withrotary-piston, dry vacuum, rotary vane and liquid ring pumps to increase pumping speed atworking pressures and shorten pump down time significantly. They incorporate fivemechanical seals for optimum protection from dust and particulate contamination and canbe mounted separately or on the inlet of the backing pump to create a compact integratedpackage.Features & BenefitsFeaturing an extra large diameter shaft, the Stokes 6” series has the capability for use withhigher powered motors in addition to ensuring a uniquely rugged and durable mechanicalbooster.Technical Data8Page372●●●●●Mechanical shaft seal – improved life and serviceabilityRingfeder® keyless gear locking system – stronger, faster timingLarge shaft diameters – allowing improved performance at highpressuresBelt drive or direct drive capabilityVertical or horizontal gas flowDisplacementV belt (2750 rpm) 5100m 3 h -1 / 3000ft 3 min -1Direct drive (3000 rpm) 5525m 3 h -1 / 2350ft 3 min -1Direct drive (3600 rpm) 6630m 3 h -1 / 3900ft 3 min -1Inlet/outlet flanges8” ASA/ANSI flangeMotor power EU/Asia18.5kWMotor power US TEFC 25hpCooling water 7.6-11.4 lmin -1 / 2-3 gal min -1Oil capacity (horizontal flow) 1.9 litre / 4.1galOil capacity (vertical flow) 4.1 litre / 8.8galMax pressure differential 333mbar / 250TorrMax temp rise 121°C / 250°FMax discharge temp 177°C / 350°FWeight bare shaft335kg / 740lbsWeight TEFC direct drive 625kg / 1370lbsRecommended OilV- Lube HDimensionsOrdering InformationProduct DescriptionOrder No.622 5HR CE 18.5kW, 230/400V, 3-ph, 50Hz @ 3000rpm 9006225HR601622 5HR CE 18.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm9006225HR602622 5H25, 25hp, 230/460V, 3-ph, 60Hz @ 3600rpm 9006225H25622 5HR (Bare shaft) Horizontal flow 9006225HR622 5V25, 25hp, 230/460V, 3-ph, 60Hz @ 3600rpm 9006225V25622 5VR (Bare shaft) Vertical flow 9006225VR622 5VR CE 18.5kW, 230/400V, 3-ph, 50Hz @ 3000rpm 9006225VR601622 5VR CE 18.5kW, 200-220/380V, 3-ph, 50/60Hz @3000/3600rpm9006225VR602Accessories & SparesOrder No.Replacement 6" booster Mseal - seal kit 607552001Replacement 6" booster - maintenance kit 607552002A 8" pipe flange connection 13 1/2" (343 mm) OD x 8” (203 mm) ID 8 x 3/4-10 NC-2B x 11/8" (29 mm) holes straddle both CL both flangesB DIA. Holes1. STD Inlet 2. Optional feetShop online at www.edwardsvacuum.com

HV8000 Mechanical booster pumpThe Edwards HV8000 high vacuum mechanical booster has been developed to providehigh reliability operation in aggressive environments.With a nominal pumping speed of 7200 m 3 h -1 (4241 ft 3 min -1 ) at 50Hz, it is ideal for largeindustrial and chemical applications including, steel degassing, metallurgy, coating, electronbeam welding and the process engineering industries.Features & BenefitsDimensions●●●●●Derived from the successful range of HV pressure blowers, theHV8000 is designed for arduous duty cycles and high powerapplications.Ideal for larger scale, harsh industrial and chemical applications,the HV8000 is available in Industrial, ATEX or Explosion Proofconfigurations.The HV8000 may be ordered as either bareshaft or with motorfitted. Variable frequency drives may be specified for greaterversatility.The HV8000 is available in vertical or horizontal gas flowconfiguration.For long service life, the external shaft seal is water-cooled.Horizontal Flow8Page373Vertical FlowShop online at www.edwardsvacuum.com

Technical DataOrdering InformationDisplacement (swept volume)50Hz 7200 m 3 h -1 / 4241 ft 3 min -160Hz 8640 m 3 h -1 / 5089 ft 3 min -1Max rotation speed50Hz3000 rpm60Hz3600 rpmMax pressure differential50Hz190 mbar / 143 TorrProduct DescriptionHV8000IND VF 380-415V, 3-ph, 50Hz, 18.5kWHV8000IND VF 440-460V, 3-ph, 60Hz, 25hpHV8000IND VF bareshaftHV8000IND HF 380-415V, 3-ph, 50Hz, 18.5kWHV8000IND HF 440-460V, 3-ph, 60Hz, 25hpHV8000IND HF bareshaftAccessories & SparesHV8000 VF motor mounting kit IECOrder No.A31101935A31101936A31101985A31102935A31102936A31102985Order No.A3110100260Hz120 mbar / 90 TorrHV8000 VF motor mounting kit NEMAA31101006Ultimate (depends on backingset)50Hz1.5 x 10 -4 mbar / 1 x 10 -4 Torr60Hz2 x 10 -4 mbar / 1.5 x 10 -4 TorrElectrical supply voltage50Hz380-415V, 3-ph60Hz440-460V, 3-phStandard motor power50Hz15 kW / 20 hp60Hz18.5 kW / 25 hpStandard backing set speedrequirements 2600 m 3 h -1 / 1530 ft 3 min -1HV8000 HF motor mounting kit IECHV8000 HF motor mounting kit NEMAGear Box Oil 4 Ltr Mobil SHC 629HV8000 Set of O-Rings spareHV8000 Mech seal kit spareHV8000 mech seal + sleeve kit spareHV8000 gear set spareHV8000 bearings kit spareHV8000 rotors kit spareHV8000 oil resevoir spareHV8000 sight glass spareA31102002A31102006H11023011A31101801A31101802A31101803A31101804A31101805A31101806A31101807A31101808Recommended oil Mobile SHC 629Max oil capacity (vertical gasflow config)8.3 litre / 2.18 US gal8Inlet/outlet connection 10” class 150 ASME B16.5Inlet/outlet cooling waterconnectionRp 1 / 2 ISO 7-1 ( 1 / 2 BSP)Page374End cover purge gas inletMax cooling water supplypressureRp 3 / 8 ISO 7-1 ( 3 / 8 BSP)4 bar / 58 psiMax cooling water supply temp 35°C / 95°FCooling water flow rate 15 l min -1 / 3.96 US gal min -1Noise level82 dB(A)Weight (without motor)580 kg / 1279 lbWeight (with standard motor)720 kg / 1587 lbShop online at www.edwardsvacuum.com

HV30000 Mechanical Booster PumpThe HV pump systems combine Edwards expertise in manufacture and assembly ofcomplete industrial vacuum systems with Dresser’s world-renowned Roots pumptechnology. These pumps are backed by Edwards Dry Pumps or Mechanical Boosterpumps.This range of high capacity mechanical booster pumps is designed to operate reliably forlong periods with no need for maintenance. The HV pumps can be fitted with an inverter toallow them to be started at atmospheric pressure, at the same time as the dry pumps.Features & Benefits●●●●●Water cooled shaft seals and after coolerFitted with thermal snap-switch, to protect the pump from overtemperatureNitrogen purge inlet fitted as standardVertical flow, direct drive (horizontal optional)Control with inverter, or interlock with a pressure switch inputDimensionsApplications●●●●●Semiconductor processingVacuum distillationVacuum packagingSteel degassingThin film coatingPerformance Curves8Page375(1) In their most efficient range, booster pumps(2) fill the gap between the pumping speeds of vapour diffusion pumps(3) vapour booster pumps(4) and rotary or dry high vacuum pumpsShop online at www.edwardsvacuum.com

8Page376Technical DataDisplacement(Supply)50 Hz 30000 m 3 h -117700 ft 3 min -160 Hz 36000 m 3 h -121204 ft 3 min -1Maximum pressure differential(Supply)50 Hz 29 mbar22 Torr60 Hz 24 mbar18 TorrRecommended backing pumps2 x GV400 / DP400 and 2 xEH4200Electrical supply400 V 50 Hz 3-ph or 460 V 60Hz 3-phMotor power50 Hz 30 kW / 40 hp60 Hz #Cooling-water supplyMaximum pressure10 bar / 145 psiInlet temperature20 o CRecommended oil Ultragrade 20Oil capacity33 l / 34.9 qtAmbient operating temperature 5 o - 40 o CMaximum operating humidity 100% RHWeight (without motor) 3100 kg / 6820 lb# On requestOrdering InformationProduct DescriptionHV30000 High Capacity Mechanical Booster PumpAccessories & SparesUltragrade 20 OilUltragrade 20 OilUltragrade 20 OilUltragrade 20 OilUltragrade 20 OilOrder No.HV30000 MechanicalBooster PumpOrder No.H11024015H11024012H11024013H11024011H11024010Shop online at www.edwardsvacuum.com

Chemical Dry PumpsCXS Chemical dry pumps 381CDX Dry pumps 385EDP Series Chemical Dry Pumps 3879Page377Shop online at www.edwardsvacuum.com

Chemical Dry Pumps9Page378IntroductionEdwards is a market leader in dry pump technology and pioneer ofdry vacuum for the chemical process, pharmaceutical and finechemical industries. The CDX uses the very latest in screw pumpingtechnology, whilst the EDP range utilizes the reverse clawmechanism, proven over more than 20 years and in over 100,000installations worldwide, to provide a clean and robust vacuumsolution.Why Dry?Dry running pumps have no oil, steam or water in the process volume.This eliminates, at source, the pollution traditionally associated withwet sealed vacuum systems and provides cost and materialshandling benefits as the sealing medium does not have to bereplenished:• no contamination of the process stream• no polluted effluent• no messy oil drums• improved processing with reduced down time• lower utility and consumable costsThe proven and rugged non contacting designs, both screw andreverse claw mechanisms, include the ability to control pump bodyand internal gas temperatures allowing a comprehensive range ofsolvents, flammables and corrosives to be pumped. Systemizedvariants address the EU's explosive atmospheres (ATEX) directivefor Category (Zone 0) T4 operation. The mechanisms are both highlytolerant to liquids and particles in the gas stream and are suitable formany applications, including:• Distillation• Drying• Evaporation and crystalisation• Filter/dryers• Solvent recovery• Reactor service• House/central vacuumThe product range is available from 83 m 3 h -1 / 49 ft 3 min -1 to900 m 3 h -1 530 ft 3 min -1 with capacity expandable to 30000 m 3 h -1 /17660 ft 3 min -1 and an ultimate pressure of better than 10 -2 mbar /0.015 Torr using combinations of mechanical vacuum boosters.Applications Engineering is a core competence and Edwards are ableto offer a comprehensive solutions package that includes:• Process design• Equipment specification and selection• Safety and operating procedures• Vacuum system and control integration• Commissioning adviceEdwards have a full range of dry pumps with a set of characteristicssuited to most applications.CXS Dry PumpsSimple to Install and UseIntegral controller and safety systems for ‘Plug and Pump’, flexibleoperation.High ReliabilityCutting edge screw technology for corrosion-free operation androbust liquid and solids handling.Low Cost of OwnershipBest in class installation and running costs with up to 5 years betweenservice.Environmentally FriendlySmooth, quiet running,

CXS Chemical Dry Screw PumpDesigned for High Reliability. Edwards patented screw-rotor designdelivers excellent pumping speed and is part of an advanced thermalmanagement system that maximizes pump performance and life ofthe seals, bearings, and motor to ensure long pump service life.Adaptable to a Wide Range of Applications. CXS pumps are offeredwith a range of purge options, filters, catchpots, inlet isolation valvesand silencers; together with our special high flow purge and solventflush accessory enabling the inside of the pump to be kept cleanwithout disassembly.Long Service Intervals and Easy Swap-out. Long-life non-oxidizinggearbox oil enables service intervals of up to 5 years to be achieved.Quick-connect utility interfaces provide for rapid pump installationand exchange to improve factory up-time.Low Cost of Ownership. Custom high-efficiency motor and drivesystem with advanced seal technology provides for greatly reducedpower consumption. Minimal cooling water and purge gasrequirements coupled with improved powertrain technology providefor long service intervals and near maintenance-free operation.Minimum Workplace and Environmental Impact. CXS pumps areincredibly compact. Edwards advanced screw-rotor design providesfor remarkably quiet, low vibration operation even without a silencer.Simple to Install and Operate. CXS pumps are easily wheeled orfork-lifted into position, coupled to the process and services using thesupplied mating connectors and run at the push of a button.Ideal for Integration into Larger Systems. CXS pumps andcombinations are supplied with serial (RS232) communication andLAN-based web-serving capability as standard. Optional modules areavailable to add Parallel (digital I/O) and Profibus control functionality.At Your Service. Edwards has highly skilled applications specialistswho will advise on the optimum configuration for your process orapplication.CXS Innovative Technology.CXS Innovative Screw TechnologyAdvanced Screw Technology• Edwards tapered screw technology results in smooth, gradualcompression along the length of the rotor for improved thermalcontrol and optimised pumping at all inlet pressures• The cooling system and compression technology deliveroutstanding performance and active temperature control protectsthe pump from thermal shocks, condensation and corrosion• Advanced machining techniques and design features eliminate theneed for rotor coatings while maintaining superb ultimate vacuumperformanceReliability• Repeatable vacuum• Excellent liquid handling (up to 25 litre slugs)• Excellent solids handling (up to 1 kg slugs)• No end-compression plate to trap solids and jam rotors or causehydraulic locks• Can flush with solvents, water or steam, online or offline• Configurable pump parameters for system optimisation• Special start-up and shutdown modes to free the rotors or avoidcold seizures, if required• No interstage condensers to create the potential for corrosionControl• Integral PID pressure control with inbuilt inverter• Flexible communications options• No complex programming required• Customisable for enhanced process optimisation• Data monitoring via onboard communications options• High torque motor 'jogging' to prevent seizureEfficient Motor and Inverter Drive System• Compact, high speed, water-cooled encapsulated motor• 110 Hz operation for smaller footprint and lower noise• High start torque for maximum restart capability• Reduced bearings temperatures for longer life• Matched inverter drive for increased efficiency• Water-cooled inverter means lower temperature electronics, hencelonger lifeATEX CertificationCAT 1/2 SystemsThe CXS dry vacuum pump, certified as an ATEX Category 1machine relying on constructional safety and containment, is safe topump gases from gas group IIB3.CAT 2 SystemsThe standard protection concept for CXS ATEX Category 2 pumpsystems is ‘Constructional Safety’. Solvent flush options if necessarycan ensure constructional safety is maintained. CAT 2 containmentoptions are also available.Our experienced applications team are trained to provide expertadvice on choosing the correct pumping system.Applications KnowledgeExpert applications engineering is central to Edwards’ success. Wealways provide solutions to customer problems. This can involve:• Process design• Equipment selection• Integration into the plant control philosophy• Safety considerations (e.g. HAZOPs)• Advice at start-up, commissioning and trainingCXS CombinationsShop online at www.edwardsvacuum.comUsing an extensive range of pre-engineered modules Edwards CXSoffers the capability to match most customer application needs.Systemisation is made easy with CXS pumps. The following items areavailable as factory fitted standard matrix options or simple ‘Bolt On’accessories:• EH mechanical boosters * • Exhaust silencer• Condensers• Instruments• Receivers• Inlet by-pass line for finerpressure control• Knockout pots• PC interfaces for control anddata monitoring• Dust filters• Ethernet, MCMµTim andProfibus interfaces• Solvent flush kits• Valves• Flame arrestors• Base skids• Isolation and control valves • Documentation packages*. Edwards EH series boosters feature our unique hydrokinetic drive which can havesignificant cost and performance advantages over direct drive machines. Thehydrokinetic drive removes any need for pressure sensors or by-pass lines or inverters,and allows the booster to run from atmospheric pressure to ultimate vacuum, givingfaster pumpdown and more flexible operation with less maintenance.The requirement for these or other accessories is determined throughexpert applications engineering.Standard CXS pumps and EH mechanical booster combinationsEH500 EH1200 EH2600CXS 160 ● ●CXS 250 ● ●9Page379

EDP12FROM PROCESSELECTRICALSUPPLYFFROMCONTROL8VPPNEUMATICFGSLINEELECTRICALSUPPLYFCVSOVVPNRVPCVSEAL PURGENITROGENCOOLINGFG7WATEROUTLETFGTSPITOCONTROL3TCV654COOLINGWATERINLETS9Page3801 Inlet 5 Gearbox2 Sealed high vacuum bearings 6 Torque limiter3 Indirect cooling 7 Outlet4 Rugged modular construction 8 Reversed clawThe Reverse Claw MechanismThe EDP range are multistage claw mechanisms. Each stagecomprises of two claw shaped rotors on parallel shafts, which rotatein opposite directions. The claws trap and compress the process gas,which takes a zig-zag path between the stages, as it is moved alongthe axis of the shaft from the inlet at the top to the exhaust at thebottom.ADA Inlet exposed C Outlet isolatedB Inlet isolated D Outlet isolatedDuring each complete rotation of the claws, first the inlet port of eachpair is exposed (to admit gas to the pump), then both the inlet andoutlet are isolated (to trap and compress the gas) and finally the outletis exposed (to expel the compressed gas).BCPROCESS EXHAUSTP&ID example: Typical dry pump system with mechanical boosterand seal purge optionsAccessory modules offered include:Mechanical BoostersProvide increased pumping speed & improved ultimate. Availablewith:• Hydrokinetic drive for faster pumpdown• Rotation sensorsGas PurgesUsed to dilute flammables and improve seal life• Inlet purge*• Shaft seal purge*SafetyEdwards offer a comprehensive range of solutions to containmentand constructional safety, to satisfy ATEX or your own requirements.• Flame arrestors• Solvent flush*• Inlet isolation valves*VesselsSolvents and other liquids carried over in the process stream can berecovered upstream or downstream of the pump.• Knock-out pot*• Condenser*• Receiver*AcousticsSilencers reduce pulsations in the exhaust and hence noise in theexhaust line. All silencers are drainable.• SilencersMonitoring & ControlOfferings range from gauges and simple 4-20 mA transmitters to fullyenclosed bespoke control units.• Temperature transmitters• Pressure transmitters• Pressure gauges• Rotation sensors• Inverter drives• Control box* Denotes item is available with solenoid/switch control/actuation.# All additional control and sensor requirements to achieve zoning are supplied with theflame arrestor module.Shop online at www.edwardsvacuum.com

