판매용 중고 VARIOUS Lot of spare parts #9260052

Magnet and robot: (2) / 0015 09091 / Lamp drivers (1) / 0015 09091 / Lamp driver (2) / 0190 36315 / Magnet drivers (1) / 0190 70060 / 4-Channel magnet driver (1) / 0190 36315 / Magnet driver (1) / 0010 09337 / Lamp module (1) / 0100 09978 / Lamp module (3) / - / Cassette assy (1) / 1070058 / Storage elevator (1) / 1009195 / P5000 Robot assy (1) / 1009049 / - (1) / 1076000 / P5000 Robot assy (1) / - / P5000 Robot assy (1) / 0010-76000 / Robot (1) / - / Cylinder Boards and Hard Disk Drive (HDD): (1) / 0100 09224 / Expanded RS232 interconnect board (1) / 0100 09138 / Robot interconnect board (1) / 0100 09117 / Dio fuse board (2) / 0100 09054 / Analog input boards (2) / 0100 11001 / Analog output boards (1) / 0190 76050 / Video controller board (1) / 0100 20001 / System electronics interface board (2) / 0100 11002 / Digital I/O boards (1) / 0100 00396 / Analog I/O board (3) / 0100 09054 / Analog input boards (4) / 0190 09368 / Video boards (2) / 0100 11001 / Analog output boards (1) / 0100 20100 / Analog in/out put board (2) / 0100 09117 / Dio fuse boards (1) / 0100 09006 / Intelligent interface board (1) / 0100 20001 / Storage elevator interlock (1) / 0100 09146 / Center finder sensor board (2) / 0100 09134 / Dio fuse boards (1) / 0100 09145 / RS232 Video interconnect board (7) / 0100 00084 / Cap sensor amp boards (1) / 0100 09123 / Wafer sensor board (28) / - / boards (1) / 0100 09137 / Encoder interface board (1) / 907957-002 / - (1) / 0100-16004 / Final signal interface (1) / 0100-00162 / Exp I/O distribution board assy (1) / 0100-09099 / Chamber interconnect board assy (1) / - / - (1) / - / - (1) / KCB150-454 / Mini controller dc power supply (1) / - / - (15) / 0100-09117 / Assy PCB dio fuse boards (20) / 0100-09099 / PCB Assy chamber interconnect boards (2) / 0100-09017 / CH Interconnect boards (10) / 0100-09162 / Manometer select boards (8) / 0100-00003 / Stepper drive PCB VME cards (6) / 0100-09134 / PCB Assy dido fuses (3) / 0100-09137 / Assy encoders interface PCB (1) / 0100-09131 / PCB DWG Fluid overfill board assy (2) / 0100-09086 / Stepper power drive boards (2) / 0100-00171 / - (1) / 0100-09094 / Materials box heater control board (1) / 0100-09040 / SSR AC Control (1) / 0100-38019 / Injector valve heater control board (1) / 0100-09037 / Remote wiring distribution board (1) / 0100-00165 / PCB Serial sideboard assy (1) / 0100-76124 / Digital I/O board (1) / 0100-20003 / Digital I/O board (9) / 0100-11002 / Digital I/O cards (5) / 0100-09362 / DPA Dido piggy-back boards (2) / 0100-09123 / Wafe sensor boards (1) / 0100-09253 / Manometer select board (2) / 0100-09138 / Robot interconnect boards (1) / 0100-09023 / Mini DI/DO board (1) / 0100-76124 / Digital I/O board (1) / 0100-09056 / Center finder PCB assy with CMOS chip (1) / 0100-09022 / Mini AI board (5) / 0100-00014 / Opto detects (4) / 0100-09112 / Thermal electric driver boards (5) / 0100-09108 / PCB assembly, LVL, sensor boards (1) / 0100-09114 / Gas panel board (1) / 0100-09153 / Gas panel board (1) / 0100-09071 / I/O breakout board (3) / 0100-09011 / AI MUX Current senses (4) / 0100-00008 / TC Gauges (1) / 0100-09172 / 8-Channel emission / Laser endpoint board (1) / 0100-09009 / Buffer I/O (2) / 0100-09102 / Controller distribution boards (3) / - / 86 Stepping motor drives (3) / 0100-00011 / Chopper drivers P.W.B (3) / 0100-09237 / Dual freq wiring interconnect boards (3) / 0100-09106 / Expanded gas panel interface boards (1) / 0100-09107 / TEOS