CXS160 chemical dry pumpEdwards pioneered the industrial dry vacuum pump in 1986 and now with more than150,000 systems sold worldwide this Edwards expertise has been used to develop a drypump capable of withstanding the harshest of process applications.The CXS incorporates innovative screw design features with simplicity and reliability inmind, a ‘Plug and Pump’ philosophy has been adopted. As a result, the CXS has industryleading reliability, safety and low cost of ownership.Features & Benefits●●●●●Continuous vacuum from atmosphere to 10-3 mbarIntegral temperature controlPumps corrosive vapours without deteriorationExcellent liquid and solids handlingDeeper vacuum than traditional technologies - not limited by sealfluid or cooling water temperatureDimensionsApplications●●●●●DryingDegassingDeodorisationDistillationReactor servicePerformance Curves9Page381Shop online at www.edwardsvacuum.com

Technical DataOrdering Information9Page382Maximum pumping speed160 m 3 h -1 / 95 ft 3 min -1-Capacity at 10 mbar (7.5Torr) 132 m 3 h -1 / 78 ft 3 min -1Ultimate vacuum

CXS250 chemical dry pumpEdwards pioneered the industrial dry vacuum pump in 1986 and now with more than150,000 systems sold worldwide this Edwards expertise has been used to develop a drypump capable of withstanding the harshest of process applications.The CXS incorporates innovative screw design features with simplicity and reliability inmind, a ‘Plug and Pump’ philosophy has been adopted. As a result, the CXS has industryleading reliability, safety and low cost of ownership.Features & Benefits●●●●●Continuous vacuum from atmosphere to 10-3 mbarIntegral temperature controlPumps corrosive vapours without deteriorationExcellent liquid and solids handlingDeeper vacuum than traditional technologies - not limited by sealfluid or cooling water temperatureDimensionsApplications●●●●●DryingDegassingDeodorisationDistillationReactor servicePerformance Curves9Page383Shop online at www.edwardsvacuum.com

Technical DataOrdering Information9Page384Maximum pumping speed250 m 3 h -1 / 148 ft 3 min -1Capacity at 10 mbar (7.5Torr) 230 m 3 h -1 / 135 ft 3 min -1Ultimate vacuum

CDX1000 Dry Vacuum PumpEdwards CDX1000 represents the next generation of dry pump technology. The CDX1000is a double ended mechanism for the chemical process, pharmaceutical and petrochemicalindustries.This innovative technology leverages Edwards latest manufacturing and designphilosophies. The CDX1000 is suited to larger processes where repeatability and reliabilityare key. Technologies and manufacturing techniques have been carefully selected toproduce a robust, high performance machine that is simple to operate and maintain.Features & Benefits●●●●●Continuous performance from atmospheric pressures to ultimatevacuumExcellent temperature controlLarge liquid slug capabilitiesNo effluent generatedDry running mechanismDimensionsApplications●●●●●ProcessesDistillationDryingEvaporation/CrystallisationSolvent/Vapour RecoveryPerformance Curves9Page3851. Speed 2. PowerNote: this diagram shows a CDX with integral flame arrestors.A Side viewB Plan viewC End viewD From fixing dimensions with mounting feet removed1. Pump inlet2. Pump outlet3. Fixing holes Ø18 mm (0.71 inch), 2 holes on each mounting foot4. Fixing holes Ø17 mm (0.67 inch), 2 holes on each mounting bracketShop online at www.edwardsvacuum.com

Technical DataOrdering Information9Page386Maximum pumping speed900 m 3 h -1530 ft 3 min -1Capacity at 10 mbar (7.5 Torr) 900 m 3 h -1530 ft 3 min -1Ultimate vacuum5 x 10 -3 mbar4 x 10 -3 TorrMaximum back pressure - standard1150 mbarA(optional*)2.0 psigPower consumption at10 mbar (7.517.1 kWTorr)23.2 HpStandard motor(380 - 400V, 3 ph, 5030 kWHz)Standard motor(200 - 460V, 3 ph, 6040 hpHz)Cooling water flow rate (adjustable) 10 – 20 lmin -1Cooling water supply temperaturerangeCooling water supply pressure2.64 - 5.28 galmin -15 - 35 o C / 41 - 95 o F2 – 10 barg29 – 145 psigSeal purge flow (maximum), regulatedto 0.3 - 0.5 barg, (5 - 7 psig) 24 l min -1Seal purge supply pressure(minimum -maximum)Noise (max. with exhaust silencer)Weight (with frame and standardmotor)Process connection, inletProcess connection, outletPumping mechanism0.85 ft 3 min -12 – 10 barg29 – 145 psig82 dB(A)1710 kg3765 lbs6” ANSI/DN1503” ANSI/DN80Product DescriptionCDX1000, 30kW, 50 Hz, Flame Proof with Integral FlameArrestorsCDX1000 Dry Vacuum Pump, 30kW, 50 Hz, Flame Proof(without Integral Flame Arrestors)CDX1000 Dry Vacuum Pump, 40 HP, 60 Hz, Flame Proof withIntegral Flame ArrestorsCDX1000 Dry Vacuum Pump, 40 HP, 60 Hz, Flame Proof(without Integral Flame Arrestors)Accessories & SparesGear Box Oil 4 Ltr Mobil SHC 629Coolant 0.9/2L DrystarIDX Routine maintenance kitIDX Heat exchanger cleaning kitIDX Cooling system overhaul kitIDX Motor fitting kitIDX Drive coupling kitIDX Bearing and seal replacement kitIDX Oil pump replacement kitIDX Strip and rebuild kitIDX Flame arrestor cleaning kitIDX Hoses kitIDX Flame arrestor replacement kit (inlet)IDX Flame arrestor replacement kit (outlet)IDX Flame arrestor tooling kitOrder No.A70801985A70802985A70811985A70812985Order No.H11023011H12810003A70801800A70801801A70801802A70801803A70801804A70801805A70801806A70801807A70801808A70801809A70801810A70801811A70801812* Consult EdwardsShop online at www.edwardsvacuum.com

EDP80 - Dry Chemical PumpsEDP pumps are based on Edwards’ oil-free, non-contacting, award-winning, reverse clawmechanism. They provide consistent vacuum at high efficiencies and low costs ofownership. Dry pumps completely eliminate all problems of process contamination andcreation of polluted effluent, which are experienced with traditional wet vacuum pumptechnologies.Features & Benefits●●●●●Staged compression for optimum temperature profile within thepump and no requirement for cooling gas injectionInherently free drainingAble to handle liquid or particulate carryoverShort gas path eliminates particulate build-up and corrosion -Edwards’ patented designCan flush with solvents, water or steamDimensionsApplications●●●●●DryingDistillationReactor serviceSolvent recoveryHouse/Central vacuumPerformance Curves9Page387EDP80 A B C D E F G H I14231254974353443350350700850(56.0)(49.4)(38.3)(13.9)(17.4)(13.8)(13.8)(27.6)(33.5)1. Pump inlet2. Pump outlet3. Fixing hole: Ø18 mm (4 off)4. Cooling water outlet connection5. Cooling water inlet connection6. Nitrogen supply inlet connectionShop online at www.edwardsvacuum.com

9Page388Technical DataMaximum pumping speed50 Hz 83 m 3 h -1 / 49 ft 3 min -160 Hz 102 m 3 h -1 / 60 ft 3 min -1Capacity at 10 mbar (7.5 Torr)50 Hz 75 m 3 h -1 / 44 ft 3 min -160 Hz 102 m 3 h -1 / 60 ft 3 min -1Ultimate vacuum50 Hz 0.5 mbar / 0.4 Torr60 Hz 0.3 mbar / 0.2 TorrMaximum back pressureStandard1150 mbar / 2.2 psigOptional*1300 mbar / 4.4 psigPower consumption at 10 mbar(7.5 Torr)50 Hz 3.3 kW / 4.4 hp60 Hz 4.0 kW / 5.4 hpStandard motor(380 – 400 V, 3 ph, 50 Hz) 5.5 kWStandard motor(200 – 460 V, 3 ph, 60 Hz) 7.5 hpCooling water flow rate(adjustable)50 Hz 1 – 8 lmin -1 /0.3 – 2.1 galmin -160 Hz 1 – 10 lmin -1 /0.3 – 2.6 galmin -1Cooling water supply pressure 2 – 10 barg / 29 – 145 psigSeal purge flow(maximum),regulated to 0.3 -0.5 barg (5 – 7 psig)20 l min -1 / 0.7 ft 3 min -1Seal purge supply pressure 2 – 10 barg / 29 – 145 psig(minimum - maximum)Noise (max. with exhaustsilencer)73 dB(A)Weight (with frame and standardmotor)50 Hz 648 kg / 1429 lbs60 Hz 650 kg / 1433 lbsInlet2'' ANSI / DN50Outlet1.5'' ANSI / DN40Pumping mechanism3 stage reversed claw* Consult EdwardsOrdering InformationProduct DescriptionEDP80 50Hz, Bareshaft PumpEDP80 60Hz, Bareshaft PumpAccessories & SparesSpares Kit Routine Maintenance DPSpares Kit Motor Fitment DPSpares Kit Upper Bearing DPSpares Kit Swept Volume DPSpares Kit Lower Bearing DPStd Replacement PRV DPBellows Replacement PRV DPSwing PRV ChemicalSpares Kit Bellows Overhaul DPSpares Kit O Ring DPSpares Kit Std PRV Overhaul DPSpares Kit Swing PRV Overhaul ChemicalDP250/EDP200 Clutch ToolsOrder No.A70545000A70547000Order No.A70501825A70501805A70501826A70501827A70501828A70501816A70501820A70501832A70501829A70501821A70501831A70501833A21071082Shop online at www.edwardsvacuum.com


9Page390Technical DataMaximum pumping speed50 Hz 163 m 3 h -1 / 96 ft 3 min -160 Hz 202 m 3 h -1 / 119 ft 3 min -1Capacity at 10 mbar (7.5 Torr)50 Hz 153 m 3 h -1 / 90 ft 3 min -160 Hz 198 m 3 h -1 / 117 ft 3 min -1Ultimate vacuum50 Hz 0.5 mbar / 0.4 Torr60 Hz 0.3 mbar / 0.2 TorrMaximum back pressureStandard1150 mbar / 2.2 psigOptional*1300 mbar / 4.4 psigPower consumption at 10 mbar(7.5 Torr)50 Hz 4.9 kW / 6.6 hp60 Hz 4.9 kW / 6.6 hpStandard motor (380 – 400 V, 3ph, 50 Hz)7.5 kWStandard motor (200 – 460 V, 3ph, 60 Hz)11 hpCooling water flow rate(adjustable)50 Hz 1 – 8 lmin -1 /0.3 – 2.1 galmin -160 Hz 1 – 10 lmin -1 /0.3 – 2.6 galmin -1Cooling water supply pressure 2 – 10 barg / 29 – 145 psigSeal purge flow(maximum),regulated to 0.3 -0.5 barg (5 – 7 psig)20 lmin -1 / 0.7 ft 3 min -1Seal purge supplypressure(minimum - maximum)2 – 10 barg / 29 – 145 psigNoise (max. with exhaustsilencer)78 dB(A)Weight (with frame and standardmotor)50 Hz 747 kg / 1647 lbs60 Hz 756 kg / 1667 lbsInlet3 ANSI / DN80Outlet1.5 ANSI / DN40Pumping mechanism3 stage reversed clawOrdering InformationProduct DescriptionEDP160 50Hz, Bareshaft PumpEDP160 60Hz, Bareshaft PumpAccessories & SparesSpares Kit Routine Maintenance DPSpares Kit Motor Fitment DPSpares Kit Upper Bearing DPSpares Kit Swept Volume DPSpares Kit Lower Bearing DPStd Replacement PRV DPBellows Replacement PRV DPSwing PRV ChemicalSpares Kit Bellows Overhaul DPSpares Kit O Ring DPSpares Kit Std PRV Overhaul DPSpares Kit Swing PRV Overhaul ChemicalDP250/EDP200 Clutch ToolsOrder No.A70544000A70546000Order No.A70501825A70501805A70501826A70501827A70501828A70501816A70501820A70501832A70501829A70501821A70501831A70501833A21071082* Consult EdwardsShop online at www.edwardsvacuum.com


9Page392Technical DataMaximum pumping speed50 Hz 260 m 3 h -1 / 320 ft 3 min -160 Hz 153 m 3 h -1 / 188 ft 3 min -1Capacity at 10 mbar (7.5 Torr)50 Hz 255 m 3 h -1 / 150 ft 3 min -150 Hz 315 m 3 h -1 / 185 ft 3 min -1Ultimate vacuum50 Hz 0.5 mbar / 0.4 Torr60 Hz 0.2 mbar / 0.2 TorrMaximum back pressureStandard1150 mbar / 2.2 psigOptional*1300 mbar / 4.4 psigPower consumption at 10 mbar(7.5 Torr)50 Hz 6.0 kW / 8.0 hp60 Hz 6.0 kW / 8.0 hpStandard motor (380 – 400 V, 3ph, 50 Hz)50 Hz 11 kW60 Hz 15 kWStandard motor (200 – 460 V, 3ph, 60 Hz)50 Hz 15 hp60 Hz 20 hpCooling water flow rate(adjustable)50 Hz 1 – 10 lmin -1 /0.3 – 2.6 galmin -160 Hz 1 – 10 lmin -1 /0.3 – 2.6 galmin -1Cooling water supply pressure 2 – 10 barg / 29 – 145 psigSeal purge flow(maximum),regulated to 0.3 -0.5 barg (5 – 7 psig)20 lmin -1 / 0.7 ft 3 min -1Seal purge supplypressure(minimum - maximum)2 – 10 barg / 29 – 145 psigNoise (max. with exhaustsilencer)50 Hz 78 dB(A)60 Hz 79 dB(A)Weight (with frame and standardmotor)50 Hz 756 kg / 1667 lbs60 Hz 848 kg / 1870 lbsInlet3 ANSI / DN80Outlet1.5 ANSI / DN40Pumping mechanism3 stage reversed clawOrdering InformationProduct DescriptionEDP250 50/60Hz, Bareshaft PumpAccessories & SparesSpares Kit Routine Maintenance DPSpares Kit Motor Fitment DPSpares Kit Upper Bearing DPSpares Kit Swept Volume DPSpares Kit Lower Bearing DPStd Replacement PRV DPBellows Replacement PRV DPSwing PRV ChemicalSpares Kit Bellows Overhaul DPSpares Kit O Ring DPSpares Kit Std PRV Overhaul DPSpares Kit Swing PRV Overhaul ChemicalDP250/EDP200 Clutch ToolsOrder No.A70543000Order No.A70501825A70501805A70501826A70501827A70501828A70501816A70501820A70501832A70501829A70501821A70501831A70501833A21071082* Consult EdwardsShop online at www.edwardsvacuum.com

EDP400 - Dry Chemical PumpsEDP pumps are based on Edwards’ oil-free, non-contacting, award-winning, reverse clawmechanism. They provide consistent vacuum at high efficiencies and low costs ofownership. Dry pumps completely eliminate all problems of process contamination andcreation of polluted effluent, which are experienced with traditional wet vacuum pumptechnologies.Features & Benefits●●●●●Staged compression for optimum temperature profile within thepump and no requirement for cooling gas injectionInherently free drainingAble to handle liquid or particulate carryoverShort gas path eliminates particulate build-up and corrosion -Edwards’ patented designCan flush with solvents, water or steamDimensionsApplications●●●●●DryingDistillationReactor serviceSolvent recoveryHouse/Central vacuumPerformance Curves9Page393EDP400 A B C D E F G H J50Hz 1721 1549 1149 349 362 476 476 997 946(60 Hz) (67.8) (61.0) (45.2) (13.7) (14.3) (18.7) (18.7) (39.3) (37.2)1. Pump inlet2. Pump outlet3. Fixing hole: Ø18 mm (4 off)4. Cooling water outlet connection5. Cooling water inlet connection6. Nitrogen supply inlet connectionShop online at www.edwardsvacuum.com

Technical DataOrdering InformationMaximum pumping speed50 Hz 377 m 3 h -1 / 222 ft 3 min -160 Hz 427 m 3 h -1 / 251 ft 3 min -1Capacity at 10 mbar (7.5 Torr)50 Hz 377 m 3 h -1 / 222 ft 3 min -150 Hz 422 m 3 h -1 / 248 ft 3 min -1Ultimate vacuumProduct DescriptionEDP400 50 Hz, Bareshaft PumpEDP400 60 Hz, Bareshaft PumpAccessories & SparesSpares Kit Routine Maintenance DPSpares Kit Motor Fitment DPSpares Kit Upper Bearing DPSpares Kit Swept Volume DPOrder No.A70542000A70541000Order No.A70501825A70501805A70501826A7050182750 Hz 0.4 mbar / 0.3 TorrSpares Kit Lower Bearing DPA7050182860 Hz 0.2 mbar / 0.2 TorrStd Replacement PRV DPA70501816Maximum back pressureBellows Replacement PRV DPA70501820StandardPower consumption at 10 mbar(7.5 Torr)1150 mbar / 2.2 psigSwing PRV ChemicalSpares Kit Bellows Overhaul DPSpares Kit O Ring DPA70501832A70501829A7050182150 Hz 7.0 kW / 9.4 hpSpares Kit Std PRV Overhaul DPA7050183160 Hz 7.0 kW / 9.4 hpStandard motor (380 – 400 V, 3ph, 50 Hz)Spares Kit Swing PRV Overhaul ChemicalDP250/EDP200 Clutch ToolsA70501833A2107108250 Hz 18.5 kW60 Hz 25.0 kWStandard motor (200 – 460 V, 3ph, 60 Hz)50 Hz 25.0 hp60 Hz 30.0 hpCooling water flow rate(adjustable)50 Hz 1 – 10 lmin -1 /0.3 – 2.6 galmin -160 Hz 1 – 10 lmin -1 /0.3 – 2.7 galmin -19Page394Cooling water supply pressureSeal purge flow(maximum),regulated to 0.3 -0.5 barg (5 – 7 psig)Seal purge supplypressure(minimum - maximum)2 – 10 barg / 29 – 145 psig20 lmin -1 / 0.7 ft 3 min -12 – 10 barg / 29 – 145 psigNoise (max. with exhaustsilencer)50 Hz 82 dB(A)60 Hz 82 dB(A)Weight (with frame and standardmotor)50 Hz 918 kg / 2024 lbs60 Hz 960 kg / 2116 lbsInlet3 ANSI / DN80Outlet1.5 ANSI / DN40Pumping mechanism3 stage reversed claw* Consult EdwardsShop online at www.edwardsvacuum.com

Liquid Ring PumpsHR Series Liquid Ring Pumps 404LR1A Liquid Ring Pumps 412LR1B Liquid Ring Pumps 43310Page395Shop online at www.edwardsvacuum.com

Liquid Ring Vacuum Pumps500400Suction Capacity (m 3 /hr) Dry Air300200Stage 1Stage 2Liquid ring vacuum pumps continue to provide the optimum solutionfor many rough vacuum applications in the chemical and alliedprocess industries. The general reliability, low maintenancerequirements, low vibration and noise levels coupled with the uniquecapabilities when handling wet gases all contribute to the popularityof the pump.Operating RangeLiquid ring pumps are suitable for continuous operation on vacuumapplications at any suction pressure down to 30 mbar A. Standardperformance data is based upon 15 °C water as the seal liquid, lowerpressures may be possible with alternative sealing liquid.A wide range of capacities are offered from two basic pumpconfigurations, single and two stages.Liquid Ring Vacuum Pump Range3000025000Liquid Ring Pump Range10000Comparison of Single and two stage performanceMaterials of ConstructionThe standard construction material is cast iron with either aspheroidal graphite or bronze impeller depending upon the series.One of the main features of the liquid ring pump is the availability ofvarious alternative materials of construction. The main options arestainless steel, aluminium bronze, and duplex stainless steels. Somepump sizes, which are particularly suited to the pharmaceuticalindustry, are also available in hastelloy.For details on material availability please contact your local salesoffice.How It Works13040 60Suction Pressure (mbar A)80 100210Page396Suction Capacity (m 3 /h)2000015000100001 Stage8350002 Stage033 40 60 100 200 500 1000Inlet Pressure mbar AThe single stage range is capable of operation at 30 mbar A whererequired, but is most suited to applications with continuous operationat inlet pressures from atmospheric down to 100 mbar A. Thesmallest pump in the range is a 25 m 3 h -1 close coupled model whilethe largest has a nominal capacity of 30000 m 3 h -1 .The two-stage range is most effective on applications with continuousoperation below 100 mbar A and has models from 50 up to5000 m 3 h -1 . Detailed performance data is shown on the followingpages.71 Suction 5 Sealing ring2 Discharge 6 Direction of rotation3 Discharge port 7 Suction port4 Casting 8 ImpellerThe impeller is mounted eccentrically to the axis of the pump casing,the liquid ring circulates concentrically within the axis of the casing.Process gases are drawn through the inlet port into the impeller cellswhere the gas is compressed and discharged through the dischargeport. The seal liquid which forms the liquid ring is supplied at apressure equal to the discharge pressure of the pump, which allowsthe pump to automatically make up the amount of liquid which isdischarged through the discharge port, therefore removing the heatof compression from the pump.654Shop online at www.edwardsvacuum.com

ApplicationsSome of the more common processes which utilise liquid ringtechnology are listed below.• Distillation• Stripping• Filtration• Solvent recovery• Evaporation• Deaeration• DryingThese processes are used in a wide range of industries andapplications, which include:• Chemical processing • Electronics industry• Food processing and packaging• Automobile components• Pharmaceutical production • Power generation• Oil exploration and refining • Waste collection• Glass industry• Building materials• Tobacco conditioning • Soil remediation• PackagingSystemsLiquid ring pumps are offered in a number of standard configurations,with a selection of seal liquid systems to suit the particular applicationand environment.SLRP ConfiguratorThe SLRP system utilizes 3D AutoCAD design software to produce atailored liquid ring pump package constructed from pre-engineeredmodules. The main benefits being the instant availability of acustomized quotation and package general arrangement drawingand reduced lead times.The system offers a selection of pump material options along with achoice from three standard operating configurations to suit the processconditions.Partial RecirculationIn this case, the liquid/gas mixture is separated in the dischargeseparator. The recovered service liquid is then mixed with fresh sealfluid to maintain a constant temperature to the pump. The excessliquid, equivalent to the make-up supply, goes to drain. The minimumamount of fresh make-up fluid is used to ensure cavitation freeoperation at the required suction pressure.89711 Process gas inlet 6 Make-up fluid2 Gas vent 7 Manual control valve3 Discharge separator 8 Edwards liquid ring vacuum pump4 30% – 70% fluid to drain 9 Check valve5 Seal fluid make-up valveTotal RecirculationTotal recirculation is used where it is desirable to minimise wasteliquid from the pump. All of the liquid is re-circulated back into thepump via a heat exchanger, which removes the heat of compressionand any latent heat of condensation from the seal liquid. The sealliquid can then be reused by the pump minimising the effluent fromthe pump system. The system is of particular interest when the pumpis operating on a solvent removal or drying process where processvapours are condensed within the pump, often the pump seal liquidcan be the same as the condensed process vapours.23456213114510Once-ThroughThis is the most basic configuration available, it comprises of a pumpcomplete with electric motor and drive and base frame. A dischargeseparator is required at the pump discharge. It is used where anample supply of seal liquid, which can be subsequently discharged todrain, is available. The liquid/gas mixture is discharged to drainthrough the discharge line.561210981 Process gas inlet 7 Cooling liquid out2 Gas vent 8 Cooling liquid in3 Discharge separator 9 Manual control valve4 Make-up fluid 10 Edwards liquid ring vacuum pump5 Fluid overflow to drain 11 Check valve6 Heat exchangerStandard AccessoriesA range of accessories to complement the standard package areavailable, these can be selected in the configurator:• Inlet non-return valve• Inlet isolating valve• Inlet vacuum gauge• Vacuum relief valve• Automatic seal water make up kit76Page397431 Process gas inlet 4 Regulating valve2 Fluid gas mixture to drain 5 Edwards liquid ring vacuum pump3 Sea fluid 6 Check valveShop online at www.edwardsvacuum.com

The SLRP package is available for the following pump sizes:50 HzRPM kW m 3 h -1 Inlet mmSIZE 1LR1L90 1450 2.2 69 40LR1L125 1450 3 111 40LR1L150 1450 4 142 40LR2S100 1450 3 91 40LR2S150 1450 4 128 40LR2S200 1450 5.5 170 40SIZE 2LR1L250 1450 5.5 69 65LR1L320 1450 7.5 111 65LR1L450 1450 11 142 65LR2S275 1450 7.5 244 50LR2S350 1450 11 340 50LR2S425 1450 15 368 50SIZE 3LR1S600 1450 15 540 100LR1S800 1450 22 790 100LR2S600 1450 18.5 596 80LR2S750 1450 30 640 8010Page39860 HzRPM HP ft 3 min -1 Inlet inchSIZE 1LR1L90 1750 5 59 1.5LR1L125 1750 7.5 70 1.5LR1L150 1750 7.5 94 1.5LR2S100 1750 7.5 59 1.5LR2S150 1750 10 88 1.5LR2S200 1750 10 118 1.5SIZE 2LR1L250 1750 10 129 2.5LR1L320 1750 15 194 2.5LR1L450 1750 20 258 2.5LR2S275 1750 15 162 2.0LR2S350 1750 20 235 2.0LR2S425 1750 25 265 2.0SIZE 3LR1S600 1750 30 367 4LR1S800 1750 40 529 4LR2S600 1750 40 383 3LR2S750 1750 50 640 3Hazardous AreasThe SLRP packages and accessories are available certified forhazardous area operation:• European ATEX Ex II 2Gc, IIB T3• USA Explosion proof Class 1 Division 1 Group C & D• Packages suitable for operation in other zones such as ATEX Cat1 are available on request.Non Standard PackagesMore complex systems include special recirculation systems such asthe Recovac package (see later) or combinations of liquid ring pumpswith roots type mechanical boosters or air, gas or steam ejectors.These hybrid systems can extend the liquid ring pump basedperformance envelope significantly.Shop online at www.edwardsvacuum.com

Liquid Ring Pump Applications in Power MarketLiquid ring pumps are ideally suited for use in a number of vacuum applications in power generation, all of which benefit from the performancecharacteristics of liquid ring vacuum pumps.• Condenser Air Extraction• Waterbox Priming• Flue Gas Desulphurisation• Fly Ash HandlingCondenser air extraction and waterbox priming both contribute to increased efficiency of the power plant, whilst flue gas desulphurisation and flyash handling are both to do with treatment of the boiler exhaust gas.Typical coal fired power plantEdwards have developed a range of standard pump packages to meet the vacuum pumping requirements for each of these applications.Condenser Air ExtractionIn order to increase the availability, operational performance and reliability of turbine condenser vacuum plants, the dynamic relationship betweenthe vacuum pumping system, condenser performance and turbine back pressure is an important factor in the design requirements and needscareful appraisal when considering overall plant performance.Selection of the vacuum equipment is usually based upon a theoretical condition, with performance requirements taken from HEI (or VGB)recommendations. Client specifications require further analysis of pump performance at actual operating temperatures and pressures, includingpart load and operation with alternate fuels.Edwards condenser air extraction packages, based on two-stage liquid ring vacuum pumps, are designed to remove system air leakage fromsteam turbine generator surface condensers systems, helping the turbine efficiency to be maintained. This is achieved by reducing the pressurein the turbine, enabling more heat from the steam to be converted to mechanical energy, thereby increasing the output of the power plant.The air load from the turbine condenser system is saturated with vapour: liquid ring pumps are ideal for handling high vapour loads as much ofthe vapour will be condensed at the pump suction (by the direct condensing action of the inlet water spray or contact with the pump seal water).This condensing reduces the total volume to be handled by the pump, which is a significant advantage when compared to other pumpingtechnologies.Edwards have developed a range of standard packages based upon the SHR series of two stage liquid ring pumps. The packages are designedto meet air leakage rates in the HEI Standards for Steam Surface Condensers.10Page399Shop online at www.edwardsvacuum.com

16.516 23 21 21.219211912813172015616.7114718.32210Page400Liquid ring pumps are very effective when pumping wet gases and condensable vapours and are able to operate across the entire pressure rangefrom atmospheric pressure to less than 1 inch Hgabs, this gives maximum flexibility in meeting the required condenser backing pressure undervarious operating conditions. A guide to pump selection can be seen in the table below, this shows the pump size required to achieve 1 inchHgabs with varying ITD's (Initial Temperature Difference) between the condenser cooling water and the condenser outlet temperature. For moreinformation on pump performance against specific operating conditions, please contact your local customer care office.ITDHEI SCFMHEI / Liquid Ring Pump Selection Chart at 33.86 mbar A withVarying Condenser ITD10 °C 11 °C 13 °C 15 °C 17 °C5 SHR2750 SHR2400 SHR2400 SHR2400 SHR24007.5 SHR2950 SHR2750 SHR2750 SHR2400 SHR240010 SHR2950 SHR2950 SHR2750 SHR2750 SHR275012.5 SHR2950 SHR2950 SHR2950 SHR2750 SHR275015 SHR21200 SHR21200 SHR2950 SHR2950 SHR295017.5 SHR21850 SHR21200 SHR21200 SHR2950 SHR295020 SHR21850 SHR21850 SHR21200 SHR21200 SHR295025 SHR22500 SHR21850 SHR21850 SHR21200 SHR2120030 SHR22500 SHR22500 SHR21850 SHR21850 SHR2185040 SHR22500 SHR22500 SHR22500 SHR22500 SHR21850The standard package includes all of the associated equipment required to operate the pump package, including the transition from hogging toholding duty.Shop online at www.edwardsvacuum.com

Features & Benefits• Two stage liquid ring pump - for optimum performance supportingthe steam condenser outlet pressure• Automatic inlet isolating valve controlled by differential switch - foreffective transition from hogging to holding• Inlet water spray nozzle - to reduce condensable load at pumpsuction• Interstage cavitation control valve - to reduce cavitation whenoperating at pressures close to the seal water vapour pressureTP1385LIFT USING SPREADER BEAMPROCESSINLET• Carbon steel discharge separator complete with level control anddischarge air flow measuring capability• Shell and tube heat exchanger with large diameter stainless steeltubes - maintaining efficiency by minimising fouling and corrosion• Seal water recirculation pump - to optimise seal water flow rate• Welded carbon steel piping - to minimise leaks• Electric motor standard or specific to customer requirements• On skid junction box - single point electrical connection.3482PROCESSEXHAUSTTP-811261088TP-3193TP-2TP-84010Page401TP-1TPE-1TP-14TP-8TP-3276318931905745401TP-74 OFF - M10EARTHINGBOSSESATP-6TP-6TP-7TP-10560044683268ATP-1384019591460C OF G602 TP-512381269C OF GTP-5320TP-4TP-4763850Model Pump SCFM HP kW A B CCEP750-2 SHR2400 5 - 7.5 40 22 2350 1000 1500CEP1000-2 SHR2750 7.5 - 12.5 75 45 3750 1350 2000CEP1500-2 SHR2950 10 - 20 100 55 3750 1350 2000CEP2000-2 SHR21200 15 - 25 125 75 4500 1500 2500CEP3000-2 SHR21850 20 - 30 175 110 4500 1500 2500CEP6000-2 SHR22500 25 - 40 225 132 5500 1700 3000Shop online at www.edwardsvacuum.com

Waterbox PrimingWaterbox and circulated water pump priming10Page402The ability to handle wet gases without detrimental effect makesliquid ring vacuum pumps ideal for this priming application. Thepumps are used initially to carry out priming of the main condenserwater boxes and CW pump; once this is complete they are used tomaintain vacuum in the water box at the required level.The removal of air from the condenser waterbox preventsaccumulation of air in the upper parts of the cooling tube bundle,thereby preventing air locks and maintaining the effective coolingsurface of the condenser, ensuring maximum cooling efficiency.The Edwards priming system is a modular design comprising threecomponent parts: vacuum pumps, vacuum receiver and primingvalve and accessories, which are supplied as required to meetcustomer specifications.The vacuum pump system comprises a single stage liquid ring pumpcomplete with a total seal water recirculation system, sized to meetthe process duty requirements. If duty and standby pumpsets arecalled for, then two systems are provided, giving true standbycapability including the seal water recirculation system.The vacuum receiver vessel is complete with a pressure transmitterto control the pump operation and includes an automatic drain tankarrangement to remove any water carry over from the system,therefore avoiding corrosion. If required, a priming valve andassociated accessories can be supplied for each condenser vacuumconnection: the priming valve helps to prevent cycling of the vacuumsystem and minimises carryover of cooling water.Additional connections can be made to the vacuum receiver to enablemain cooling water pumps to be primed before operation.Shop online at www.edwardsvacuum.com