Gas interface board (1) / 0100-09018 / Video interconnect board (2) / 0100-09031 / Remote gas panel boards (5) / 0100-09029 / Turbo interconnects (3) / 0100-09058 / Operator control panel boards (3) / 0100-09156 / PCB assy, RF match controls (4) / 0100-09020 / Fuse boards (1) / 0100-09081 / Dry vacuum distribution board (1) / 0100-09115 / Assy PCB gas panel analog (1) / 0100-38032 / E Chuck controller (1) / 0100-01652 / HDPCVD 300 mm AP gas panel distribution assy (2) / 0100-09076 / PCB Assy, brake interconnects (1) / 0100-13024 / PCB Assy, interface processor distribution (1) / 0100-09264 / 486 PC Interface board (1) / 0100-09110 / Mini pilter board (1) / 0100-09079 / Robot motor-sensor interconnect board (1) / 0100-09069 / Contactor interlock board (3) / 0100-09104 / Contactor interlocks (2) / 0100-09027 / AC Inter connect boards (3) / 0100-09103 / AC Inter connect boards (1) / 0100-11000 / Analog input board (1) / 0190-05996 / Analog IO board (1) / 0190-05997 / Analog IO board (1) / 0100-00825 / Analog IO board (3) / - / Printed circuit board bay pneumatics (2) / 0100-09127 / Loader interconnect boards (1) / 0100-09010 / System electronics backplane board (2) / 0100-09224 / Expanded RS232 interconnect boards (1) / 0100-09012 / Power backplane PCB precision (1) / 0100-09161 / Expanded RS232 interconnect board (1) / 0100-76181 / PCB Assy 5000 wiring distribution board (1) / 0100-09008 / Pneumatic control board (1) / 89 903061-001 / Multi-channel serial data switch (2) / 82 12A-24041-51 / - (1) / SBC-188 / CPU Board (1) / - / P5000 Signal tower (2) / 81 902468-001 / WJ951 Output cards (2) / 83 ZT8820B / PCB Memory modules (1) / 0100-70019 / Controller distribution WPS board (1) / 76 800046C / CPU Board (1) / 76 800046B / CPU Board (1) / 88 30000354 / Serial adapter card (2) / 77 10026-100 / - (3) / 0100-35180 / DPA System distribution boards (1) / 80 979922-001 / WJ996 Auxiliary board (1) / 84 LD H-S1-3 / Motor drive board (1) / 0100-09003 / WPCB assy, 7710 VME (1) / - / SV21 CPU (1) / 0190-00318 / VGA B.D (1) / 0100-09196 / E-Chuck controller (1) / - / Memory slot (2) / - / - (9) / 3514-700-0 / Flow controllers (1) / 0100-09362 / DPA Dido piggy-back board (4) / ST34520N / Hard disk driver (1) / MPF3102AT / Hard disk driver (1) / MS3002GN / 2-GBYTE SCSI Flash disk (1) / - / Hard Disk Driver (HDD) (1) / AC23200-00LC / IDE Hard driver (1) / Sony MPF-920 / Floppy disk driver (1) / - / Hard Disk Driver (HDD) (1) / FD-235HF / Floppy Disk Driver (FDD) (1) / 1002402-1K / Precision 5000 Board (5) / - / Disket (1) / 0150-70002 / Disk controller cable (2) / - / Hard Disk Driver (HDD) (1) / 193077C7-00 / Floppy Disk Driver (FDD) (1) / 562-531-4804 / Hard Disk Driver (HDD) (1) / MS3002N / SSD 2-GBYTE SCSI Flash disk (1) / - / Hard Disk Driver (HDD) (1) / 0190-09667 / SV21 CPU Chamber parts: (1) / 0010 09340 / Susceptor lift (1) / 0010 09341 / Wafer lift (2) / 0010 09019 / Throttel valves (1) / 0010 09340W / Susceptor lift (1) / 0020 09132 / Enclosure lift I/O valve (1) / CRB80-180 / Rotary actuator (1) / CRB80-180-XJN / Rotary actuator (2) / 0040 75082 / Adapters (1) / C5347-9212M / Stepping motor (1) / 0020-34695 / Super-E Cathode liner (Magnet) (1) / - / Turbo cooling line (1) / - / - (4) / 44136-6697 / Powerises (1) / 0020-38663 / L/L Extend adapter (1) / - / L/L Extend adapter (3) / - / Oriental chambers (2) / - / Ceramic rings (1) / PH265-05B-C12 / Oriental motor (1) / - / - (1) / 1120-01071 / OPT Bifurcated board (1) / 0190-09134 / Wave optics (1) / PH265-05B-C12 / Oriental motor 2-Phase vexta stepper (4) / C5347-9212M / Motor-encoder assy robots (2) / PH264-01B-C11 / Vexta 2-Phase stepping motor assy (1) / M21NRXD-LSS / Steping motor with brake (1) / P2HNRXF-LSS / Steping motor with brake (1) / 0190-09472 / End point detector (1) / 37693 / - (1) / 0190-35742 / Over-pressure switch (1) / - / MKS INSTRUMENTS Pressure switch (2) / - / Susceptors, 8"-6" (4) / - / Shower heads (1) / - / Hot box, 3-Phase (1) / - / Hot box, 4-Phase Valve, gauge and filter: (1) / 122AA 00002EB / Baratron gauge (2) / WG3NS6RR2 / Inline gas filters (3) / WG3NS8RR2 / Inline gas filters (1) / GLFPF6101VM4 / Fall filter (1) / SS-BNV51 / Valve (1) / 46360 / Pressure gauge (1) / - / - (1) / SS-BNA211-C / Valve (92) / H-ZGRT-4, NI / Gaskets (1/4) (52) / CGTR-04-NI / Gaskets (1/4) (11) / UN4GR / Gaskets (1/4) (4) / UN8GR / Gaskets (1/2) (10) / NGT08R / Gaskets (1/2) (830) / UJR-6.35RE / Gaskets (1/4) (7) / UJR-9.52RE / Gaskets (1/2) (1) / 1203666 / Baratron 10torr (MKS) (1) / 000230838 / Baratron 10torr (MKS) (1) / 000838753 / Baratron 10torr (MKS) (1) / - / - (1) / SS-4BMG-VCR / Needle valve (1) / - / TC Gauge (2) / - / Vacuum gauges (1) / MA02114 / Thermocouple vacuum gauge (1) / CA94010 / Thermocouple vacuum gauge (5) / 4560-0217 / V/V (Veriflo division) (4) / AP1006S-2PW / Regulators (AD Tech) (1) / AP1001S-3P-44 / Regulator (AD Tech) (1) / AP100-SX-2PW / Regulator (AD Tech) (1) / 5401-4017 / Regulator (1) / GJ002003F / Regulator (1) / 1739-3200 / Gas line (6) / 45600196 / V/V (Veriflo division) (2) / 6LV-DAFR4-P / V/V (Swagelok) (1) / 620240 / V/V (Nupro) (5) / 45400894 / V/V (Veriflo division) (17) / 43800734 / Regulators (27) / 316L-P / V/V (Fujilcin) (1) / AP1601S-ZA / Regulator (AD Tech) (1) / SS-DLFR4-PX / V/V (Swagelok) (1) / SS-DLFR4-PX / V/V (Nupro) (2) / 3800-01173 / Regulators (Veriflo) (4) / 6LVV-DPLVR4 / V/V (Swagelok) (1) / SS-4BK-V51 / Regulator (Swagelok) (1) / SS-4BK-V51 / Regulator (Nupro) (1) / 316L-P / Bellows V/V (KSK) (1) / 506326001 / V/V (Swagelok) (1) / 426576 / V/V (Swagelok) (1) / 0190-36237 / Injection (Stec) (3) / IV-2410AV / Injection (Stec) (4) / SS-4MG-VCR / V/V (Swagelok) (1) / SS-1GF2 / V/V (Swagelok) (1) / SS-DLV51 / V/V (Swagelok) (1) / SS-BNVCR4-C / V/V (Swagelok) (1) / SS-4BY-V35-1C / V/V (Swagelok) (1) / SS-4BY-V35-1C / V/V (Nupro) (1) / SS-4BMG-VCR / V/V (Nupro) (2) / 0224-44145 / Gas lines (3) / 42600719 / Diaphragm valves (1) / - / Hoke valve (1) / VDW214 / Solenoid valve (2) / LF-A40M-A-EVD / Liquid mass flow meters 7g/min TEOS (1) / - / - (3) / TC531 18039 / Thermocouples (TC) vacuum gauge (2) / RMB-85D-SSV / Water flow meters (4) / 127AA-00100B / MKS Baratron (1) / 122ba-01000eb / Baratron pressure transducer 1000 torr (1) / 122AA-00002EB / MKS Pressure transducer (1) / 122BA-01000EB / MKS Baratron (1) / 627A-14974 / MKS INSTRUMENTS Baratron (1) / 122BA-00100BB / Pressure transducer, 100 torr (2) / SMC NVJ3443Y / Valves, SOL/PILOT, base (2) / VJ3243Y-5LOZ / Valves, SOL/PILOT, base (1) / NVJ3240Y-5MOZ / Valve, SOL/PILOT, base (1) / YPC SF2101-IP / Solenoid valve (1) / SMC SYJ3243 / Base mounted 5-Port 2 position double solenoid valve (1) / SMC VXA3 / Tire valve regulator air operation valve (1) / - / Solenoid valve (1) / - / Solenoid valve (1) / - / Solenoid valve (1) / - / Solenoid valve (1) / - / Solenoid valve (1) / - / - (5) / - / - (1) / SS-4MG-VCR / - (8) / - / - (1) / - / - (1) / - / TC Vacuum gauge (1) / - / - (3) / Type 0531 / TC Vacuum gauge (1) / - / Convectron gauge (3) / - / - Bracket and cover: (1) / 0010 09201 / 5000 Platform thru-the-wall monitor (1) / 0010 75085 / Base thru-wall mon precision 5000 (1) / 11764601 / Valve bracket (1) / 0020 18713 / Valve bracket (1) / 0020 18656 / Valve bracket (1) / - / Tm cover (1) / - / Cover (1) / - / Cover, actuator, loadlock, P5000 (1) / - / Cover (1) / 0020 13088 / Bracket plate for hard driver (1) / 0020 09586 / Crank window (3) / - / Brackets (3) / 0020 09359 / Chamber interconnect board cover, sensor brackets (5) / - / Brackets (1) / - / Cover (2) / 0020 70053 / Window lower upper (1) / 0020 09807 / Edge plate fixed panel (2) / 0021 36054 / L/L Brackets (1) / - / - (1) / - / - (1) / - / - (1) / - / - (1) / 0020-10371 / Cover (1) / 0020-05240 / Cover (2) / 0020-10649 / Covers (2) / 0020-10667 / - (6) / - / - (12) / - / - (1) / - / - (1) / - / - (1) / - / - (1) / - / - (1) / - / - (8) / 0020 09359 / Covers (1) / 0020 10661 / Cover (1) / 0020 10661 / Cover (2) / 0020 10690 / Covers (1) / 0020 10228 / Cover (1) / 0020 10229 / Cover (2) / 0020 09428 / Covers (1) / 0040 32646 / Generator cover (1) / 0040 32646 / Generator cover (1) / 0040 32645 / Generator cover (1) / 0020 04146 / Upper FAC cover (1) / 0020 70462-A / Cover (2) / 0020 09763 / E Touche covers (2) / 0020 09763 / C PMP covers (1) / 0020 10552 / C Cover (1) / 0020-09320 / D Cover (1) / 0020-10161 / A Cover (6) / 0020-09359 / A Covers (4) / 0020-09806 / E Covers (1) / 0020-09628 / B Cover (1) / 0020-70055 / A(502) Cover (2) / 0200-7055 / A(301) Covers (1) / 0200-20602 / Cover (002) (4) / 0020-10649 / Covers (5) / 0020-09818 / Covers (1) / 0020-70099 / Cover (1) / 0020-70098 / Cover (2) / 0020-10973 / Covers (2) / 0015-09019 / - (1) / 0015-09012 / - (4) / 0020-09898 C / - (3) / 0020-09899 (D) / - (4) / 0244-46160 / - (1) / 0020-10229 / - (1) / 0020-10228 / - (2) / 0020-04145 / - (2) / 0020-09577 / - (3) / 0020-10668 / - (1) / 0020-09444 / - (1) / 0020-10367 / - (1) / 0040-09560 / - (1) / 0020-20558 / - (1) / 0020-09566 / - (1) / 0020-09558 / - (1) / 0040-76242 / - (1) / 0020-70091 / - (1) / 0021-01918 / - (1) / 0020-75759 / - (1) / 16-00065-02 / - (1) / 10826700 / - (1) / 0020-09284 / - (1) / 0020-04149 / - (1) / 0040-09055 / - (1) / 0020-09650 / - (1) / 0020-10436 / - (1) / 0020-70139 / - (1) / 0020-23633 / - (1) / 0020-23631 / - (1) / 1176-4601 / - (16) / - / V/V Brackets (1) / 19946K / V/V Bracket (1) / 0021-02684 / V/V Bracket (4) / 0021-02683 / V/V Brackets (2) / 11444600 / V/V Brackets (3) / 0021-36821 / V/V Brackets (2) / 1176-4600 / V/V Brackets (14) / 4890095 / Sensor brackets (1) / 0020-09150 / - (1) / 0020-09558-B-LEO / - (1) / 0040-01108 002 / - (1) / 0040-09098C / - (1) / - / - (1) / - / - (1) / - / - (13) / - / - (4) / - / - (1) / - / - (1) / 714-240507-001 / - (1) / 0020-09359 / Enclosure, Chamber interconnect PCB (1) / - / - (1) / - / - (1) / - / - (1) / - / - (1) / - / - (1) / - / - (1) / - / - (1) / 0020-09577 / - (2) / - / - (2) / 0020-10664B / - (1) / 0020-09816A / - (1) / 0020-09723B / (1) / - / - (1) / 0224-43951 / BKT, TEOS Upper line support (8) / 0020-10975 / - (6) / 0020-10973 / Chamber clamps SACVD (1) / 0020-10552 C / Panneau (1) / 0010-09233 / - (1) / 0020-10552 C / Panneau (1) / 0020-70699 A / - (8) / 0020-10566 / - (2) / - / - (1) / - / - (1) / - / - Sensor and fuse: (5) / PP10-S / Fuses (7.5A), P5000 (5) / PP11-4-0218 / Fuses (4A) P5000 (4) / PP11-4-0103 / Fuses (10A) P5000 (5) / PP11-4-0640 / Fuses (15A) P5000 (1) / PFW720-UIB990257 / Flow switch (12) / - / Cap sensors (2) / ET-S500ND / Sensors (1) / 902343008 / Flow sensor (1) / 184948 / Flow switch (GEMS) (4) / - / Fiber sensor cables AC Rack and RF Rack: (1) / - / Switchboard (1) / - / Power connect (1) / C320KGS22 / Base auxiliary contacts (2) / C320KGS32 / Base auxiliary contacts (6) / A1238H11BT / Fans (3) / UF-12B11 / Fans (2) / SP1202524H / Fans (1) / SJ1225HA1 / Fan (1) / SJ1238HA1 / Fan (2) / EC12025H24SA / Fans (1) / BP1202512H / Fan (1) / MULTIFAN 8312 / Fan (1) / A31668-16 / Fan (1) / 001076036 / Mini controller (1) / CRMC-FX4820T / CD Room (MITSUMI) (1) / 93BB-1CD0-0PBT / Watlow temperature controller (2) / 4606X / Fans (1) / F0800-G-3 / Fan (1) / UES17H115S29 / Fan (1) / EHD-14K / Circuit breaker (480VAC) (1) / VSF75-24 / Power supply (4) / CU-AL / Circuit 1poie units (20A) (5) / CU-AL / Circuit 1poie units (15A) (2) / 1289C3QGQ7 / Circuit s (4) / CE15FN3Y1 / Contactors (1) / S82K-05024 / Power supply (1) / LIS-31-12 / Regulated power supply (5) / LIS-71-15 / Regulated power supplies (1) / - / - (1) / 0950-3646 / Power supply liteon (1) / - / Main AC Rack (1) / - / RF Delta generator rack AMZ-401 (1) / H3CA-A / Time delay ray (1) / H3CA-8 / - (1) / Lg SMC-20P / Magnetic contactor green series SMC20P (2) / CA3-60-N-11 / Precher + schuh CA3-60-N-11 contactors (2) / AM3-A3-A / 3-Pole breakers (2) / W92X11-2-20 / 2-Pole circuit breakers (1) / A015850 / Magnetic contactor (1) / 3TB40 10-OA / Contactor (2) / 4NCOFO / SC-O Contactor with shutdown setting (1) / 2NC1Q0 / Electrical contactor (10) / 10E 3RT1017 / Siemens sirius motors (1) / - / 2P, 20A, Contactor (10) / - / 1P, 20A, Contactors (18) / - / 1P, 15A, Contactors (6) / - / 3P, 50A, Contactors (4) / - / 3P, 60A, Contactors (2) / - / 3P, 40A, Contactors (30) / - / 3P, 15A, Contactors (4) / - / 3P, 25A, Contactors (9) / - / 3P, 20A, Contactors (3) / - / 3P, 30A, Contactors (1) / - / Cutler hammer (3) / - / Cutlers hammers (1) / - / Terminal block (2) / - / - (1) / 1433552 / Power distribution block (1) / 0200-19005 / - (3) / 1261C66G08 / On / Off trip switch mechanism handle of circuit breakers (6) / 0190-10028 / RF Generators LL and TM: (2) / - / Carrier plates (5) / - / Monitors (3) / 0010 09103 / Monitor bases (1) / - / Slot storage elevator (1) / - / Slot storage elevator (1) / 0040-09595 / ASP Hoop (1) / 030129 / Seal door (VALQUA) (4) / - / L/L Cover doors (1) / - / Wafer blade (8) / - / - (4) / - / Slit doors (2) / - / Slit doors (4) / - / - (1) / 0020-70080 / L/L (1) / - / - (4) / - / Lifter endure, PVD Sputter (1) / - / - (1) / - / - (1) / - / - (1) / CDSL-J-469 / - (4) / HOOP BRAKET / - (2) / - / - (2) / 15-00501-00 / Indexer robots (1) / - / Keyboard (1) / - / - (5) / - / Monitor covers Cables: (5) / 0150 36784 / Cables (MFC) (2) / - / Cables (1) / 0150-76063 / VP7 Cable (2) / 0140-70026 B / P1 Cables (1) / 0150-09916 / J5 DI/O Fuse board cable (3) / 0150-09242 / Cables (1) / 0150-75197 / Cable (1) / 0150-75198 / Cable (2) / 0226-30746 / Flow switch cables (1) / 0140-09205 / Cables (2) / 0140-09707 / - (1) / 0140-36042 / - (1) / 0140-09647 / - (1) / 0140-09065 / - (2) / 0226-48118 / - (1) / 0140-09170 / - (1) / 0140-09471 / - (1) / 0140-09065 / - (1) / 0140-09170 / - (1) / 0150-09018 / - (1) / 0150-09019 / - (1) / 0150-00238 / - (1) / 0150-09054 / - (1) / 0140-35240 / - (1) / 0150-09183 / - (1) / 0150-09202 / - (1) / 0140-09238 / - (1) / 0140-09005 / - (1) / 0150-09054 / - (1) / 0140-09650 / - (1) / 0140-09006 / - (2) / 0140-09007 / - (1) / 0140-09004 / - (1) / 0140-09006 / - (1) / 0140-09005 / - (1) / 0150-00236 / - (1) / 0150-09057 / - (1) / 0150-09241 / - (1) / 0140-09498 / - (1) / 0140-76019 / - (1) / 0140-09230 / - (1) / 0150-09054 / - (1) / 0150-09421 / - (1) / 0150-09242 / - (1) / 0150-09421 / - (1) / 0150-09921 / - (1) / 015038910 / Heater cable (3) / - / - (1) / 0150-09203 / - (1) / 0226-30746 / - (1) / - / - (1) / 0150-09143 / DC Power jumper to remote PCB (1) / 03-00049-00 / - (1) / - / - (1) / 0150-36598 / - (2) / 0150-10673 / - (1) / 0150-36698 / Cable and connector (1) / 0150-06185 / Cable and connector (1) / 0150-36784 / Cable and connector (1) / 0150-09054 / Assy, cable RF Match (3) / 02-00343-02,03,04 / Harness assy (1) / 0150-75068 / Cable, assy motor-encoder (1) / 02-00343-01 / - (1) / 0140-70002 / Harn assy detector / Emitter (6) / 0150-02454 / - (7) / - / - (1) / - / - (1) / 0150-09241 / Shielded ozone monitor (1) / 0150-09018 / Flat cable chamber INT C 40 POS (1) / 0150-10404 / PCB Ozonator (1) / 0150-09053 / Ribbon cable remote power box (1) / 0150-09889 / Cable and connector (1) / 0150-09068 / Flat cable, turbo control (1) / 0150-09019 / Flt cable, chamber INT D 40 POS (1) / 0150-09005 / - (1) / 0150-35616 / Cable (1) / 0150-35615 / Cable, EV manifold (1) / 03-023303-00 / - (1) / 0150-09046 / Wassy cable dist (1) / 0150-09202 / Cable and connector (1) / 0150-00244 / - (1) / 0150-00243 / - (1) / 0150-00245 / - (1) / 0150-00242 / - (1) / 0150-00246 / - (1) / 0150-00247 / - (1) / 0150-09202 / TEOS Control to panel (1) / 0150-00273 / - (2) / 0150-00296 / Cable and connectors (1) / 0140-09000 / Harness, system electrical (1) / 0140-00150 / Cable and connector (1) / 0150-00240 / Cable and connector (1) / 150-09023 / Video MTR system (1) / 0150-09057 / RF Generator (1) / 0150-09053 / Ribbon cable (1) / 0150-09016 / Flat cable A40 POS (1) / 0150-09236 / - (1) / 0150-70002 / Cable flat assy SCSI 50P extended (1) / 0140-00156 / - (1) / 0150-09033 / Assy cable system video (1) / 0150-09236 / Disc controller (1) / 0150-00296 / Cable and connector (1) / 0150-09241 / - (1) / 8400-0647 / Fixed interface (1) / 0150-10011 / SACVD Exp. RS232 interconnect (1) / 0150-09500 / Expanded AI cable (2) / 0620-01713 / - (1) / - / - (2) / 0140-70093 / Dry vacuum pump interfaces (2) / 0150-10248 / Cable and connectors (1) / 0150-09681 / Integrated end point power (1) / 0150-10011 / SACVD Exp. RS232 interconnect (1) / 0150-76006 / - (1) / 0150-09708 / 50' Remote video (1) / 0150-35740 / - (1) / - / - (1) / 0226-31530,31525 / - (2) / 0150-76234 / Cable and connectors (4) / 0150-75041 / EMC comp, cable PROC INTFC, pump (1) / 0150-09918 / Ozonator PCB and 5000 (5) / 0150-09106 / Assy cable remotes 50 ft (1) / 0150-09241 / Chamber purge AFC (6) / 0150-35227 / Chamber purges AFC (1) / 03-00143-02 / - (1) / 0150-76193 / - (1) / 0140-76016 / DC Chamber misc cable RS232 wafer orienter (6) / 0150-09807 / Modified wafer position sens (2) / 03-00098-00 / P2-EXT-Disk (2) / 0140-10034 / Press Trans HRN 11-13 (6) / 0140-09996 / Press XDCR Seriplex (3) / 0140-10034 / Pressure transducers (7) / 0140-10035 / I/O Expansion, chambers (4) / 0150-76186 / Pump EMC comp cable assemblies (1) / 0140-09087 / Lamp / Mag control (1) / 0150-09033 / System video (1) / 0150-76175 / Operator panel (1) / 0150-20075 / Emo interconnect (2) / 0150-09027 / Heat exchange interfaces (1) / 0150-09054 / RF Match (1) / EVNPS04-0025 / - (1) / 0150-09104 / RS232 Liq source cable (1) / - / - (1) / 0190-70030 / Blade vacuum sense VCR FTG SUNX DPX-200 (1) / 0190-09133 / Close decreasing tor (1) / 0226-31525 / - (1) / 0150-09032 / Assy cable ozonator (2) / 0150-18074 / Eto microwave control, chambers (1) / 0150-36131 / NESLAB Control 75 ft EMC (1) / 0150-10598 / Cable, communications, DPA (1) / 0226-31017 / - (1) / 0150-18050 / ETO Microwave control cable (1) / 0150-09047 / Assy ribbon cable (1) / 0140-09044 / Harness, loader door open (1) / 0140-09143 / Harness load chamber (2) / 0140-09004 / Harness chamber inters (1) / 0140-09027 / Harness chamber a, b slit (1) / 0150-09193 / Assy cable, sys electronic AC power/ chopper (1) / 0150-09046 / Wassy cable dist (1) / 0140-09005 / Harness chamber inter (1) / 0226-09045 / - (1) / 0150-09019 / Assy, flt cable, chamber INT D 40 POS (5) / 0150-09367 / - (1) / 0150-09183 / Cable assy set gas to remote (1) / - / - (1) / 0150-09190 / - (1) / 0150-09192 / - (1) / 0150-70016 / Cable assy encoder if (1) / 0150-70031 / Stepper 2-Phase reversal, 29 pos (1) / 0140-16017 / - (2) / 0140-09542 / Temp switch mag coil interlocks (2) / 0150-10248 / - (1) / 0140-09205 / - (1) / 0140-09982.A / Harness assy, TC interlock (1) / 0225-09247 / CES RF Interlock switch with harness (1) / 0150-09203 / Harness assembly gas panel power jumper (2) / 0140-09102 / Harness status lights 50 (3) / 0140-70002 / Harness assy detectors / Emitter (2) / 0140-09160 / Harness assembly standard vacuum pumps (4) / 0140-09007 / Harnesses (1) / 0140-09152 / Harness assy cassette handler interface , (1) / 0150-09023 / Video MTR system (1) / 0140-09031 / Cassette position (2) / 0140-09247 / - (1) / 0140-09006 / Harness, chamber inconnect (1) / 0150-09247 / - (1) / 0150-09145 / N2 final valve cable (1) / 0150-09018 / Flat cable chamber INT C40 POS (1) / 0150-09196 / Assy cable system TCS (1) / 0150-09068 / Turbo control (1) / 0225-30846 / - (1) / 0140-09049 / - (1) / 0140-09417 / Harness power, external, TEOS temp control (2) / 0150-09701 / Dual freq int, panels (2) / 0140-09063 / Harness front PNL-EMO (1) / - / - (1) / 0150-20836 / Cable assy PVD CH HTR WTR (1) / 0150-09099 / Harness assy limit SWITC (1) / 0140-09090 / Harness assy lamps / Mag controls (1) / 0140-09103 / Harness assy current converter (1) / 0140-09106 / Harness assy current transducer (1) / 0150-09921 / Cables assy ozonator N2 MFC and dual freq (1) / 0140-09042 / Harness, slit, I/O and STOR elevator (1) / 0150-09242 / - (1) / 0140-70024 / - (1) / 0150-09202 / Panel cable assembly TEOS control (2) / 0226-10037 / - (1) / 0150-10595 / - (2) / - / - (3) / 0226-43701 / Cable with INTLK, RF adapter (1) / 0150-00314 / Cable assy (1) / - / - (1) / 0150-09707 / Cable, ash, 5ft remote video (1) / 0150-09921 / Assy ozonator N2 MFC and dual freq (1) / 0150-09033 / Assy cable system video (1) / 0150-09054 / Assy, cable RF match (1) / 0140-09200 / - (1) / 0090-76106 / Thermal circuit breakers (1) / 0150-09240 / Cable assy, RF generator (1) / 0140-09160 / Harness assembly standard vacuum pump (1) / 0150-04078 / - (1) / 0140-00144 / Harness assy, power / Fuse, orienter (1) / 03-00310-01 / Cable assy (1) / 0140-70004 / Harness loader discontact (4) / 0150-10253 / Cable extension suction valve heater channels (1) / 0140-09063 / Harness front PNL-EMO (4) / 0150-36237 / Cable, CRF Generator, remote controls (1) / 0140-35761 / - (1) / 0150-09488 / Cable, ASH, extended RS-232 interconnect (4) / 0150-37074 / Cable assy Connector and robot parts: (1) / - / Hanshin compressor (1) / DH-5 / Air dryer (1) / HAC-20A / After cooler (2) / - / - (2) / 0020 31283 / - (47) / 37104-2165-000 FL 100 / E-Con mini clamp w/m plug blue (89) / - / Molex connectors (2P, Male) (27) / - / Molex connectors (2P, Female) (20) / - / Molex connectors (4P,9P,Male and female) (41) / DS1033-09MBNSISS / D-Sub plugs (9P, Male) (42) / DS1033-09FBNSISS / D-Sub plugs (9P, Female) (1) / - / D-Sub plug (37P, Male) (1) / - / D-Sub plug (37P, Female) (6) / 5199906 / Gender changers (25P) (1) / 5190481 / Gender changers (25P) (1) / - / 4-pin Crimp terminal (1) / - / PG 250 REC (1) / CE025012-BLUE / Terminal (1) / - / Crimp terminal (1) / - / Crimp terminal (12) / HDES-5600 E06 / Devices (1) / 020010666 / Cover, cable set (1) / 9545005(D) / - (1) / 9717005(D) / - (1) / 0020-30000 / Clamp, pin ADJ, WB (1) / - / 29 Slot E/V Housing (6) / 815001-404 / - (2) / 004001239 / - (10) / - / Springs (1) / - / Leveler (1) / - / Hubbellock (5) / LR300 4100 / Display, powers (2) / - / - (2) / PDK-004A-OWG / IEE Electronic display (1) / 9905177-1 / - (1) / 0090-00084 / Sensor assy, dual spill sensor (1) / 00-908124 / Stator generator OEM (1) / 10-042679-00 / - (1) / 16-00494-00 / - (1) / F03-16PE-517 / - (4) / CS10-34CU-E / Capacities proximity (1) / 0140-09422 / Ampule over-temp interlock (1) / JSR-S100N 8100N / - (1) / 997869-001 / - (2) / 213001 / Water Base fluid 1/4" NPT 0.150-0.850 GPM (1) / F442103 / Aux air (1) / 1350EPC9ADD1A / Flowmeter flow meter (2) / - / Hubbellock locking connector bodies (1) / SY05-126822 / - (1) / 0010-76535 / Pneumatic logic box tilt cassette (2) / 0020-30586 / - (1) / - / Jacket (1) / - / 24V, DC 2W (1) / - / S/E Inter lock (1) / - / Operator assist system Pump, chiller and piping: (1) / - / Air flow switch (1) / 253B 11102 / Exhaust throttle valve (1) / 253B 15004 / Exhaust throttle valve (1) / 253B 14997 / Exhaust throttle valve (1) / 0050 76889 / Pump piping (1) / - / Pump piping (1) / 0050 76884 / Pump piping (2) / - / Pump piping (4) / 0050 27394 / Pump piping (4) / - / Pump piping (1) / 0050 10529 / Pump piping (4) / - / Pump piping (1) / 0050 76032 / Pump piping (1) / - / Pump piping (1) / 0050 06101 / Pump piping (2) / 0050 26652 / Pump piping (1) / - / Pump piping (2) / - / Reducers (7) / 0040 09716 / - (1) / ASM 122 D / He detector (1) / 0010-30063 / Hot analyzer (3) / 0010-30063 / Hot analyzer (1) / 0100-30230 / Hot analyzer (1) / 0010-30229 / Hot analyzer (1) / 0040-09020 / Duct exhaust MFC: (2) / 2321853 / MFC CH3F (50 SCCM) (2) / 347781 / MFC O2 (20 SCCM) (3) / 2320754 / MFC N2 (100 SCCM) (1) / 2256499 / MFC SF6 (50 SCCM) (2) / 34D000 / MFC CF4 (100 SCCM) (1) / 2346387 / MFC SF6 (50 SCCM) (2) / 015051 / MFC CHF3 (100 SCCM) (2) / 3412869719 / MFC C4F8 (30 SCCM) (2) / 3030-08692 / MFC AR (5000 SCCM) (1) / 3030-6666 / MFC O2 (20 SLM) (1) / 3030-09567 / MFC HE (2000 SCCM) (1) / 3030-07413 / MFC O2 (5000 SCCM) (2) / 3030-09410 / MFC NF3 (3000 SCCM) (2) / 2354983 / MFC C4F8 (30 SCCM) (1) / 2322857 / MFC AR (500 SCCM) (6) / 1660-100009 / MFC N2 (5 SLM) (5) / 1660-100159 / MFC O2 ( 3 SLM) (2) / 1660-100415 / MFC HE (3.5 SLM) (1) / 1660-100006 / MFC N2 (1 SLM) (4) / 1640A-14387 / MFC O2 (6000 SCCM) (2) / 0002-93698 / MFC (MKS) (1) / - / MFC (1) / - / MFC (1) / - / MFC Applicator and block: (2) / 004004390001 / Handle with gloved hands (1) / 004004390002 / Handle with gloved hands (1) / 002110666 / Block gas / WTR Chamber (1) / W403174201 / - (1) / 5200CVD / HDP-CVD RPSC Applicator (1) / 5200CVD / RPSC Applicator (1) / 5200CVD / RPSC Applicator (1) / D13604 / GHz Coupling (1) / D13604 / GHz Coupling (1) / D13604 / GHz Coupling (1) / D13604 / GHz Coupling (1) / 0020-09549B / Adapter.