Exhaust Gas Treatment ApplicationsThe boiler exhaust gas is conditioned by an electrostatic precipitator which extracts the fly ash, before entering an absorber/scrubber whereSulphur Dioxide is absorbed by a limestone slurry forming gypsum as a by product.Flue Gas DesulpurisationFlue gas desulphurisation systems are a common feature on modern coal fired power plants, a by product of the process is gypsum which mustbe dewatered to enable it to be sold commercially. This is usually carried out using a rotary drum filter, which utilises a large single stage liquidring pump to remove the water by sucking air through the slurry, leaving behind the dewatered gypsum. The vacuum pump is selected dependingupon the surface area of the filter.The table below shows the appropriate pump model for a selection of nominal capacities.Nominal Capacity m 3 h -1 Pump Size Motor Size kW Motor Size HP Drive Type2500 LR1A2500 55 75 V-belt5000 LR1A5000 110 150 V-belt6500 LR1A6500 160 220 V-belt10000 LR1A10000 200 270 V-belt13000 LR1A13000 330 450 V-belt19000 LR1B18000 355 475 Gearbox30000 LR1B30000 710 950 Gearbox37000 LR1B38000 800 1000 GearboxFly Ash HandlingOnce the fly ash has been separated in the ESP it is collected in a hopper, from the hopper the ash is transported by a vacuum conveying systemto a collection area for disposal or conversion into building products. The vacuum conveying duty is ideally suited to single stage liquid ring pumpswhich can handle any carryover of the abrasive ash.10Page403Shop online at www.edwardsvacuum.com

EHR2190 Liquid Ring PumpWithin Edwards’ full range of liquid ring vacuum pumps, the EHR series offers a two-stageconstruction for peak performance at low suction pressures. Liquid ring pumps are ideal forpumping either dry or wet gases, with a high tolerance to liquid carry over.Pumps can be supplied as bareshaft or as part of a package complete with drive motor,discharge separator, heat exchanger and other accessories for recirculation of the sealliquid. In addition, all Edwards liquid ring pumps are available as part of ATEX category 1 orcategory 2 pump systems.Features & BenefitsThis model is the EHR2190 Cast Iron material variant.Applications●●●●●Two stage design - peak efficiency at high vacuumOperates across entire vacuum rangeMechanical shaft sealsChoice of construction materialsRugged, robust constructionDimensions●The EHR2190 is ideal for vacuum distillation and evaporatorapplications in the chemical, pharmaceutical and biofuelsindustry, and is also suited to condenser air extraction in thepower industry.Performance Curves10Page404Technical Data50 Hz 60 HzNominal capacity 190 m 3 h -1 215 m 3 h -1Suction pressure 30 mbara 30 mbaraNominal speed 1470 rpm 1740 rpmNominal motor power 5.5 kW 7.5 kWWeight 90 kg 90 kgOrdering InformationProduct DescriptionEHR2190 Cast IronEHR2190 Stainless SteelEHR2190 Stainless Steel FittedOrder No.A80000000A80001000A80005000Materials of constructionCasingBodyImpellerShaftSealsCast IronCast IronSG Iron420S37MechanicalShop online at www.edwardsvacuum.com

EHR2390 Liquid Ring PumpWithin Edwards’ full range of liquid ring vacuum pumps, the EHR series offers a two-stageconstruction for peak performance at low suction pressures. Liquid ring pumps are ideal forpumping either dry or wet gases, with a high tolerance to liquid carry over.Pumps can be supplied as bareshaft or as part of a package complete with drive motor,discharge separator, heat exchanger and other accessories for recirculation of the sealliquid. In addition, all Edwards liquid ring pumps are available as part of ATEX category 1 orcategory 2 pump systems.Features & Benefits●●●●●This model is the EHR2390 Cast Iron material variant.Two stage design - peak efficiency at high vacuumOperates across entire vacuum rangeMechanical shaft sealsChoice of construction materialsRugged, robust constructionDimensionsApplications●The EHR2390 is ideal for vacuum distillation and evaporatorapplications in the chemical, pharmaceutical and bio-fuelsindustry, and is also suited to condenser air extraction in thepower industry.Performance Curves10Page405Technical Data50 Hz 60 HzNominal capacity 390 m 3 h -1 440 m 3 h -1Suction pressure 30 mbara 30 mbaraNominal speed 1470 rpm 1740 rpmNominal motor power 11 kW 15 kWWeight 160 kg 160kgMaterials of constructionOrdering InformationProduct DescriptionEHR2390 Cast IronEHR2390 Stainless SteelEHR2390 Stainless Steel FittedOrder No.A80020000A80021000A80025000CasingBodyImpellerShaftSealsCast IronCast IronSG Iron420S37MechanicalShop online at www.edwardsvacuum.com

SHR2400 Liquid Ring PumpWithin Edwards’ full range of liquid ring vacuum pumps, the SHR series offers a two-stageconstruction for peak performance at low suction pressures. Liquid ring pumps are ideal forpumping either dry or wet gases, with a high tolerance to liquid carry over.Pumps can be supplied as bareshaft or as part of a package complete with drive motor,discharge separator, heat exchanger and other accessories for recirculation of the sealliquid. In addition, all Edwards liquid ring pumps are available as part of ATEX category 1 orcategory 2 pump systems.Features & BenefitsThis model is the SHR2400 Cast Iron material variant.Applications●●●●●Two stage design - peak efficiency at high vacuumOperates across entire vacuum rangeMechanical shaft sealsChoice of construction materialsRugged, robust constructionDimensions●The SHR2400 is ideal for vacuum distillation and evaporatorapplications in the chemical, pharmaceutical and biofuelsindustry, and is also suited to condenser air extraction in thepower industry.Performance Curves10Page406Technical Data50 Hz 60 HzNominal capacity 610 m 3 h -1 700 m 3 h -1Suction pressure 30 mbara 30 mbaraNominal speed 1470 rpm 1740 rpmNominal motor power 22 kW 30 kWWeight 222 kg 222 kgMaterials of constructionOrdering InformationProduct DescriptionSHR2400 Cast IronSHR2400 Stainless SteelSHR2400 Stainless Steel FittedOrder No.A80060000A80061000A80065000CasingBodyImpellerShaftSealsCast IronCast IronSG Iron420S37MechanicalShop online at www.edwardsvacuum.com

SHR2750 Liquid Ring PumpWithin Edwards’ full range of liquid ring vacuum pumps, the SHR series offers a two-stageconstruction for peak performance at low suction pressures. Liquid ring pumps are ideal forpumping either dry or wet gases, with a high tolerance to liquid carry over.Pumps can be supplied as bareshaft or as part of a package complete with drive motor,discharge separator, heat exchanger and other accessories for recirculation of the sealliquid. In addition, all Edwards liquid ring pumps are available as part of ATEX category 1 orcategory 2 pump systems.This model is the SHR2400 Stainless Steel Fitted material variant.Features & BenefitsApplications●●●●●Two stage design - peak efficiency at high vacuumOperates across entire vacuum rangeMechanical shaft sealsChoice of construction materialsRugged, robust constructionDimensions●The SHR2750 is ideal for vacuum distillation and evaporatorapplications in the chemical, pharmaceutical and biofuelsindustry, and is also suited to condenser air extraction in thepower industry.Performance Curves10Page407A B C Dmm 1279 691 551 691Inch 50.35 27.20 21.69 27.20Technical Data50 Hz 60 HzNominal capacity 1230 m 3 h -1 1440 m 3 h -1Suction pressure 30 mbara 30 mbaraNominal speed 980 rpm 1175 rpmNominal motor power 45 kW 55 kWWeight 584 kg 584 kgMaterials of constructionOrdering InformationProduct DescriptionSHR2750 Cast IronSHR2750 Stainless SteelSHR2750 Stainless Steel FittedOrder No.A80090000A80091000A80095000CasingBodyImpellerShaftSealsCast IronCast IronSG Iron420S37MechanicalShop online at www.edwardsvacuum.com

SHR2950 Liquid Ring PumpWithin Edwards’ full range of liquid ring vacuum pumps, the SHR series offers a two-stageconstruction for peak performance at low suction pressures. Liquid ring pumps are ideal forpumping either dry or wet gases, with a high tolerance to liquid carry over.Pumps can be supplied as bareshaft or as part of a package complete with drive motor,discharge separator, heat exchanger and other accessories for recirculation of the sealliquid. In addition, all Edwards liquid ring pumps are available as part of ATEX category 1 orcategory 2 pump systems.Features & BenefitsThis model is the SHR2950 Cast Iron material variant.Applications●●●●●Two stage design - peak efficiency at high vacuumOperates across entire vacuum rangeMechanical shaft sealsChoice of construction materialsRugged, robust constructionDimensions●The SHR2950 is ideal for vacuum distillation and evaporatorapplications in the chemical, pharmaceutical and biofuelsindustry, and is also suited to condenser air extraction in thepower industry.Performance Curves10Page408A B C Dmm 1379 791 651 791Inch 54.29 31.14 25.94 31.14Technical Data50 Hz 60 HzNominal capacity 1680 m 3 h -1 1920 m 3 h -1Suction pressure 30 mbara 30 mbaraNominal speed 980 rpm 1175 rpmNominal motor power 55 kW 75 kWWeight 760 kg 760 kgMaterials of constructionOrdering InformationProduct DescriptionSHR2950 Cast IronSHR2950 Stainless SteelSHR2950 Stainless Steel FittedOrder No.A80100000A80101000A80105000CasingBodyImpellerShaftSealsCast IronCast IronSG Iron420S37MechanicalShop online at www.edwardsvacuum.com

SHR21200 Liquid Ring PumpWithin Edwards’ full range of liquid ring vacuum pumps, the SHR series offers a two-stageconstruction for peak performance at low suction pressures. Liquid ring pumps are ideal forpumping either dry or wet gases, with a high tolerance to liquid carry over.Pumps can be supplied as bareshaft or as part of a package complete with drive motor,discharge separator, heat exchanger and other accessories for recirculation of the sealliquid. In addition, all Edwards liquid ring pumps are available as part of ATEX category 1 orcategory 2 pump systems.Features & Benefits●●●●●This model is the SHR21200 Cast Iron material variant.Two stage design - peak efficiency at high vacuumOperates across entire vacuum rangeMechanical shaft sealsChoice of construction materialsRugged, robust constructionDimensionsApplications●The SHR21200 is ideal for vacuum distillation and evaporatorapplications in the chemical, pharmaceutical and biofuelsindustry, and is also suited to condenser air extraction in thepower industry.Performance Curves10Page409A B C D E F Gmm 1710 410 800 500 630 600 800Inch 67.32 16.14 31.49 19.68 24.80 23.62 31.49Technical Data50 Hz 60 HzNominal capacity 1960 m 3 h -1 2240 m 3 h -1Suction pressure 30 mbara 30 mbaraNominal speed 735 rpm 880 rpmNominal motor power 75 kW 90 kWWeight 1180 kg 1180 kgMaterials of constructionOrdering InformationProduct DescriptionSHR21200 Cast IronSHR21200 Stainless Steel FittedOrder No.A80130000A80135000CasingBodyImpellerShaftSealsCast IronCast IronSG Iron420S37MechanicalShop online at www.edwardsvacuum.com

SHR21850 Liquid Ring PumpWithin Edwards’ full range of liquid ring vacuum pumps, the SHR series offers a two-stageconstruction for peak performance at low suction pressures. Liquid ring pumps are ideal forpumping either dry or wet gases, with a high tolerance to liquid carry over.Pumps can be supplied as bareshaft or as part of a package complete with drive motor,discharge separator, heat exchanger and other accessories for recirculation of the sealliquid. In addition, all Edwards liquid ring pumps are available as part of ATEX category 1 orcategory 2 pump systems.Features & BenefitsThis model is the SHR21850 Cast Iron material variant.Applications●●●●●Two stage design - peak efficiency at high vacuumOperates across entire vacuum rangeMechanical shaft sealsChoice of construction materialsRugged, robust constructionDimensions●The SHR21850 is ideal for vacuum distillation and evaporatorapplications in the chemical, pharmaceutical and biofuelsindustry, and is also suited to condenser air extraction in thepower industry.Performance Curves10Page410A B C D E F Gmm 2004 406 1100 498 850 900 1100Inch 78.89 15.98 43.30 27.20 19.60 35.43 43.30Technical Data50 Hz 60 HzNominal capacity 3280 m 3 h -1 3800 m 3 h -1Suction pressure 30 mbara 30 mbaraNominal speed 735 rpm 880 rpmNominal motor power 110 kW 132 kWWeight 1680 kg 1680 kgMaterials of constructionOrdering InformationProduct DescriptionSHR21850 Cast IronSHR21850 Stainless SteelSHR21850 Stainless Steel FittedOrder No.A80150000A80151000A80155000CasingBodyImpellerShaftSealsCast IronCast IronSG Iron420S37MechanicalShop online at www.edwardsvacuum.com

SHR22500 Liquid Ring PumpWithin Edwards’ full range of liquid ring vacuum pumps, the SHR series offers a two-stageconstruction for peak performance at low suction pressures. Liquid ring pumps are ideal forpumping either dry or wet gases, with a high tolerance to liquid carry over.Pumps can be supplied as bareshaft or as part of a package complete with drive motor,discharge separator, heat exchanger and other accessories for recirculation of the sealliquid. In addition, all Edwards liquid ring pumps are available as part of ATEX category 1 orcategory 2 pump systems.Features & Benefits●●●●●This model is the SHR22500 Cast Iron material variant.Two stage design - peak efficiency at high vacuumOperates across entire vacuum rangeMechanical shaft sealsChoice of construction materialsRugged, robust constructionDimensionsApplications●The SHR22500 is ideal for vacuum distillation and evaporatorapplications in the chemical, pharmaceutical and biofuelsindustry, and is also suited to condenser air extraction in thepower industry.Performance Curves10Page411Technical Data50 Hz 60 HzNominal capacity 4510 m 3 h -1 4900 m 3 h -1Suction pressure 30 mbara 30 mbaraNominal speed 585 rpm 650 rpmNominal motor power 132 kW 150 kWWeight 2635 kg 2635 kgMaterials of constructionOrdering InformationProduct DescriptionSHR22500 Cast IronSHR22500 Stainless SteelSHR22500 Stainless Steel FittedOrder No.A80170000A80171000A80175000CasingBodyImpellerShaftSealsCast IronCast IronSG Iron420S37MechanicalShop online at www.edwardsvacuum.com

LR1A200 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A200 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A200 is ideal for filtration, vacuum forming, generalindustrial and chemical and petrochemical applications.Performance Curves10Page412A (keyway) B C D E F Gmm 38 58 146 206 639 645 180Inch 1.50 2.28 5.75 8.11 25.16 25.39 7.09H I J K L Mmm 220 275 464 105 105 4 holes Ø 15Inch 8.66 10.83 18.27 4.13 4.13 0.591. DN65 / PN10 2. DN50 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 170 m 3 h -1 200 m 3 h -1100 CFM 120 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 1450 rpm 1750 rpmNominal motorpower5.5 kW 7.5 kW7.5 HP 10 HPOrdering InformationProduct DescriptionLR1A200 Liquid Ring PumpOrder No.LR1A200Shop online at www.edwardsvacuum.com

LR1A300 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A300 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A300 is ideal for filtration, vacuum forming, generalindustrial and chemical and petrochemical applications.Performance Curves10A (keyway) B C D E F Gmm 38 58 193 262 740 645 495Page413Inch 1.50 2.28 7.60 10.31 29.13 25.39 19.49H I J L M Kmm 180 220 275 105 105 4 holes Ø 15Inch 7.09 8.66 10.83 4.13 4.13 0.591. DN65 / PN10 2. DN50 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 260 m 3 h -1 320 m 3 h -1150 CFM 180 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 1450 rpm 1750 rpmNominal motorpower7.5 kW 11 kW10 HP 15 HPOrdering InformationProduct DescriptionLR1A300 Liquid Ring PumpOrder No.LR1A300Shop online at www.edwardsvacuum.com

LR1A400 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A400 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A400 is ideal for condenser evacuation, pulp and paper,filtration, vacuum forming and chemical and petrochemicalapplications.Performance Curves10Page414A (keyway) B C D E F Gmm 38 58 193 316 795 645 495Inch 1.50 2.28 7.60 12.44 31.30 25.39 19.49H I J L M Kmm 180 220 275 105 105 4 holes Ø 15Inch 7.09 8.66 10.83 4.13 4.13 0.591. DN65 / PN10 2. DN50 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 350 m 3 h -1 420 m 3 h -1205 CFM 250 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 1450 rpm 1750 rpmNominal motorpower11 kW 15 kW15 HP 20HPOrdering InformationProduct DescriptionLR1A400 Liquid Ring PumpOrder No.LR1A400Shop online at www.edwardsvacuum.com

LR1A500 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A500 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A500 is ideal for condenser evacuation, pulp and paper,filtration, vacuum forming, general industrial and chemical andpetrochemical applications.Performance Curves10A (keyway) B C D E F Gmm 38 58 193 316 795 645 495Page415Inch 1.50 2.28 7.60 12.44 31.30 25.39 19.49H I J L M Kmm 180 220 275 105 105 4 holes Ø 15Inch 7.09 8.66 10.83 4.13 4.13 0.591. DN65 / PN10 2. DN50 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 430 m 3 h -1 530 m 3 h -1250 CFM 300 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 1450 rpm 1750 rpmNominal motorpower15 kW 18.5 kW20 HP 25 HPOrdering InformationProduct DescriptionLR1A500 Liquid Ring PumpOrder No.LR1A500Shop online at www.edwardsvacuum.com

LR1A700 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A700 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A700 is ideal for condenser evacuation, pulp and paper,filtration, vacuum forming and chemical and petrochemicalapplications.Performance Curves10Page416A (keyway) B C D E F Gmm 38 58 206 380 885 745 600Inch 1.50 2.28 8.11 14.96 34.85 29.33 23.62H I J L M Kmm 225 260 330 105 105 4 holes Ø 19Inch 8.86 10.24 12.99 4.13 4.13 0.751. DN65 / PN10 2. DN50 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 600 m 3 h -1 690 m 3 h -1350 CFM 420 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 1450 rpm 1750 rpmNominal motorpower18.5 kW 22 kW25 HP 30 HPOrdering InformationProduct DescriptionLR1A700 Liquid Ring PumpOrder No.LR1A700Shop online at www.edwardsvacuum.com

LR1A800 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A800 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A800 is ideal for condenser evacuation, pulp and paper,filtration, vacuum forming and chemical and petrochemicalapplications.Performance Curves10A (keyway) B C D E F GPage417mm 54 82 227 395 975 985 315Inch 2.13 3.23 8.94 15.55 38.39 38.78 12.40H J L M N Kmm 340 430 840 155 155 4 holes Ø 24Inch 13.39 16.93 33.07 6.10 6.10 0.941. DN125 / PN10 2. DN100 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 780 m 3 h -1 900 m 3 h -1460 CFM 550 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 980 rpm 1170 rpmNominal motorpower22 kW 30 kW30 HP 40 HPOrdering InformationProduct DescriptionLR1A800 Liquid Ring PumpOrder No.LR1A800Shop online at www.edwardsvacuum.com

LR1A1200 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A1200 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A1200 is ideal for condenser evacuation, pulp andpaper, filtration, vacuum forming and chemical andpetrochemical applications.Performance Curves10Page418A (keyway) B C D E F Gmm 54 82 227 515 1095 985 315Inch 2.13 3.23 8.94 20.28 43.11 38.78 12.40H J L M N Kmm 340 430 840 155 155 4 holes Ø 24Inch 13.39 16.93 33.07 6.10 6.10 0.941. DN125 / PN10 2. DN100 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 1110 m 3 h -1 1300 m 3 h -1650 CFM 780 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 980 rpm 1170 rpmNominal motorpower37 kW 45 kW50 HP 60 HPOrdering InformationProduct DescriptionLR1A1200 Liquid Ring PumpOrder No.LR1A1200Shop online at www.edwardsvacuum.com

LR1A1300 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A1300 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A1300 is ideal for condenser evacuation, pulp andpaper, filtration, vacuum forming and chemical andpetrochemical applications.Performance Curves10A (keyway) B C D E F GPage419mm 54 82 227 551 1131 985 315Inch 2.13 3.23 8.94 21.70 44.53 38.78 12.40H J L M N Kmm 340 430 840 155 155 4 holes Ø 24Inch 13.39 16.93 33.07 6.10 6.10 0.941. DN125 / PN10 2. DN100 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 1200 m 3 h -1 1400 m 3 h -1700 CFM 850 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 980 rpm 1170 rpmNominal motorpower37 kW 45 kW50 HP 60 HPOrdering InformationProduct DescriptionLR1A1300 Liquid Ring PumpOrder No.LR1A1300Shop online at www.edwardsvacuum.com

LR1A1600 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A1600 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A1600 is ideal for condenser evacuation, pulp andpaper, filtration, vacuum forming and chemical andpetrochemical applications.Performance Curves10Page420A (keyway) B C D E F Gmm 74.5 105 263 525 1237 1245 400Inch 2.93 4.13 10.35 20.67 48.70 49.02 15.74H J L M N Kmm 465 570 1030 215 215 4 holes Ø 28Inch 18.31 22.44 40.55 8.46 8.46 1.101. DN150 / PN10 2. DN125 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 1550 m 3 h -1 1800 m 3 h -1900 CFM 1100 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 740 rpm 880 rpmNominal motorpower45 kW 55 kW60 HP 75 HPOrdering InformationProduct DescriptionLR1A1600 Liquid Ring PumpOrder No.LR1A1600Shop online at www.edwardsvacuum.com

LR1A2500 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A2500 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresPacked gland, single and double mechanical seal optionsSplit packing gland design to facilitate repackingInternal and external seal flushing optionsDimensionsApplications●The LR1A2500 is ideal for condenser evacuation, pulp andpaper, filtration, vacuum forming and chemical andpetrochemical applications.Performance Curves10A (keyway) B C D E F GPage421mm 74.5 105 263 675 1395 1245 400Inch 2.93 4.13 10.35 26.57 54.92 49.02 15.74H J L M N Kmm 465 570 1030 215 215 4 holes Ø 28Inch 18.31 22.44 40.55 8.46 8.46 1.101. DN150 / PN10 2. DN125 / PN10 3. Outlet 4. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 2500 m 3 h -1 2800 m 3 h -11500 CFM 1700 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 740 rpm 880 rpmNominal motorpower75 kW 90 kW100 HP 125 HPOrdering InformationProduct DescriptionLR1A2500 Liquid Ring PumpOrder No.LR1A2500Shop online at www.edwardsvacuum.com

LR1A4000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A4000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1A4000 is ideal for condenser evacuation, pulp andpaper, filtration, flue gas desulphurization, vacuum forming andchemical and petrochemical applications.Performance Curves10Page422A (keyway) B C D E F G H Jmm 106 315 790 1580 815 890 1360 480 670Inch 4.17 12.40 31.10 62.20 32.09 35.04 53.54 18.90 26.38K M N P R S T Lmm 495 137 475 1185 230 230 205 4 holes Ø 35Inch 19.49 5.39 18.70 46.65 9.06 9.06 8.07 1.381. DN200 / PN10 2. DN150 / PN10 3. DN150 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 4000 m 3 h -1 3800 m 3 h -12350 CFM 2250 CFMSuction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 740 rpm 710 rpmNominal motorpower110 kW 110 kW150 HP 150 HPOrdering InformationProduct DescriptionLR1A4000 Liquid Ring PumpOrder No.LR1A4000Shop online at www.edwardsvacuum.com

LR1A5000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A5000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1A5000 is ideal for condenser evacuation, pulp andpaper, filtration, flue gas desulphurization, vacuum forming andchemical and petrochemical applications.Performance Curves10A (keyway) B C D E F G H JPage423mm 106 315 900 1695 870 1000 1360 480 670Inch 4.17 12.40 35.43 66.73 34.25 39.37 53.54 18.90 26.38K M N P R S T Lmm 495 137 475 1185 230 230 205 4 holes Ø 35Inch 19.49 5.39 18.70 46.65 9.06 9.06 8.07 1.381. DN200 / PN10 2. DN150 / PN10 3. DN150 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 4600 m 3 h -1 4400 m 3 h -12700 CFM 2600 CFMSuction pressure 160 mbar 160 mbar120 Torr 120 TorrNominal speed 740 rpm 710 rpmNominal motorpower110 kW 110 kW150 HP 150 HPOrdering InformationProduct DescriptionLR1A5000 Liquid Ring PumpOrder No.LR1A5000Shop online at www.edwardsvacuum.com

LR1A5500 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A5500 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.DimensionsPerformance CurvesA (keyway) B C D E F G H Jmm 127 335 910 1745 875 1132 1570 555 800Inch 5.0 13.19 35.83 68.70 34.45 44.57 61.81 21.85 31.50K M N P R S T Lmm 503 170 560 1370 285 285 245 4 holes Ø 24Inch 19.80 6.69 22.05 53.94 11.22 11.22 9.65 0.94101. DN250 / PN10 2. DN200 / PN10 3. DN125 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsPage424Technical DataOrdering Information50 Hz 60 HzNominal capacity(saturated) 5300 m 3 h -1 5300 m 3 h -13100 CFM 3100 CFMProduct DescriptionLR1A5500 Liquid Ring PumpOrder No.LR1A5500Suction pressure 33 mbar 33 mbar25 Torr 25 TorrNominal speed 590 rpm 580 rpmNominal motor power 132 kW 132 kW200 HP 200 HPShop online at www.edwardsvacuum.com

LR1A6500 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A6500 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1A6500 is ideal for condenser evacuation, pulp andpaper, filtration, flue gas desulphurization, vacuum forming andchemical and petrochemical applications.Performance Curves10A (keyway) B C D E F G H JPage425mm 127 335 1050 1885 945 1272 1570 555 800Inch 5.0 13.19 41.34 74.21 37.20 50.08 61.81 21.85 31.50K M N P R S T Lmm 503 170 560 1370 285 285 245 4 holes Ø 24Inch 19.80 6.69 22.05 53.94 11.22 11.22 9.65 0.941. DN250 / PN10 2. DN200 / PN10 3. DN125 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 6200 m 3 h -1 6200 m 3 h -13700 CFM 3700 CFMSuction pressure 160 mbar 160 mbar120 Torr 120 TorrNominal speed 590 rpm 580 rpmNominal motor power 160 kW 160 kW200 HP /200 HPOrdering InformationProduct DescriptionLR1A6500 Liquid Ring PumpOrder No.LR1A6500Shop online at www.edwardsvacuum.com

LR1A10000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A10000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1A10000 is ideal for condenser evacuation, pulp andpaper, filtration, flue gas desulphurization, vacuum forming andchemical and petrochemical applications.Performance Curves10Page426A (keyway) B C D E F G H Jmm 148 355 1260 2170 1067 1410 1865 655 950Inch 5.83 13.98 49.61 85.43 41.61 55.51 73.43 25.79 37.40K M N P R S T Lmm 689 180 670 1625 335 335 285 4 holes Ø 42Inch 27.13 7.09 26.38 63.98 13.19 13.19 11.22 1.651. DN300 / PN10 2. DN250 / PN10 3. DN150 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz 60 HzNominal capacity(saturated) 9000 m 3 h -1 9000 m 3 h -15300 CFM 5300 CFMSuction pressure 160 mbar 160 mbar120 Torr 120 TorrNominal speed 490 rpm 500 rpmNominal motorpower160 kW 160 kW200 HP 200 HPOrdering InformationProduct DescriptionLR1A10000 Liquid Ring PumpOrder No.LR1A10000Shop online at www.edwardsvacuum.com

LR1A12000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A12000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1A12000 is ideal for condenser evacuation, pulp andpaper, filtration, flue gas desulphurization, vacuum forming andchemical and petrochemical applications.Performance Curves10A (keyway) B C D E F G H JPage427mm 169 375 1270 2255 1460 2160 775 1120Inch 6.65 14.76 50.0 88.78 57.49 85.04 30.51 44.09K M N P R S T Lmm 858 215 800 1875 385 385 285 4 holes Ø 42Inch 33.78 8.46 31.50 73.82 15.16 15.16 11.22 1.651. DN350 / PN10 2. DN300 / PN10 3. DN150 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 11700 m 3 h -16900 CFMSuction pressure33 mbar25 TorrNominal speed470 rpmNominal motor power315 kW450 HPOrdering InformationProduct DescriptionLR1A12000 Liquid Ring PumpOrder No.LR1A12000Shop online at www.edwardsvacuum.com

LR1A13000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1A13000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1A Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1A13000 is ideal for condenser evacuation, pulp andpaper, filtration, flue gas desulphurization, vacuum forming andchemical and petrochemical applications.Performance Curves10Page428A (keyway) B C D E F G H Jmm 169 375 1450 2435 1640 2160 775 1120Inch 6.65 14.76 57.09 95.87 64.57 85.04 30.51 44.09K M N P R S T Lmm 858 215 800 1875 385 385 285 4 holes Ø 42Inch 33.78 8.46 31.50 73.82 15.16 15.16 11.22 1.651. DN350 / PN10 2. DN300 / PN10 3. DN150 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 12600 m 3 h -17400 CFMSuction pressure160 mbar120 TorrNominal speed440 rpmNominal motor power280 kW400 HPOrdering InformationProduct DescriptionLR1A13000 Liquid Ring PumpOrder No.LR1A13000Shop online at www.edwardsvacuum.com





LR1B3500 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1B3500 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1B Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1B3500 is ideal for fly ash conveying, pulp and paper,filtration, flue gas desulphurization, methane extraction in miningand chemical and petrochemical applications.Performance Curves10A (keyway) B C D E F G H JPage433mm 106 315 790 1580 815 890 1360 480 670Inch 4.17 12.40 31.10 62.20 32.09 35.04 53.54 18.90 26.38K M N P R S T Lmm 495 137 475 1185 230 230 205 4 holes Ø 35Inch 19.49 5.39 18.70 46.65 9.06 9.06 8.07 1.381. DN200 / PN10 2. DN150 / PN10 3. DN100 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 3300 m 3 h -11900 CFMSuction pressure160 mbar120 TorrNominal speed590 rpmNominal motor power75 kW100 HPOrdering InformationProduct DescriptionLR1B3500 Liquid Ring PumpOrder No.LR1B3500Shop online at www.edwardsvacuum.com

LR1B4500 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1B4500 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1B Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1B4500 is ideal for fly ash conveying, pulp and paper,filtration, flue gas desulphurization, methane extraction in miningand chemical and petrochemical applications.Performance Curves10Page434A (keyway) B C D E F G H Jmm 106 315 990 1780 915 1090 1360 480 670Inch 4.17 12.40 38.98 70.08 36.02 42.91 53.54 18.90 26.38K M N P R S T Lmm 495 137 475 1185 230 230 205 4 holes Ø 35Inch 19.49 5.39 18.70 46.65 9.06 9.06 8.07 1.381. DN200 / PN10 2. DN150 / PN10 3. DN100 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 4500 m 3 h -12800 CFMSuction pressure160 mbar120 TorrNominal speed640 rpmNominal motor power110 kW150 HPOrdering InformationProduct DescriptionLR1B4500 Liquid Ring PumpOrder No.LR1B4500Shop online at www.edwardsvacuum.com


LR1B7000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1B7000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1B Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1B7000 is ideal for fly ash conveying, pulp and paper,filtration, flue gas desulphurization, methane extraction in miningand chemical and petrochemical applications.Performance Curves10Page436A (keyway) B C D E F G H Jmm 127 335 1150 1985 1025 1290 1570 555 800Inch 5.0 13.19 45.28 78.15 40.35 50.79 61.81 21.85 31.50K M N P R S T Lmm 503 170 560 1370 285 285 245 4 holes Ø 35Inch 19.80 6.69 22.05 53.94 11.22 11.22 9.65 1.381. DN250 / PN10 2. DN200 / PN10 3. DN125 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN andANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 6000 m 3 h -13500 CFMSuction pressure160 mbar120 TorrNominal speed510 rpmNominal motor power132 kW200 HPOrdering InformationProduct DescriptionLR1B7000 Liquid Ring PumpOrder No.LR1B7000Shop online at www.edwardsvacuum.com




LR1B12000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1B12000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1B Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1B12000 is ideal for fly ash conveying, pulp and paper,filtration, flue gas desulphurization, methane extraction in miningand chemical and petrochemical applications.Performance Curves10Page440A (keyway) B C D E F G H Jmm 140 355 1608 2518 1231 1758 1948 1200 950Inch 5.51 13.98 63.31 99.13 48.47 69.21 76.70 47.24 37.40K M N P R S T Lmm 600 180 670 1663 335 335 285 4 holes Ø 42Inch 23.62 7.09 26.38 65.47 13.19 13.19 11.22 1.654. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 13800 m 3 h -18100 CFMSuction pressure180 mbar135 TorrNominal speed490 rpmNominal motor power300 kW400 HPOrdering InformationProduct DescriptionLR1B12000 Liquid Ring PumpOrder No.LR1B12000Shop online at www.edwardsvacuum.com


LR1B14000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1B14000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1B Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1B14000 is ideal for fly ash conveying, pulp and paper,filtration, flue gas desulphurization, methane extraction in miningand chemical and petrochemical applications.Performance Curves10Page442A (keyway) B C D E F G H Jmm 160 375 1820 2805 1445 2010 2263 1120Inch 6.30 14.76 71.65 110.43 56.89 79.13 89.09 44.09K M N P R S T Lmm 690 215 800 1923 385 385 367 4 holes Ø 42Inch 27.17 8.46 31.50 75.71 15.16 15.16 14.45 1.654. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 17100 m 3 h -110000 CFMSuction pressure180 mbar135 TorrNominal speed395 rpmNominal motor power400 kW500 HPOrdering InformationProduct DescriptionLR1B14000 Liquid Ring PumpOrder No.LR1B14000Shop online at www.edwardsvacuum.com


LR1B18000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1B18000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1B Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1B18000 is ideal for fly ash conveying, pulp and paper,filtration, flue gas desulphurization, methane extraction in miningand chemical and petrochemical applications.Performance Curves10Page444A (keyway) B C D E F G H Jmm 190 400 1950 2980 1548 2176 2560 875 1320Inch 7.48 15.75 76.77 117.32 60.94 85.67 100.79 34.45 51.97K M N P R S T Lmm 925 244 950 2220 435 435 370 4 holes Ø 48Inch 36.42 9.61 37.40 87.40 17.13 17.13 14.57 1.891. DN400 / PN10 2. DN350 / PN10 3. DN200 / PN10 4. Outlet 5. InletTechnical Data50 Hz / 60 HzNominal capacity (saturated) 17400 m 3 h -110000 CFMSuction pressure160 mbar120 TorrNominal speed298 rpmNominal motor power355 kW500 HPOrdering InformationProduct DescriptionLR1B18000 Liquid Ring PumpOrder No.LR1B18000Shop online at www.edwardsvacuum.com

LR1B21000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1B21000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1B Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1B21000 is ideal for fly ash conveying, pulp and paper,filtration, flue gas desulphurization, methane extraction in miningand chemical and petrochemical applications.Performance Curves10A (keyway) B C D E F G H JPage445mm 180 400 2129 3159 1638 2355 2688 1620 1320Inch 7.09 15.75 83.82 124.37 64.49 92.72 105.83 63.78 51.97K M N P R S T Lmm 1025 244 950 2285 435 435 370 4 holes Ø 48Inch 40.35 9.61 37.40 89.96 17.13 17.13 14.57 1.894. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 22500 m 3 h -113250 CFMSuction pressure180 mbar135 TorrNominal speed330 rpmNominal motor power550 kW750 HPOrdering InformationProduct DescriptionLR1B21000 Liquid Ring PumpOrder No.LR1B21000Shop online at www.edwardsvacuum.com


LR1B30000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1B30000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1B Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1B30000 is ideal for fly ash conveying, pulp and paper,filtration, flue gas desulphurization, methane extraction in miningand chemical and petrochemical applications.Performance Curves10A (keyway) B C D E F G H JPage447mm 210 450 2280 3445 2540 2965 1025 1600Inch 8.27 17.72 89.76 135.63 100.00 116.73 40.35 62.99K M N P R S T Lmm 1125 290 1120 2560 490 490 370 4 holes Ø 48Inch 44.29 11.42 44.09 100.79 19.29 19.29 14.57 1.891. DN500 / PN10 2. DN400 / PN10 3. DN200 / PN10 4. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 30000 m 3 h -117600 CFMSuction pressure160 mbar120 TorrNominal speed312 rpmNominal motor power560 kW750 HPOrdering InformationProduct DescriptionLR1B30000 Liquid Ring PumpOrder No.LR1B30000Shop online at www.edwardsvacuum.com

LR1B38000 Liquid Ring PumpEdwards offers a full range of liquid ring pumps. The LR1B38000 provides a single-stagedesign and curved blade impellor with reinforcing rings for improved ruggedness, reducingnoise and vibration.All of our liquid ring pumps handle wet or dry gases, with high tolerance to liquid carry over.The LR1B Series has an enhanced bearing design enabling reduced internal clearances forimproved efficiency. Pumps are available in cast iron and 316 stainless steel constructionas standard with other materials and corrosion resistant coatings available.Features & Benefits●●●●●Optional central partition enabling dual vacuum duty operationVariable area discharge port for optimum performance at all inletpressuresFlange-mounted casing construction for extra rigidityTop and side inlet/outlet flange options for installations withlimited headroomPacked gland, single and double mechanical seal optionsDimensionsApplications●The LR1B38000 is ideal for fly ash conveying, pulp and paper,filtration, flue gas desulphurization, methane extraction in miningand chemical and petrochemical applications.Performance Curves10Page448A (keyway) B C D E F G H Jmm 200 450 2490 3655 1730 2540 2965 1900 1600Inch 7.87 17.72 98.03 143.90 68.11 100.00 116.73 74.80 62.99K M N P R S T Lmm 1155 290 1120 2560 490 490 370 4 holes Ø 48Inch 45.47 11.42 44.10 100.79 19.29 19.29 14.57 1.894. Outlet 5. Inlet*Flanges available in both DIN and ANSI standardsTechnical Data50 Hz / 60 HzNominal capacity (saturated) 37500 m 3 h -122000 CFMSuction pressure180 mbar135 TorrNominal speed312 rpmNominal motor power775 kW1000 HPOrdering InformationProduct DescriptionLR1B38000 Liquid Ring PumpOrder No.LR1B38000Shop online at www.edwardsvacuum.com

Shelf Dryers11Page449Shop online at www.edwardsvacuum.com

Stokes Vacuum Shelf Dryers Model 438Stokes Model 438 vacuum shelf dryerEdwards has over 90 years experience in the design of dryers for thechemical, pharmaceutical, plastics and metallurgical industries andhas pioneered the design of heated shelves for vacuum shelf dryers.Stokes Model 438 Shelf DryersEdwards Shelf Dryers provide rapid drying of heat sensitive, airsensitive, pyrophoric, and other materials that require drying withoutagitation. The dryer chamber features heated shelves (see below)which are sealed by use of an O-ring contained in a machined groovein the chamber door. The chamber assembly includes a vacuumbreak valve, vacuum gauge, a drain connection, and a connection forproduct thermocouples, and can be fitted with other connections asneeded.Stokes Model 438 Heated Shelf DesignStokes Model 438 Specifications• Non-code chamber as standard• Heated shelves, 50 psi design pressure• External manifolded shelf heating connections• Door hinged with Viton ® O-ring seal and clamps• Sight glasses through door• Vacuum gauge & 4 psi vacuum break valve• Sloped bottom for draining, includes 1 inch NPT manual drain valveOptions• Carbon steel, 316LSS, or other special materials upon request• Internal finishes: Mill finish, #4 polish, or other coating optionsavailable upon request• Wall flange• Upgraded elastomers• Washdown duty• Instrumentation• Additional connections• Door validation port• Vacuum port location• Vacuum System• Heating System• CE Marking not available at this time• Other options available upon requestGlovebox Vacuum Shelf Dryers Model 438GBX11Page450438GBX available in sizes B, D and F only.Edwards offers a "GBX" series vacuum shelf dryer to provide anair/liquid tight seal when mating to an isolation glove box. This designincludes a spigot to accept an inflatable gasket seal from a portableglove box. The spigot is sealed to the chamber with a silicone gasketto ensure full isolation. The door hinges are a double articulatingdavited type design to keep the door swing within the parameters ofthe glove box.One of the key design features of the Stokes Shelf Dryer is the shelfheating connection and manifold system. The supply and return tubefor each shelf protrude through the back wall of the chamber wherethey connect to the supply and return header. Where each shelf exitsthe chamber, the tube is sealed with a proprietary tube ferrule sealingthe chamber and assuring the vacuum integrity of the chamber. Allshelf manifold connections are located outside of the drying chamber,eliminating any possible contamination of the product from leaks inthe heating manifold.An uppermost non-usable shelf is installed serving as the heatingsurface for the top of the chamber assembly. The shelves areconstructed and inspected for maximum steam working pressure of50 psig and are suitably baffled for efficient heating or cooling usingwater, oil, or steam.Shop online at www.edwardsvacuum.com

Data Summary Stokes Vacuum Shelf Dryers Model 438Chamber SizeChamber Size b Chamber Size d Chamber Size f Chamber Size h Chamber Size j# A C W # A C W # A C W # A C W # A C WB-0 0.0 20.5 700 D-0 0.0 27.0 970 F-0 0.0 39.0 1600 H-0 0.0 49.0 3530 J-0 0.0 71.5 4200B-1 4.0 16.3 920 D-1 6.0 23.0 1270 F-1 6.0 35.0 1920 H-1 12.2 44.0 4170 J-1 12.2 65.0 4840B-2 8.0 7.6 1030 D-2 12.0 11.0 1420 F-2 12.0 17.0 2080 H-2 24.4 21.5 4490 J-2 24.4 32.0 5160B-3 12.0 4.8 1140 D-3 18.0 7.0 1570 F-3 18.0 11.0 2240 H-3 36.7 14.0 4810 J-3 36.7 21.0 5480B-4 16.0 3.3 1250 D-4 24.0 5.0 1720 F-4 24.0 8.0 2400 H-4 48.9 10.3 5130 J-4 48.9 15.5 5800B-5 20.0 2.5 1360 D-5 30.0 3.8 1870 F-5 30.0 6.2 2560 H-5 61.1 8.0 5450 J-5 61.1 12.2 6120B-6 24.0 1.9 1470 D-6 36.0 3.0 2020 F-6 36.0 5.0 2720 H-6 73.3 6.5 5770 J-6 73.3 10.0 6440D-7 42.0 2.4 2170 F-7 42.0 4.1 2880 H-7 85.6 5.4 6090 J-7 85.6 8.4 6760D-8 48.0 2.0 2320 F-8 48.0 3.5 3040 H-8 97.8 4.6 6410 J-8 97.8 7.2 7080D-9 54.0 1.7 2470 F-9 54.0 3.0 3200 H-9 110.0 4.0 6730 J-9 110.0 6.3 7400F-10 60.0 2.6 3360 H-10 122.2 3.5 7050 J-10 122.2 5.6 7720F-11 66.0 2.3 3520 H-11 134.4 3.1 7370 J-11 134.4 5.0 8040F-12 72.0 2.0 3680 H-12 146.7 2.8 7690 J-12 146.7 4.5 8360H-13 158.9 2.5 8010 J-13 158.9 4.0 8680H-14 171.1 2.2 8330 J-14 171.1 3.7 9000H-15 183.3 2.0 8650 J-15 183.3 3.4 9320J-16 195.6 3.1 9640J-17 207.8 2.8 9960J-18 220.0 2.6 10280J-19 232.2 2.4 10600J-20 244.4 2.3 10920J-21 256.7 2.1 11240J-22 268.9 2.0 11560A Useable total surface area (sq. ft.)C Clearance between shelves (inches)W Weight (lbs)Dimensions and Shelf InformationChamberSizeWidthOverall Dimensions Internal Dimensions Shelf InformationDepth Height Width Depth Height Volume Size Each(Door Open)(ft 3 )UseableShelves438 B 40.5" 75" 56" 30" 29" 20.5" 10.3 24" x 24" up to 6438 D 40.5" 77" 66" 30" 42" 27" 19.7 24" x 36" up to 9438 F 40.5" 85.5" 75" 30" 42" 39" 28.4 24" x 36" up to 12438 H 62" 107" 77.5" 50" 46" 49" 65.2 44" x 40" up to 15438 J 66" 110" 99" 50" 46" 71.5" 95.2 44" x 40" up to 2211Page451Shop online at www.edwardsvacuum.com


Process Vacuum12Page453Shop online at www.edwardsvacuum.com

Steam Ejector Vacuum SystemsEdwards has over 90 years experience in the design and supply ofsteam ejector systems. Edwards has been instrumental in thedevelopment of the steam ejector from the relatively crude singlestage devices which evolved into today’s highly efficient multi-stagesystems.Process and mechanical design expertise is combined with projectmanagement skills for the supply of individual items of plant, or theexecution of total projects including installation and commissioning.The company has an immense reputation in applications includingthe following:• Refinery Vacuum Systems • Edible Oil Processing• Vacuum Distillation Units • Polymerization• Flash Evaporation for Seawater • CrystallizationDesalination• Evaporative Cooling• Turbine Condenser AirExtractionFeatures of the Steam Ejector Solution• Low capital cost• No moving parts• Low maintenance• Wide choice of materials• No close clearances• No size limitation• Ability to handle large vapourload• Liquid slugs do not causemechanical damage• Not sensitive to suctiontemperatureOperating PressureSingle Stage 150 – 130 mbarTwo Stage 25 – 15 mbarThree Stage 10 – 7 mbarFour Stage 1 mbarFive Stage 0.1 mbarAs ejectors can be economically manufactured on an individual basisto suit specific customer needs they have a wide capacity range,which is limited only by the manufacturing techniques relevant to thematerial of construction, typically this range would be between10 - 1.5 x 10 6 m 3 h -1 .81276 312Page45451 Strainer 5 Diffuser2 Motive steam 6 Suction3 Nozzle 7 vapour Head4 Discharge 8 Nozzle HolderRangeEjectors can be arranged as multi-stage systems with interstagecondensers, which may be the direct contact type (jet condenser) orsurface type (shell and tube). The multi-stage arrangements allowslower suction pressures to be achieved than could be produced by asingle stage ejector. Interstage condensers economize on the use ofmotive steam, since the operating steam from stages upstream of thecondenser is condensed leaving only saturated incondensable gasesto be handled by the succeeding stage or stages.4Interstage Jet CondensersJet or spray type condensers operate by condensing steam by directcontact with the cooling water. This type of condenser can be locatedat barometric height or at low level using a condensate extractionpump. Jet condensers tend to use less cooling water than surfacetypes, although as the ejected vapours are in contact with the coolingwater the treatment of any resulting effluent must be considered.Interstage Surface CondensersSurface condensers of the shell and tube type perform the samefunction as jet types, however the ejector steam and process vapoursare condensed on the tube surfaces without contact with the coolingwater, greatly reducing the potential effluent problem. Removableend covers on the condensers allow easy cleaning of the tubes.Shop online at www.edwardsvacuum.com

Deaeration EquipmentMultistage Ejector/Liquid Ring PumpCombinationsEdwards are able to offer combinations of steam ejectors and liquidring pumps where the liquid ring pump replaces the final stage orstages of a steam ejector system.This enables large vapour/gas flows to be handled at the lowpressures associated with multi-stage steam ejector sets whilstsubstantially reducing steam consumption and hence operatingcosts.Ejector and ejector liquid ring pump combinations can be suppliedusing Edwards designed liquid ring pumps. The depth of experiencein both types of equipment allows optimisation of the equipment bothin performance and economy of utilities.Applications and Design ServicesEdwards offers a comprehensive design service based on unrivalledprocess vacuum experience, application knowledge and designcapabilities.In order to propose a solution the following information is required atthe enquiry stage:• Suction flow• Composition and Molecularweight• Suction pressure• Discharge temperature• System volume• Evacuation time• Discharge pressure• Motive pressure andtemperature, max-normal-min• Cooling water temperature,max-normal-min• Type of condenser direct orindirect• Type of installation Barometricor low level• Materials of construction• Design codes applicableEdwards experience in water deaeration equipment spans more than70 years, serving essentially two markets and applications:Seawater deaerators for water injection systems for secondaryrecovery of oil from offshore reservoirsBoiler feedwater and process deaeration for power generation plants,boilers and process useSeawater DeaeratorsSecondary recovery by means of water injection is frequently anessential feature of crude oil production. It is often a crucial factor inachieving and sustaining economically viable production rates.The source of the water is dependant on the location of the productionfacility and could be from a subsurface source such as producedwater or an aquifer, or from a surface source such as the sea or ariver.The latter two sources, as with most surface waters, normally containsubstantial levels of dissolved oxygen. In order to control corrosionrates in downstream plant and to inhibit bacterial growth this oxygenmust be removed before the water is used for injection.Edwards is able to provide extensively proven deaeration technologyto facilitate the removal of this oxygen to levels such that theremaining residual may be economically removed by the addition ofa chemical scavenger.The following options are available:• Spray/pack deaerators• Packed column deaerators• Trace gas stripping deaeratorsSpray/pack DeaeratorsAlthough conventional packed bed deaerators offer a satisfactorysolution in many circumstances, the unique Edwards spray packeddeaerator technology offers significant advantages over conventionaldesigns. It affords additional benefits for FPSO installations becausethe mass transfer efficiency of the spray section is unaffected bywave motion and by any foaming of the water as it enters thedeaerator.6112Page4555421 First stage vapour take-off 4 Recycle2 Oxygen scavenger 5 Second stage vapour take-off3 Water outlet 6 Water inlet3Shop online at www.edwardsvacuum.com

12Page456This patented design offers many benefits over conventionaldeaerators and compact deaerator designs including the following:• Substantial height and weight reduction compared to conventionalvacuum stripping columns• May be used upstream of sulphate reduction membranes, since itcan operate without the addition of anti-foam chemicals• Unaffected by any motion of the installation, making it the preferredtechnology for FPSO applications• There is no reliance on catalysts, which have a limited life span andmay be poisoned• There is no requirement for storage and/or production ofhazardous combustible products such as methanol or hydrogen• Extensively field-proven technology, with over 50 units utilising thespray distributor supplied for water injection servicePacked Column DeaeratorsThis conventional design uses well-proven technology and remainsthe industry standard for both onshore and offshore applicationsworldwide.The design is suitable for both vacuum and gas stripping applicationswith corrosion resistant tower internals designed for foam retention,efficient liquid and gas phase distribution and redistribution, in orderto maximise mass transfer efficiency.Trace Gas Stripping DeaeratorsThis patented system combines vacuum stripping and inert gasstripping to offer a unit that operates under vacuum with the masstransfer process being assisted by a small quantity of inert gasadmitted into the deaerator column.This process allows highly compact deaerator columns to be usedwhilst the required vacuum pump capacity is substantially lower thanwould be associated with conventional vacuum stripping deaerators.Deaeration and the use of Sulphate RemovalSystemsEdwards is able to offer field proven designs for water injectiondeaerators, which are required to operate upstream of sulphateremoval systems. Such installations require that the deaerator mustoperate without antifoam agents since the use of such agents inincompatible with the membranes used in the sulphate removalsystem.Edwards has supplied units to replace conventional packed columndeaerator designs supplied by other manufacturers that have provedto be incapable of operating at the required design conditions withoutthe use of antifoam agents. Our ability to offer proven technologies,which provide enhanced mass transfer capability can enable existingdeaerator vessels to be re-used in order to minimise the cost anddowntime associated with the upgrade.Sulphate removal systems may be installed upstream of thedeaerator in which case antifoam agents may be used, however thislocation upstream of the deaerator column has many seriousdisadvantages, which include:• Materials of construction of the sulphate removal system must besuitable for service in contact with undeaerated seawater• Presence of oxygen in the seawater will increase the risk ofoxidation of the membranes and/or the possibility of aerobicbacteria or algae growth on the membranes• Additional precautions to ensure the removal of any hydrocarbonspresent in the water may be necessary prior to the sulphateremoval system to ensure that these do not contact themembranesDeaeration on Floating Production VesselsEdwards has considerable experience in the supply of deaerationpackages for use on floating production vessels, includinginstallations on FPSO's, semi-submersibles and on tension legplatforms.These production facilities require that the deaeration package isinsensitive to the motion of the installation and that the height andweight of the package together with the elevation of the center ofgravity above grade level are minimised.Our deaeration technology includes designs that are ideally suited tosuch floating production facilities, with references available for thesetypes of installations at locations around the world, in conditionsranging from offshore Canada to Equatorial Africa.Shop online at www.edwardsvacuum.com

Boiler Feedwater and Process Water DeaeratorsThe types of deaerator described have been developed over years ofexperience of the different types required for numerous industrialapplications. Examples of some of the industries where deaeration isused are:Power Stations – treating boiler feed water.Oil Refineries and Chemical Plants – treating boiler feed water andprocess deaeration.Breweries – deaerating water in the production of high gravity beer.12High Level Pressure DeaeratorsFor modern industrial installations where heat economy is essential,and where even lower oxygen contents are demanded to avoid costlymaintenance work, the pressure heater/deaerator system is usedwhere inlet boiler feed water is heated to well above atmosphericboiling point.Edwards has developed a system of sprays and trays such that thefeed water enters the deaerator through an atomizing spray valveassembly into the upper volume of the deaerator vessel whereprimary deaeration takes place. The feed then falls over a series oftrays to the base of the deaerator during the course of whichsecondary deaeration takes placed.Heating steam is admitted via a diffuser positioned below the trayassembly to ensure ultimate heating effect and optimum scrubbingaction so as to produce residual oxygen contents down to0.007 p.p.m. or less. This deaerating section is mounted on a storagecompartment such that the whole system can be mounted at asuitable height to obtain the required suction head on the boiler feedpump advised by the manufacturer.13625541 Vent 4 Deaerated water outlet2 Feed water inlet 5 Off-load Heating Steam3 Heating steam inlet1 Vent 4 Discharge to storage vessel2 Feed water inlet 5 Balance pipe return3 Heating steam inlet 6 Manway412Page457Shop online at www.edwardsvacuum.com


ServiceGuide to Pump Selection and Pipe Installation 463Conversions 466Material Safety Data Sheets 46713Page459Shop online at www.edwardsvacuum.com

ServiceProduct Repair and OverhaulOur Expertise is in understanding how to get the most from yourEdwards product, using the know-how we have gathered fromsupporting our global installed base of over 750 000 EdwardsVacuum Pumps and 8 500 Edwards Exhaust Management Systems.When products require more than just routine maintenance and youwant the confidence afforded by the quality and standard of repaironly the OEM can guarantee, then choose from our range of productrepair and overhaul services. Edwards offers fixed price servicing forswift response and simple budgeting, or a flexible pricing structure formaximum cost control.Your Advantage is in being able to optimise your total cost ofownership (TCO), to improve product and process yield, and tominimise your environmental impact. Whether the repair of a singleunit, or a proactive programme of managing and optimising allEdwards product across your facility, Expert Advantage offers achoice for you.• Product upgrades and optimisation• Product repair and overhaul• Product exchange• Replacement parts, kits and tooling• On-site support• Service contracts and agreements• Operation, maintenance and service training• Certified product sales13Page460Upgrades and OptimisationTake advantage of Edwards’ latest technology and know-how byupgrading or optimising your existing equipment. We offer costeffective upgrade of most Edwards and other branded equipment,allowing you to benefit from enhanced performance, energyefficiency, and greatly improved cost of ownership. Through CIPdriven optimisation programmes, we use our know-how developedfrom our global installed base to help you enhance your process andproduct yield, and realise Total Cost of Ownership (TCO)improvements.• Innovative products and upgrades to reduce carbon footprint andoptimise environmental strategy• Simple single equipment retrofit kits to full facility-wide turnkeyprogrammes with high return on investment• Technology upgrades, system tuning and optimisation for productand process yield improvements• Sophisticated modelling and simulation, validated against ourglobal knowledge base• Remote diagnostics and prognostic condition monitoring withFabWorks-iMS for TCO optimisationHighly trained service technicians follow factory derived proceduresin all our facilities globally.Product ExchangeProduct exchangeIf process uptime is critical, or it is simply not convenient to performrepair or maintenance work on site, the Edwards Service ExchangeProgramme offers rapid product replacement from a comprehensiveglobal inventory (for common pump variants and subject toavailability). Products are rebuilt and tested to factory derivedstandards by factory trained technicians and are backed up by acomprehensive 1 year warranty.Replacement Parts, Kits andToolingGenuine Edwards Replacement Parts are produced to the samequality standards as our new products. They always meet the latestproduct standards and will minimise your maintenance time byhelping you get the job done right the first time.To simplify your job we offer many kits/sets tailored to your Edwardsproduct needs for periodic and repair maintenance. Use GenuineEdwards Replacement Parts kits and your maintenance team willstart work with the materials they need to get the job done: save time,reduce your supply chain cost, extend the life of your product andenjoy years of trouble free operation.With distribution centres globally located, Edwards can meet yourneeds for availability of our Genuine Replacement Parts.Edwards' service facility in Brno, CZ, part of our global networkShop online at www.edwardsvacuum.com

Certified ProductsEdwards Certified Products are pre-owned units, refurbished in ourOEM remanufacturing factories by our skilled technicians usinggenuine Edwards' spare parts only. Certified products offer a costeffective and carbon friendly option to acquire additional vacuum andabatement equipment.Certified products are provided with all the accessories required toinstall your product straight out of the box, typical installationaccessories include electrical connectors, water connectors, inlet andexhaust o-rings as well as full instructions for installation and usage.Edwards Certified Products are available globally through ourextensive service and logistics Network. Due to the rapidly changingnature of the used equipment market please contact Edwards in thefirst instance to ensure product availability before ordering.Onsite ServicesEdwards support extends across our complete range of products.Operation, Maintenance andService TrainingHighly skilled Edwards teams, supporting End-users, OEMs andSystems Integrators alike worldwide, work in partnership with you, atyour site. From simple single visits to integrated multi-site teams,resolving breakdowns, providing continuous improvement, optimisingequipment uptime and yield, and reducing your site managementcosts. Options include:• Product installation and commissioning, operator training• Scheduled monitoring, preventative and predictive maintenance,breakdown support• Upgrades providing improved performance and efficiency• Logistics management to optimise availability and supply chain• Emergency hotline and service support, including availabilityoutside of normal working hours• Local, regional and global agreements, flexible and integrated withyour support networkAvoid unplanned downtime with correct operation and maintenanceby taking advantage of professional advice over the phone, ordedicated onsite training for your technicians and operators.Local Support from a GlobalCompanyWe understand the importance of local support. Edwards has anumber of major service facilities located throughout the world,backed up by an extensive team of engineers and technicians toprovide the support you need. From Edwards you can expect a local,rapid response and great value service, delivered by the experts.Consistent and ReliableStandards Wherever You AreWe develop or manufacture the training, processes, tooling and partsused throughout our service network at the factories where wedevelop and manufacture our products. This is why our service teamis always ready to deliver quality support. As you would expect froma responsible, global company, we operate under ISO9001 andISO14001 accreditation.13Service Contracts andAgreementsPage461Tailored Contracts, ideal for larger installations, bring together anycombination of our service product range into one package, whetherfor a single turnkey activity or longer term equipment maintenance,management and optimisation programmes focussed on reducingtotal cost of ownership.For smaller installations, or those under the cost control of multiplemanagers, Edwards provides standard fixed price contracts forsimple budgeting and cost management.Shop online at www.edwardsvacuum.com

Global Support from EdwardsOur worldwide network of around 1000 service personnel is easily and simply accessed through your local Edwards Office.www.edwardsvacuum.com/service13Page462Location Contact Telephone Number Contact EmailUnited KingdomIrelandBeneluxAustriaSwitzerlandPolandCzech RepublicRussiaEastern EuropeMiddle EastSouth AfricaGermany+44 (0)1293 842202+49 (0)800 000 1457Aftersales@edwardsvacuum.comDEservice@edwardsvacuum.comItaly +39 (0)863 509516 ITmanutenzione@edwardsvacuum.comFrance, North Africa +33 (0) 1 47 98 24 01 FRserviceapresvente@edwardsvacuum.comIsrael +(972) 7 681 0633 Edwards.israel@edwardsvacuum.comAmericas (except Brazil) +(1) 1 800 848 9800 edwardsstokesservice@edwardsvacuum.comBrazil + 55 11 3952 5000 service@edwardsvacuum.com.brSE Asia, Australasia +(65) 6546 8408 Customer.careSG@edwardsvacuum.comKorea +(82) 41 621 7070 infokorea@edwardsvacuum.comTaiwan ROC +886-37-581000 Customer.CareTW@edwardsvacuum.comPeoples Republic of China and SAR +(86) 21 5866 9618 x25 CareSHA.Customer@edwardsvacuum.comJapan +81-47-458-8853 edj.service@edwardsvacuum.comIndia +91-20-40752210 India@edwardsvacuum.comShop online at www.edwardsvacuum.com

Guide to Pump Selection and Pipe InstallationOur experienced applications team are trained to provide expert advice on specifying the correct pumping system. Please contact your localEdwards office for further details.Rotary Pump Speed and Pump-Down TimeCalculationsTo estimate the pump speed you need to reach a given systempressure, P:S = (F × V)/t (1)To estimate the time to pump-down your system to a givenpressure, P:t = (F × V)/S (2)where t is the pump-down timeF is the pump-down factor at pressure PV is the volume of the vacuum systemS is the speed of the rotary pumpRead F from Figure 1. t, V and S must be in consistent units: forexample, t in hours, V in cubic metres (m 3 ) and S in cubic metres perhour (m 3 h -1 ).Speed and Power Curves22Speed and Power Curves-1C (l s )410310210110010-110-210-41025015010010 -3 10 -2 10 -1 10 0 10 1 10 2 mbar7040Ømm2516125F201816141210864220-2 -110 101 One-stage rotary pump2 Two-stage rotary pump or pump combination1010Figure 1 – Pump-down factor, F, as a function of system pressure, mbarF applies a correction for the change in the speed of rotary pumps asthe inlet pressure decreases. But F does not include a correction forthe effect of conductance of inter-connecting pipes (refer to thesection below if you want to apply this correction).These calculations apply to clean and leak tight vacuum systems. Itis difficult to extend these curves to below 0.1 mbar, because theeffect of system design and out-gassing become increasinglyimportant at lower pressures.For example, you have a 0.06 m 3 (60 l) vacuum system that you mustevacuate to 1 mbar in 0.05 hr (3 minutes). From Figure 1, at 1 mbarF=7.S = (F × V)/t = (7 × 0.06)/0.05 = 8.4 m 3 h -1So, you require a pump with a minimum speed of 8.4 m 3 h -1 and anultimate vacuum well below 1 mbar. Edwards RV8 pump is suitablefor this application.Effect of the Conductance of Connection PipesResistance to flow of gases and vapours through pipes cansignificantly affect the size of pump you require or the pump-downtime you can achieve with a given pump. If you know the dimensionsof the pipes in your system, you can correct the speed and pumpdowntime calculations. The conductance of 1 m lengths of pipes ofvarious diameters is shown in Figure 2.Please note these limitations for the data in this graph. The datashown in the dotted portions of the curves applies only to low velocity,viscous, laminar flow in long pipes (where the length of the pipe istypically many 100 times the pipe diameter). This data does not applyto turbulent flow (when the pipe conductance may be significantlyreduced) or to compressed gases (such as gases in short pipes orsubject to high speed flows). If your calculations are for short pipes(where the length of the pipe is typically < 100 times the pipediameter), or for pipe diameters and pressures shown by the dottedportions of the curves in Figure 2, please refer to Wutz 1 or Dushman 2 ,or contact Edwards for advice.110210310 mbar20 1 510 10 10 10 3 10 4 10 Pa-2 -110 100110 10210 10 3 104Figure 2 – Conductance of 1 m of round pipe, for air at 20 °C (the data shown in the dottedportions of the curves is for low velocity, viscous, laminar flow in long pipes)The conductance of a pipe at a given pressure is:C p = C/lwhere C p is the conductance of the pipeC is the conductance per metre, read from Figure 2l is the length of the pipe in metres.Then, you can use the value for C p to correct the pumping speed atthe end of the pipe when it is connected to the pump inlet; use thisequation:1/S p = (1/S) + (1/C p ) or S p = (C p × S)/(C p + S) (3)where S p is the pumping speed at the end of the pipeS is the speed of the pump.Use a similar procedure to make an approximate correction to thepump-down time calculation. First, read the value of C at the requiredsystem pressure from Figure 2, and calculate C p for your pipe at thatpressure. Then use the pump speed, S, and C p in equation (3) tocalculate the corrected speed, S p . Use this value of S p in equation (2)to estimate the pump-down time, t.If you use a narrow pipe between the pump and the process chamber,this restricts the effective pumping speed. It is usually moreeconomical to use a wider or shorter pipe and a smaller pump, thanto restrict the pumping speed of a larger pump. You should aim at theeffective pumping speed to be 80% or more of the pump’s speed. Youcan use equation (3) and the graph in Figure 2 to select the minimumsize of the pipe you need.For example, you need a pumping speed of 150 m 3 h -1 at 1.0 mbar inyour process chamber, and the pump must be 6 m away from thechamber. The E2M175 (135 m 3 h -1 at 1 mbar) is too small for thisapplication, even without losses in the pipelines. So, consider theE2M275 pump which has a pump speed of 230 m 3 h -1 . Use equation(3) to calculate the minimum conductance of the connecting pipe:C p = (S × S p )/(S – S p ) = (230 × 150)/(230 – 150) = 430 m 3 h -1The conductance per metre is then 430 × 6 = 2580 m 3 h -1 . In Figure 2,the nearest larger diameter pipe that has a conductance of 2580 m 3 h -1 or more at 1.0 mbar is 70 mm. Conveniently, this is the samediameter as the inlet of the E2M275 pump.1 Theory and Practice of Vacuum Technology, M Wutz, A Herman, and W Walcher,Friedr. Vieweg and Sohn, (1989)2 Scientific Foundations of Vacuum Technique, 3rd ed, S Dushman and J Lafferty, Wiley(1997)Pa13Page463Shop online at www.edwardsvacuum.com

13Page464Maximum Pipe Length for Increase in Pump-DownTime of < 20%Table 1 gives a quick guide to the maximum length of pipe you canuse to connect the pump to your vacuum system, if you want theconductance of the pipe to contribute no more than 20% to the pumpdowntime.Pump ModelPump Inlet Inlet Ø(mm)Maximum Pipe Length (m),for Pump-Down to1 mbar 0.1 mbar50 Hz 60 Hz 50 Hz 60 HzSpeedivac 2 ¼ inch 12 4 3.5 – –BSPE2M0.7 NW10 10 6 5 0.7 0.6E2M1, E2M1.5 NW10 10 3 2.5 0.3 0.3RV3 NW25 25 50 45 7 6RV5 NW25 25 35 30 4.5 3.5RV8 NW25 25 22 19 3 2RV12 NW25 25 16 14 2 1.5E1M18, E2M18 NW25 25 11 9 1.5 1E2M28 NW25 25 8 6.5 1 0.8E2M40 ISO40 40 26 24 2.5 2E2M80 ISO40 40 16 13 1.5 1E2M175 ISO63 70 31 28 4 3.5E2M275 ISO63 70 25 21 3.5 2.5Table 1 – Maximum pipe lengths, for an increase in pump-down time of < 20%In our calculations, we assumed that the pipes and fittings usedcorrespond to the size of the inlet port. That is, for example, thatNW25 pipes and fittings are used for the RV pumps. If you usesmaller pipes and fittings, the pump-down times will be increasedsignificantly.How to Choose a Rotary Pump to Back a VapourPumpWe recommend that you use two-stage rotary pumps (such as theRV5 or the E2M18 pumps) to back vapour pumps. When a vapourpump operates at its maximum specified throughput, the backingpressure must not be higher than 0.5 times the critical backingpressure. Note that the maximum throughput of most vapour pumpsis calculated at 1 × 10 -2 mbar: the maximum throughput of vapourbooster pumps is calculated at 1 mbar.Use this equation to calculate the required rotary pump speed:S > t m /(0.5 × P cb )where S is the speed of the rotary pumpt m is the maximum throughput of the vapour pumpP cb is the critical backing pressure of the vapour pump.For example, at 1 × 10 -2 mbar and a corresponding speed of 60 l s -1 ,the maximum throughput of the Diffstak 100/300 pump is60 × 10 -2 = 0.6 mbar l s -1 . The critical backing pressure of this pumpwith Santovac ® 5 fluid is 0.6 mbar. So, the required rotary pumpspeed is:S > 0.6/(0.5 × 0.6) = 2 l s -1 ~ 8 m 3 h -1The nearest larger, two-stage rotary pump suitable for this application(with no correction for pipe conductance effects) is the RV8. If themaximum throughput for your system is lower than the pump’sspecified maximum throughput, you may be able to use a smallerrotary pump: please contact Edwards for advice.You must now check that the rotary pump you have selected canpump-down your vacuum system from atmospheric pressure to thecritical backing pressure in an acceptable time. If it cannot, you mayneed to choose a larger rotary pump.How to Choose a Rotary Pump to Back aTurbomolecular PumpWe recommend that you use two-stage rotary pumps (such as theRV5 or the E2M18 pumps) or scroll pumps to back turbomolecularpumps. The size of the rotary pump you need depends on themaximum backing pressure and the speed of the turbomolecularpump at your required system pressure:S > (S t × P)/(0.5 × P mb )where S is the speed of the rotary pumpS t is the speed of the turbomolecular pump, at your requiredsystem pressure PP mb is the maximum backing pressure of the turbomolecularpump.For conventional turbomolecular pumps, the maximum backingpressure is typically 0.1 mbar: for compound turbomolecular pumps,it is about 5 mbar.For example, you require a system pressure of 1 × 10 -4 mbar with aconventional 200 l s -1 turbomolecular pump. The required rotarypump speed is:S > (200 × 10 -4 )/(0.5 × 0.1) = 0.4 l s -1 ~ 1.44 m 3 h -1So, you need a rotary pump with a speed, at 0.1 mbar, of 1.44 m 3 h -1 .The nearest larger, two-stage, rotary pump suitable for thisapplication (with no corrections for pipe conductance affects) is theRV3.You must now check that the rotary pump you have selected canpump-down your vacuum system from atmospheric pressure to thecritical backing pressure in an acceptable time. If it cannot, you mayneed to choose a larger pump. This is particularly important if you usea compound turbomolecular pump: the higher maximum backingpressure of these pumps mean that you can use a smaller backingpump. Note that, in all applications you will achieve a lower ultimatepressure (lower P) if you use a larger backing pump.If you want to pump hydrogen or helium, these calculations may notapply: please contact Edwards for advice.Shop online at www.edwardsvacuum.com

Effect of the Pipe Between the Secondary Pumpand the Rotary PumpAs we discussed above, the conductance of the pipe between therotary pump and the secondary pump can reduce the effectivepumping speed. This may mean that the critical backing pressure ofthe secondary pump is exceeded, even though the unrestrictedspeed of the rotary pump is adequate.If you know the bore and length of the pipe between the rotary pumpand the secondary pump, you can use equation (3) and the data inFigure 2 to calculate the pumping speed at the end of the pipe. Then,match this corrected speed to the maximum throughput of thesecondary pump.Alternatively, in Table 2, we give a quick guide to the maximum lengthof pipe you can use between the rotary and secondary pumps, if youwant the reduction in pump speed at 0.5 mbar to be no more than20%. In our calculations, we assumed that the pipes and fittings usedcorrespond to the size of the inlet port. That is, for example, NW25pipes and fittings are used for the RV pumps. If you use smaller pipesand fittings, you must use shorter pipes.Pump Model Pump Inlet Inlet Ø(mm)Maximum PipeLength (m)50 Hz 60 HzSpeedivac 2 ¼ inch BSP 12 0.8 0.8E2M0.7 NW10 10 0.7 0.7E2M1, E2M1.5 NW10 10 0.4 0.4RV3 NW25 25 7 6RV5 NW25 25 4 3.5RV8 NW25 25 2.5 2RV12 NW25 25 1.5 1.5E1M18, E2M18 NW25 25 1 1E2M28 NW25 25 0.8 0.7E2M40 ISO40 40 3.5 3.5E2M80 ISO40 40 2 1.5E2M175 ISO63 70 7 7E2M275 ISO63 70 4.5 4.5Table 2 – Maximum pipe lengths, for a maximum decrease in pumping speed of 20% at0.5 mbar13Page465Shop online at www.edwardsvacuum.com

ConversionsPressure Unitsmbar bar Torr Pa (Nm –2 ) atm lbf inch –21 mbar = 1 1 x 10 -3 0.75 10 2 9.87 x 10 -4 1.45 x 10 -21 bar = 10 3 1 7.5 x 10 2 1 x 10 5 0.987 14.51 Torr = 1.33 1.33 x 10 -3 1 1.33 x 10 2 1.32 x 10 -3 1.93 x 10 -21 Pa (Nm -2 ) = 0.01 1 x 10 -5 7.5 x 10 -3 1 9.87 x 10 -6 1.45 x 10 -41 atm = 1.01 x 10 3 1.01 7.6 x 10 2 1.01 x 10 5 1 14.71 lbf inch -2 = 68.9 6.89 x 10 -2 51.71 6.89 x 10 3 6.80 x 10 -2 11 kgf cm -2 = 9.81 x 10 2 0.98 7.36 x 10 2 9.81 x 10 4 0.97 14.21 inch Hg = 33.9 3.39 x 10 -2 25.4 3.39 x 10 3 3.34 x 10 -2 0.491 mm Hg = 1.33 1.33 x 10 -3 1 1.33 x 10 2 1.32 x 10 -3 1.93 x 10 -21 inch H 2 O = 2.49 2.49 x 10 -3 1.87 2.49 x 10 2 2.46 x 10 -3 3.61 x 10 -21 mm H 2 O = 9.81 x 10 -2 9.81 x 10 -5 7.36 x 10 -2 9.81 9.68 x 10 -5 1.42 x 10 -3Leak Rate Unitskgf cm –2 inch Hg mm Hg inch H 2 O mm H 2 O1 mbar = 1.02 x 10 -3 2.95 x 10 -2 0.75 0.40 10.21 bar = 1.02 29.53 7.5 x 10 2 4.01 x 10 2 1.02 x 10 41 Torr = 1.36 x 10 -3 3.94 x 10 -2 1 0.54 13.61 Pa (Nm -2 ) = 1.02 x 10 -5 2.95 x 10 -4 7.5 x 10 -3 4.01 x 10 -3 0.1021 atm = 1.03 29.92 7.6 x 10 2 4.07 x 10 2 1.03 x 10 41 lbf inch -2 = 7.03 x 10 -2 2.04 51.71 27.68 7.03 x 10 21 kgf cm -2 = 1 28.96 7.36 x 10 -2 3.94 x 10 2 1 x 10 41 inch Hg = 3.45 x 10 -2 1 25.4 13.6 3.45 x 10 21 mm Hg = 1.36 x 10 -3 3.94 x 10 -2 1 0.54 13.601 inch H 2 O = 2.54 x 10 -3 7.36 x 10 -2 1.87 1 25.41 mm H 2 O = 10 -4 2.90 x 10 -3 7.36 x 10 -2 3.94 x 10 -2 1Note also: 1 dyn cm –2 (barye) = 0.1 Pa (Nm –2 ) = 10 –3 mbar13Page466mbar l s -1 Torr l s -1 atm cm 3 s -1 lusec atm ft 3 min -11 mbar l s -1 = 1 0.75 0.99 7.5 x 10 2 2.09 x 10 -31 Torr l s -1 = 1.33 1 1.32 x 10 3 10 3 2.79 x 10 -31 atm cm 3 s -1 = 1.01 0.76 1 7.6 x 10 2 2.12 x 10 -31 lusec = 1.33 x 10 -3 1 x 10 -3 1.32 x 10 -3 1 2.79 x 10 -61 atm ft 3 min -1 = 4.78 x 10 2 3.59 x 10 2 4.72 x 10 2 3.59 x 10 5 1Pumping Speed UnitsMaterial safety data sheetsl s –1 l min –1 ft 3 min –1 m 3 h –11 l s -1 = 1 60 2.119 3.601 l min -1 = 0.017 1 0.035 0.061 ft 3 min -1 = 0.472 28.317 1 1.6991 m 3 h -1 = 0.278 16.667 0.589 1Shop online at www.edwardsvacuum.com

Material Safety Data SheetsThe following data sheets are available on requestP110-11-000 Mechanical pump oil - SupergradeP110-20-100 Oil Apiezon ® AP303P120-01-000 Mechanical pump oil – 45P120-01-005 Mechanical pump oil – TWP120-01-010 Mechanical pump oil – Ultragrade 15, 19, 20, 70P120-01-030 Drynert 25/6, gear box lubricantP120-01-050 Synfilm GT OilP120-02-000 Oil – Apiezon ® A, AP201, B, BW, C & GP120-02-005 Oil – Apiezon ® J & KP120-02-010 Oil – Apiezon ® AP301P120-02-015 Diffusion pump fluid – DC702, 704EU & 705P120-02-025 Diffusion pump fluid – Edwards L9P120-03-000 Grease – Fomblin ® (AR555)P120-03-005 Grease – Krytox ® series 240 & LVP fluorinatedgreasesP120-03-010 Grease – Apiezon ® H & TP120-03-015 Grease – Apiezon ® L & MP120-03-025 Grease – Apiezon ® AP101P120-03-030 Grease – Apiezon ® AP100P120-03-035 Grease – Silicone high vacuumP120-03-040 Fomblin ® CR 861P120-03-045 DEFRIC COAT D1-CP120-03-050 DEFRIC COAT D1-C solventP120-04-000 Wax – Apiezon ® W & W40P120-04-005 Wax – Sealing compound Apiezon ® QP120-04-015 O-rings – Viton ®P120-04-020 O-rings – Nitrile & rubber vacuumP120-04-025 O-rings – Kalrez ®P120-04-030 Indium metal sealsP120-04-035 O Rings - Fluoroelastomer (VAT)P120-05-000 GS batteryP120-05-005 Grease – Asonic GHY72P120-06-000 Coolant – Edwards Drystar ® 2P120-06-005 Coolant – HT110P120-07-000 Refrigerant – Edwards chiller (SUVA HP62)P120-08-000 GRC cartridges – C150Y/C150R/C150JV/C150W/CM10YP120-08-005 End point detector fluidP120-08-010 Pipe insulation jacketsP120-08-015 Thermal processing/conditioning system TPU-TCSP120-08-020 GRC cartridges – C150A/C7150AP120-08-025 GRC cartridges – C250YP120-09-000 Alumina grade A (activated alumina)P120-09-005 Activated charcoal AC35P120-09-010 Rotary pump blade material – CX2P120-09-020 Rotary pump blade material – GE21P120-09-025 Polytetrafluoroethylene PTFEP120-10-000 Leak detection/ion gauge filamentsP120-11-010 V Lube BP120-11-020 V Lube F US versionP120-11-025 V Lube F European versionP120-11-030 V Lube GP120-11-040 V Lube HP120-11-080 Heat transfer fluidP120-11-100 Sealant – silicone liquid gasketP120-11-110 Cartridge grease - Shell Darina ® EP grease 2P120-20-010 1-Methoxy-2-PropanolP120-20-020 Emarald lacquerP120-20-030 Emarald primerP120-20-040 Isopropanol anhydrousP120-20-050 Potassium hydroxide solutionP120-20-060 Visioncoat 2000P120-20-070 Visioncoat 2000 solventP120-20-080 Optical 10L fluidP120-20-090 Super II fluidP120-20-100 Hexid fluidP120-20-110 In-situ hydrophobic monomerP120-20-130 Exchange carbonP120-20-140 Exchange resinP120-20-160 ZirconiumP120-30-010 XDS black tip seal dustP120-30-015 XDS light brown tip seal dustP120-40-020 Sodium fluorideP120-40-060 Aquareus ion exchange resinP120-70-005 Rotary pump blade material -F43P120-70-010 Rotary pump blade material -F3213Page467Shop online at www.edwardsvacuum.com

13Page468Trade MarksEdwards, Barocel, Diffstak, Drystar, Speedivac are trademarks ofEdwards Limited.Notice - DimensionsAlthough every care has been taken in the preparation of dimensionaldrawings no responsibility can be taken for customers' workprocessed from this catalogue. Unless otherwise stated alldimensions are in mm (inches).Notice - AccessoriesAccessories are occasionally included in illustrations and dimensiondrawings for clarity or convenience. In general this is indicated on thedrawing or in the adjacent text but in the case of doubt, please verifythe status of such components before ordering.Edwards is an ISO9001 (BS5750) certified organization.Certificate numbers:FM21010, FM39455, FM25009,FM32104, FM59924 and FS23443.All goods listed in this catalogue are offered subject to our standardconditions of sale. Copies available on request.We reserve the right to change specifications without notice.© This catalogue is copyright and no part of it may be reproducedwithout our written permission.Publication C10009895Shop online at www.edwardsvacuum.com

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RoHS ComplianceThe EU RoHS (Restriction of certain Hazardous Substances) Directive controls the use of certainhazardous substances (lead, mercury, cadmium, hexavalent chromium, PBDE and PBE) inelectrical and electronic equipment. Similar legal requirements have been implemented in manyother countries.Edwards products do not fall within the scope of the RoHS Directive, but we have a voluntaryprogramme of RoHS compliance as part of our commitment to protecting the environment.A wide range of Edwards products are RoHS compliant including iX semiconductor dry pumps,small rotary pumps, scientific turbo pumps, STP magnetically levitated turbo pumps, industrial dryand roots pumps, scroll pumps, vacuum gauges and controllers, vacuum system components andflange fittings. Refer to our website for the latest information.These items do not contain the following materials above the limits set by the European RoHSDirective, 2002/95/EC. These limits are set out in the table below.Substance TypicalUses Limits** (by weight of the homogeneousmaterial*)Lead Solders, pigments, PVC stabilisers, balance 0.1 wt%weightsCadmium Pigments, plastics stabilisers, platings, 0.01 wt%batteries, contactsMercury Switch and relay contacts, batteries, sensors,fluorescent tubes0.1 wt%HexavalentChromiumCoatings and platings (esp Aluminium),metallised plastics0.1 wt%PBB Flame retardant, no longer produced 0.1 wt%PBDE Flame retardants for variety of plastics 0.1 wt%* A single substance that could (theoretically) be mechanically separated from other substances** The EU Directive allows various exemptions – see 2002/95/EC http://ec.europa.eu/environment/waste/weee/Shop online at www.edwardsvacuum.com

UNITED KINGDOM - HEAD OFFICECrawley Business Quarter, Manor Royal,Crawley, West Sussex RH10 9LWTel: Sales & Service +44 8459 212223Office +44 1293 528844Fax: Sales & Service +44 1293 533453USAHighwood Office Park, One Highwood Drive Suite101, Tewksbury, MA 01876Tel: Toll free (USA) +1 800 848 9800Fax: Office +1 866 484 5218CANADA5860 Chedworth Way, Mississauga,Ontario LR5 0A2Tel: Office +1 800 387 4076Fax: Office +1 905 501 1225BRAZILRua Bernado Wrona, 22202710-060 - Sao Paulo - SP, BrazilTel: Office +55 11 3952 5000Fax: Office +55 11 3965 2766BELGIUMBergensesteenweg 709BE- 1600 Sint-Pieters-LeeuwTel: Office +32 2 300 0730Fax: Office +32 2 300 0704ITALYVia Vittore Carpaccio 3520090 Trezzano sul Naviglio, MilanoTel: Office +39 02 48 4471Fax: Office +39 02 48 401638GERMANYAmmerthalstrasse 36,85551 Kirchheim, MunichTel: Sales & Service 0800 000 1456Fax: Sales & Service +49 899 919 1888FRANCE101 rue de la Bongarde,92238 Gennevilliers, CedexTel: Sales & Service +33 1 4121 1256Office +33 1 4798 2401Fax: Sales & Service +33 1 4121 1238ISRAEL5 Habarzel Blvd. Gat 2000 Industrial Zone,PO Box 862, Qiryat Gat 200901Tel: Sales +972 8 681 0633Service +972 7 681 0633Fax: Office +972 8 681 0640CHINA23 Fu Te Road (North)Wai Gao Qiao Free Trade Zone,Pudong, Shanghai 200131PR ChinaTel: Sales +86 21 5866 9618Service +86 21 5866 9618 ext 152Fax: Office +86 21 5866 9993+86 21 5868 2533JAPAN1078-1 Yoshihashi, Yachiyo-shi,Chiba 276-8523, JapanTel: Sales +81 47 458 8831Service +81 47 458 8851Fax: Sales +81 47 458 8835Service +81 47 458 8048SINGAPORE42 Loyang Drive, Loyang Industrial EstateSingapore 508962Tel: Office +65 6546 8408Fax: Office +65 6546 8407TAIWANNo.1, Renyi Street, Jhunan Town,Miaoli County 350,Taiwan (R.O.C.)Tel: Office +886 37 581000Fax: Office +886 37 581608KOREA5F Hanwon Building, 6-1 Sunae-dong,Bundang-gu, Seongnam-si,Gyeonggi-do, KoreaTel: Office +82 31 716 7070Fax: Office +82 31 710 2222INDIAT97/2, Opposite Saint GobainBhosari MIDC, Pune 411026, IndiaTel: Sales +91 20 4075 2222Service +91 20 4075 2207Fax: Sales +91 20 4075 2212Service +91 20 2712 0548www.edwardsvacuum.cominfo@edwardsvacuum.com© Edwards Limited 2012. All rights reserved. Publication No. C10012895

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